Carbon dioxide laser tube, three-fold carbon dioxide laser and four-fold carbon dioxide laser

Abstract

The utility model discloses a carbon dioxide laser tube, a three-fold carbon dioxide laser and a four-fold carbon dioxide laser. The carbon dioxide laser tube comprises a gas storage tube, a water cooling tube and a discharge tube which are sequentially sleeved from outside to inside, an inner cavity of the discharge tube is communicated with one end of a spiral air return pipe, and the other end of the spiral air return pipe is led out of the discharge tube, penetrates through the wall of the water cooling tube, is wound on the periphery of the water cooling tube and is communicated with an air storage cavity of the air storage tube; wherein the water cooling pipe is provided with an annular expansion section, a water inlet pipe and a water outlet pipe, and at least one connecting column is arranged on the periphery of the annular expansion section; one end of the water inlet pipe is arranged on the annular expansion section and communicates with the water cooling cavity, and the other end of the water inlet pipe penetrates outwards from the pipe wall of the gas storage pipe; one end of the water outlet pipe is arranged at the position, away from the annular expansion section, of the water cooling pipe and communicates with the water cooling cavity, and the other end of the water outlet pipe penetrates outwards from the pipe wall of the gas storage pipe. The carbon dioxide laser tube, the three-fold carbon dioxide laser and the four-fold carbon dioxide laser are good in cooling effect.

Description

Technical Field

[0001] The utility model relates to the field of carbon dioxide lasers, in particular to a carbon dioxide laser tube and a three-fold and four-fold carbon dioxide laser. Background Art

[0002] A CO2 laser is a gas laser that uses the vibration-later energy level transition of CO2 to generate laser light. Existing high-power CO2 lasers are usually composed of multiple CO2 laser tubes arranged side by side in the horizontal direction, and then the laser excited by a single CO2 laser tube is superimposed by a reflector to form a high-power laser. The water-cooling tube in the CO2 laser tube used in existing high-power CO2 lasers is usually a straight tube with a uniform diameter and set on the outer periphery of the discharge tube, so that the cold water stays for a short time on the outer periphery of the light-emitting end of the discharge tube where more heat is generated, which has a poor cooling effect. Utility Model Content

[0003] The main purpose of the utility model is to provide a carbon dioxide laser tube, aiming to solve the problem that the existing carbon dioxide laser tube has a poor cooling effect on the discharge tube.

[0004] In order to achieve the above-mentioned purpose, the utility model proposes a carbon dioxide laser tube. The carbon dioxide laser tube comprises:

[0005] The gas storage tube, water cooling tube and discharge tube are sequentially sleeved from the outside to the inside, and form a gas storage cavity, a water cooling cavity and a discharge cavity from the outside in sequence; the inner cavity of the discharge tube is connected with one end of a spiral gas return tube, and the other end of the spiral gas return tube is led out from the discharge tube and passes through the tube wall of the water cooling tube, and then is wound around the outer periphery of the water cooling tube and is connected with the gas storage cavity of the gas storage tube; wherein the water cooling tube has an annular expansion section, a water inlet pipe and a water outlet pipe, and the outer periphery of the annular expansion section is provided with at least one A connecting column connected to the inner wall of the gas storage pipe; one end of the water inlet pipe is arranged at the annular expansion section and is connected to the water cooling cavity, and the other end is arranged to pass outward from the pipe wall of the gas storage pipe; one end of the water outlet pipe is arranged at the water cooling pipe away from the annular expansion section and is connected to the water cooling cavity, and the other end of the water outlet pipe is arranged to pass outward from the pipe wall of the gas storage pipe; both ends of each of the connecting columns are respectively connected to the outer wall of the annular expansion section and the inner wall of the gas storage pipe.

[0006] Preferably, the number of at least one of the connecting columns is two, and the two connecting columns and the corresponding water inlet pipes are evenly distributed around the circumference of a radial cross-section of the corresponding annular expansion section.

[0007] Preferably, at least one of the connecting columns is cylindrical in shape.

[0008] Preferably, the annular expansion section is cylindrical.

[0009] Preferably, the diameter of the annular expansion section is 1.5-3 times the diameter of other parts of the water cooling pipe.

[0010] The utility model also proposes a three-fold carbon dioxide laser, comprising three carbon dioxide laser tubes as described above, the three carbon dioxide laser tubes are stacked in a herringbone shape in the radial direction, the optical paths of the three carbon dioxide laser tubes are connected in series through a three-fold reflector assembly, and a light output mirror is provided at the light output end of the optical path; the respective water inlet pipes and water outlet pipes of the three carbon dioxide laser tubes are connected in series or in parallel to form a cooling water path.

