Optical fiber cabin penetrating device

Abstract

The utility model provides an optical fiber cabin penetrating device. The optical fiber cabin penetrating device comprises an installation component which is configured to be installed on a cabin wall and is provided with an assembly through hole; the optical fiber feed-through component is arranged in the assembling through hole in a penetrating mode and connected with the mounting component in a welded mode, a mounting channel is formed in the optical fiber feed-through component, an optical fiber is arranged in the mounting channel and matched with the mounting channel in a sealed mode, and the two ends of the optical fiber extend out of the mounting channel; at least one side of the installation component is welded with the insertion component along the axial direction of the assembly through hole, one end of the insertion component is located on the periphery of the optical fiber feed-through component, and the other end of the insertion component is configured to be capable of being quickly assembled and disassembled with an optical fiber connector. According to the technical scheme of the utility model, the problem that the optical fiber connector is inconvenient to plug and unplug when the optical fiber feed-through device is used in the prior art is solved.

Description

Technical Field

[0001] The utility model relates to the technical field of optical fiber communication, in particular to an optical fiber cabin penetration device. Background Art

[0002] With the development and demand of information science semiconductor technology, the requirements for semiconductor equipment are getting higher and higher, especially in terms of vacuum environment and precision requirements. The semiconductor industry cannot do without vacuum technology, because high vacuum environment has the advantages of high cleanliness, less water vapor, and less pollution to components.

[0003] Optical signal transmission can be carried out through various media. The optical signal transmission inside and outside the vacuum usually uses a vacuum window or an optical fiber through-cabin device. Although the optical fiber feedthrough in the prior art can realize high vacuum optical signal transmission, there are many inconveniences in the plugging and unplugging of the optical fiber connector. Utility Model Content

[0004] The main purpose of the utility model is to provide an optical fiber cabin penetration device to solve the problem of inconvenience in plugging and unplugging optical fiber connectors when using optical fiber feed-throughs in the prior art.

[0005] In order to achieve the above-mentioned purpose, the utility model provides an optical fiber cabin penetration device, which includes: an installation component, which is constructed to be installed on the cabin wall, and the installation component is provided with an assembly through hole; an optical fiber feed-through component, which is penetrated through the assembly through hole and welded to the installation component, and the optical fiber feed-through component is provided with an installation channel, in which an optical fiber is arranged, the optical fiber is sealed with the installation channel, and both ends of the optical fiber extend out of the installation channel; a plug-in component, along the axial direction of the assembly through hole, at least one side of the installation component is welded with a plug-in component, one end of the plug-in component is located at the outer periphery of the optical fiber feed-through component, and the other end of the plug-in component is constructed to be able to be quickly disassembled and assembled with the optical fiber connector.

[0006] Furthermore, the optical fiber feed-through component includes: a cabin penetration component, including a cabin penetration body penetrated by the assembly through hole and a connecting part connected to the cabin penetration body, the cabin penetration body is provided with a first through hole, and the connecting part is provided with an assembly groove connected to the end of the first through hole; a ceramic ferrule, one end of the ceramic ferrule is installed in the assembly groove, the other end of the ceramic ferrule extends into the plug-in component, the ceramic ferrule is provided with a second through hole connected to the first through hole, and the first through hole and the second through hole together form an installation channel.

[0007] Furthermore, along the axial direction of the installation channel, the thickness of the cabin penetration body is greater than half of the thickness of the installation component.

[0008] Furthermore, the inner wall at the end position of the assembly through hole is welded to the connecting portion, the outer periphery of the end of the optical fiber feed-through component is provided with an insert component, and the end surface of the insert component facing the installation component is welded to the installation component.

[0009] Furthermore, a first mounting groove and a second mounting groove which are connected are provided on the plug-in component, one end of the optical fiber feed-through component cooperates with the first mounting groove, and the second mounting groove is configured to be used for installing an optical fiber connector.

[0010] Furthermore, a sealing liquid is filled between the outer wall of the optical fiber and the inner wall of the installation channel.

[0011] Furthermore, the optical fiber feed-through component is provided with an injection channel which is connected to the installation channel and is set at an angle. Along the axial direction of the installation channel, at least one side of the injection channel is provided with an exhaust channel which is connected to the installation channel and is set at an angle.

