Bubble sensor

Abstract

The utility model relates to a bubble sensor, comprising a housing having a first side surface and a second side surface; the shell is further provided with a channel, two ends of the channel are respectively provided with a first opening and a second opening, and the first opening and the second opening are located on the first side face and the second side face. And the optical signal detection module is arranged in the shell and is communicated with the channel. Therefore, a pipeline can pass through the channel, and the optical signal detection module can detect an optical signal of the pipeline located in the channel so as to judge whether liquid in the pipeline has bubbles or not according to the optical signal.

Description

Technical Field

[0001] The utility model relates to a semiconductor manufacturing process, in particular to a bubble sensor for sensing whether bubbles exist in a photoresist. Background Art

[0002] Air bubble detectors are generally used in medical treatment to detect whether there are bubbles in the infusion pipeline. The existing air bubble sensor has a shell with a groove on the top side of the shell, and an ultrasonic transmitter and an ultrasonic receiver are respectively provided on the two side walls of the groove. The pipeline to be detected is placed in the groove, and the ultrasonic transmitter emits ultrasound, which is received by the ultrasonic receiver after passing through the pipeline. The ultrasonic receiver transmits the received signal to a computer to determine whether there are bubbles in the pipeline.

[0003] In the semiconductor manufacturing process, photoresist is coated on a copper foil substrate, and a specific circuit layout (conductor pattern) is formed on the copper foil substrate through processes such as photolithography and etching. In the process of coating photoresist, it is also necessary to first detect whether there are bubbles in the photoresist. The semiconductor process requires very high precision, and the traditional bubble sensor that uses ultrasound to detect bubbles is no longer sufficient for the needs of the semiconductor process. Utility Model Content

[0004] The main utility model object of the utility model is to provide a bubble sensor, which can provide a high-precision bubble detection effect.

[0005] To achieve the above-mentioned purpose of the utility model, the utility model discloses a bubble sensor, comprising: a shell having a first side surface and a second side surface; the shell further has a channel, the two ends of the channel respectively have a first opening and a second opening and are located on the first side surface and the second side surface; and an optical signal detection module is arranged in the shell and connected to the channel.

[0006] Thereby, the channel can allow a pipeline to pass through, and the optical signal detection module can detect the optical signal of the pipeline in the channel to determine whether the liquid in the pipeline has bubbles.

[0007] In one embodiment, the shell has a main shell and a fixing member; the channel and the optical signal detection module are both arranged in the main shell; the fixing member is connected to the main shell in a manner that it can move in a direction approaching the main shell and away from the main shell; the fixing member has a stop member, and when the fixing member moves toward the main shell, the stop member will extend into the first opening and press against the pipeline.

[0008] In one embodiment, the fixing member further has another stopper, and when the fixing member moves toward the main housing, it will extend into the second opening and press against the pipeline.

[0009] In one embodiment, the optical signal detection module has a first substrate on which an optical sensor is disposed; the first substrate is disposed in the housing so that the optical sensor detects the optical signal of the pipeline in the channel.

[0010] In one embodiment, the optical signal detection module has a first substrate on which two optical sensors are disposed, and the two optical sensors are separated by a predetermined distance along the axial direction of the channel; the first substrate is disposed in the shell so that the two optical sensors detect the optical signal of the pipeline in the channel.

[0011] In one embodiment, the first substrate has a through hole, and the two optical sensors are respectively located on two sides of the through hole; the optical signal detection module further has a charge coupled device, and its lens detects the optical signal of the pipeline in the channel through the through hole of the first substrate.

[0012] In one embodiment, the optical signal detection module has a charge coupled device disposed in the housing for detecting the optical signal of the pipeline in the channel.

[0013] The beneficial effects of the utility model are as follows: it can provide a high-precision bubble detection effect. BRIEF DESCRIPTION OF THE DRAWINGS

[0014] Figure 1 It is a stereogram of a preferred embodiment of the utility model.

[0015] Figure 2 It is an exploded view of a preferred embodiment of the utility model.

[0016] Figure 3 It is a cross-sectional view of a preferred embodiment of the utility model.