[0011] Preferably, the annular expansion sections corresponding to the three carbon dioxide laser tubes are all arranged on one side close to the light output end of the optical path.

[0012] The utility model also proposes a four-fold carbon dioxide laser, comprising four carbon dioxide laser tubes as described above, three of the carbon dioxide laser tubes are stacked in a field shape in the radial direction, the optical paths of the four carbon dioxide laser tubes are connected in series through a four-fold reflector assembly, a light output mirror is provided at the light output end of the optical path, and respective water inlet pipes and water outlet pipes of the four carbon dioxide laser tubes are connected in series or in parallel to form a cooling water path.

[0013] Preferably, the annular expansion sections corresponding to the four carbon dioxide laser tubes are all arranged on one side close to the light output end of the optical path.

[0014] The carbon dioxide laser tube and three-fold and four-fold carbon dioxide laser provided by the utility model are provided with an annular expansion section, a water inlet pipe and a water outlet pipe on the water cooling pipe of the carbon dioxide laser tube. The outer periphery of the annular expansion section is provided with at least one connecting column connected to the inner wall of the gas storage pipe; one end of the water inlet pipe is arranged in the annular expansion section and is connected to the water cooling cavity, and the other end is arranged to pass outward from the pipe wall of the gas storage pipe; one end of the water outlet pipe is arranged at the water cooling pipe away from the annular expansion section and is connected to the water cooling cavity, and the other end of the water outlet pipe is arranged to pass outward from the pipe wall of the gas storage pipe. This allows the cold water in the water cooling pipe of the three-fold and four-fold carbon dioxide laser composed of the carbon dioxide laser tube to have a certain retention time in the annular expansion section, and the cooling effect is better. BRIEF DESCRIPTION OF THE DRAWINGS

[0015] In order to more clearly illustrate the embodiments of the utility model or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the utility model. For ordinary technicians in this field, other drawings can be obtained based on the structures shown in these drawings without paying creative work.

[0016] Figure 1 This is a schematic structural diagram of an axial cross section of a carbon dioxide laser tube provided by the utility model;

[0017] Figure 2 for Figure 1 Schematic diagram of the radial cross-section structure corresponding to the middle annular expansion section;

[0018] Figure 3 This is a schematic diagram of the structure of the three-fold carbon dioxide laser provided by the utility model;

[0019] Figure 4 This is a schematic diagram of the structure of the four-fold carbon dioxide laser provided by the utility model;

[0020] Figure 5 for Figure 3 and Figure 4 A three-dimensional assembly diagram of the heat dissipation component;

[0021] Figure 6 for Figure 5 A three-dimensional schematic diagram of the heat sink;

[0022] Figure 7 for Figure 6 A three-dimensional schematic diagram of a section through the axes of the two air outlets;

[0023] Figure 8 for Figure 5 A three-dimensional schematic diagram of the center light output mirror seat;

[0024] Fig. 9 for Figure 8 A full cutaway three-dimensional schematic diagram of .

[0025] Description of Figure Numbers:

[0026] Label name Label name 100 CO2 laser tube 101 Gas storage pipe 101a Air storage chamber 102 Water cooling pipe 102a Water cooling chamber 1021 Annular expansion section 1022 Water inlet pipe 1023 Outlet pipe 1024 Connecting column 103 Discharge tube 103a Discharge chamber 104 Spiral air return pipe 200a Trifold CO2 Laser 200a1 Trifold reflector assembly 200b Fourfold CO2 laser 200b1 Four-fold reflector assembly 1 light mirror holder 11 Lens mounting slot 12 light hole 13 Annular groove 14 Ring bulge 131 Air Inlet 2 Heat sink 21 Ring cover 22 Dust cover 211 Make way hole 212 Vent 213 Ring gap 3 light tube

[0027] The purpose, features and advantages of the present invention will be further described in conjunction with the embodiments and with reference to the accompanying drawings. DETAILED DESCRIPTION

[0028] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments of the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0029] It should be noted that if the embodiments of the present invention involve directional indications (such as up, down, left, right, front, back...), the directional indications are only used to explain the relative position relationship, movement status, etc. between the components under a certain specific posture (as shown in the accompanying drawings). If the specific posture changes, the directional indication will also change accordingly.