[0012] Furthermore, an annular groove is provided on one side of the mounting component along the axial direction of the assembly through hole, and an annular sealing member is provided in the annular groove.

[0013] Furthermore, there is one annular groove, a mounting through hole is provided on the mounting component, and the annular sealing member is a sealing gasket; the optical fiber penetration device also includes a locking member which is penetrated through the mounting through hole.

[0014] Furthermore, there are two annular grooves, which are arranged at intervals along the radial direction of the assembly through hole, and the annular sealing member is a rubber ring; there are two plug-in components, and an external thread is provided on the outer wall of one of the two plug-in components, and along the axial direction of the assembly through hole, the external thread and the annular groove are located on the same side of the installation component, and the optical fiber cabin penetration device also includes an anti-slip component connected to the plug-in component, and the anti-slip component is provided with an internal thread, and the internal thread cooperates with the external thread.

[0015] By applying the technical solution of the utility model, the optical fiber is installed on the optical fiber feed-through component, and the plug-in component can be quickly disassembled and assembled with the optical fiber connector. When the optical fiber feed-through component welded on the installation component and the plug-in component are installed on the cabin wall through the installation component, the plug-in component can be extended into the cabin and quickly connected with the optical fiber connector in the cabin, and / or the plug-in component can be quickly connected with the optical fiber connector outside the cabin. In this way, on the one hand, while the optical signal is stably transmitted, the optical fiber connectors inside and outside the vacuum cabin can be quickly connected, thereby facilitating the rapid plugging and unplugging of the optical fiber connectors to facilitate later maintenance; on the other hand, by connecting the optical fiber feed-through component and the plug-in component to the installation component by welding, the structural stability of the optical fiber penetration device can be improved, and the sealing of the optical fiber penetration device can also be improved, thereby avoiding affecting the vacuum degree of the vacuum cabin. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] The drawings constituting part of the present application are used to provide a further understanding of the present invention. The exemplary embodiments of the present invention and their descriptions are used to explain the present invention and do not constitute an improper limitation on the present invention. In the drawings:

[0017] Figure 1A schematic structural diagram of an embodiment of the optical fiber cabin penetration device of the utility model is shown;

[0018] Figure 2 Shows Figure 1 A schematic structural diagram of a cabin penetration component of an optical fiber feed-through component of an optical fiber cabin penetration device;

[0019] Figure 3 Shows Figure 1 A schematic structural diagram of a plug-in component of an optical fiber penetration device;

[0020] Figure 4 Shows Figure 1 Schematic diagram of the exploded structure of the optical fiber penetration device;

[0021] Figure 5 A schematic diagram of the exploded structure of another embodiment of the optical fiber penetration device of the utility model is shown.

[0022] The above drawings include the following reference numerals:

[0023] 1. Mounting component; 12. Annular groove; 14. Annular seal; 2. Fiber feed-through component; 21. Mounting channel; 22. Cabin penetration component; 221. First through hole; 222. Liquid injection channel; 223. Assembly groove; 224. Exhaust channel; 23. Ceramic ferrule; 3. Plug-in component; 311. First mounting groove; 312. Second mounting groove; 5. Mounting through hole. DETAILED DESCRIPTION

[0024] It should be noted that, in the absence of conflict, the embodiments and features in the embodiments of the present application can be combined with each other. The present utility model will be described in detail below with reference to the accompanying drawings and in combination with the embodiments.

[0025] The structures, proportions, sizes, etc. illustrated in the drawings of this specification are only used to match the contents disclosed in the specification for people familiar with this technology to understand and read, and are not used to limit the limiting conditions for the implementation of the utility model, so they have no substantial technical significance. Any modification of the structure, change of the proportion relationship or adjustment of the size, without affecting the effect and purpose that can be achieved by the utility model, should still fall within the scope of the technical content disclosed by the utility model. At the same time, the terms such as "upper", "lower", "left", "right", "middle" and "one" quoted in this specification are only for the convenience of description, and are not used to limit the scope of the implementation of the utility model. The change or adjustment of the relative relationship, without substantial change of the technical content, should also be regarded as the scope of the implementation of the utility model.

