Heat recovery device and heat recovery device
The heat of the heating equipment is recovered and utilized through the heat recovery device, which solves the problem of heat waste in the production of silicon carbide process, and realizes energy conservation and equipment performance improvement.
Patent Information
- Application Number
- CN202421057032.0
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-05-15
- Publication Date
- 2024-12-24
- Estimated Expiration
- 2034-05-15
AI Technical Summary
During the production process of silicon carbide, the heat generated by the heating equipment causes the performance of equipment in the workshop to degrade, affect the operation of other equipment, and it is difficult to effectively utilize and save energy.
A heat recovery device is designed, including a heat-exhausted pipeline and a return air duct. The heat from the heating equipment is recovered and utilized through a heat exchanger. The heat can be provided to other equipment needed for use, and discharged to the atmosphere through the exhausted pipeline. The environment or return air duct is sent into the return air mezzanine to achieve heat recovery and energy conservation.
It effectively reduces the temperature rise of the heating equipment during operation, avoids the impact on other equipment, and saves energy and improves production efficiency through heat recovery.
Smart Images

Figure CN222230762U_ABST
Abstract
Description
Technical Field
[0001] The present application relates to the technical field of temperature control of workshop equipment, and in particular to a heat recovery device and heat recovery and utilization equipment. Background Art
[0002] Silicon carbide (SiC), as an emerging third-generation semiconductor core material, has excellent properties such as wide bandgap, high critical breakdown electric field strength, high electron mobility, good radiation resistance and chemical stability. This makes it an important substrate wafer material with wide applications, showing good application prospects in the fields of aviation devices, new energy vehicles, rail transportation and household appliances.
[0003] During the silicon carbide process production in the workshop, some machines (equipment) will generate a lot of heat during operation, thus affecting the performance of the equipment in the workshop. Utility Model Content
[0004] The purpose of the present application is to provide a heat recovery device and a heat recovery and utilization device, which can recycle the heat generated by the operation of the heating device, save energy, alleviate the temperature rise phenomenon, and try to avoid affecting the operation of other equipment to save energy.
[0005] The embodiments of the present application can be implemented as follows:
[0006] In a first aspect, the utility model provides a heat recovery device, including a heat exhaust pipeline, an exhaust pipeline and a return air pipeline;
[0007] The heat exhaust pipeline includes a heat exhaust pipe and a heat exchanger arranged in the heat exhaust pipe, the air inlet end of the heat exhaust pipe is used to connect with the exhaust port of the heating equipment in the workshop, and the air outlet end of the heat exhaust pipe is connected to the air inlet end of the exhaust pipe and the air inlet end of the return air pipe;
[0008] The air outlet end of the exhaust pipe is connected to the external atmospheric environment, and the air outlet end of the return air pipe is used to connect to the supply and return air interlayer of the workshop.
[0009] In an optional embodiment, the heat exhaust pipeline further includes a first air valve disposed on the heat exhaust pipeline, and the first air valve can open or close the heat exhaust pipeline.
[0010] In an optional embodiment, the heat exhaust pipeline also includes an exhaust fan arranged in the heat exhaust pipe, the negative pressure side of the exhaust fan corresponds to the air inlet end of the heat exhaust pipe, and the positive pressure side of the exhaust fan corresponds to the air outlet end of the heat exhaust pipe.
[0011] In an optional implementation, either the exhaust pipe or the return air pipe can be connected.
[0012] In an optional embodiment, the heat exhaust pipeline also includes a temperature sensor arranged in the heat exhaust pipe, and the temperature sensor is located on the downstream side of the heat exchanger. The exhaust pipeline and the return air pipeline can be selectively connected according to the detection result of the temperature sensor.
[0013] In an optional embodiment, the exhaust pipeline includes an exhaust pipe and a second air valve arranged on the exhaust pipe, the air inlet end of the exhaust pipe is connected to the air outlet end of the hot exhaust pipe, the air outlet end of the exhaust pipe is connected to the external atmospheric environment, and the second air valve can open or close the exhaust pipe.
[0014] In an optional embodiment, the return air pipeline includes a return air duct and a third air valve arranged on the return air duct, the air inlet end of the return air duct is connected to the air outlet end of the heat exhaust duct, the air outlet end of the return air duct is used to connect the supply and return air interlayer, and the third air valve can open or close the return air duct.
[0015] In an optional embodiment, the heat exchanger includes a wind box and a heat exchange coil arranged in the wind box.
