Semiconductor waste gas recovery device

Abstract

The utility model relates to a semiconductor waste gas recovery device, which is applied to the technical field of semiconductors, and comprises a fixed plate, a lifting cylinder connected with the fixed plate, a connecting seat connected with the lifting cylinder, a universal mechanism connected with the connecting seat, and a horizontal movement mechanism connected with the universal mechanism, the recovery mechanism is connected with the horizontal movement mechanism, the recovery mechanism comprises a pipeline fan, a corrugated pipe connected with the pipeline fan and a recovery cover connected with the corrugated pipe, a lifting cylinder drives a universal mechanism to move up and down, meanwhile, the universal mechanism is arranged, steering of the recovery cover is facilitated, a traditional back-buckling cover fixing structure is changed, and the recovery cover is convenient to use. A driving motor in the universal mechanism rotates to drive a sector gear so as to drive the recovery cover to steer, and meanwhile, a horizontal movement mechanism is arranged, so that the recovery cover can conveniently move in the horizontal direction, and waste gas can be conveniently recovered in the horizontal direction.

Description

Technical Field

[0001] The utility model belongs to the technical field of semiconductor waste gas recovery application, in particular to a semiconductor waste gas recovery device. Background Art

[0002] At present, a large amount of organic solution is needed to produce a large amount of organic waste gas in the process of domestic semiconductor wafer manufacturing plant and panel factory. Among them, the photoresist stripping process is one of the main processes that produce organic waste gas. The main components of the photoresist stripper currently used are organic solutions with high boiling points and almost completely soluble in water, such as ethanolamine (MEA), dimethyl sulfoxide (DMSO), ethylene glycol monobutyl ether (BDG), etc. Organic waste gas has a great direct impact on the human body. Due to its penetration, lipid and volatility, it can cause harm to the human body when it comes into contact with it or through the respiratory and digestive systems. Some organic waste gas is not only easy to cause the deterioration of the air quality of the working environment, but also causes secondary pollution through photochemical reactions. Therefore, it must be treated before it can be directly discharged into the atmosphere. Incineration is currently a widely used method for treating organic waste gas in various semiconductor / panel factories.

[0003] The waste gas recovery hood of the waste gas recovery device for semiconductor production in the prior art is mostly fixed and can only recover waste gas in one direction. Summary of the invention

[0004] The purpose of the utility model is to provide a semiconductor waste gas recovery device to solve the above-mentioned technical problems.

[0005] Technical solution: A semiconductor waste gas recovery device includes a fixed plate, a lifting cylinder connected to the fixed plate, a connecting seat connected to the lifting cylinder, a universal mechanism connected to the connecting seat, a horizontal motion mechanism connected to the universal mechanism, and a recovery mechanism connected to the horizontal motion mechanism. The recovery mechanism includes a duct fan, a bellows connected to the duct fan, and a recovery hood connected to the bellows.

[0006] In a specific possible implementation scheme, the universal mechanism includes a servo motor arranged on the connecting seat, a first joint connected to the driving end of the servo motor, a first steering member connected to the first joint, a second steering member connected to the first steering member, and a second joint connected to the second steering member;

[0007] A driving motor, a fixing rod arranged on the connecting seat, a driving motor connected to the fixing rod, a first gear assembly connected to the driving motor, and a second gear assembly connected to the first gear assembly.

[0008] In a specific embodiment, the second joint is connected to the horizontal motion mechanism;

[0009] The horizontal motion mechanism comprises a base, a horizontal motion cylinder connected to the base, a slider installed at one end to the base and connected to the horizontal motion cylinder at the other end, and a conversion joint arranged at the bottom of the slider.

[0010] In a specific possible implementation manner, the adapter is connected to a recovery cover.

[0011] In a specific possible implementation scheme, the recovery cover includes a mounting portion and a recovery portion, one end of the mounting portion is connected to the recovery portion, and the other end of the mounting portion is connected to the bellows;

[0012] The mounting portion is designed to be "L" shaped;

[0013] The recovery portion is configured to be tapered.

[0014] In a specific embodiment, the first gear assembly includes a driving wheel and a driven wheel meshing with the driving wheel;

[0015] A belt is arranged at one end of the driven wheel.