[0026] It should be noted that in the embodiment of the present invention, the optical fiber penetration device is installed in the vacuum chamber to connect the optical signals inside and outside the vacuum chamber, wherein the vacuum chamber has a vacuum environment of less than 1×10 -5 Pa ultra-high vacuum chamber.

[0027] like Figures 1 to 4 As shown, an embodiment of the utility model provides an optical fiber cabin penetration device. The optical fiber cabin penetration device includes a mounting component 1, an optical fiber feed-through component 2 and a plug-in component 3. Among them, the mounting component 1 is constructed to be installed on the cabin wall, and the mounting component 1 is provided with an assembly through hole; the optical fiber feed-through component 2 is inserted into the assembly through hole and is welded to the mounting component 1, and the optical fiber feed-through component 2 is provided with an installation channel 21, and an optical fiber is arranged in the installation channel 21, and the optical fiber is sealed with the installation channel 21, and both ends of the optical fiber extend out of the installation channel 21; along the axial direction of the assembly through hole, at least one side of the mounting component 1 is welded with a plug-in component 3, one end of the plug-in component 3 is located at the outer periphery of the optical fiber feed-through component 2, and the other end of the plug-in component 3 is constructed to be able to be quickly disassembled and assembled with the optical fiber connector.

[0028] Specifically, in the embodiment of the present invention, both sides of the mounting member 1 are welded with the plug-in member 3; in other embodiments, the plug-in member 3 may also be provided on any one of the two sides of the mounting member 1, for example, Figure 1 A plug-in component 3 is provided on the left or right side of the device.

[0029] In the above technical scheme, by installing the optical fiber on the optical fiber feed-through component 2, and by enabling the plug-in component 3 to be quickly disassembled and assembled with the optical fiber connector, when the optical fiber feed-through component 2 welded on the mounting component 1 and the plug-in component 3 are installed on the cabin wall through the mounting component 1, the plug-in component 3 can be extended into the cabin and quickly connected to the optical fiber connector in the cabin, and / or the plug-in component 3 can be quickly connected to the optical fiber connector outside the cabin. In this way, on the one hand, while the optical signal is stably transmitted, the optical fiber connectors inside and outside the vacuum cabin can be quickly connected, thereby facilitating the rapid plugging and unplugging of the optical fiber connectors to facilitate later maintenance; on the other hand, by connecting the optical fiber feed-through component 2 and the plug-in component 3 to the mounting component 1 by welding, the structural stability of the optical fiber cabin penetration device can be improved, and the sealing of the optical fiber cabin penetration device can also be improved, thereby avoiding affecting the vacuum degree of the vacuum cabin.

[0030] Specifically, in the embodiment of the utility model, the mounting component 1 is made of stainless steel. Thus, on the one hand, the corrosion resistance and oxidation resistance of the mounting component 1 can be improved, thereby reducing the occurrence of problems such as rust on the mounting component 1 caused by changes in environmental conditions; on the other hand, the mounting component 1 may be deformed due to excessive pressure difference between the inside and outside of the vacuum chamber caused by vacuuming, while the mounting component 1 made of stainless steel has higher strength, thereby reducing the probability of deformation of the mounting component 1 when the pressure difference between the inside and outside of the vacuum chamber is too large.

[0031] Specifically, in the embodiments of the present invention, the optical fiber may be a single-mode optical fiber or a multi-mode optical fiber, which may be selected according to transmission requirements.

[0032] Preferably, the mounting component 1 is a Conflat Flange (CF) suitable for ultra-high vacuum.

[0033] It should be noted that, in the embodiment of the present invention, the optical fiber extending out of the installation channel 21 can be connected to the optical fiber connector through the plug-in component 3 after the end surface is polished.

[0034] It should be noted that in the embodiments of the present invention, Figure 1 The mounting member 1 is connected to the bulkhead of the vacuum chamber, Figure 1 The plug-in component 3 on the right side is installed in the vacuum chamber wall and connected with the optical fiber connector in the vacuum chamber. Figure 1 The plug-in component 3 on the left side is connected to the optical fiber connector outside the vacuum chamber.

[0035] Preferably, in the embodiment of the present invention, two ends of the fiber feed-through component 2 respectively pass through two ends of the assembly through hole of the mounting component 1 , and the two plug-in components 3 are respectively located at the periphery of the two ends of the fiber feed-through component 2 .

