Double-arm carrying structure

Abstract

The utility model relates to the field of semiconductor wafer processing, in particular to a double-arm carrying structure which comprises a lower arm assembly and an upper arm assembly, the lower arm assembly is assembled on a turret assembly through a flange, and the output end of the upper arm assembly is connected with a wrist assembly; the lower end of a lower arm rotating shaft in the lower arm assembly is assembled in the rotating tower assembly, the rotating tower assembly transmits power to the lower arm assembly with the lower arm rotating shaft as the axis, and the lower arm assembly outputs the power to a wrist connecting base in the upper arm assembly with the upper arm rotating shaft as the axis. According to the utility model, the whole structure is optimized, a double-arm structure is adopted, free control of the execution tail end in a limited longitudinal space is realized, double arms are combined with double-wheel belt transmission, the rotation angle is converted and then the rotation angle is reversed again, and no interference exists in a vertical space in the moving process of the operation tail end; the overall space occupation is reduced, and the use efficiency in the equipment is improved; if an external lifting assembly is combined, efficient multi-dimensional carrying action can be achieved.

Description

Technical Field

[0001] The utility model relates to the field of semiconductor wafer processing, in particular to a double-arm transport structure. Background Art

[0002] In the field of semiconductor manufacturing, especially in the wafer front-end process, each process has multiple detailed steps, so the wafer needs to be transported between multiple processes and steps. In this process, a large number of wafer handling robots are needed to complete the loading and unloading of wafers, so as to further complete the wafer processing, cleaning, testing and other processes;

[0003] Usually, during the transportation process, a stable translation process is required because most wafers are sheet-shaped materials. However, conventional robotic arms require a larger working space, and their arms will interfere with other equipment due to various directions or movements. Therefore, the overall robotic arm space is larger, which in turn causes increased costs in other aspects and reduced efficiency, thus affecting the applicability and stability of the entire equipment. Utility Model Content

[0004] In view of the above-mentioned deficiencies in the prior art, the purpose of the utility model is to provide a double-arm transport structure.

[0005] The utility model provides the following technical solutions:

[0006] A double-arm carrying structure comprises a lower arm assembly and an upper arm assembly, wherein the lower arm assembly is assembled on a turret assembly via a flange, and the output end of the upper arm assembly is connected to a wrist assembly; the lower end of a lower arm rotating shaft in the lower arm assembly is assembled in the turret assembly, the turret assembly transmits power to the lower arm assembly with the lower arm rotating shaft as the axis, and the lower arm assembly outputs power to a wrist connecting seat in the upper arm assembly with the upper arm rotating shaft as the axis.

[0007] Further, the lower arm assembly includes a lower arm housing, a lower arm bottom cover, a lower arm driving wheel and a lower arm driven wheel; the lower arm rotating shaft is rotatably connected through the rotating shaft and penetrates into the lower arm housing, the lower arm driving wheel is fixed in the lower arm housing, and is rotatably connected to the lower arm rotating shaft through the lower arm expansion sleeve;

[0008] Furthermore, the lower arm driving wheel and the lower arm driven wheel form a belt transmission through the lower arm tensioning wheel and the belt;

[0009] Furthermore, the driven wheel of the lower arm is fixedly connected to the lower part of the upper arm connection seat and is rotatably sleeved on the upper arm shaft; the upper end surface of the upper arm connection seat is fixedly connected to the upper arm assembly and is rotatably mounted on the lower arm housing through the lower arm cross roller bearing; the lower end of the upper arm shaft is fixed to the lower arm bottom cover, and the upper end is deep into the upper arm assembly;

[0010] Furthermore, the upper arm assembly includes an upper arm housing, an upper arm bottom cover, an upper arm driving wheel and an upper arm driven wheel; the upper arm driving wheel is fixed in the upper arm housing and is rotatably connected to the upper arm rotating shaft through an upper arm expansion sleeve;

[0011] Furthermore, the upper arm driving wheel and the upper arm driven wheel form a belt transmission through the upper arm tensioning wheel and the belt;

[0012] Furthermore, the upper arm driven wheel is fixedly connected to the lower part of the wrist connecting seat; the lower part of the wrist connecting seat is rotatably mounted on the upper arm housing through the upper arm cross roller bearing;

[0013] Compared with the prior art, the beneficial effects of the utility model are as follows:

[0014] By adopting the utility model, the overall structure is optimized, and a double-arm structure is adopted to realize free control of the end in a limited longitudinal space. The double arms are combined with a double-wheel belt transmission to convert the rotation angle and then reverse it again. In addition, there is no interference in the vertical space during the movement of the end. The overall space occupancy is reduced and the utilization efficiency inside the equipment is improved. If combined with an external lifting component, efficient multi-dimensional handling actions can be achieved. BRIEF DESCRIPTION OF THE DRAWINGS

[0015] Figure 1 It is a schematic diagram of the overall structure of the utility model;

[0016] Figure 2 It is a schematic diagram of the combination of the upper arm assembly and the lower arm assembly of the utility model;

[0017] Figure 3 It is a cross section of the upper arm assembly and the lower arm assembly of the utility model.