[0016] In an optional embodiment, the heat exhaust duct also has an air inlet for communicating with the supply and return air interlayer of the workshop.
[0017] In a second aspect, the utility model provides a heat recovery and utilization device, comprising a circulation pipeline and the heat recovery device described in any one of the aforementioned embodiments, the circulation pipeline comprising a water supply pipeline, a return water pipeline and a delivery pump arranged on the water supply pipeline or the return water pipeline, the water inlet end of the water supply pipeline is used to be connected to the water outlet of the heat taking device, the water outlet end of the water supply pipeline is connected to the water inlet of the heat exchanger, the water inlet end of the return water pipeline is connected to the water outlet of the heat exchanger, and the water outlet end of the return water pipeline is used to be connected to the water inlet of the heat taking device.
[0018] Compared with the prior art, the beneficial effects of the embodiments of the present application include, for example:
[0019] The heat generated by the heating equipment in the workshop during operation is introduced into the heat exchanger through the heat exhaust pipe. The heat exchanger can be connected to other equipment that needs heat, so that the heat exchanger can absorb part of the heat of the air passing through itself, thereby reducing the air temperature in the heat exhaust pipe downstream of the heat exchanger. At the same time, the heat absorbed by the heat exchanger can be provided to other heat-taking equipment that needs heat, such as pure water station water supply heating, fresh air air conditioning reheating coil, etc., so as to achieve heat recovery and utilization, and the temperature rise phenomenon during the operation of the heating equipment can also be alleviated, so as to avoid affecting the operation of other equipment as much as possible. In addition, the air in the heat exhaust pipe that has absorbed heat through the heat exchanger can be discharged to the atmosphere outside the workshop through the exhaust pipe and / or sent into the supply and return air interlayer through the return air pipe to enter the workshop, saving energy. BRIEF DESCRIPTION OF THE DRAWINGS
[0020] In order to more clearly illustrate the specific implementation methods of the present application or the technical solutions in the prior art, the drawings required for use in the specific implementation methods or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are some implementation methods of the present application. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying any creative work.
[0021] Figure 1 This is a schematic diagram of the use principle of the heat recovery equipment in the embodiment of the present application.
[0022] Icons: 100-heat recovery device; 110-heat exhaust pipeline; 111-heat exhaust pipe; 112-heat exchanger; 113-first air valve; 114-exhaust fan; 115-air inlet; 116-temperature sensor; 120-exhaust pipeline; 121-exhaust pipeline; 122-second air valve; 130-return air pipeline; 131-return air pipeline; 132-third air valve; 200-circulation pipeline; 210-water pipeline; 220-return water pipeline; 230-delivery pump; 300-heat extraction equipment; 400-fan filter unit. DETAILED DESCRIPTION
[0023] In order to make the purpose, technical solution and advantages of the embodiments of the present application clearer, the technical solution in the embodiments of the present application will be clearly and completely described below in conjunction with the drawings in the embodiments of the present application. Obviously, the described embodiments are part of the embodiments of the present application, rather than all the embodiments. The components of the embodiments of the present application described and shown in the drawings here can be arranged and designed in various different configurations.
[0024] Therefore, the following detailed description of the embodiments of the present application provided in the accompanying drawings is not intended to limit the scope of the present application for which protection is sought, but merely represents selected embodiments of the present application. Based on the embodiments in the present application, all other embodiments obtained by ordinary technicians in the field without creative work are within the scope of protection of the present application.
[0025] It should be noted that similar reference numerals and letters denote similar items in the following drawings, and therefore, once an item is defined in one drawing, further definition and explanation thereof is not required in subsequent drawings.
[0026] In the description of the present application, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc. indicate positions or positional relationships based on the positions or positional relationships shown in the accompanying drawings, or the positions or positional relationships in which the product of the application is usually placed when in use. They are only for the convenience of describing the present application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific position, be constructed and operated in a specific position, and therefore cannot be understood as a limitation on the present application. In addition, the terms "first", "second", "third", etc. are only used to distinguish the description, and cannot be understood as indicating or implying relative importance.
[0027] In addition, the terms "horizontal", "vertical", "overhanging" and the like do not mean that the components are required to be absolutely horizontal or overhanging, but can be slightly tilted. For example, "horizontal" only means that its direction is more horizontal than "vertical", and does not mean that the structure must be completely horizontal, but can be slightly tilted.
