Circulating pump for cleaning operation of washing tower

Abstract

The utility model belongs to the field of circulating pumps, and particularly relates to a circulating pump for cleaning operation of a washing tower, which comprises a base and a circulating pump main body, the circulating pump main body is provided with a water inlet pipe and a water outlet pipe, and the water inlet pipe and the water outlet pipe are provided with operating flanges and connecting pipes. The connecting pipe is provided with a mounting flange, the mounting flange is attached to the operating flange, the operating flange is provided with an assembling block, the mounting flange is provided with a fixing block, the assembling block is provided with a T-shaped groove, the T-shaped groove is provided with an inserting hole, the fixing block is provided with a traction opening, the fixing block is provided with a T-shaped inserting block, and the T-shaped inserting block is connected with the T-shaped groove in an inserted mode. According to the circulating pump for cleaning operation of the washing tower, through cooperation of the inserting rods and the T-shaped inserting blocks, the problems that an existing circulating water pump is prone to vibration in the using process, the flanges are fixed only through bolts and nuts, the stability between the flanges is poor, and even liquid leakage between the flanges is prone to occurring are solved.

Description

Technical Field

[0001] The utility model relates to the field of circulating pumps, in particular to a circulating pump for cleaning operations of a washing tower. Background Art

[0002] The semiconductor scrubber is a device specially used for chemical washing in the semiconductor manufacturing process. It constitutes one of the important steps in semiconductor manufacturing, and is mainly used to remove organic and inorganic pollutants on the surface of semiconductors to ensure the performance and reliability of the device. The working principle of the semiconductor scrubber is to contact the cleaning agent with the semiconductor surface by spraying or immersion, decompose and remove the organic and inorganic pollutants on the surface. After heating and mixing, the cleaning agent is sprayed onto the semiconductor surface. The cleaning agent chemically reacts with the pollutants to generate volatile oxides and compounds, which are finally discharged through the exhaust system. The circulation pump is one of the very important equipment in the semiconductor scrubber. The circulating water pump of the absorption liquid is used to extract the absorption liquid from the bottom of the scrubber and spray it on the filler again to enhance the contact.

[0003] However, the existing circulating pumps for semiconductor scrubbers still have the following problems during use:

[0004] The flanges of the water inlet pipe and the water outlet pipe on the existing circulating water pump are respectively fixed to the flange on the connecting pipe by bolts and nuts. Since the circulating water pump is prone to vibration during use, the stability between the flanges is poor and even easily causes leakage between the flanges. Therefore, it is very necessary to involve a circulating pump for washing tower cleaning operations to be used in the existing circulating pumps. Utility Model Content

[0005] In order to make up for the deficiencies of the prior art, the existing circulating water pump is prone to vibration during use and is only fixed by bolts and nuts between flanges, which makes the stability between the flanges poor and even easily leads to leakage between the flanges. The utility model proposes a circulating pump for washing tower cleaning operations.

[0006] The utility model adopts the following technical scheme to solve the technical problem: a circulating pump for washing tower cleaning operation, comprising a base and a circulating pump body, wherein a water inlet pipe is fixedly mounted on the circulating pump body, a water outlet pipe is fixedly mounted on the circulating pump body, one end of the water inlet pipe and the water outlet pipe are fixedly mounted with an operating flange, one side of the water inlet pipe and the water outlet pipe are both mounted with a connecting pipe, one end of the connecting pipe is fixedly mounted with a mounting flange, the mounting flange is correspondingly fitted with the operating flange, the arc surface of the operating flange is symmetrically fixedly mounted with an assembly block, the arc surface of the mounting flange is symmetrically mounted with a fixing block, the assembly block is provided with a T-slot, the inner wall of the T-slot is provided with a plurality of jacks, the side of the fixing block is provided with a traction port, the traction port is close to the mounting flange, the fixing block is fixedly mounted with a T-plug block, and the T-plug block is correspondingly plugged with the T-slot on the assembly block.

[0007] Preferably, an operating block is fixedly mounted on the surface of the fixed block, a rotating cavity is provided inside the operating block, a traction cavity is symmetrically provided on the rotating cavity, a threaded sleeve is movably mounted on the rotating cavity, one end of the threaded sleeve is movably inserted into the traction port, a guide block is fixedly mounted on one end of the threaded sleeve, a traction block is fixedly mounted on the side of the guide block, and the traction block is fixedly mounted on the arc surface of the mounting flange.