[0016] In a specific possible implementation manner, the base includes a horizontal portion and a vertical portion;

[0017] The vertical portion is connected to a belt.

[0018] In a specific embodiment, the second gear assembly includes a first gear, a second gear connected to the first gear;

[0019] The first gear and the second gear are sector gears.

[0020] To sum up, the present application has the following beneficial technical effects: the universal mechanism is driven up and down by the lifting cylinder, and the universal mechanism is set at the same time, which facilitates the turning of the recovery hood and changes the traditional fixed structure of the rebate hood. The rotation of the drive motor in the universal mechanism drives the fan gear and then drives the recovery hood to turn. At the same time, a horizontal movement mechanism is set, which facilitates the horizontal movement of the recovery hood and facilitates the horizontal recovery of exhaust gas. BRIEF DESCRIPTION OF THE DRAWINGS

[0021] Figure 1 It is a schematic diagram of the structure of the utility model;

[0022] Figure 2 It is a schematic diagram of the structure of the universal mechanism of the utility model.

[0023] : Illustrations: 1. fixed plate; 2. lifting cylinder; 3. connecting seat; 4. universal mechanism; 5. horizontal motion mechanism; 6. recovery mechanism; 7. duct fan; 8. bellows; 9. recovery cover; 10. servo motor; 11. first joint; 12. first steering member; 13. second steering member; 14. second joint; 15. driving motor; 16. fixing rod; 17. first gear assembly; 18. second gear assembly; 19. base; 20. horizontal motion cylinder; 21. slider; 22. adapter; 23. mounting part; 24. recovery part; 25. driving wheel; 26. driven wheel; 27. belt; 28. horizontal part; 29. ​​vertical part; 30. first gear; 31. second gear. DETAILED DESCRIPTION

[0024] In the following description, a large number of specific details are given to provide a more thorough understanding of the utility model. However, it is obvious to those skilled in the art that the utility model can be implemented without one or more of these details. In other examples, in order to avoid confusion with the utility model, some technical features known in the art are not described.

[0025] Reference Figure 1 A semiconductor waste gas recovery device is composed of a fixed plate 1, a lifting cylinder 2, a universal mechanism 4, a horizontal motion mechanism 5 and a recovery mechanism 6.

[0026] Specifically, the fixed plate 1 is set at a preset position, and the lifting cylinder 2 is installed on the fixed plate 1. For the stability of movement, guide rails are set at both ends of the lifting cylinder 2. A connecting seat 3 is set at the lifting end of the lifting cylinder 2. The connecting seat 3 is connected to the universal mechanism 4, the universal mechanism 4 is connected to the horizontal movement mechanism 5, and the recovery mechanism 6 is connected to the horizontal movement mechanism 5. The duct fan 7, the bellows 8 connected to the duct fan 7, and the recovery cover 9 connected to the bellows 8, the recovery cover 9 includes a mounting portion 23 and a recovery portion 24, one end of the mounting portion 23 is connected to the recovery portion 24, and the other end of the mounting portion 23 is connected to the bellows 8; the mounting portion 23 is designed to be "L"-shaped; the recovery portion 24 is set to be conical. In order to realize the full-range rotation of the recovery mechanism 6 and absorb exhaust gas from all directions, the universal mechanism 4 is composed of two driving mechanisms: a vertically mounted servo motor 10 and a driving motor 15 perpendicular to the axial direction of the servo motor 10.

[0027] As a preferred case, the universal mechanism 4 includes a servo motor 10 arranged on the connecting seat 3, a first joint 11 connected to the driving end of the servo motor 10, a first steering member 12 connected to the first joint 11, a second steering member 13 connected to the first steering member 12, a second joint 14 connected to the second steering member 13, a driving motor 15, a fixing rod 16 arranged on the connecting seat 3, a first gear assembly 17 connected to the driving motor 15, a second gear assembly 18 connected to the first gear assembly 17, the second joint 14 is connected to the horizontal motion mechanism 5, and the horizontal motion mechanism 5 includes a base 19, a horizontal motion cylinder 20 connected to the base 19, a slider 21 connected to the base 19 at one end and connected to the horizontal motion cylinder 20 at the other end, and an adapter 22 arranged at the bottom of the slider 21. The first gear assembly 17 includes a driving wheel 25 and a driven wheel 26 meshing with the driving wheel 25; a belt 27 is provided at one end of the driven wheel 26, the base 19 includes a horizontal portion 28 and a vertical portion 29; the vertical portion 29 is connected to the belt 27, and the second gear assembly 18 includes a first gear and a second gear connected to the first gear; the first gear and the second gear are fan-shaped gears. The driving motor 15 drives the driving wheel 25 to rotate and then drives the driven wheel 26 to move with the belt 27, so that the second gear can rotate along the first gear, and the servo motor 10 works synchronously, and the rotation direction of the first steering member 12 and the second steering member 13 is synchronized with the rotation direction of the first gear and the second gear, that is, the steering operation is realized.