[0017] 10 Shell

[0018] 12Optical signal detection module

[0019] 14 Main shell

[0020] 16Fixtures

[0021] 18 First side

[0022] 20 Second side

[0023] 22 The third side

[0024] 24 channels

[0025] 26 First Opening

[0026] 28 Second opening

[0027] 30 Main Body

[0028] 32 stoppers

[0029] 34 bolts

[0030] 36 first substrate

[0031] 38 light sensors

[0032] 40 second substrate

[0033] 42 Charge Coupled Device

[0034] 44Piercing

[0035] 46 lenses

[0036] 48 pipeline DETAILED DESCRIPTION

[0037] The following description with reference to the drawings is a preferred embodiment of the present invention. It should be understood that the drawings and descriptions are for illustrative purposes only and are not intended to limit the present invention. In addition, the terms "upper" and "lower", "left" and "right", "front" and "rear", "first" and "second" described in the specification are used to clearly explain the relative positions between components or mechanisms, and are not intended to be limiting terms.

[0038] See also Figures 1 to 3 As shown, a preferred embodiment of the present invention provides a bubble sensor, which mainly includes a housing 10 and an optical signal detection module 12 .

[0039] The housing 10 has a main housing 14 and a fixing member 16. The main housing 14 has a first side surface 18, a second side surface 20 located on the opposite side of the first side surface 18, and a third side surface 22 located between the first side surface 18 and the second side surface 20. The main housing 14 further has a passage 24, which penetrates the main housing 14 and forms a first opening 26 and a second opening 28 at the first side surface 18 and the second side surface 20, respectively. The first opening 26 and the second opening 28 are connected to the third side surface 22. The fixing member 16 has a main body 30 and two stoppers 32, wherein the main body 30 is a plate, and the two stoppers 32 are two protrusions, which extend outward from two sides of one side surface of the main body 30, respectively, and the two stoppers are generally parallel and separated by a predetermined distance. The main body 30 is connected to the third side surface 22 of the main housing 14, and can move in a direction close to the third side surface 22 and away from the third side surface 22. When the stopper 32 moves toward the direction approaching the third side surface 22, the two stopper 32 respectively extend into the first opening 26 and the second opening 28. In this embodiment, the fixing member 16 is fixed to the main housing 14 by a plurality of bolts 34, and the fixing member 16 can be moved by rotating the bolts 34.

[0040] The optical signal detection module 12 is disposed in the main housing 14 and is connected to the channel 24. In the present embodiment, the optical signal detection module 12 includes a first substrate 36, two photosensors 38, a second substrate 40, and a charge-coupled device (CCD) 42. The first substrate 36 is fixed in the main housing 10 and has a through hole 44. The two photosensors 38 are disposed on the first substrate 36 and are located on two sides of the through hole 44, so that the two photosensors 38 are separated by a predetermined distance along the axial direction of the channel 24. The two photosensors 38 are located in the channel 24 and are respectively located at predetermined positions close to the first opening 26 and the second opening 28, so that the two photosensors 38 are separated by a predetermined distance along the axial direction of the channel 24. The CCD 42 is disposed on the second substrate 40 and has a lens 46 passing through the through hole 44 of the first substrate 36 to communicate with the channel 24 .

[0041] When using, please refer to Figure 3As shown, a pipe 48 is inserted from the first opening 26, passes through the channel 24, and then extends from the second opening 28. The pipe 48 is used to transmit photoresist liquid, that is, the photoresist liquid flows in the pipe 48. Then, the fixing member 16 is fixed to the main housing 14, so that the two stoppers 32 extend into the first opening 26 and the second opening 28 respectively, and slightly press against the pipe 48, so that the pipe 48 can be firmly fixed in the channel 24 and will not move easily. After that, the optical signal detection module 12 can be activated to capture the optical signal of the pipe 48 located in the channel 24, and transmit the optical signals to a computer (not shown) in a wired or wireless manner to determine whether there are bubbles in the photoresist liquid in the pipe 48.

[0042] In this embodiment, the two optical sensors 38 can react to the illumination of light and determine whether there are bubbles by the change of illumination; while the charge coupled device 42 generates an optical image, and the image recognition technology can be used to determine whether there are bubbles. The two optical sensors 38 can see whether bubbles are detected through the data they detect, but when the bubbles are too small, the detection may fail. The detection results of the two optical sensors 38 can be verified by using the charge coupled device 42. In addition, the charge coupled device 42 can be used to take a photo of the detected content and save it as a picture for user search, and the data detected by the two optical sensors 38 can be used to draw a chart. In addition, by setting the two optical sensors 38 at a predetermined distance, the flow rate of the photoresist liquid in the pipeline 48 can be detected.

