Mask conveying lifting appliance

Abstract

The utility model discloses a mask plate conveying lifting appliance which comprises a lifting rail, a conveying mechanism, a lifting mechanism and a mask plate lifting frame, the lifting rail is arranged above an exposure machine, and the lifting rail extends along a conveying route of a mask plate warehouse and the exposure machine; the conveying mechanism is arranged on the hanger rail; the lifting mechanism is connected with the conveying mechanism; the conveying mechanism is used for conveying the lifting mechanism along the conveying route; the mask hanging bracket is connected with the output end of the lifting mechanism, the lifting mechanism is used for driving the mask hanging bracket to ascend and descend, the mask hanging bracket comprises a carrying part and a locking assembly, the carrying part is used for containing a carrier for containing a mask, the locking assembly is arranged on the carrying part, and the locking assembly is used for locking and fixing the carrier. According to the mask conveying lifting appliance, the mask is conveyed in a lifting mode, the effective use area of the factory ground is increased, and the conveying efficiency of the mask is improved.

Description

Technical Field

[0001] The utility model relates to the technical field of hoisting equipment, in particular to a mask plate conveying hoist. Background Art

[0002] Masks are widely used and are needed in any field involving photolithography. Masks are graphic masters used in photolithography processes commonly used in micro-nano processing technology. They are carriers of intellectual property information such as graphic design and process technology. The mask graphic structure is formed on a transparent substrate by an opaque shading film, and the graphic information is transferred to the product substrate through an exposure process.

[0003] At present, when replacing the mask used by the exposure machine, it is necessary to use a ground intelligent forklift to transport the mask, such as Figure 1 As shown, a dedicated conveying channel 3' is provided between the mask warehouse 1' and the exposure machine 2', and the ground intelligent forklift loads the mask from the mask warehouse 1', moves along the dedicated conveying channel 3' and conveys the mask to the corresponding exposure machine. The prior art has the following defects: a dedicated conveying channel 3' needs to be provided on the ground to ensure that the ground intelligent forklift can reach each exposure machine 2', which occupies a large amount of effective use area of ​​the ground, and at the same time, the moving speed of the ground intelligent forklift is very slow, and it is easy to interfere with other objects on the dedicated conveying channel 3' when conveying the mask, resulting in low mask conveying efficiency. Utility Model Content

[0004] The utility model aims to provide a mask plate conveying hoist, which conveys the mask plate by hoisting, thereby increasing the effective use area of ​​the factory floor and the mask plate conveying efficiency.

[0005] In order to achieve the above purpose, the utility model adopts the following technical solutions:

[0006] Provided is a mask conveying hanger, comprising:

[0007] A hanging rail is arranged above the exposure machine, and the hanging rail extends along a conveying route between the mask warehouse and the exposure machine;

[0008] A conveying mechanism, arranged on the hanging rail;

[0009] A lifting mechanism connected to the conveying mechanism, the conveying mechanism being used to convey the lifting mechanism along the conveying route;

[0010] The mask hanger is connected to the output end of the lifting mechanism, and the lifting mechanism is used to drive the mask hanger to rise and fall. The mask hanger includes a transport portion for placing a carrier for holding the mask and a locking assembly arranged on the transport portion, and the locking assembly is used to lock and fix the carrier.

[0011] As a preferred solution of the mask conveying hanger, the transporting portion includes at least two fork arms arranged at intervals, and each of the fork arms is provided with a locking assembly.

[0012] As a preferred solution for the mask conveying hanger, the locking assembly includes two clamping blocks and a first driving assembly, wherein the first driving assembly is connected to the two clamping blocks and is used to drive the two clamping blocks to move closer to or away from each other to clamp or release the carrier.

[0013] As a preferred solution of the mask conveying hanger, the fork arm is provided with a mounting groove, and the mounting groove extends along the length direction of the fork arm. The first driving assembly includes:

[0014] A positive and negative thread screw is installed in the installation groove and is rotatably connected to the fork arm, and both of the two clamping blocks are threadedly connected to the positive and negative thread screw;

[0015] The first rotating driving member is arranged on the conveying part, wherein the output end of the first rotating driving member is connected to the forward and reverse threaded screw, and the first rotating driving member drives the forward and reverse threaded screw to rotate forward and reversely to make the two clamping blocks approach or move away from each other.