[0028] In the description of this application, it should also be noted that, unless otherwise clearly specified and limited, the terms "set", "install", "connect", and "connect" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or it can be indirectly connected through an intermediate medium, or it can be the internal communication of two elements. For ordinary technicians in this field, the specific meanings of the above terms in this application can be understood according to specific circumstances.
[0029] In conjunction with the accompanying drawings, some embodiments of the present application are described in detail below. In the absence of conflict, the following embodiments and features in the embodiments can be combined with each other.
[0030] refer to Figure 1The embodiment of the present application discloses a heat recovery device, which is mainly used in a silicon carbide production workshop. The silicon carbide production workshop is formed with a supply and return air interlayer. The air in the supply and return air interlayer can be transported to the workshop through a FFU (Fan Filter Unit) fan filter unit 400.
[0031] The heat recovery equipment includes a circulation pipeline 200 and a heat recovery device 100, and the heat recovery device 100 includes a heat exhaust pipeline 110, an exhaust pipeline 120 and a return air pipeline 130;
[0032] The heat exhaust pipe 110 includes a heat exhaust pipe 111 and a heat exchanger 112 arranged in the heat exhaust pipe 111. The air inlet end of the heat exhaust pipe 111 is used to connect with the exhaust outlet of the heating equipment in the workshop, and the air outlet end of the heat exhaust pipe 111 is connected to the air inlet end of the exhaust pipe 120 and the air inlet end of the return air pipe 130; the air outlet end of the exhaust pipe 120 is connected to the external atmospheric environment, and the air outlet end of the return air pipe 130 is used to connect to the supply and return air mezzanine of the workshop.
[0033] In this way, the heat generated by the heating equipment in the workshop during operation is introduced into the heat exchanger 112 through the heat exhaust pipe 111. The heat exchanger 112 can be connected to other equipment that needs heat, so that the heat exchanger 112 can absorb part of the heat of the air passing through itself, thereby reducing the air temperature in the heat exhaust pipe 111 downstream of the heat exchanger 112. At the same time, the heat absorbed by the heat exchanger 112 can be provided to other heat-taking equipment 300 that needs heat, such as pure water station water supply heating to increase water production rate, fresh air air conditioning reheating preheating coil to improve humidification efficiency, etc., thereby realizing heat recovery and utilization, and the temperature rise phenomenon during the operation of the heating equipment can also be alleviated, so as to minimize the impact on the operation of other equipment. In addition, the air in the heat exhaust pipe 111 that has absorbed heat through the heat exchanger 112 can be discharged to the atmosphere outside the workshop through the exhaust pipe 120 and / or sent to the supply and return air interlayer through the return air pipe 130 to enter the workshop, saving energy.
[0034] Specifically, in order to utilize the heat in the heat exchanger 112, the heat recovery and utilization equipment also includes a circulation pipeline 200, which includes a water supply pipeline 210, a return water pipeline 220 and a delivery pump 230 arranged on the water supply pipeline 210 or the return water pipeline 220. The water inlet end of the water supply pipeline 210 is used to connect with the water outlet of the heat extraction equipment 300, the water outlet end of the water supply pipeline 210 is connected to the water inlet of the heat exchanger 112, the water inlet end of the return water pipeline 220 is connected to the water outlet of the heat exchanger 112, and the water outlet end of the return water pipeline 220 is used to connect with the water inlet of the heat extraction equipment 300. In this way, when the delivery pump 230 is running, the water can circulate between the heat exchanger 112, the water delivery pipeline 210, the heat extraction equipment 300 and the return water pipeline, so that the air heat in the heat exhaust pipe 111 absorbed by the heat exchanger 112 can be provided to other heat extraction equipment 300 for use, thereby reducing the load power consumption after water supply heating in the pure water station and preheating of the fresh air air conditioner, and saving energy.
[0035] The heat exchanger 112 includes a bellows and a heat exchange coil disposed in the bellows. The bellows is mainly used to facilitate the installation and fixation of the heat exchange coil in the heat exhaust pipe 111.
[0036] The heat exhaust pipeline 110 also includes a first air valve 113 disposed on the heat exhaust pipeline 111. The first air valve 113 can open or close the heat exhaust pipeline 111, so that it is possible to choose whether to recover the heat of the heating device according to actual needs.