[0008] Preferably, a plurality of plug rods are fixedly mounted on the guide block, the plug rods movably penetrate the fixed block and the T-shaped plug block, and the plug rods are plugged into corresponding plug holes on the T-shaped slots.

[0009] Preferably, the surface of the threaded sleeve is symmetrically fixed with a sliding block, the sliding block is movably assembled with the traction cavity, the rotating cavity is movably assembled with a transmission screw, the transmission screw is threadedly assembled with the threaded sleeve, one end of the transmission screw movably passes through the operating block, and one end of the transmission screw is fixedly assembled with a knob.

[0010] Preferably, the operating flange and the mounting flange are equipped with a plurality of operating bolts, each of which is threadedly equipped with an operating nut, and the operating bolts are located on the outside of the water inlet pipe and the connecting pipe.

[0011] Preferably, a mounting frame is fixedly mounted on the bottom of the circulating pump body, and fastening bolts are threadedly mounted on the mounting frame and the base.

[0012] The utility model is beneficial in that:

[0013] The utility model circulating pump body is fixed to the base by installing fastening bolts on the mounting frame, and the T-shaped plug block on the fixed block slides from the T-shaped slot on the assembly block. At this time, the mounting flange is located on one side of the operating flange, and the knob is twisted to make the transmission screw rotate in the threaded sleeve rod, so that the sliding block moves on the traction cavity. At this time, the guide block drives the mounting flange on the traction block to move in the direction of the operating flange until the mounting flange and the operating flange are fitted. At the same time, the plug rod moves on the fixed block and the T-shaped plug block, and the plug rod is plugged into the socket on the T-shaped slot to limit the movement of the T-shaped plug block on the T-shaped slot. At the same time, the operating flange and the mounting flange are fixed by operating bolts and operating nuts, thereby improving the stability between the mounting flange and the operating flange. BRIEF DESCRIPTION OF THE DRAWINGS

[0014] In order to more clearly illustrate the embodiments of the utility model or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the utility model. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0015] Figure 1 It is a schematic diagram of the structure of a circulating pump used for cleaning operations of a washing tower of the utility model;

[0016] Figure 2 It is a schematic diagram of the structure of a circulating pump used for cleaning operations of a washing tower of the utility model;

[0017] Figure 3 This is a schematic diagram of the structure of the stable adjustment mechanism of the utility model;

[0018] Figure 4 It is a schematic cross-sectional structure diagram of the stabilizing adjustment mechanism of the utility model.

[0019] In the figure:

[0020] 10. Base; 11. Circulation pump body; 12. Mounting frame; 13. Fastening bolts;

[0021] 20. Water inlet pipe; 21. Water outlet pipe; 22. Operation flange; 23. Connecting pipe;

[0022] 30. Mounting flange; 31. Operating bolts; 32. Operating nuts; 33. Assembly block;

[0023] 40. fixing block; 41. T-shaped plug block; 42. T-shaped slot; 43. socket;

[0024] 50. traction port; 51. traction block; 52. operation block; 53. knob;

[0025] 60. Rotation chamber; 61. Traction chamber; 62. Threaded sleeve rod; 63. Sliding block;

[0026] 70. Transmission screw; 71. Guide block; 72. Insert rod. DETAILED DESCRIPTION

[0027] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments of the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0028] Example