[0016] As a preferred solution of the mask conveying hanger, the fork arm is provided with a mounting groove, and the mounting groove extends along the length direction of the fork arm. The first driving assembly includes:

[0017] A forward and reverse threaded screw is installed in the installation groove and is rotatably connected to the fork arm;

[0018] A base, which is arranged in one-to-one correspondence with the clamping block, the base is threadedly connected to the positive and negative thread screw, and the top of the base is not higher than the upper surface of the fork arm, and the top of the base is provided with a groove;

[0019] A lifting drive member is installed in the groove, the lifting drive member is connected to the clamping block, and the lifting drive member drives the clamping block to move up and down so that the clamping block switches between a clamping position and a storage position; in the clamping position, the clamping block protrudes from the groove; in the storage position, the clamping block is placed in the groove;

[0020] The first rotating driving member is arranged on the transporting part, wherein the output end of the first rotating driving member is connected to the forward and reverse threaded screw, and the first rotating driving member drives the forward and reverse threaded screw to rotate forward and reversely to make the two bases approach or move away from each other.

[0021] As a preferred solution of the mask conveying hanger, a material detection sensor is provided on the fork arm, and a pressure sensor is provided on the clamping surface of the clamping block. The mask conveying hanger also includes a control system, and the control system is signal-connected with the material detection sensor, the pressure sensor and the first rotating drive member. The control system is used to control the first rotating drive member to drive the forward and reverse thread screws to rotate in a preset direction when the material detection sensor detects that there is the carrier on the fork arm, and to control the first rotating drive member to stop when the pressure value of the pressure sensor exceeds a preset value.

[0022] As a preferred solution of the mask conveying hanger, the clamping block includes a first clamping surface and a second clamping surface perpendicular to each other, the first clamping surface is used to abut against the side surface of the carrier, and the second clamping surface is used to abut against the upper surface of the carrier.

[0023] As a preferred solution of the mask conveying hanger, the transport portion further includes a connecting plate and a reinforcing beam, one end of all the fork arms is connected to the connecting plate and located on the same side of the connecting plate, and the reinforcing beam connects two adjacent fork arms.

[0024] As a preferred solution of the mask conveying hanger, the conveying mechanism includes:

[0025] A movable conveying seat, wherein a cavity is provided inside the movable conveying seat;

[0026] A connecting shaft is rotatably disposed through the movable conveying seat, and a middle portion of the connecting shaft is placed in the cavity;

[0027] Rotating wheels are arranged on both sides of the mobile conveying seat, the two rotating wheels are respectively connected to the two ends of the connecting shaft, and the rotating wheels are used to walk on the hanging rail;

[0028] The second driving assembly is arranged in the cavity, and the second driving assembly is connected to the middle part of the connecting shaft, and is used for driving the connecting shaft to rotate forward and reverse.

[0029] As a preferred solution of the mask conveying hanger, the second driving assembly includes a second rotating driving member, a driving gear arranged on the output end of the second rotating driving member, and a driven gear sleeved on the connecting shaft, the driven gear is meshed with the driving gear, and the second rotating driving member drives the driving gear to rotate, so that the driven gear drives the connecting shaft to rotate.

[0030] The beneficial effects of the utility model are as follows: the lifting mechanism is driven to move by the conveying mechanism, so that the mask hanger connected to the lifting mechanism can drive the mask to be transported between the mask warehouse and the exposure machine, completing the loading and unloading of the mask. Compared with using a ground intelligent forklift to transport the mask, there is no need to set up a dedicated conveying channel on the ground, which increases the effective use area of ​​the factory floor, and there are no obstacles to interfere during the conveying process, so the conveying efficiency is high. BRIEF DESCRIPTION OF THE DRAWINGS

[0031] The utility model is further described in detail below based on the drawings and embodiments.

[0032] Figure 1 This is a schematic diagram of the existing mask conveying.

[0033] Figure 2 A schematic diagram of mask conveying provided in an embodiment of the utility model.