[0030] In addition, if there are descriptions involving "first", "second", etc. in the embodiments of the utility model, the descriptions of "first", "second", etc. are only used for descriptive purposes and cannot be understood as indicating or suggesting their relative importance or implicitly indicating the number of the indicated technical features. Therefore, the features defined as "first" and "second" may explicitly or implicitly include at least one of the features. In addition, the technical solutions between the various embodiments can be combined with each other, but they must be based on the ability of ordinary technicians in the field to implement them. When the combination of technical solutions is contradictory or cannot be implemented, it should be deemed that such a combination of technical solutions does not exist and is not within the scope of protection required by the utility model.

[0031] A CO2 laser is a gas laser that uses the vibration-later energy level transition of CO2 to generate laser light. Existing high-power CO2 lasers are usually composed of multiple CO2 laser tubes arranged side by side in the horizontal direction, and then the laser excited by a single CO2 laser tube is superimposed by a reflector to form a high-power laser. The water-cooling tube in the CO2 laser tube used in existing high-power CO2 lasers is usually a straight tube with a uniform diameter and set on the outer periphery of the discharge tube, so that the cold water stays for a short time on the outer periphery of the light-emitting end of the discharge tube where more heat is generated, which has a poor cooling effect.

[0032] In order to solve the above problems, the embodiments of the present invention provide a carbon dioxide laser tube and a three-fold and four-fold carbon dioxide laser. Figures 1 to 9 It is a schematic diagram of an embodiment of the utility model.

[0033] First, as Figures 1 to 4As shown, the embodiment of the utility model provides a carbon dioxide laser tube 100 comprising: a gas storage tube 101, a water cooling tube 102, and a discharge tube 103 which are sequentially sleeved from the outside to the inside, and correspondingly form a gas storage cavity 101a, a water cooling cavity 102a, and a discharge cavity 103a from the outside in sequence; the inner cavity of the discharge tube 103 is connected with one end of a spiral gas return tube 104, and the other end of the spiral gas return tube 104 is led out from the discharge tube 103 and passes through the tube wall of the water cooling tube 102, and then is wound around the outer periphery of the water cooling tube 102 and is connected with the gas storage cavity 101a of the gas storage tube 101; wherein the water cooling tube 102 has a ring The annular expansion section 1021, the water inlet pipe 1022 and the water outlet pipe 1023 are provided. The outer periphery of the annular expansion section 1021 is provided with at least one connecting column 1024 connected to the inner wall of the gas storage pipe 101; one end of the water inlet pipe 1022 is provided at the annular expansion section 1021 and is connected to the water cooling chamber 102a, and the other end is provided through the pipe wall of the gas storage pipe 101; one end of the water outlet pipe 1023 is provided at the water cooling pipe 102 away from the annular expansion section 1021, and is connected to the water cooling chamber 102a, and the other end of the water outlet pipe 1023 is provided through the pipe wall of the gas storage pipe 101. It should be noted that other structures of the carbon dioxide laser tube 100, such as the arrangement of electrodes, etc., are prior art, and can be specifically arranged with reference to the prior art. The gas storage tube 101, water cooling tube 102, and discharge tube 103 can be sheathed by end sintering, and the annular expansion section 1021 can be blown after local heating of the water cooling tube 102 through a mold; the water inlet pipe 1022 and the water outlet pipe 1023 are both sealed at the tube wall where they pass through the gas storage tube 101, and can be sealed by glass sintering. The water cooling tube 102 in the carbon dioxide laser tube 100 provided by the utility model, due to the setting of the annular expansion section 1021, the cold water entering the water inlet pipe 1022 can flow to the water outlet end of the water cooling tube 102 after a certain retention time in the larger annular expansion section 1021, so that the light cooling effect is better.

[0034] In order to ensure the stability of the annular expansion section 1021, in the embodiment of the utility model, Figure 2 As shown, at least one of the connecting columns 1024 is provided in two, and the two connecting columns 1024 and the corresponding water inlet pipe 1022 are evenly distributed around the outer periphery of a radial cross section of the corresponding annular expansion section 1021. The above arrangement of the connecting columns 1024 and the water inlet pipe 1022 can evenly withstand the impact force of the cold water on the annular expansion section 1021 during use at the outer periphery of the annular expansion section 1021, so that the vibration of the water cooling pipe 102 is small during use.

[0035] Specifically, in the embodiment of the utility model, at least one of the connecting columns 1024 is cylindrical in shape. The connecting column 1024 is a cylindrical connecting column 1024, which has stronger compressive stability and bending resistance than connecting columns 1024 of other shapes, such as square bar-shaped connecting columns 1024. It can better disperse the pressure and maintain the stability of the stable annular expansion section 1021.