[0029] like Figures 1 to 4 As shown, it is a schematic diagram of the structure of a circulating pump for a washing tower cleaning operation in a preferred embodiment of the utility model, referring to Figure 1 and Figure 3 as well as Figure 4A circulating pump for washing tower cleaning operation comprises a base 10 and a circulating pump body 11, a water inlet pipe 20 is fixedly mounted on the circulating pump body 11, a water outlet pipe 21 is fixedly mounted on the circulating pump body 11, one end of the water inlet pipe 20 and the water outlet pipe 21 are fixedly mounted with an operating flange 22, one side of the water inlet pipe 20 and the water outlet pipe 21 are both equipped with a connecting pipe 23, one end of the connecting pipe 23 is fixedly mounted with a mounting flange 30 that fits with the operating flange 22, the arc surface of the operating flange 22 is symmetrically fixedly mounted with an assembly block 33, the arc surface of the mounting flange 30 is symmetrically mounted with a fixing block 40, the assembly block 33 is provided with a T-slot 42, the inner surface of the T-slot 42 The wall is provided with a plurality of plug holes 43, the side of the fixed block 40 is provided with a traction port 50, the traction port 50 is close to the mounting flange 30, the fixed block 40 is fixedly equipped with a T-shaped plug block 41 plugged with the T-shaped slot 42 on the assembly block 33, the surface of the fixed block 40 is fixedly equipped with an operating block 52, the interior of the operating block 52 is provided with a rotating cavity 60, the rotating cavity 60 is symmetrically provided with a traction cavity 61, the rotating cavity 60 is movably equipped with a threaded sleeve rod 62, one end of the threaded sleeve rod 62 is movably penetrated into the traction port 50, one end of the threaded sleeve rod 62 is fixedly equipped with a guide block 71, the side of the guide block 71 is fixedly equipped with the traction block 51, the traction The guide block 51 is fixedly assembled with the arc surface of the mounting flange 30, and a plurality of plug rods 72 are fixedly assembled on the guide block 71. The plug rods 72 movably penetrate the fixed block 40 and the T-shaped plug block 41, and the plug rods 72 are correspondingly plugged into the plug holes 43 on the T-shaped slots 42. The surface of the threaded sleeve 62 is symmetrically fixedly assembled with a sliding block 63 that moves in the traction cavity 61, and the rotating cavity 60 is movably assembled with a transmission screw 70 that is threadedly assembled with the threaded sleeve 62, one end of the transmission screw 70 movably penetrates the operating block 52, and one end of the transmission screw 70 is fixedly assembled with a knob 53, and the T-shaped plug block 41 on the fixed block 40 is inserted from the T-shaped slot 42 on the assembly block 33. The mounting flange 30 is slidably mounted on the traction block 51, and the mounting flange 30 is located on one side of the operating flange 22. The knob 53 is twisted to rotate the transmission screw 70 in the threaded sleeve 62, so that the sliding block 63 moves on the traction cavity 61. At this time, the guide block 71 drives the mounting flange 30 on the traction block 51 to move toward the direction of the operating flange 22 until the mounting flange 30 is fitted with the operating flange 22. At the same time, the insertion rod 72 moves on the fixing block 40 and the T-shaped insertion block 41, and the insertion rod 72 is correspondingly plugged into the insertion hole 43 on the T-shaped slot 42, thereby limiting the movement of the T-shaped insertion block 41 on the T-shaped slot 42 and improving the stability between the mounting flange 30 and the operating flange 22.

[0030] Reference Figure 1 and Figure 2The operating flange 22 and the mounting flange 30 are equipped with multiple operating bolts 31, and the operating nuts 32 are threadedly assembled on the operating bolts 31. The operating bolts 31 are located on the outside of the water inlet pipe 20 and the connecting pipe 23. The bottom of the circulating pump body 11 is fixedly equipped with a mounting frame 12, and the mounting frame 12 and the base 10 are threadedly equipped with fastening bolts 13. The operating flange 22 and the mounting flange 30 are stabilized by the operating bolts 31 and the operating nuts 32, which facilitates the connection of the connecting pipe 23 with the water inlet pipe 20 and the water outlet pipe 21 respectively. The circulating pump body 11 is fixed to the base 10 by installing the fastening bolts 13 on the mounting frame 12.

[0031] Working principle: The circulating pump body 11 is fixed to the base 10 by installing the fastening bolts 13 on the mounting frame 12. The T-shaped plug 41 on the fixing block 40 slides from the T-shaped slot 42 on the assembly block 33. At this time, the mounting flange 30 is located on one side of the operating flange 22. The knob 53 is twisted to make the transmission screw 70 rotate in the threaded sleeve 62, so that the sliding block 63 moves on the traction chamber 61. At this time, the guide block 71 drives the mounting on the traction block 51. The flange 30 moves toward the operating flange 22 until the mounting flange 30 fits with the operating flange 22. At the same time, the plug rod 72 moves on the fixing block 40 and the T-shaped plug block 41, and the plug rod 72 is plugged into the corresponding plug hole 43 on the T-shaped slot 42 to limit the movement of the T-shaped plug block 41 on the T-shaped slot 42. At the same time, the operating flange 22 and the mounting flange 30 are fixed by the operating bolts 31 and the operating nuts 32 to improve the stability between the mounting flange 30 and the operating flange 22.