[0034] Figure 3 This is a left view of the mask conveying hanger provided in an embodiment of the utility model.

[0035] Figure 4 A schematic structural diagram of a mask hanger provided in an embodiment of the utility model.

[0036] Figure 5 A cross-sectional view of an assembly diagram of a first drive assembly and a clamping block provided in an embodiment of the utility model Figure 1 .

[0037] Figure 6 A cross-sectional view of an assembly diagram of a first drive assembly and a clamping block provided in an embodiment of the utility model Figure 2 .

[0038] Figure 7 A cross-sectional view of an assembly diagram of a first drive assembly and a clamping block provided in an embodiment of the utility model Figure 3 .

[0039] Figure 8 A top view of the conveying mechanism provided in an embodiment of the utility model.

[0040] Figure 1 middle:

[0041] 1', mask warehouse; 2', exposure machine; 3', dedicated conveying channel;

[0042] Figures 2 to 8 middle:

[0043] 10. Mask warehouse; 20. Exposure machine; 30. Conveyor route;

[0044] 100. Hanging rail;

[0045] 200, conveying mechanism; 210, movable conveying seat; 211, cavity; 220, connecting shaft; 230, rotating wheel; 240, second driving assembly; 241, second rotating driving member; 242, driving gear; 243, driven gear;

[0046] 300, lifting mechanism;

[0047] 400, mask hanger; 410, transport unit; 411, fork arm; 4111, mounting groove; 412, connecting plate; 413, reinforcing beam; 420, locking assembly; 421, clamping block; 4211, first clamping surface; 4212, second clamping surface; 422, first driving assembly; 4221, positive and negative thread screw; 4222, first rotating driving member; 4223, base; 42231, groove; 4224, lifting driving member; 430, material detection sensor; 440, pressure sensor. DETAILED DESCRIPTION

[0048] The advantages and features of the present invention and the methods for achieving them will become apparent with reference to the embodiments described in detail below in conjunction with the accompanying drawings. However, the present invention is not limited to the embodiments disclosed below, but can be implemented in various forms. The present embodiments are provided only to complete the disclosure of the present invention and to enable those skilled in the art to fully understand the scope of the present invention, and the present invention is limited only by the scope of the claims. The same reference numerals represent the same constituent elements throughout the specification.

[0049] Hereinafter, the present invention will be described in detail with reference to the accompanying drawings.

[0050] like Figure 2 and Figure 3As shown, the mask conveying and hanging device of the embodiment of the utility model is used to convey the mask in the mask warehouse 10 to each exposure machine 20 that needs to replace the mask. The mask conveying and hanging device includes a hanging rail 100, a conveying mechanism 200, a lifting mechanism 300 and a mask hanger 400. Among them, the hanging rail 100 is arranged above the exposure machine 20, and the hanging rail 100 extends along the conveying route 30 of the mask warehouse 10 and the exposure machine 20, and the conveying route 30 includes a route from the mask warehouse 10 to all exposure machines 20. The conveying mechanism 200 is arranged on the hanging rail 100, and the lifting mechanism 300 is connected to the conveying mechanism 200, and the conveying mechanism 200 is used to convey the lifting mechanism 300 along the conveying route 30. The mask hanger 400 is connected to the output end of the lifting mechanism 300, and the lifting mechanism 300 is used to drive the mask hanger 400 to rise and fall. The mask hanger 400 includes a transporting part 410 for placing a carrier holding the mask and a locking assembly 420 arranged on the transporting part 410, and the locking assembly 420 is used to lock and fix the carrier holding the mask.

[0051] The working process of the mask conveyor is as follows:

[0052] The conveying mechanism 200 determines the conveying path according to the requirements of the corresponding exposure machine 20 (the conveying route 30 includes a plurality of conveying paths from the mask warehouse 10 to the corresponding exposure machine 20);

[0053] The conveying mechanism 200 conveys the mask hanger 400 to the mask warehouse 10 by driving the lifting mechanism 300 to move. After arriving at the mask warehouse 10, the lifting mechanism 300 controls the mask hanger 400 to descend.