[0043] In the present embodiment, each optical sensor 38 is composed of three chips, which are arranged in a "pin" shape. In other words, two of the chips are arranged side by side in the horizontal direction, and the other chip is in the center in the vertical direction. The total width of the two chips arranged side by side is greater than the diameter of the pipe 48, and the other chip is aligned with the axis of the pipe 48, so as to detect whether there are bubbles in all parts of the pipe 48 (especially near the pipe wall). When the optical sensor 38 detects the presence of bubbles at a specific position in the pipe, this information will be transmitted to the computer. When the computer analyzes the optical signal detected by the charge coupled device 42, it can perform image enhancement processing on the specific position (near the place where the optical sensor 38 detects the bubble) to determine the exact position and size of the bubble, so as to perform more accurate detection operations.

[0044] Several matters that need to be supplemented about this utility model are described as follows:

[0045] 1. The above implementation is explained by taking the detection of whether there are bubbles in the photoresist liquid in the pipe 48 as an example. In practice, the bubble sensor provided by the utility model can detect whether there are bubbles in any type of liquid. The applicable industries are not limited to semiconductor processes. On the contrary, industries such as medical, mechanical, and chemical industries that need to detect bubbles in liquids can all use the bubble sensor of the utility model.

[0046] 2. The optical signal detection module 12 provided by the bubble sensor of the present invention mainly detects the optical signal of the pipeline 48 as the basis for judging whether there are bubbles. Therefore, in addition to the optical sensor and the charge coupled device 42 disclosed in the above embodiments, other devices capable of detecting optical signals, such as complementary metal-oxide-semiconductor (CMOS), bolometer, photographic plate, etc., can also be applied to the present invention.

[0047] 3. The optical signal detected by the optical signal detection module 12 of the present invention is transmitted to a computer for analysis. The transmission method and analysis method of the optical signal are not the main technical features of the present invention. A person with ordinary knowledge in the technical field can easily obtain the appropriate transmission method and analysis method, so the content is not described in detail.

[0048] The above are preferred embodiments and design drawings of the utility model, but the preferred embodiments and design drawings are only examples and are not used to limit the scope of rights of the technology of the utility model. Any implementation with equal technical means or within the scope of rights covered by the following "patent application scope" does not depart from the scope of the utility model and is the applicant's scope of rights.

Claims

1. A bubble sensor, characterized in that: Contains: A shell having a first side surface and a second side surface; the shell further has a channel, two ends of the channel respectively have a first opening and a second opening and are located on the first side surface and the second side surface; as well as An optical signal detection module is disposed in the housing and connected to the channel; The channel can allow a pipeline to pass through, and the optical signal detection module can detect the optical signal of the pipeline in the channel to determine whether the liquid in the pipeline has bubbles.

2. The air bubble sensor according to claim 1, characterized in that: The shell has a main shell and a fixing member; the channel and the optical signal detection module are both arranged in the main shell; the fixing member is connected to the main shell in a manner that it can move in a direction close to the main shell and away from the main shell; the fixing member has a stop member, and when the fixing member moves toward the main shell, the stop member will extend into the first opening and press against the pipeline.

3. The air bubble sensor according to claim 2, characterized in that: The fixing part further has another stopper. When the fixing part moves toward the main housing part, it will extend into the second opening and press against the pipeline.

4. The air bubble sensor according to claim 1, characterized in that: The optical signal detection module has a first substrate on which an optical sensor is arranged; the first substrate is arranged in the housing so that the optical sensor detects the optical signal of the pipeline in the channel.

5. The air bubble sensor according to claim 4, characterized in that: The optical sensor has three chips, two of which are arranged side by side in the horizontal direction, and the other chip is located in the center in the vertical direction.

6. The air bubble sensor according to claim 1, characterized in that: The optical signal detection module has a first substrate on which two optical sensors are arranged, and the two optical sensors are spaced a predetermined distance apart along the axial direction of the channel; the first substrate is arranged in the housing so that the two optical sensors detect the optical signal of the pipeline in the channel.

7. The air bubble sensor according to claim 6, characterized in that: The first substrate has a through hole, and the two optical sensors are respectively located at two sides of the through hole; the optical signal detection module further has a charge coupled device, and its lens detects the optical signal of the pipeline in the channel through the through hole of the first substrate.

8. The air bubble sensor according to claim 1, characterized in that: The optical signal detection module has a charge coupling element arranged in the housing and used for detecting the optical signal of the pipeline in the channel.

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