[0036] like Figure 1 and Figure 2 As shown, in the embodiment of the utility model, the optical fiber feed-through component 2 includes: a cabin penetration member 22, including a cabin penetration body penetrated in the assembly through hole and a connecting portion connected to the cabin penetration body, the cabin penetration body is provided with a first through hole 221, and the connecting portion is provided with an assembly groove 223 connected to the end of the first through hole 221; a ceramic ferrule 23, one end of the ceramic ferrule 23 is installed in the assembly groove 223, and the other end of the ceramic ferrule 23 extends into the plug-in component 3, and the ceramic ferrule 23 is provided with a second through hole connected to the first through hole 221, and the first through hole 221 and the second through hole together form an installation channel 21.

[0037] In the above technical solution, the optical fiber feedthrough component 2 includes a chamber penetration member 22 and a ceramic ferrule 23. On the one hand, the ceramic ferrule 23 has a high strength and a low expansion coefficient. By setting the ceramic ferrule 23, the optical fiber can be supported and fixed, so that the optical fiber can be kept in the installation position in an environment with large temperature changes to avoid misalignment with the external optical fiber connector, thereby ensuring the coaxiality of the optical fiber in the optical fiber feedthrough component 2 and the optical fiber of the optical fiber connector, and the ceramic ferrule 23 can protect the optical fiber; on the other hand, the ceramic ferrule 23 can be installed on the installation component 1 through the chamber penetration member 22.

[0038] It should be noted that in the embodiment of the present invention, the ceramic ferrule 23 is a standard part. Since the ceramic ferrule 23 is a precision machined part, its outer diameter is strictly controlled, and its inner diameter can be selected according to the size of the optical fiber.

[0039] Specifically, in the embodiment of the utility model, the cross-sectional area of ​​the first through hole 221 in the length direction of the optical fiber is larger than the cross-sectional area of ​​the assembly groove 223 in the length direction of the optical fiber. The first through hole 221 is used to install the optical fiber, and the assembly groove 223 is used to install the ceramic ferrule 23.

[0040] It should be noted that, in the embodiment of the present invention, the cross section of the cabin penetration member 22 in the length direction of the optical fiber is an I-shaped structure, which is easy to process and integrate.

[0041] Specifically, in the embodiment of the present utility model, the connecting portion is a ring-shaped structure.

[0042] Specifically, in the embodiment of the present invention, there are two ceramic ferrules 23, which are symmetrically arranged with respect to the mounting member 1. Correspondingly, there are also two connecting parts, which are symmetrically arranged with respect to the cabin penetration body.

[0043] Specifically, in the embodiment of the utility model, the cabin penetration piece 22 is made of stainless steel. Thus, on the one hand, the cabin penetration piece 22 can have a higher rigidity, thereby preventing the cabin penetration piece 22 from being deformed, thereby protecting the optical fiber installed inside. On the other hand, the welding process of stainless steel is mature. Thus, the cabin penetration piece 22 can be easily connected to the mounting component 1.

[0044] like Figure 1 and Figure 2 As shown, in the embodiment of the present invention, along the axial direction of the installation channel 21 , the thickness h of the cabin penetration body is greater than half of the thickness H of the installation component 1 .

[0045] Through the above arrangement, the cabin penetration body can withstand higher pressure, so that deformation of the cabin penetration body can be avoided, thereby protecting the optical fiber passing through the cabin penetration body.

[0046] Specifically, in the embodiment of the present invention, the thickness H of the mounting member 1 is greater than or equal to 3 mm, so that the cabin penetration body can withstand a pressure greater than 2.5 MPa.

[0047] Specifically, in the embodiment of the utility model, the inner wall at the end position of the assembly through hole is welded to the connecting portion, the outer periphery of the end of the optical fiber feed-through component 2 is provided with a plug-in component 3, and the end face of the plug-in component 3 facing the installation component 1 is welded to the installation component 1.

[0048] Through the above arrangement, the airtightness and firmness of the connection between the installation component 1 and the optical fiber feed-through component 2 can be improved, and the airtightness and firmness of the connection between the installation component 1 and the plug-in component 3 can be improved.