[0054] Place the carrier containing the mask on the mask hanger 400 and fix the carrier by the locking assembly 420 to prevent the mask from falling during transportation;

[0055] The lifting mechanism 300 is controlled to lift the mask hanger 400. After the mask hanger 400 is lifted to the position, the conveying mechanism 200 drives the lifting mechanism 300 to move, so that the lifting mechanism 300 drives the mask hanger 400 to move to the corresponding exposure machine 20 position.

[0056] After reaching the exposure machine 20, the lifting mechanism 300 controls the mask hanger 400 to descend to unload the mask.

[0057] It is worth noting that the distance that the lifting mechanism 300 controls the mask hanger 400 to rise can be set according to actual needs, and the position should be such that the mask hanger 400 will not interfere with other equipment in the factory during the movement.

[0058] The mask conveying hoist provided in this embodiment realizes the conveyance of the mask by hoisting. Compared with the use of ground intelligent forklifts to convey the mask, there is no need to set up a dedicated conveying channel on the ground, which increases the effective use area of ​​the factory floor, and there are no obstacles to interfere during the conveying process, so the conveying efficiency is high.

[0059] Furthermore, if Figure 4 As shown, the transporting part 410 includes at least two fork arms 411 arranged at intervals, and each fork arm 411 is provided with a locking assembly 420. When loading the mask, the fork arm 411 can be inserted under the carrier, and there is no need to manually carry the carrier, which greatly reduces the labor intensity of the workers, and the automatic loading of the mask can be achieved through the cooperation of the lifting mechanism 300 and the conveying mechanism 200. A locking assembly 420 is provided on each fork arm 411, which can improve the fixing strength of the carrier, reduce the risk of the carrier falling during the conveying process, and thus improve the reliability of the mask conveying. The mask hanger 400 has a simple structure, a better effect of fixing the carrier, and cooperates with the conveying mechanism 200 and the lifting mechanism 300 to realize the automatic loading and unloading of the mask, improve the conveying efficiency of the mask, and reduce the labor cost of the mask conveying.

[0060] In this embodiment, the transporting portion 410 includes two fork arms 411 .

[0061] Optionally, in this embodiment, the transport portion 410 further includes a connecting plate 412 and a reinforcing beam 413, one end of all fork arms 411 is connected to the connecting plate 412 and is located on the same side of the connecting plate 412, and the reinforcing beam 413 connects two adjacent fork arms 411. The transport portion 410 has a simple structure and high strength.

[0062] Further, see Figure 4 The locking assembly 420 includes two clamping blocks 421 and a first driving assembly 422. The first driving assembly 422 is connected to the two clamping blocks 421. The first driving assembly 422 is used to drive the two clamping blocks 421 to move closer to or away from each other to clamp or release the carrier. The locking assembly 420 has a simple structure, is easy to control, and is suitable for carriers of different sizes and specifications, and has high universality.

[0063] Optionally, continue to see Figure 4In this embodiment, the first driving assembly 422 includes a forward and reverse threaded screw 4221 and a first rotating driving member 4222. A mounting groove 4111 is provided on the fork arm 411, and the mounting groove 4111 extends along the length direction of the fork arm 411. The forward and reverse threaded screw 4221 is installed in the mounting groove 4111 and is rotatably connected to the fork arm 411. The two clamping blocks 421 are both threadedly connected to the forward and reverse threaded screw 4221. The first rotating driving member 4222 is arranged on the conveying part 410, and the output end of the first rotating driving member 4222 is connected to the forward and reverse threaded screw 4221. The first rotating driving member 4222 drives the forward and reverse threaded screw 4221 to rotate forward and reversely to make the two clamping blocks 421 approach or move away from each other. The first driving assembly 422 has a simple structure and reliable force transmission. The automatic clamping and loosening of the carrier can be achieved by controlling the start and stop of the first rotating driving member 4222, and the control is simple.

[0064] Exemplarily, the first rotating driving member 4222 can drive the forward and reverse threaded screw 4221 to rotate forwardly to move the two clamping blocks 421 closer to each other, and can drive the forward and reverse threaded screw 4221 to rotate reversely to move the two clamping blocks 421 away from each other.

[0065] Of course, in other embodiments, the structure of the first driving component 422 may also be set to other structures according to actual needs.