[0037] In addition, the heat exhaust pipe 110 also includes an exhaust fan 114 arranged in the heat exhaust pipe 111. The negative pressure side of the exhaust fan 114 corresponds to the air inlet end of the heat exhaust pipe 111, and the positive pressure side of the exhaust fan 114 corresponds to the air outlet end of the heat exhaust pipe 111. In this way, when the exhaust fan 114 is running, the flow speed of the air in the heat exhaust pipe 111 can be accelerated, and the heat generated when the heating equipment is running can be quickly taken away.
[0038] Optionally, the heat exhaust duct 111 also has an air inlet 115 for connecting to the supply and return air layer of the workshop, and there is a return air port between the supply and return air layer and the inside of the workshop, so that when the first air valve 113 is opened and the exhaust fan 114 is running, clean air in the workshop can be extracted to take away the heat generated by the heating equipment. After being cooled by the heat exchanger 112, whether the air is directly discharged into the atmospheric environment outside the workshop or sent back to the supply and return air layer and then enters the workshop, the cleanliness of the air can be guaranteed to be free of pollutants.
[0039] In this embodiment, the exhaust pipe 120 and the return air pipe 130 can be selectively connected, that is, when the exhaust pipe 121 is connected, the return air pipe 130 is blocked, and when the exhaust pipe 120 is blocked, the return air pipe 130 is connected, thereby selecting whether the air is directly discharged to the atmosphere or sent to the return air layer according to the temperature of the air after absorbing part of the heat through the heat exchanger 112.
[0040] Of course, in some embodiments, the exhaust duct 120 and the return air duct 130 may also be connected at the same time, and the specific operation can be flexibly performed according to actual needs.
[0041] Specifically, in this embodiment, the heat exhaust pipe 110 further includes a temperature sensor 116 disposed on the heat exhaust pipe 111, and the temperature sensor 116 is located at the downstream side of the heat exchanger 112. The exhaust pipe 120 and the return air pipe 130 can be selectively connected according to the detection result of the temperature sensor 116. For example, if the temperature sensor 116 detects that the air temperature at the downstream side of the heat exchanger 112 exceeds a preset temperature value (for example, 26° C.), the exhaust pipe 120 is connected and the return air pipe 130 is cut off; if it does not exceed the preset temperature value, the exhaust pipe 120 is cut off and the return air pipe 130 is connected.
[0042] In detail, the exhaust pipe 120 includes an exhaust pipe 121 and a second air valve 122 arranged on the exhaust pipe 121. The air inlet end of the exhaust pipe 121 is connected to the air outlet end of the heat exhaust pipe 111. The air outlet end of the exhaust pipe 121 is connected to the external atmospheric environment. The second air valve 122 can open or close the exhaust pipe 121. The return air pipe 130 includes a return air pipe 131 and a third air valve 132 arranged on the return air pipe 131. The air inlet end of the return air pipe 131 is connected to the air outlet end of the heat exhaust pipe 111. The air outlet end of the return air pipe 131 is used to connect the supply and return air interlayer. The third air valve 132 can open or close the return air pipe 131. In this way, the first air valve 113 or the second air valve 122 can be selected to open according to actual needs to make the corresponding exhaust pipe 121 or return air pipe 131 open. For example, the temperature on the downstream side of the heat exchanger 112 is detected by the temperature sensor 116. If the temperature exceeds the preset temperature value, the second air valve 122 is opened and the third air valve 132 is closed to discharge the air outdoors. If the temperature is lower than the preset temperature value, the third air valve 132 is opened and the second air valve 122 is closed to recover the air to the return air layer.
[0043] In summary, the embodiment of the present application discloses a heat recovery device 100 and a heat recovery and utilization device, which introduces the heat generated by the heating equipment in the workshop during operation into the heat exchanger 112 through the heat exhaust pipe 111. The heat exchanger 112 can be connected to other equipment that needs heat, so that part of the heat of the air passing through itself can be absorbed by the heat exchanger 112, thereby reducing the air temperature in the heat exhaust pipe 111 downstream of the heat exchanger 112. At the same time, the heat absorbed by the heat exchanger 112 can be provided to other heat-taking equipment 300 that needs heat, such as pure water station water supply heating, fresh air air conditioning reheating preheating coil, etc., thereby realizing heat recovery and utilization, and the temperature rise phenomenon during the operation of the heating equipment can also be alleviated, thereby minimizing the impact on the operation of other equipment. In addition, the air in the heat exhaust pipe 111 that has absorbed heat through the heat exchanger 112 can be discharged to the atmosphere outside the workshop through the exhaust pipe 120 and / or sent to the return air interlayer through the return air pipe 130 to enter the workshop, saving energy.