[0036] In the embodiment of the utility model, the annular expansion section 1021 is cylindrical. The annular expansion section 1021 is cylindrical, which is convenient for repeated manufacturing. The water cooling tube 102 can be blown after local heating through a mold. Compared with annular expansion sections 1021 in other shapes such as a corrugated tube, it is easier to control production accuracy and ensure the quality stability of the mass production of the carbon dioxide laser tube 100.

[0037] In the embodiment of the utility model, the diameter of the annular expansion section 1021 is 1.5-3 times the diameter of other parts of the water cooling pipe 102. The diameter of the annular expansion section 1021 is set as above, which ensures that the cold water entering the water inlet pipe 1022 can stay in the annular expansion section 1021 for a period of time during use, but will not stay for too long, and can flow to other parts of the water cooling pipe 102 in time after the cold water absorbs heat and is discharged from the water outlet pipe 1023.

[0038] The utility model also proposes a three-fold carbon dioxide laser 200a (such as Figure 3 ), including three carbon dioxide laser tubes 100 as described above, the three carbon dioxide laser tubes 100 are stacked in a herringbone shape in the radial direction, the optical paths of the three carbon dioxide laser tubes 100 are connected in series through a three-fold reflector assembly 200a1, and a light output mirror is provided at the light output end of the optical path; the respective water inlet pipes 1022 and water outlet pipes 1023 of the three carbon dioxide laser tubes 100 are connected in series or in parallel to form a cooling water path. It should be noted that the three-fold reflector assembly 200a1 may include four 45-degree reflectors and one 90-degree reflector (such as Figure 3 ) so that the lasers of the three carbon dioxide laser tubes 100 stacked in a triangular shape can be emitted from the light-emitting end. The respective water inlet pipes 1022 and water outlet pipes 1023 of the three carbon dioxide laser tubes 100 can be connected in series or in parallel through a rubber hose (not shown), and the external water cooler of the cooling water circuit is a prior art and will not be described in detail here.

[0039] Since the present tri-fold carbon dioxide laser 200a adopts all the technical solutions of the carbon dioxide laser tube 100 in all the above-mentioned embodiments, it has at least all the beneficial effects brought by the technical solutions of the above-mentioned embodiments. In addition, the tri-fold carbon dioxide laser 200a can be stacked in a herringbone shape to make the base size of the tri-fold carbon dioxide laser 200a consistent with that of the two-fold carbon dioxide laser, which is convenient for power upgrade of laser processing equipment using the two-fold carbon dioxide laser.

[0040] Specifically, in the embodiment of the utility model, the annular expansion sections 1021 corresponding to the three carbon dioxide laser tubes 100 are all arranged near the light output end of the optical path. The above arrangement of the annular expansion sections 1021 enables the annular expansion sections 1021 on the light output side to form a cooling force to cool the light output end with more heat.

[0041] The utility model also proposes a four-fold carbon dioxide laser 200b (such as Figure 4 ), including four carbon dioxide laser tubes 100 as described above, three of the carbon dioxide laser tubes 100 are stacked in a field shape in the radial direction, the optical paths of the four carbon dioxide laser tubes 100 are connected in series through a four-fold reflector assembly 200b1, and a light-emitting mirror is provided at the light-emitting end of the optical path, and the respective water inlet pipes 1022 and water outlet pipes 1023 of the four carbon dioxide laser tubes 100 are connected in series or in parallel to form a cooling water path. It should be noted that the four-fold reflector assembly 200b1 may include six 45-degree reflectors and one 90-degree reflector (such as Figure 4 ) so that the lasers of the four carbon dioxide laser tubes 100 stacked in a field shape can be emitted from the light-emitting end. The respective water inlet pipes 1022 and water outlet pipes 1023 of the four carbon dioxide laser tubes 100 can be connected in series or in parallel through a rubber hose (not shown), and the external water cooler of the cooling water circuit is a prior art and will not be described in detail here.

[0042] Since the four-fold carbon dioxide laser 200b adopts all the technical solutions of the carbon dioxide laser tube 100 in all the above-mentioned embodiments, it has at least all the beneficial effects brought by the technical solutions of the above-mentioned embodiments. In addition, the stacking of the four-fold carbon dioxide laser 200b in a field shape can make the base size of the four-fold carbon dioxide laser 200b consistent with the base size of the two-fold carbon dioxide laser, which is convenient for power upgrade of laser processing equipment using the two-fold carbon dioxide laser.

