Quartz flower basket with insertion rod

Abstract

The quartz flower basket comprises a flower basket body and the inserting rod, the flower basket body comprises a base, two first stand columns, two second stand columns, a top connecting piece and a handle, and the base is provided with a first inserting hole; the base is connected with one ends of the first column and the second column. The other ends of the first upright post and the second upright post are connected with a top connecting piece; the top connecting piece comprises a second inserting hole; the top connecting piece is connected with a handle; the first stand column is provided with a plurality of first containing grooves, the second stand column is provided with a plurality of second containing grooves, the first containing grooves and the second containing grooves are arranged in groups, and the angle between the center connecting line of the first containing grooves and the second containing grooves and the plane of the base is 4-6 degrees. The wafer is horizontally placed through the first placing groove and the second placing groove of the quartz flower basket, so that the problem that the wafer is corroded and the inside of the wafer is not uniform is solved. And the insertion rods, the first insertion holes and the second insertion holes are arranged to block the edges of the wafers, so that the wafers are further prevented from slipping off.

Description

Technical Field

[0001] The utility model relates to a quartz flower basket, in particular to a quartz flower basket with an inserting rod. Background Art

[0002] The wet etching process uses a quartz device that carries wafers in a solution for processing. It is usually called a "quartz basket". Currently, the wafers are placed in the basket perpendicular to the liquid surface.

[0003] When performing the aqua regia wet etching process, since the aqua regia is heated by using an electric heater to heat the bottom outer wall of the quartz cylinder containing the aqua regia solution, this will cause the temperature and state of different liquid levels in the quartz cylinder to be different. Aqua regia is also very volatile, which will cause slight differences in concentration at different liquid depths. In this way, the wafer is placed vertically in a flower basket for placing wafers and then immersed in the etching solution. Due to the difference in concentration and temperature, after the wafer is placed vertically, it is found under a microscope that there are slight differences in the etching effect at different liquid level heights. Summary of the invention

[0004] The present application provides a quartz flower basket with a plug rod, through which a wafer is horizontally placed in a first placement groove and a second placement groove of the quartz flower basket, thereby improving the problem of unevenness in the wafer due to corrosion. The plug rod and the first and second plug holes are arranged to block the edge of the wafer to further ensure that the wafer will not slip.

[0005] The present application provides the following technical solution: a quartz flower basket with an insertion rod, comprising a flower basket body and an insertion rod, wherein the flower basket body comprises a base, two first columns, two second columns, a top connector and a handle, wherein the base has a first socket; the base connects one end of the first column and the second column; the other ends of the first column and the second column are connected to the top connector, wherein the top connector comprises a second socket; the top connector is connected to the handle; the first column has a plurality of first placement grooves, the second column has a plurality of second placement grooves, the first placement grooves and the second placement grooves are arranged in groups, the angle between the center line of the first placement groove and the second placement groove and the plane of the base is 4-6°, the insertion rod is inserted into and installed in the first socket and the second socket, and the cross-sectional shape of the insertion rod is the same as the cross-sectional shape of the first socket and the second socket.

[0006] Furthermore, the first plug hole and the second plug hole are on a straight line, so that the insertion rod is inserted into the first plug hole and the second plug hole along a straight line.

[0007] Further, the cross-sectional shape of the plug rod is circular, square or triangular. In some embodiments, the cross-sectional shape of the plug rod can also be other common or uncommon shapes, including rectangle, ellipse, trapezoid, regular polygon, etc.

[0008] The quartz flower basket of the present application is made of quartz.

[0009] The beneficial effects of this application are:

[0010] (1) Placing the wafer horizontally can make all points of the wafer basically on the same horizontal plane, which improves the uniformity of each point of the product. When the number of wafers to be processed is small, the amount of etching liquid can be reduced. Because in the wet process, the etching liquid must immerse the entire wafer in it, the height of the wafer when placed horizontally is much lower than when placed vertically. In this way, the amount of etching liquid used to immerse the horizontally placed wafer will be greatly reduced. With less etching liquid, the heating time is also reduced, which can also improve production efficiency.

[0011] (2) The wafer can be firmly placed in the quartz flower basket by means of the first placement groove and the second placement groove arranged in groups. By setting the angle of the center line of the first placement groove and the second placement groove to 4-6°, the wafer is slightly lifted upward. Under the action of gravity, a force is generated to support the first placement groove and the second placement groove, making it difficult for the wafer to slip out of the first placement groove and the second placement groove.