[0049] Specifically, in the embodiment of the utility model, the inner wall and the connecting portion at the end position of the assembly through hole are butt-welded (internal and external welding) by laser welding, so that the connecting portions on both sides of the assembly through hole are welded to the mounting component 1. In this way, the airtightness and firmness of the connection between the mounting component 1 and the optical fiber feedthrough component 2 can be improved, thereby reducing the vacuum leakage rate.

[0050] It should be noted that, in the embodiments of the present invention, the vacuum leakage rate refers to the rate at which gas enters a relatively negative pressure closed space. The lower the vacuum leakage rate, the higher the vacuum degree of the cabin. The vacuum leakage rate is related to the sealing process.

[0051] It should be noted that in the embodiment of the present invention, the rigidity of the mounting component 1 is greater than that of the cabin penetration component 22 , so that the plug-in component 3 is preferentially welded to the mounting component 1 rather than welding the plug-in component 3 to the cabin penetration component 22 .

[0052] Preferably, in the embodiment of the utility model, the mounting component 1 and the plug-in component 3 are connected by vacuum welding, which can improve the welding accuracy and avoid defects such as impurities or pores in the weld, thereby improving the weld quality and making the connection between the mounting component 1 and the plug-in component 3 have higher sealing and firmness.

[0053] like Figure 1 and Figure 3 As shown, in the embodiment of the utility model, a first mounting groove 311 and a second mounting groove 312 are provided on the plug-in component 3, one end of the fiber feed-through component 2 cooperates with the first mounting groove 311, and the second mounting groove 312 is constructed for installing a fiber optic connector.

[0054] Through the above arrangement, the end of the ceramic ferrule 23 away from the first through hole 221 can be inserted into the first mounting groove 311. In this way, when the optical fiber connector is installed in the second mounting groove 312, it can be quickly connected with the ceramic ferrule 23 in the first mounting groove 311, thereby realizing the rapid connection of the optical fiber connector inside and outside the vacuum chamber, and then facilitating the rapid plugging and unplugging of the optical fiber connector to facilitate later maintenance.

[0055] It should be noted that, in the embodiment of the present invention, the connection and sealing of the entire optical fiber penetration device are achieved by connecting the plug-in component 3 with the mounting component 1 and matching the plug-in component 3 with the optical fiber feed-through component 2.

[0056] It should be noted that, in the embodiment of the present invention, the shape of the first mounting groove 311 matches the shape of the end of the ceramic ferrule 23 away from the first through hole 221 .

[0057] Specifically, in the embodiment of the present utility model, the two plug-in components 3 are symmetrically arranged with respect to the mounting component 1 .

[0058] Specifically, in the embodiment of the present invention, the plug-in component 3 is a precision-machined part, so that the optical fiber connector can be ensured to be coaxial with the optical fiber in the installation channel 21, thereby minimizing the docking error.

[0059] Specifically, the plug-in component 3 is made of stainless steel.

[0060] Specifically, in the embodiment of the utility model, a sealing liquid is filled between the outer wall of the optical fiber and the inner wall of the installation channel 21. In this way, the gap between the optical fiber and the inner wall of the installation channel 21 can be eliminated, so that a seal is formed between the optical fiber and the optical fiber feed-through component 2, so as to improve the sealing performance of the optical fiber cabin penetration device.

[0061] Specifically, in the embodiment of the utility model, the sealing liquid can be glue or glass powder or ceramic powder. In this way, by filling the sealing liquid between the outer wall of the optical fiber and the inner wall of the installation channel 21, the optical fiber can be fixed in the installation channel 21, so that the optical fiber in the ceramic ferrule 23 and the optical fiber in the cabin penetration member 22 can always remain coaxial, avoiding bending of the optical fiber and affecting the transmission of the optical signal.

[0062] like Figure 2 As shown, in the embodiment of the utility model, the optical fiber feed-through component 2 is provided with an injection channel 222 which is connected to the installation channel 21 and is set at an angle. Along the axial direction of the installation channel 21, exhaust channels 224 are provided on both sides of the injection channel 222. The exhaust channels 224 are connected to the installation channel 21 and are set at an angle.