[0028] Specifically, the second joint 14 is connected to the horizontal motion mechanism 5; the horizontal motion mechanism 5 includes a base 19, a horizontal motion cylinder 20 connected to the base 19, a slider 21 connected to the base 19 at one end and the horizontal motion cylinder 20 at the other end, a transfer joint provided at the bottom of the slider 21, and a connector 22 connected to the recovery cover 9. The slider 21 is driven to move by the movement of the horizontal motion cylinder 20, and the connector is connected to the recovery cover 9, and the other end of the recovery cover 9 is connected to the bellows 8, and the bellows 8 is soft, that is, universal steering.

[0029] As described above, although the present invention has been shown and described with reference to specific preferred embodiments, it should not be interpreted as limiting the present invention itself. Various changes can be made to it in form and detail without departing from the spirit and scope of the present invention defined in the appended claims.

Claims

1. A semiconductor waste gas recovery device, characterized in that: The invention comprises a fixing plate (1), a lifting cylinder (2) connected to the fixing plate (1), a connecting seat (3) connected to the lifting cylinder (2), a universal mechanism (4) connected to the connecting seat (3), a horizontal motion mechanism (5) connected to the universal mechanism (4), and a recovery mechanism (6) connected to the horizontal motion mechanism (5), wherein the recovery mechanism (6) comprises a duct fan (7), a bellows (8) connected to the duct fan (7), and a recovery cover (9) connected to the bellows (8).

2. A semiconductor waste gas recovery device according to claim 1, characterized in that: The universal mechanism (4) comprises a servo motor (10) arranged on the connecting seat (3), a first joint (11) connected to the driving end of the servo motor (10), a first steering member (12) connected to the first joint (11), a second steering member (13) connected to the first steering member (12), and a second joint (14) connected to the second steering member (13); A driving motor (15), a fixing rod (16) disposed on the connecting seat (3), a first gear assembly (17) connected to the driving motor (15), and a second gear assembly (18) connected to the first gear assembly (17).

3. A semiconductor waste gas recovery device according to claim 2, characterized in that: The second joint (14) is connected to the horizontal movement mechanism (5); The horizontal motion mechanism (5) comprises a base (19), a horizontal motion cylinder (20) connected to the base (19), a sliding block (21) having one end connected to the base (19) and the other end connected to the horizontal motion cylinder (20), and an adapter (22) arranged at the bottom of the sliding block (21).

4. A semiconductor waste gas recovery device according to claim 3, characterized in that: The adapter (22) is connected to the recovery cover (9).

5. A semiconductor waste gas recovery device according to claim 4, characterized in that: The recovery cover (9) comprises a mounting portion (23) and a recovery portion (24), one end of the mounting portion (23) being connected to the recovery portion (24), and the other end of the mounting portion (23) being connected to the bellows (8); The mounting portion (23) is designed to be "L" shaped; The recovery portion (24) is configured to be conical.

6. A semiconductor waste gas recovery device according to claim 2, characterized in that: The first gear assembly (17) comprises a driving wheel (25) and a driven wheel (26) meshing with the driving wheel (25); A belt (27) is provided at one end of the driven wheel (26).

7. A semiconductor waste gas recovery device according to claim 3, characterized in that: The base (19) comprises a horizontal portion (28) and a vertical portion (29); The vertical portion (29) is connected to the belt (27).

8. A semiconductor waste gas recovery device according to claim 2, characterized in that: The second gear assembly (18) comprises a first gear (30) and a second gear (31) connected to the first gear; The first gear (30) and the second gear (31) are sector gears.

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