[0032] The above shows and describes the basic principle, main features and advantages of the utility model. Those skilled in the art should understand that the utility model is not limited by the above embodiments, and the above embodiments and descriptions are only for explaining the principle of the utility model. Without departing from the spirit and scope of the utility model, the utility model may have various changes and improvements, and these changes and improvements fall within the scope of the utility model to be protected.

Claims

1. A circulating pump for cleaning a washing tower, characterized in that: The invention comprises a base (10) and a circulation pump body (11), wherein a water inlet pipe (20) is fixedly mounted on the circulation pump body (11), a water outlet pipe (21) is fixedly mounted on the circulation pump body (11), one end of each of the water inlet pipe (20) and the water outlet pipe (21) is fixedly mounted with an operating flange (22), one side of each of the water inlet pipe (20) and the water outlet pipe (21) is equipped with a connecting pipe (23), one end of each of the connecting pipes (23) is fixedly mounted with a mounting flange (30), the mounting flange (30) is correspondingly fitted with the operating flange (22), and the operating flange (22) is fixedly mounted on the operating flange (22). The arc surface of the mounting flange (22) is symmetrically fixedly equipped with an assembly block (33), the arc surface of the mounting flange (30) is symmetrically equipped with a fixing block (40), the assembly block (33) is provided with a T-shaped slot (42), the inner wall of the T-shaped slot (42) is provided with a plurality of plug holes (43), the side of the fixing block (40) is provided with a traction port (50), the traction port (50) is close to the mounting flange (30), and the fixing block (40) is fixedly equipped with a T-shaped plug block (41), and the T-shaped plug block (41) is plugged into the T-shaped slot (42) on the mounting block (33).

2. A circulating pump for cleaning a washing tower according to claim 1, characterized in that: The surface of the fixed block (40) is fixedly equipped with an operating block (52), a rotating cavity (60) is arranged inside the operating block (52), a traction cavity (61) is symmetrically arranged on the rotating cavity (60), a threaded sleeve rod (62) is movably equipped on the rotating cavity (60), one end of the threaded sleeve rod (62) is movably inserted into the traction port (50), one end of the threaded sleeve rod (62) is fixedly equipped with a guide block (71), and the side of the guide block (71) is fixedly equipped with a traction block (51), and the traction block (51) is fixedly assembled with the arc surface of the mounting flange (30).

3. A circulating pump for cleaning a washing tower according to claim 2, characterized in that: A plurality of plug rods (72) are fixedly mounted on the guide block (71), the plug rods (72) movably penetrate the fixed block (40) and the T-shaped plug block (41), and the plug rods (72) are correspondingly plugged into the plug holes (43) on the T-shaped slots (42).

4. A circulating pump for cleaning a washing tower according to claim 3, characterized in that: The surface of the threaded sleeve (62) is symmetrically fixedly equipped with a sliding block (63), and the sliding block (63) is movably assembled with the traction chamber (61). The rotating chamber (60) is movably equipped with a transmission screw (70), and the transmission screw (70) is threadedly assembled with the threaded sleeve (62). One end of the transmission screw (70) movably penetrates the operating block (52), and one end of the transmission screw (70) is fixedly equipped with a knob (53).

5. The circulating pump for cleaning a washing tower according to claim 1, characterized in that: The operating flange (22) and the mounting flange (30) are equipped with a plurality of operating bolts (31), each of which is threadedly equipped with an operating nut (32). The operating bolts (31) are located outside the water inlet pipe (20) and the connecting pipe (23).

6. A circulating pump for cleaning a washing tower according to claim 1, characterized in that: A mounting frame (12) is fixedly mounted on the bottom of the circulating pump body (11), and fastening bolts (13) are threadedly mounted on the mounting frame (12) and the base (10).

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