[0063] Through the above-mentioned arrangement, the sealing liquid can enter the first through hole 221 through the injection channel 222, and fill the two sides of the first through hole 221 through the first through hole 221, so that the air in the installation channel 21 is discharged through the exhaust channel 224, and then the sealing liquid fills the gap between the outer wall of the optical fiber and the inner wall of the installation channel 21, so that a seal is formed between the optical fiber and the optical fiber feed-through component 2, so as to improve the sealing performance of the optical fiber cabin penetration device.

[0064] Furthermore, by arranging exhaust channels 224 on both sides of the injection channel 222, the injection of the sealing liquid can be facilitated, so that the distance for the sealing liquid to fill the gap between the outer wall of the optical fiber and the inner wall of the installation channel 21 is minimized. In this way, the injection time can be shortened to avoid the solidification of the sealing liquid, thereby improving the sealing performance of the optical fiber cabin penetration device.

[0065] It should be noted that, in the embodiment of the present invention, the I-shaped structure of the cabin penetration member 22 is symmetrically arranged about the axis of the first through hole 221, which is easy to process and integrate.

[0066] Preferably, in the embodiment of the present invention, the angle between the injection channel 222 and the installation channel 21 is 90°.

[0067] Preferably, in the embodiment of the present invention, the included angle between the exhaust passage 224 and the mounting passage 21 is 90°.

[0068] It should be noted that in the embodiment of the utility model, an exhaust through hole is also provided on the ceramic ferrule 23, one end of the exhaust through hole is connected to the installation channel 21, and the other end of the exhaust through hole is connected to the exhaust channel 224, so that the gas in the installation channel 21 can be discharged through the exhaust through hole and the exhaust channel 224.

[0069] It should be noted that in the embodiment of the present invention, when the sealing liquid is glue, vacuum degassing is required; when the sealing liquid is glass powder or ceramic powder, high-temperature sintering is required. After the sealing liquid is completely solidified, the end faces of the two ceramic inserts 23 away from the first through hole 221 need to be ground respectively.

[0070] In another embodiment, along the axial direction of the installation channel 21, only Figure 2 An exhaust channel 224 is provided on the left side of the injection channel 222 .

[0071] In another embodiment, along the axial direction of the installation channel 21, only Figure 2 An exhaust channel 224 is provided on the right side of the injection channel 222 .

[0072] like Figure 4 and Figure 5 As shown, in the embodiment of the present invention, an annular groove 12 is provided on one side of the mounting member 1 along the axial direction of the assembly through hole, and an annular sealing member 14 is provided in the annular groove 12 .

[0073] Through the above arrangement, a seal can be formed between the installation component 1 and the cabin wall, so as to avoid the vacuum degree of the high vacuum chamber being affected by the installation of the optical fiber cabin penetration device.

[0074] It should be noted that, in the embodiment of the present invention, the mounting member 1 is in the shape of a disc, and the center of the annular groove 12 overlaps with the center of the mounting member 1 .

[0075] It should be noted that, in the embodiment of the present invention, the groove width of the annular groove 12 matches the width of the annular seal 14 .

[0076] like Figure 1 and Figure 4As shown, in the embodiment of the utility model, there is one annular groove 12 , a mounting through hole 5 is provided on the mounting component, and the annular seal 14 is a sealing gasket; the optical fiber penetration device also includes a locking member penetrated through the mounting through hole 5 .

[0077] In the above technical solution, by arranging a locking piece, the side of the mounting component 1 provided with the annular groove 12 can be pressed against the cabin wall surface, and an extrusion force is generated on the sealing gasket in the annular groove 12, so that the sealing gasket produces elastic deformation, and then the sealing gasket fills the gap between the mounting component 1 and the cabin wall, so that a seal is formed between the mounting component 1 and the cabin wall. In this way, the vacuum degree of the vacuum cabin caused by the installation of the optical fiber cabin penetration device can be avoided.

[0078] Specifically, in the embodiment of the present invention, there are multiple mounting through holes 5 , which are arranged at intervals along the circumference of the mounting component 1 , and there are multiple locking members, which are arranged in coordination with the multiple mounting through holes 5 .

[0079] Specifically, in the embodiment of the present invention, the annular seal 14 is an oxygen-free copper gasket, so that the sealing performance of the annular seal 14 can be higher and it is suitable for high temperature and high pressure environments. By setting the oxygen-free copper gasket, the vacuum leakage rate can be less than 1·E -12 Pa·m 3 / s, so that the vacuum degree of the vacuum chamber will not be affected.