[0044] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present application, rather than to limit it. Although the present application has been described in detail with reference to the aforementioned embodiments, those skilled in the art should understand that they can still modify the technical solutions described in the aforementioned embodiments, or replace some or all of the technical features therein with equivalents. However, these modifications or replacements do not cause the essence of the corresponding technical solutions to deviate from the scope of the technical solutions of the embodiments of the present application.
Claims
1. A heat recovery device (100), characterized in that: It includes a heat exhaust pipeline (110), an exhaust pipeline (120) and a return air pipeline (130); The heat exhaust pipeline (110) comprises a heat exhaust pipeline (111) and a heat exchanger (112) arranged in the heat exhaust pipeline (111); the air inlet end of the heat exhaust pipeline (111) is used to be connected to the air outlet of the heat-generating equipment in the workshop; the air outlet end of the heat exhaust pipeline (111) is connected to the air inlet end of the exhaust pipeline (120) and the air inlet end of the return air pipeline (130); The air outlet end of the exhaust pipe (120) is connected to the external atmospheric environment, and the air outlet end of the return air pipe (130) is used to connect to the supply and return air interlayer of the workshop.
2. The heat recovery device (100) according to claim 1, characterized in that: The heat exhaust pipeline (110) further comprises a first air valve (113) arranged on the heat exhaust pipeline (111), and the first air valve (113) can open or close the heat exhaust pipeline (111).
3. The heat recovery device (100) according to claim 1, characterized in that: The heat exhaust pipeline (110) further comprises an exhaust fan (114) arranged in the heat exhaust pipeline (111), wherein the negative pressure side of the exhaust fan (114) corresponds to the air inlet end of the heat exhaust pipeline (111), and the positive pressure side of the exhaust fan (114) corresponds to the air outlet end of the heat exhaust pipeline (111).
4. The heat recovery device (100) according to claim 1, characterized in that: The exhaust pipe (120) and the return air pipe (130) can be selectively connected.
5. The heat recovery device (100) according to claim 4, characterized in that: The heat exhaust pipe (110) further comprises a temperature sensor (116) arranged on the heat exhaust pipe (111); the temperature sensor (116) is located on the downstream side of the heat exchanger (112); and the exhaust pipe (120) and the return air pipe (130) can be selectively connected according to the detection result of the temperature sensor (116).
6. The heat recovery device (100) according to any one of claims 1 to 5, characterized in that: The exhaust pipeline (120) comprises an exhaust pipe (121) and a second air valve (122) arranged on the exhaust pipe (121); the air inlet end of the exhaust pipe (121) is connected to the air outlet end of the hot exhaust pipe (111); the air outlet end of the exhaust pipe (121) is connected to the external atmospheric environment; and the second air valve (122) can open or close the exhaust pipe (121).
7. The heat recovery device (100) according to any one of claims 1 to 5, characterized in that: The return air pipeline (130) comprises a return air duct (131) and a third air valve (132) arranged on the return air duct (131); the air inlet end of the return air duct (131) is connected to the air outlet end of the heat exhaust duct (111); the air outlet end of the return air duct (131) is used to connect to the supply and return air interlayer; the third air valve (132) can open or close the return air duct (131).
8. The heat recovery device (100) according to claim 1, characterized in that: The heat exchanger (112) comprises a wind box and a heat exchange coil arranged in the wind box.
9. The heat recovery device (100) according to claim 1, characterized in that: The heat exhaust pipe (111) also has an air inlet (115) for communicating with the supply and return air interlayer of the workshop.
10. A heat recovery device, characterized in that: The invention comprises a circulation pipeline (200) and a heat recovery device (100) according to any one of claims 1 to 9, wherein the circulation pipeline (200) comprises a water supply pipeline (210), a return water pipeline (220) and a delivery pump (230) arranged on the water supply pipeline (210) or the return water pipeline (220), the water inlet end of the water supply pipeline (210) is used to be connected to the water outlet of a heat extraction device (300), the water outlet end of the water supply pipeline (210) is connected to the water inlet of the heat exchanger (112), the water inlet end of the return water pipeline (220) is connected to the water outlet of the heat exchanger (112), and the water outlet end of the return water pipeline (220) is used to be connected to the water inlet of the heat extraction device (300).