[0066] In this embodiment, the first rotation driving member 4222 is disposed on the connecting plate 412 .

[0067] It is understandable that the first rotating driving member 4222 may be selected but not limited to a forward and reverse motor.

[0068] Further, see Figure 4 A material detection sensor 430 is provided on the fork arm 411, a pressure sensor 440 is provided on the clamping surface of the clamping block 421, and the mask conveying hanger also includes a control system, which is signal-connected to the material detection sensor 430, the pressure sensor 440 and the first rotating drive member 4222.

[0069] Specifically, when the control system receives information that there is a carrier on the fork arm 411 transmitted by the material detection sensor 430, it will control the first rotating drive member 4222 to drive the forward and reverse thread screw 4221 to rotate in a preset direction, so that the clamping block 421 can clamp the carrier, until the control system receives a pressure value transmitted by the pressure sensor 440 that exceeds a preset value, and then controls the first rotating drive member 4222 to stop, at which time the clamping of the carrier is completed. By setting the material detection sensor 430 and the pressure sensor 440, the loading of the carrier can be controlled intelligently, and the clamping block 421 can be prevented from applying excessive clamping force to the carrier and causing damage to the carrier.

[0070] It is worth noting that the preset direction refers to a direction that enables the two clamping blocks 421 to approach each other.

[0071] Optionally, the material detection sensor 430 may be a photoelectric sensor.

[0072] Optionally, in a possible embodiment, the material detection sensor 430 is disposed on a side of the fork arm 411 , the side being close to the other fork arm 411 and located between the two clamping blocks 421 .

[0073] Further, see Figure 4 In one possible embodiment, the clamping block 421 is not adjustable in height, that is, the clamping block 421 always protrudes from the fork arm 411 for clamping. This arrangement makes the overall height of the transport portion 410 higher. If the space under the carrier is small, the clamping block 421 will prevent the fork arm 411 from being inserted under the carrier, making it difficult to load the mask plate.

[0074] like Figure 5 and Figure 6 As shown, in other embodiments, the first drive assembly 422 may include a positive and negative threaded screw 4221, a base 4223, a lifting drive 4224 and a first rotating drive 4222. The positive and negative threaded screw 4221 is installed in the installation groove 4111 and is rotatably connected to the fork arm 411. The base 4223 is arranged in a one-to-one correspondence with the clamping block 421, the base 4223 is threadedly connected to the positive and negative threaded screw 4221, and the top of the base 4223 is not higher than the upper surface of the fork arm 411, and a groove 42231 is provided on the top of the base 4223. The lifting drive 4224 is installed in the groove 42231, and the lifting drive 4224 is connected to the clamping block 421. The lifting drive 4224 drives the clamping block 421 to rise and fall so that the clamping block 421 switches between the clamping position and the storage position. In the clamping position, the clamping block 421 protrudes from the groove 42231; in the storage position, the clamping block 421 is placed in the groove 42231. The output end of the first rotating driving member 4222 is connected to the forward and reverse threaded screw 4221, and the first rotating driving member 4222 drives the forward and reverse threaded screw 4221 to rotate forward and reversely to make the two bases 4223 approach or move away from each other, thereby achieving the two clamping blocks 421 approaching or moving away from each other.

[0075] Specifically, before the fork arm 411 is inserted under the carrier, the lifting drive 4224 controls the clamping block 421 to be in the storage position, so that the fork arm 411 can be inserted under the carrier to load the mask. After the fork arm 411 is inserted under the carrier, the lifting drive 4224 controls the clamping block 421 to be in the clamping position, so as to fix the carrier.

[0076] By providing the base 4223 and the lifting drive 4224, the height adjustment of the clamping block 421 is achieved, which prevents the clamping block 421 from interfering with the fork arm 411 in loading the carrier, and meets various user requirements. In addition, the lifting of the clamping block 421 can be automatically controlled, which is beneficial to saving labor costs and improving the transportation efficiency of the mask plate.

[0077] It is understandable that the lifting drive member 4224 can be selected but not limited to a cylinder.