[0043] Specifically, in the embodiment of the utility model, the annular expansion sections 1021 corresponding to the four carbon dioxide laser tubes 100 are all arranged near the light output end of the optical path. The above arrangement of the annular expansion sections 1021 enables the annular expansion sections 1021 on the light output side to form a cooling force to cool the light output end with more heat.

[0044] In order to improve the light output and heat dissipation characteristics of the three-fold carbon dioxide laser 200a and the four-fold carbon dioxide laser 200b, in the embodiment of the utility model, please refer to Figures 5 to 9 The light outlets of the three-fold CO2 laser 200a and the four-fold CO2 laser 200b are provided with heat dissipation components, and the heat dissipation components include: a light outlet mirror seat 1, a heat sink 2 and a light outlet tube 3; the light outlet mirror seat 1 has a lens mounting groove 11 in the middle of the front side, and a light outlet hole 12 is opened in the middle of the bottom surface of the lens mounting groove 11 along the front-back direction; the light outlet mirror seat 1 is provided with an annular groove 13 at the rear side of the lens mounting groove 11 and at the position of the outer periphery of the light outlet hole 12, and the outer wall of the annular groove 13 is opened. An air inlet 131 is provided; the heat sink 2 includes an annular cover body 21 and a dust cover 22 formed by extending backward from the outer edge of the annular cover body 21, the annular cover body 21 is sealed and connected to the rear end of the light output mirror seat 1, and the middle part of the annular cover body 21 has a clearance hole 211 coaxially arranged with the light output hole 12; the annular cover body 21 is provided with at least one air outlet hole 212 at a position corresponding to the annular groove 13; the inner end of the light output tube 3 is detachable and coaxially installed on the inner edge of the clearance hole 211. The heat dissipation component is provided with a light output mirror seat 1 and a heat sink 2, and an annular groove 13 is provided on the light output mirror seat 1, and an air inlet hole 131 is provided on the outer wall of the annular groove 13, which together with the annular cover body 21 of the heat sink 2 constitute a ventilation cavity, and the air inlet hole 131 passes cold air into the ventilation cavity and dissipates hot air through the air outlet hole 212 on the annular cover body 21, so as to facilitate the heat dissipation of the lens mounting groove 11 adjacent to the annular groove 13; a clearance hole 211 is provided in the middle part of the annular cover body 21, and the inner end of the light output tube 3 is detachable and coaxially installed on the inner edge of the clearance hole 211, which further increases the heat dissipation structure and improves the heat dissipation efficiency.

[0045] Specifically, there are three air outlet holes 212, and the three air outlet holes 212 are evenly distributed around the central axis of the annular groove 13. The even distribution of the air outlet holes 212 ensures that the hot air of the heat dissipation component can be discharged more evenly, and ensures the uniformity of heat dissipation in various parts of the heat dissipation component.

[0046] Specifically, the outer end of the light emitting tube 3 is arranged to extend beyond the outer edge of the dust cover 22. The light emitting tube 3 extends beyond the outer edge of the dust cover 22, which facilitates the installation of the light emitting tube 3 and increases the dust protection range of the light emitting lens.

[0047] Specifically, the outer edge and the inner edge of the annular cover body 21 are respectively provided with two annular notches 213, and the light output mirror seat 1 is provided with two annular protrusions 14 which are respectively matched with the two annular notches 213 in concave and convex manner at the outer edge and the inner edge of the annular groove 13 relative to the two annular notches 213. The matching arrangement of the two annular notches 213 and the two annular protrusions 14 facilitates the sealing connection between the annular cover body 21 and the rear end of the light output mirror seat 1, and the sealing connection can be achieved by applying sealant at the matching position of the two annular notches 213 and the two annular protrusions 14, and the positioning after bonding is convenient, which ensures the reliability of the light output parameters of the mass production of the product.

[0048] Specifically, the outer side surface of the dust cover 22 is arranged in a truncated cone side surface shape with a gradually decreasing diameter in the direction away from the annular cover body 21, and the inner side surface is arranged in a cylindrical side surface shape. The truncated cone side surface shape of the dust cover 22 with a gradually decreasing diameter in the direction away from the annular cover body 21 allows dust settled on the dust cover 22 to slide off more easily, and the inner side surface is arranged in a cylindrical side surface shape, which is convenient for the installation of the light emitting tube 3 and the calibration of the light emitted by the light emitting tube 3.