[0018] Figure 4 It is a schematic diagram of the motion trajectory of the utility model. DETAILED DESCRIPTION

[0019] The technical solutions in the embodiments of the present invention will be described clearly and completely below in conjunction with the drawings in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, rather than all of the embodiments.

[0020] refer to Figure 1-3 As shown, a double-arm handling structure comprises a lower arm assembly 7 and an upper arm assembly 7, wherein the lower arm assembly 7 is assembled on a turret assembly 5 through a flange, and the output end of the upper arm assembly 7 is connected to a wrist assembly 8; the lower end of a lower arm shaft 73 in the lower arm assembly 7 is assembled in the turret assembly 5, and the turret assembly 5 transmits power to the lower arm assembly 7 with the lower arm shaft 73 as the axis, and the upper arm shaft 73 of the lower arm assembly 7 is used as the axis to output power to a wrist connection seat 76 in the upper arm assembly 7;

[0021] Further, the lower arm assembly 6 includes a lower arm housing 61, a lower arm bottom cover 62, a lower arm driving wheel 64 and a lower arm driven wheel 65; the lower arm rotating shaft 63 is rotatably connected through the rotating shaft and penetrates into the lower arm housing 61, the lower arm driving wheel 64 is fixed in the lower arm housing 61, and is rotatably connected to the lower arm rotating shaft 63 through a lower arm expansion sleeve 67;

[0022] Furthermore, the lower arm driving wheel 64 and the lower arm driven wheel 65 form a belt transmission through the lower arm tensioning wheel 68 and a belt;

[0023] Further, the lower arm driven wheel 65 is fixedly connected to the lower part of the upper arm connecting seat 66, and is rotatably sleeved on the upper arm rotating shaft 73; the upper end surface of the upper arm connecting seat 66 is fixedly connected to the upper arm assembly 7, and is rotatably mounted on the lower arm housing 61 through the lower arm cross roller bearing 69; the lower end of the upper arm rotating shaft 73 is fixed to the lower arm bottom cover 62, and the upper end is deep into the upper arm assembly 7;

[0024] Furthermore, the upper arm assembly 7 includes an upper arm housing 71, an upper arm bottom cover 72, an upper arm driving wheel 74 and an upper arm driven wheel 75; the upper arm driving wheel 74 is fixed in the upper arm housing 71 and is rotatably connected to the upper arm rotating shaft 73 through an upper arm expansion sleeve 77;

[0025] Furthermore, the upper arm driving wheel 74 and the upper arm driven wheel 75 form a belt transmission through the upper arm tensioning wheel 78 and a belt;

[0026] Furthermore, the upper arm driven wheel 75 is fixedly connected to the lower part of the wrist connecting seat 76; the lower part of the wrist connecting seat 76 is rotatably mounted on the upper arm housing 71 through the upper arm cross roller bearing 79;

[0027] During the specific implementation of the present invention, the turret assembly 5 is the main output of the rotational force, and the lower arm shaft 63 is assembled in the turret assembly 5. Under the drive, the lower arm assembly 6 is driven to rotate as a whole, so that the lower arm driving wheel 64 and the lower arm shaft 63 produce relative rotation, and the rotation angle is transmitted through the belt and the lower arm tensioning wheel 68, and transmitted to the lower arm driven wheel 65; the upper arm assembly 7 as a whole rotates with the lower arm shaft 73 as the axis, and the lower arm driven wheel 65 is fixed to the upper arm connecting seat 66, so the rotation is transmitted to the upper arm housing 71; under the rotation action, the upper arm driving wheel 74 in the upper arm assembly 7 also rotates relative to the upper arm shaft 73; and the rotation is transmitted to the upper arm driven wheel 75 through the belt and the upper arm tensioning wheel 78, thereby driving the wrist connecting seat 76 to realize the control of the wrist assembly 8;