[0078] Furthermore, if Figure 7 As shown, in this embodiment, the clamping block 421 includes a first clamping surface 4211 and a second clamping surface 4212 which are perpendicular to each other, the first clamping surface 4211 is used to abut against the side surface of the carrier, and the second clamping surface 4212 is used to abut against the upper surface of the carrier. Such a configuration can limit the freedom of movement of the carrier in the horizontal and vertical directions, thereby improving the fixing effect of the carrier.

[0079] Furthermore, if Figure 3 and Figure 8 As shown, the conveying mechanism 200 includes a mobile conveying seat 210, a connecting shaft 220, a rotating wheel 230 and a second driving assembly 240. A cavity 211 is provided inside the mobile conveying seat 210. The connecting shaft 220 is rotatably arranged in the mobile conveying seat 210, and the middle part of the connecting shaft 220 is placed in the cavity 211. The rotating wheels 230 are arranged on both sides of the mobile conveying seat 210, and the two rotating wheels 230 are respectively connected to the two ends of the connecting shaft 220, and the rotating wheels 230 are used to walk on the hanging rail 100. The second driving assembly 240 is arranged in the cavity 211, and the second driving assembly 240 is connected to the middle part of the connecting shaft 220, and is used to drive the connecting shaft 220 to rotate forward and reverse.

[0080] Exemplarily, the second drive assembly 240 drives the connecting shaft 220 to rotate forward, and the connecting shaft 220 drives the rotating wheel 230 to rotate, so that the movable conveying seat 210 moves from the mask warehouse 10 to the exposure machine 20; the second drive assembly 240 drives the connecting shaft 220 to rotate reversely, and the connecting shaft 220 drives the rotating wheel 230 to rotate, so that the movable conveying seat 210 moves from the exposure machine 20 to the mask warehouse 10.

[0081] The conveying mechanism 200 has a simple structure and can realize movement by controlling the second driving assembly 240. The control is simple. In addition, the friction between the rotating wheel 230 and the hanging rail 100 is small and the moving speed is fast, which further improves the conveying efficiency of the mask.

[0082] Optionally, continue to see Figure 8In this embodiment, the second driving assembly 240 includes a second rotating driving member 241, a driving gear 242 disposed on the output end of the second rotating driving member 241, and a driven gear 243 sleeved on the connecting shaft 220. The driven gear 243 is meshed with the driving gear 242. The second rotating driving member 241 drives the driving gear 242 to rotate, so that the driven gear 243 drives the connecting shaft 220 to rotate. The second driving assembly 240 has a simple structure and is easy to control.

[0083] It is understandable that the second rotation driving member 241 may be selected but not limited to a forward and reverse motor.

[0084] Optionally, the lifting mechanism 300 is a cylinder or a hydraulic cylinder.

[0085] Optionally, the output end of the lifting mechanism 300 can be connected to the mask hanger 400 by welding. A connection portion connected to the output end of the lifting mechanism 300 can also be provided on the mask hanger 400 to realize the connection between the mask hanger 400 and the lifting mechanism 300, which can be provided according to actual needs and is not specifically limited in this application.

[0086] Optionally, the structure of the connection portion may be a traditional floating joint structure.

[0087] Although the embodiments of the present invention have been described above with reference to the accompanying drawings, the present invention is not limited to the above embodiments, but can be manufactured in various forms, and those skilled in the art will understand that the present invention can be implemented in other specific forms without changing the technical spirit or basic features of the present invention. Therefore, it should be understood that the above embodiments are exemplary and not restrictive in all aspects.

Claims

1. A mask conveying hanger, characterized in that: include: A hanging rail is arranged above the exposure machine, and the hanging rail extends along a conveying route between the mask warehouse and the exposure machine; A conveying mechanism, arranged on the hanging rail; A lifting mechanism connected to the conveying mechanism, the conveying mechanism being used to convey the lifting mechanism along the conveying route; The mask hanger is connected to the output end of the lifting mechanism, and the lifting mechanism is used to drive the mask hanger to rise and fall. The mask hanger includes a transport portion for placing a carrier for holding the mask and a locking assembly arranged on the transport portion, and the locking assembly is used to lock and fix the carrier.