[0049] Specifically, the inner wall of the lens installation groove 11 is provided with anti-skid threads. The provision of the anti-skid threads facilitates the installation of the lens into the lens installation groove 11. When the lens is installed by bonding, the anti-skid threads can be glued to increase the firmness of the lens bonding.

[0050] The above are only preferred embodiments of the present invention, and do not limit the patent scope of the present invention. All equivalent structural changes made by using the contents of the present invention specification and drawings under the inventive concept of the present invention, or directly / indirectly applied in other related technical fields are included in the patent protection scope of the present invention.

Claims

1. A carbon dioxide laser tube (100), characterized in that: include: The gas storage tube (101), the water cooling tube (102) and the discharge tube (103) are sequentially sleeved from the outside to the inside, and correspondingly form a gas storage cavity (101a), a water cooling cavity (102a) and a discharge cavity (103a) from the outside to the inside; the inner cavity of the discharge tube (103) is connected to one end of a spiral gas return tube (104); the other end of the spiral gas return tube (104) is led out from the discharge tube (103) and passes through the tube wall of the water cooling tube (102), then is wound around the outer periphery of the water cooling tube (102) and is connected to the gas storage cavity (101a) of the gas storage tube (101); wherein the water cooling tube (102) has an annular expansion section (1021), a water inlet pipe ( The annular expansion section (1021) and a water outlet pipe (1023) are provided, and at least one connecting column (1024) connected to the inner wall of the gas storage pipe (101) is provided on the outer periphery of the annular expansion section (1021); one end of the water inlet pipe (1022) is arranged on the annular expansion section (1021) and is in communication with the water cooling chamber (102a), and the other end of the water inlet pipe (1022) is arranged to pass outwards from the pipe wall of the gas storage pipe (101); one end of the water outlet pipe (1023) is arranged on the water cooling pipe (102) away from the annular expansion section (1021) and is in communication with the water cooling chamber (102a), and the other end of the water outlet pipe (1023) is arranged to pass outwards from the pipe wall of the gas storage pipe (101).

2. The carbon dioxide laser tube (100) according to claim 1, characterized in that: The number of at least one of the connecting columns (1024) is two, and the two connecting columns (1024) and the corresponding water inlet pipe (1022) are evenly distributed around the outer circumference of a radial cross section of the corresponding annular expansion section (1021).

3. The carbon dioxide laser tube (100) according to claim 1, characterized in that: At least one of the connecting pillars (1024) is cylindrical in shape.

4. The carbon dioxide laser tube (100) according to claim 1, characterized in that: The annular expansion section (1021) is cylindrical.

5. The carbon dioxide laser tube (100) according to claim 4, characterized in that: The diameter of the annular expansion section (1021) is 1.5 to 3 times the diameter of other parts of the water cooling pipe (102).

6. A three-fold carbon dioxide laser (200a), characterized in that: The invention comprises three carbon dioxide laser tubes (100) as claimed in any one of claims 1 to 5, wherein the three carbon dioxide laser tubes (100) are stacked in a herringbone shape in the radial direction, the optical paths of the three carbon dioxide laser tubes (100) are connected in series through a three-fold reflector assembly (200a1), and a light output mirror (300) is provided at the light output end of the optical path; and respective water inlet pipes (1022) and water outlet pipes (1023) of the three carbon dioxide laser tubes (100) are connected in series or in parallel to form a cooling water path.

7. The three-fold carbon dioxide laser (200a) according to claim 6, characterized in that: The annular expansion sections (1021) corresponding to each of the three carbon dioxide laser tubes (100) are all arranged on a side close to the light output end of the optical path.

8. A four-fold carbon dioxide laser (200b), characterized in that: The invention comprises four carbon dioxide laser tubes (100) according to any one of claims 1 to 5, three of the carbon dioxide laser tubes (100) are stacked in a field shape in the radial direction, the optical paths of the four carbon dioxide laser tubes (100) are connected in series through a four-fold reflector assembly (200b1), a light output mirror (300) is provided at the light output end of the optical path, and respective water inlet pipes (1022) and water outlet pipes (1023) of the four carbon dioxide laser tubes (100) are connected in series or in parallel to form a cooling water path.

9. The four-fold carbon dioxide laser (200b) according to claim 8, characterized in that: The annular expansion sections (1021) corresponding to each of the four carbon dioxide laser tubes (100) are all arranged on a side close to the light output end of the optical path.

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