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Selective laser melting forming device and method of medical magnesium alloy metal part

ActiveCN101856724ASatisfies complex spatial shape requirements with high degrees of freedomMeet complex space shape requirementsSelective laser meltingOptoelectronics
The invention provides a selective laser melting forming device of a medical magnesium alloy metal part, which comprises a control device, a powder delivering and spreading device, a laser transmission mechanism, an air purification device and a closed forming chamber, wherein the powder delivering and spreading device comprises a hopper and powder spreading brushes arranged on two sides below the hopper, the upper part of the hopper is arranged in a way of corresponding to a feeding opening on the upper part of the forming chamber, and the lower parts of the powder spreading brushes horizontally correspond to the upper surface of a forming cylinder; the laser transmission mechanism is arranged outside and above the forming chamber and is arranged in a way of corresponding to the forming cylinder; the side wall of the forming chamber is provided with an air inlet and an air outlet, and the air purification device is connected with the air inlet and the air outlet respectively; and the control device is connected with the powder delivering and spreading device, the laser transmission mechanism, the forming cylinder and the air purification device respectively. The invention also provides a selective laser melting forming method of the medical magnesium alloy metal part. The device and the method can manufacture parts which have complex shapes required in the medical field directly, and have the advantages of high forming efficiency and the like.
Owner:SOUTH CHINA UNIV OF TECH

Plasma ashing apparatus and endpoint detection process

InactiveUS20040235299A1Enhance photoresist removalFlexible process platformElectric discharge tubesSemiconductor/solid-state device manufacturingNitrogen plasmaCombustion chamber
A plasma ashing apparatus for removing organic matter from a substrate including a low k dielectric, comprising a first gas source; a plasma generating component in fluid communication with the first gas source; a process chamber in fluid communication with the plasma generating component; an exhaust conduit in fluid communication with the process chamber; wherein the exhaust conduit comprises an inlet for a second gas source and an afterburner assembly coupled to the exhaust conduit, wherein the inlet is disposed intermediate to the process chamber and an afterburner assembly, and wherein the afterburner assembly comprises means for generating a plasma within the exhaust conduit with or without introduction of a gas from the second gas source; and an optical emission spectroscopy device coupled to the exhaust conduit comprising collection optics focused within a plasma discharge region of the afterburner assembly. An endpoint detection process for an oxygen free and nitrogen free plasma process comprises monitoring an optical emission signal of an afterburner excited species in an exhaust conduit of the plasma asher apparatus. The process and apparatus can be used with carbon and/or hydrogen containing low k dielectric materials.
Owner:LAM RES CORP
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