[0080] Preferably, in an embodiment of the present invention, the locking member is a screw.

[0081] like Figure 5 As shown, in another embodiment of the utility model, there are two annular grooves 12, which are arranged at intervals along the radial direction of the assembly through hole, and the annular seal 14 is a rubber ring; there are two plug-in components 3, and an external thread is provided on the outer wall of one of the two plug-in components 3, and along the axial direction of the assembly through hole, the external thread and the annular groove 12 are located on the same side of the installation component 1, and the optical fiber cabin penetration device also includes an anti-slip component connected to the plug-in component 3, and the anti-slip component is provided with an internal thread, and the internal thread is threaded with the external thread.

[0082] In the above technical solution, the installation component 1 can be fixed on the bulkhead surface through the threaded cooperation between the anti-slip part and the plug-in component 3, and an extrusion force can be generated on the two rubber rings between the installation component 1 and the bulkhead, so that the two rubber rings are elastically deformed, and then the two rubber rings fill the gap between the installation component 1 and the bulkhead, so that a double sealing layer is formed between the installation component 1 and the bulkhead. In this way, the vacuum degree of the vacuum cabin caused by the installation of the optical fiber penetration device can be avoided.

[0083] Specifically, in the embodiment of the utility model, the rubber ring is made of chlorinated nitrile rubber, which has high air tightness and good physical properties. By setting two chlorinated nitrile rubber rings, the vacuum leakage rate can be less than 1·E -9 Pa·m 3 / s, so that the vacuum degree of the vacuum chamber will not be affected.

[0084] Preferably, in an embodiment of the present invention, the anti-dropping member is a nut.

[0085] It should be noted that in the embodiment of the utility model, the assembly process of the optical fiber penetration device is as follows: first, cut an optical fiber that is about 30 mm longer than the length of the penetration member 22, and use a wire stripper to strip the outer coating of the optical fiber. In this way, the degassing problem caused by the optical fiber coating being a resin material that belongs to an organic matter can be avoided, and the problem of the coating being damaged during high-temperature welding due to the resin not being resistant to high temperatures can be avoided; then, the optical fiber is passed through the first through hole 221, and then the two ends of the optical fiber are respectively inserted into the ceramic ferrule 23, and part of the ceramic ferrule 23 is installed in the assembly groove 223, and at the same time, the two ends of the optical fiber are respectively extended out of the two second through holes; further, Sealing liquid is injected through the injection channel 222 and exhausted through the exhaust channel 224, so that the sealing liquid fills the gap between the outer wall of the optical fiber and the inner wall of the installation channel 21. When the sealing liquid is completely solidified, the end faces of the two ceramic ferrules 23 away from the first through hole 221 need to be grinded respectively. After grinding, the optical fiber feed-through component 2 is passed through the assembly through hole, and the inner wall at the end position of the assembly through hole and the connecting part are butt-welded (inside and outside welding) by laser welding to weld the connecting parts on both sides of the assembly through hole to the installation component 1. At the same time, the end face of the plug-in component 3 facing the installation component 1 is connected to the installation component 1 by vacuum welding.

[0086] From the above description, it can be seen that the above-mentioned embodiments of the utility model achieve the following technical effects: by installing the optical fiber on the optical fiber feed-through component, and by enabling the plug-in component to be quickly disassembled and assembled with the optical fiber connector, when the optical fiber feed-through component and the plug-in component welded on the mounting component are installed on the cabin wall through the mounting component, the plug-in component can be extended into the cabin and quickly connected to the optical fiber connector in the cabin, and / or the plug-in component can be quickly connected to the optical fiber connector outside the cabin. In this way, on the one hand, while the optical signal is stably transmitted, the optical fiber connectors inside and outside the vacuum cabin can be quickly connected, thereby facilitating the rapid plugging and unplugging of the optical fiber connectors to facilitate later maintenance; on the other hand, by connecting the optical fiber feed-through component and the plug-in component to the mounting component by welding, the structural stability of the optical fiber cabin penetration device can be improved, and the sealing of the optical fiber cabin penetration device can also be improved, thereby avoiding affecting the vacuum degree of the vacuum cabin.