[0028] Among them, the gear ratio of the upper arm driven wheel 65 and the upper arm driving wheel 64 is 1:2, and the gear ratio of the lower arm driven wheel 75 and the lower arm driving wheel 74 is 1:2. When the turret assembly 5 drives the lower arm assembly 7 to rotate by an angle of θ, the upper arm connecting seat 66 rotates 2θ in the opposite direction relative to the lower arm bottom cover 62; when the upper arm assembly 7 rotates 2θ as a whole along with the upper arm connecting seat 66, the wrist connecting seat 76 rotates θ in the opposite direction relative to the upper arm assembly 7 as a whole;

[0029] Figure 4 As shown, in this embodiment, the wheel center distances of the pulley transmission assemblies in the lower arm assembly 6 and the upper arm assembly 7 are the same, ensuring that the turret assembly 5 only drives the lower arm assembly 6 and when not rotating, the motion axis of the final execution end wrist assembly 8 remains in the same straight line, and the straight line intersects with the vertical line of the rotating assembly.

[0030] By adopting the utility model, the overall structure is optimized, and a double-arm structure is adopted to realize free control of the end in a limited longitudinal space. The double arms are combined with a double-wheel belt transmission to convert the rotation angle and then reverse it again. In addition, there is no interference in the vertical space during the movement of the end. The overall space occupancy is reduced and the utilization efficiency inside the equipment is improved. If combined with an external lifting component, efficient multi-dimensional handling actions can be achieved.

[0031] The specific embodiments described herein are merely examples of the spirit of the present invention. Those skilled in the art may make various modifications or additions to the specific embodiments described or replace them in similar ways, but they will not deviate from the scope defined by the spirit of the present invention.

Claims

1. A double-arm handling structure, comprising a lower arm assembly (6) and an upper arm assembly (7), characterized in that: The lower arm assembly (6) is assembled on the turret assembly (5) through a flange, and the output end of the upper arm assembly (7) is connected to the wrist assembly (8); the lower end of the lower arm shaft (63) in the lower arm assembly (6) is assembled in the turret assembly (5), the turret assembly (5) transmits power to the lower arm assembly (6) with the lower arm shaft (63) as the axis, and the lower arm assembly (6) outputs power to the wrist connecting seat (76) in the upper arm assembly (7) with the upper arm shaft (73) as the axis.

2. A double-arm transport structure according to claim 1, characterized in that: The lower arm assembly (6) comprises a lower arm housing (61), a lower arm bottom cover (62), a lower arm driving wheel (64) and a lower arm driven wheel (65); the lower arm rotating shaft (63) is rotatably connected via the rotating shaft and penetrates into the lower arm housing (61); the lower arm driving wheel (64) is fixed in the lower arm housing (61) and is rotatably connected to the lower arm rotating shaft (63) via a lower arm expansion sleeve (67).

3. A double-arm transport structure according to claim 2, characterized in that: The lower arm driving wheel (64) and the lower arm driven wheel (65) form a wheel belt transmission through the lower arm tensioning wheel (68) and a belt.

4. A double-arm transport structure according to claim 3, characterized in that: The lower arm driven wheel (65) is fixedly connected to the lower part of the upper arm connecting seat (66) and is rotatably sleeved on the upper arm rotating shaft (73); the upper end surface of the upper arm connecting seat (66) is fixedly connected to the upper arm assembly (7) and is rotatably mounted on the lower arm housing (61) through the lower arm cross roller bearing (69); the lower end of the upper arm rotating shaft (73) is fixed to the lower arm bottom cover (62) and the upper end is inserted into the upper arm assembly (7).

5. A double-arm transport structure according to claim 4, characterized in that: The upper arm assembly (7) comprises an upper arm housing (71), an upper arm bottom cover (72), an upper arm driving wheel (74) and an upper arm driven wheel (75); the upper arm driving wheel (74) is fixed in the upper arm housing (71) and is rotationally connected to the upper arm rotating shaft (73) through an upper arm expansion sleeve (77).

6. A double-arm transport structure according to claim 5, characterized in that: The upper arm driving wheel (74) and the upper arm driven wheel (75) form a wheel-belt transmission through the upper arm tensioning wheel (78) and a belt.

7. A double-arm transport structure according to claim 5, characterized in that: The upper arm driven wheel (75) is fixedly connected to the lower part of the wrist connecting seat (76); the lower part of the wrist connecting seat (76) is rotatably mounted on the upper arm housing (71) via an upper arm cross roller bearing (79).

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