2. The mask conveying and hanging device according to claim 1, characterized in that: The transport portion comprises at least two fork arms arranged at intervals, and each of the fork arms is provided with a locking assembly.

3. The mask conveying and hanging device according to claim 2, characterized in that: The locking assembly includes two clamping blocks and a first driving assembly. The first driving assembly is connected to the two clamping blocks and is used to drive the two clamping blocks to move closer to or away from each other so as to clamp or release the carrier.

4. The mask conveying and hanging device according to claim 3, characterized in that: The fork arm is provided with a mounting groove, and the mounting groove extends along the length direction of the fork arm. The first driving assembly includes: A positive and negative thread screw is installed in the installation groove and is rotatably connected to the fork arm, and both of the two clamping blocks are threadedly connected to the positive and negative thread screw; The first rotating driving member is arranged on the conveying part, wherein the output end of the first rotating driving member is connected to the forward and reverse threaded screw, and the first rotating driving member drives the forward and reverse threaded screw to rotate forward and reversely to make the two clamping blocks approach or move away from each other.

5. The mask conveying and hanging device according to claim 3, characterized in that: The fork arm is provided with a mounting groove, and the mounting groove extends along the length direction of the fork arm. The first driving assembly includes: A forward and reverse threaded screw is installed in the installation groove and is rotatably connected to the fork arm; A base, which is arranged in one-to-one correspondence with the clamping block, the base is threadedly connected to the positive and negative thread screw, and the top of the base is not higher than the upper surface of the fork arm, and the top of the base is provided with a groove; A lifting drive member is installed in the groove, the lifting drive member is connected to the clamping block, and the lifting drive member drives the clamping block to move up and down so that the clamping block switches between a clamping position and a storage position; in the clamping position, the clamping block protrudes from the groove; in the storage position, the clamping block is placed in the groove; The first rotating driving member is arranged on the transporting part, wherein the output end of the first rotating driving member is connected to the forward and reverse threaded screw, and the first rotating driving member drives the forward and reverse threaded screw to rotate forward and reversely to make the two bases approach or move away from each other.

6. The mask conveying and hanging device according to claim 4 or 5, characterized in that: A material detection sensor is provided on the fork arm, and a pressure sensor is provided on the clamping surface of the clamping block. The mask conveying hanger also includes a control system, and the control system is signal-connected with the material detection sensor, the pressure sensor and the first rotating drive member. The control system is used to control the first rotating drive member to drive the forward and reverse thread screws to rotate in a preset direction when the material detection sensor detects that there is the carrier on the fork arm, and to control the first rotating drive member to stop when the pressure value of the pressure sensor exceeds a preset value.

7. The mask conveying and hanging device according to claim 3, characterized in that: The clamping block comprises a first clamping surface and a second clamping surface which are perpendicular to each other, wherein the first clamping surface is used to abut against the side surface of the carrier, and the second clamping surface is used to abut against the upper surface of the carrier.

8. The mask conveying and hanging device according to claim 2, characterized in that: The transport portion further comprises a connecting plate and a reinforcing beam, one end of all the fork arms is connected to the connecting plate and is located on the same side of the connecting plate, and the reinforcing beam connects two adjacent fork arms.

9. The mask conveying and hanging device according to claim 1, characterized in that: The conveying mechanism comprises: A movable conveying seat, wherein a cavity is provided inside the movable conveying seat; A connecting shaft is rotatably disposed on the movable conveying seat, and a middle portion of the connecting shaft is placed in the cavity; Rotating wheels are arranged on both sides of the mobile conveying seat, and the two rotating wheels are respectively connected to the two ends of the connecting shaft, and the rotating wheels are used to walk on the hanging rail; The second driving assembly is arranged in the cavity, and the second driving assembly is connected to the middle part of the connecting shaft, and is used for driving the connecting shaft to rotate forward and reverse.

10. The mask conveying and hanging device according to claim 9, characterized in that: The second driving assembly includes a second rotating driving member, a driving gear arranged on the output end of the second rotating driving member, and a driven gear sleeved on the connecting shaft, the driven gear is meshed with the driving gear, and the second rotating driving member drives the driving gear to rotate, so that the driven gear drives the connecting shaft to rotate.

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