[0012] (3) The arrangement of the insertion rod and the first and second insertion holes blocks the wafer edge, further ensuring that the wafer will not slip off. At the same time, the insertion rod and the first and second insertion holes are firmly installed. BRIEF DESCRIPTION OF THE DRAWINGS

[0013] Figure 1 It is a front view of a flower basket body of Example 1 of a quartz flower basket of the utility model;

[0014] Figure 2 It is a side view of a flower basket body of Example 1 of a quartz flower basket of the utility model;

[0015] Figure 3 It is a top view of a flower basket body of Example 1 of a quartz flower basket of the utility model;

[0016] Figure 4 It is an enlarged view of the A part of the flower basket body of the embodiment 1 of the quartz flower basket of the utility model;

[0017] Figure 5 It is a front view of an insertion rod of Example 1 of a quartz flower basket of the utility model;

[0018] Figure 6 It is an assembly diagram of Embodiment 1 of a quartz flower basket of the utility model;

[0019] Figure 7 This is a diagram of the use state of Example 1 of a quartz flower basket of the utility model;

[0020] Figure 8It is a top view of a flower basket body of Example 2 of a quartz flower basket of the utility model;

[0021] Fig. 9 It is a top view of a flower basket body of Example 3 of a quartz flower basket of the utility model;

[0022] Among them, the base 1, the first socket 1-1, the first column 2, the first placement groove 2-1, the second column 3, the second placement groove 3-1, the top connecting piece 4, the second socket 4-1, the handle 5, and the insertion rod 6. DETAILED DESCRIPTION

[0023] In order to further explain the technical means and effects adopted by the present invention to achieve the predetermined purpose of the utility model, the specific implementation method, structure, characteristics and effects of the present invention are described in detail below in combination with the accompanying drawings and preferred embodiments.

[0024] The present application uses the first placement groove and the second placement groove of the quartz flower basket to horizontally place the wafer, thereby improving the problem of uneven etching of the wafer.

[0025] Example 1

[0026] like Figure 1-7 A quartz flower basket with an insertion rod comprises a flower basket body and an insertion rod 6. The flower basket body comprises a base 1, two first columns 2, two second columns 3, a top connector 4 and a handle 5. The base 1 has a first plug hole 1-1; the base 1 connects one end of the first column 2 and the second column 3; the other ends of the first column 2 and the second column 3 are connected to the top connector 4, and the top connector 4 includes a second plug hole 4-1; the top connector is connected to the handle 5; the first column 2 has a plurality of first placement grooves 2-1, and the second column 3 has a plurality of second placement grooves 3-1. The first placement grooves 2-1 and the second placement grooves 3-1 are arranged in groups, and the angle between the center line of the first placement groove 2-1 and the second placement groove 3-1 and the plane of the base 1 is 4°. The insertion rod 6 is inserted and installed in the first plug hole 1-1 and the second plug hole 4-1. In this embodiment, the first plug hole 1-1 and the second plug hole 4-1 are on a straight line. Thus, the insertion rod is inserted into the first plug hole and the second plug hole along a straight line.

[0027] In this embodiment, the cross-sectional shape of the rod 6 is the same as that of the first and second sockets 1-1 and 4-1, both of which are circular. The first placement groove 2-1 and the second placement groove 3-1 are arranged in groups, so that the wafer can be firmly placed in the quartz flower basket. The angle of the center line of the first placement groove 2-1 and the second placement groove 3-1 is set to 4°, and the wafer is slightly lifted upward. Under the action of gravity, a force is generated to support the first and second placement grooves 2-1 and 3-1, so that the wafer is not easy to slide out of the first and second placement grooves 2-1 and 3-1. In addition, the arrangement of the rod 6 and the first and second sockets 1-1 and 4-1 blocks the edge of the wafer to further ensure that the wafer will not slide off.

[0028] Example 2

[0029] like Figure 8 , this embodiment is basically the same as the embodiment 1, except that the cross-sectional shape of the rod 6 and the cross-sectional shape of the first socket 1-1 and the second socket 4-1 are square, and the angle of wafer placement. A quartz flower basket with a rod includes a flower basket body and a rod 6, the flower basket body includes a base 1, two first columns 2, two second columns 3, a top connector 4 and a handle 5, the base 1 has a first socket 1-1; the base 1 connects one end of the first column 2 and the second column 3; the other ends of the first column 2 and the second column 3 are connected to the top connector 4, the top connector 4 includes a second socket 4-1; the top connector is connected to the handle 5; the first column 2 has a plurality of first placement grooves 2-1, the second column 3 has a plurality of second placement grooves 3-1, the first placement grooves 2-1 and the second placement grooves 3-1 are arranged in groups, the center line of the first placement groove 2-1 and the second placement groove 3-1 is at an angle of 5° with the plane of the base 1, and the rod 6 is inserted and installed in the first socket 1-1 and the second socket 4-1. In this embodiment, the first plug hole 1-1 and the second plug hole 4-1 are in a straight line, so that the plug rod is inserted into the first plug hole and the second plug hole along a straight line, and the plug rod 6 is firmly installed with the first plug hole 1-1 and the second plug hole 4-1.