[0087] The above description is only the preferred embodiment of the utility model, and is not intended to limit the utility model. For those skilled in the art, the utility model can have various modifications and changes. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the utility model shall be included in the protection scope of the utility model.

Claims

1. An optical fiber cabin penetration device, characterized in that: include: A mounting member (1) configured to be mounted on a bulkhead, wherein the mounting member (1) is provided with a mounting through hole; an optical fiber feed-through component (2) which is inserted into the assembly through hole and connected to the mounting component (1) by welding, the optical fiber feed-through component (2) having a mounting channel (21), an optical fiber being arranged in the mounting channel (21), the optical fiber being in sealing cooperation with the mounting channel (21), and both ends of the optical fiber extending out of the mounting channel (21); A plug-in component (3) is welded to at least one side of the mounting component (1) along the axial direction of the assembly through hole, one end of the plug-in component (3) is located on the periphery of the optical fiber feed-through component (2), and the other end of the plug-in component (3) is constructed to be able to be quickly disassembled from the optical fiber connector.

2. The optical fiber penetration device according to claim 1, characterized in that: The optical fiber feed-through component (2) comprises: A cabin penetration member (22), comprising a cabin penetration body penetrated through the assembly through hole and a connecting portion connected to the cabin penetration body, the cabin penetration body being provided with a first through hole (221), and the connecting portion being provided with an assembly groove (223) communicating with an end of the first through hole (221); A ceramic ferrule (23), one end of the ceramic ferrule (23) being mounted in the assembly groove (223), the other end of the ceramic ferrule (23) extending into the plug-in component (3), the ceramic ferrule (23) being provided with a second through hole communicating with the first through hole (221), the first through hole (221) and the second through hole jointly forming the mounting channel (21).

3. The optical fiber penetration device according to claim 2, characterized in that: Along the axial direction of the installation channel (21), the thickness (h) of the cabin penetration body is greater than half the thickness (H) of the installation component (1).

4. The optical fiber penetration device according to claim 2, characterized in that: The inner wall at the end position of the assembly through hole is welded to the connecting portion, the outer periphery of the end of the optical fiber feed-through component (2) is provided with the plug-in component (3), and the end surface of the plug-in component (3) facing the installation component (1) is welded to the installation component (1).

5. The optical fiber penetration device according to any one of claims 1 to 4, characterized in that: The plug-in component (3) is provided with a first mounting groove (311) and a second mounting groove (312) which are connected to each other; one end of the optical fiber feed-through component (2) cooperates with the first mounting groove (311); and the second mounting groove (312) is configured to be used for mounting an optical fiber connector.

6. The optical fiber penetration device according to any one of claims 1 to 4, characterized in that: A sealing liquid is filled between the outer wall of the optical fiber and the inner wall of the installation channel (21).

7. The optical fiber penetration device according to claim 6, characterized in that: The optical fiber feed-through component (2) is provided with a liquid injection channel (222) which is in communication with the mounting channel (21) and is arranged at an angle; along the axial direction of the mounting channel (21), at least one side of the liquid injection channel (222) is provided with an exhaust channel (224); the exhaust channel (224) is in communication with the mounting channel (21) and is arranged at an angle.

8. The optical fiber penetration device according to any one of claims 1 to 4, characterized in that: An annular groove (12) is provided on one side of the mounting component (1) along the axial direction of the assembly through hole, and an annular sealing member (14) is provided in the annular groove (12).

9. The optical fiber penetration device according to claim 8, characterized in that: There is one annular groove (12), a mounting through hole (5) is provided on the mounting component (1), and the annular sealing member (14) is a sealing gasket; the optical fiber penetration device also includes a locking member that is penetrated through the mounting through hole (5).

10. The optical fiber penetration device according to claim 8, characterized in that: There are two annular grooves (12), which are arranged at intervals along the radial direction of the assembly through hole, and the annular seal (14) is a rubber ring; there are two plug-in components (3), and one of the two plug-in components (3) has an external thread on its outer wall, and along the axial direction of the assembly through hole, the external thread and the annular groove (12) are located on the same side of the installation component (1), and the optical fiber penetration device also includes an anti-slip component connected to the plug-in component (3), and the anti-slip component is provided with an internal thread, and the internal thread is threadedly matched with the external thread.

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