[0030] In this embodiment, the cross-sectional shape of the rod 6 is the same as that of the first and second sockets 1-1 and 4-1, both of which are square. The wafer can be firmly placed in the quartz flower basket by the first placement groove 2-1 and the second placement groove 3-1 arranged in groups. The angle of the center line of the first and second placement grooves 2-1 and 3-1 is set to 4°, and the wafer is slightly lifted upward. Under the action of gravity, a force is generated to support the first and second placement grooves 2-1 and 3-1, so that the wafer is not easy to slide out of the first and second placement grooves 2-1 and 3-1. In addition, the arrangement of the rod 6 and the first and second sockets 1-1 and 4-1 blocks the edge of the wafer to further ensure that the wafer will not slide off, and the rod 6 and the first and second sockets 1-1 and 4-1 are firmly installed.

[0031] Example 3

[0032] like Fig. 9 , this embodiment is basically the same as the embodiment 1, except that the cross-sectional shape of the rod 6 and the cross-sectional shape of the first socket 1-1 and the second socket 4-1 are triangular, and the angle of wafer placement. A quartz flower basket with a rod includes a flower basket body and a rod 6, the flower basket body includes a base 1, two first columns 2, two second columns 3, a top connector 4 and a handle 5, the base 1 has a first socket 1-1; the base 1 connects one end of the first column 2 and the second column 3; the other ends of the first column 2 and the second column 3 are connected to the top connector 4, the top connector 4 includes a second socket 4-1; the top connector is connected to the handle 5; the first column 2 has a plurality of first placement grooves 2-1, the second column 3 has a plurality of second placement grooves 3-1, the first placement grooves 2-1 and the second placement grooves 3-1 are arranged in groups, the center line of the first placement groove 2-1 and the second placement groove 3-1 is at an angle of 5° with the plane of the base 1, and the rod 6 is inserted and installed in the first socket 1-1 and the second socket 4-1. In this embodiment, the first plug hole 1-1 and the second plug hole 4-1 are in a straight line, so that the plug rod is inserted into the first plug hole and the second plug hole along a straight line, and the plug rod 6 is firmly installed with the first plug hole 1-1 and the second plug hole 4-1.

[0033] In this embodiment, the cross-sectional shape of the rod 6 is the same as that of the first and second sockets 1-1 and 4-1, both of which are triangular. The first placement groove 2-1 and the second placement groove 3-1 are arranged in groups, so that the wafer can be firmly placed in the quartz flower basket. The angle of the center line of the first placement groove 2-1 and the second placement groove 3-1 is set to 4°, and the wafer is slightly lifted upward. Under the action of gravity, a force is generated to support the first and second placement grooves 2-1 and 3-1, so that the wafer is not easy to slide out of the first and second placement grooves 2-1 and 3-1. In addition, the arrangement of the rod 6 and the first and second sockets 1-1 and 4-1 blocks the edge of the wafer to further ensure that the wafer will not slide off.

[0034] The above description is only a preferred embodiment of the present invention and does not constitute any form of limitation to the present invention. Although the present invention has been disclosed as a preferred embodiment as above, it is not intended to limit the present invention. Any technical personnel in this field can make some changes or modify the technical contents disclosed above into equivalent embodiments without departing from the scope of the technical solution of the present invention. However, any brief modifications, equivalent changes and modifications made to the above embodiments based on the technical essence of the present invention without departing from the content of the technical solution of the present invention are still within the scope of the technical solution of the present invention.

Claims

1. A quartz flower basket with a rod, characterized in that: It includes a flower basket body and an insertion rod, the flower basket body includes a base, two first columns, two second columns, a top connector and a handle, the base has a first socket; the base is connected to one end of the first column and the second column; the other ends of the first column and the second column are connected to the top connector, the top connector includes a second socket; the top connector is connected to the handle; the first column has a plurality of first placement grooves, the second column has a plurality of second placement grooves, the first placement grooves and the second placement grooves are arranged in groups, the angle between the center line of the first placement groove and the second placement groove and the base plane is 4-6°, the insertion rod is inserted into and installed in the first socket and the second socket, and the cross-sectional shape of the insertion rod is the same as the cross-sectional shape of the first socket and the second socket.

2. The quartz flower basket according to claim 1, characterized in that: The first jack and the second jack are in a straight line.

3. The quartz flower basket according to claim 1, characterized in that: The cross-section of the plunger is circular, square or triangular.

Images