Quantitative discharging device for mixed materials in semiconductor industry

Abstract

The utility model discloses a quantitative discharging device for mixed materials in the semiconductor industry. The quantitative discharging device comprises a buffer tank, a stirring mechanism, a radar liquid level meter, a screw pump, a mass flow meter, an electric proportioning valve, a circulating pipeline and a discharging pipe, the buffer tank is provided with a radar liquid level meter used for detecting the liquid level of materials in the buffer tank, a discharging port is formed in the bottom of the buffer tank and connected with an inlet of the screw pump, an outlet of the screw pump is connected with one end of the circulating pipeline, the other end of the circulating pipeline is connected with a circulating material inlet in the upper portion of the buffer tank, and the circulating material inlet is communicated with the circulating pipeline. The mass flow meter is arranged on the circulating pipeline, the discharging pipe is communicated with the circulating pipeline, and an electric proportioning valve is arranged on the discharging pipe. According to the quantitative discharging device, flow control is mainly adopted, liquid level control is assisted, and more accurate quantitative discharging of the buffer tank can be achieved by comprehensively utilizing the two parameters of the flow and the liquid level.

Description

Technical Field

[0001] The utility model relates to the technical field of quantitative discharging of buffer tanks, in particular to a quantitative discharging device for mixed materials in the semiconductor industry. Background Art

[0002] The background of quantitative discharging technology of buffer tanks mainly involves the demand for precise control of discharging volume in industrial production and laboratories. In many industrial processes and experimental operations, materials need to be discharged from buffer tanks according to a predetermined ratio or quantity to ensure product quality, production efficiency and accuracy of experimental results.

[0003] The traditional method of discharging materials from a buffer tank may have problems with unstable discharging volume and low precision, which may lead to inconsistent product quality, low production efficiency or errors in experimental results. Therefore, the development of quantitative discharging technology aims to solve these problems and improve the precision and controllability of discharging.

[0004] The background of quantitative discharging technology of buffer tanks is also related to the development trend of automation and intelligence. With the advancement of industrial automation and intelligent control technology, people have higher and higher requirements for precise control and automation of production processes. Quantitative discharging technology can be integrated with other automation systems to realize automated control of the production process and improve production efficiency and quality. Utility Model Content

[0005] The present application provides a device for quantitatively discharging mixed materials in the semiconductor industry to solve the problems of unstable discharge volume and low precision in the traditional buffer tank discharging method, the mixed material is a suspension that is easy to precipitate and has high viscosity, and the equipment is normally in a state of long-term continuous operation, which is prone to cause pipeline blockage.

[0006] In an embodiment of the present application, a device for quantitatively discharging mixed materials in the semiconductor industry is provided, the device comprising a buffer tank, a stirring mechanism, a radar level meter, a screw pump, a mass flow meter, an electric proportional control valve, a circulation pipeline and a discharge pipe;

[0007] The stirring mechanism comprises a stirring motor, a stirring shaft and a stirring blade, wherein the stirring motor is arranged above the buffer tank, the stirring shaft and the stirring blade are arranged in the buffer tank, the stirring motor is connected to the stirring shaft, and the stirring blade is arranged on the stirring shaft;

[0008] The cache tank is provided with a radar level meter for detecting the liquid level of the material in the tank. A discharge port is provided at the bottom of the cache tank, the discharge port is connected to the inlet of the screw pump, the outlet of the screw pump is connected to one end of the circulation pipeline, and the other end of the circulation pipeline is connected to the circulation material inlet above the cache tank. The mass flow meter is provided on the circulation pipeline, the discharge pipe is connected to the circulation pipeline, and an electric proportional control valve is provided on the discharge pipe.

[0009] Furthermore, the outlet of the screw pump is connected to the circulation pipeline through a manual three-way ball valve, and the manual three-way ball valve is connected to a drainage pipeline for discharging cleaning water.

[0010] Furthermore, the circulation pipeline is connected to the circulation material inlet above the buffer tank through an electric V-type ball valve.

[0011] Furthermore, the electric proportional control valve is connected to a PLC controller.

[0012] Furthermore, the radar level meter is connected to a PLC controller, and the PLC controller is connected to a feed valve.

[0013] Furthermore, the mass flow meter is connected to a PLC controller.

[0014] Furthermore, the electric V-shaped ball valve is connected to a PLC controller.

[0015] The present application provides a semiconductor industry mixed material quantitative discharging device, the device includes a buffer tank, a stirring mechanism, a radar level meter, a screw pump, a mass flow meter, an electric proportional control valve, a circulation pipeline and a discharge pipe; the stirring mechanism includes a stirring motor, a stirring shaft and a stirring blade, the stirring motor is arranged above the buffer tank, the stirring shaft and the stirring blade are arranged in the buffer tank, the stirring motor is connected to the stirring shaft, and the stirring blade is arranged on the stirring shaft; the buffer tank is provided with a radar level meter for detecting the liquid level of the material in the tank, the bottom of the buffer tank is provided with a discharge port, the discharge port is connected to the inlet of the screw pump, the outlet of the screw pump is connected to one end of the circulation pipeline, the other end of the circulation pipeline is connected to the circulation material inlet above the buffer tank, the mass flow meter is arranged on the circulation pipeline, the discharge pipe is connected to the circulation pipeline, and the discharge pipe is provided with an electric proportional control valve. The present application adopts flow control as the main method and liquid level control as the auxiliary method, and can comprehensively utilize the two parameters of flow and liquid level to achieve more accurate quantitative discharging of the buffer tank. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] Figure 1 A structural diagram of a device for quantitatively discharging mixed materials in the semiconductor industry provided by one embodiment of the utility model;

[0017] Figure 2 An internal structure diagram of a device for quantitatively discharging mixed materials in the semiconductor industry provided by one embodiment of the utility model.

[0018] In the figure: buffer tank 1, radar level meter 2, screw pump 3, mass flow meter 4, electric proportional control valve 5, circulation pipeline 6, discharge pipe 7, stirring motor 8, stirring shaft 9, stirring blade 10, manual three-way ball valve 11, electric V-type ball valve 12. DETAILED DESCRIPTION

[0019] The present invention is further described in detail below by specific embodiments in conjunction with the accompanying drawings. Wherein similar elements in different embodiments adopt associated similar element numbers. In the following embodiments, many detailed descriptions are intended to enable the present application to be better understood. However, those skilled in the art can easily recognize that some of the features can be omitted in different situations, or can be replaced by other elements, materials, and methods. In some cases, some operations related to the present application are not shown or described in the specification, in order to avoid the core part of the present application being overwhelmed by too much description, and for those skilled in the art, it is not necessary to describe these related operations in detail, and they can fully understand the related operations based on the description in the specification and the general technical knowledge in the art.

[0020] In addition, the features, operations or characteristics described in the specification can be combined in any appropriate manner to form various implementations. At the same time, the steps or actions in the method description can also be interchanged or adjusted in a manner that is obvious to those skilled in the art. Therefore, the various sequences in the specification and the drawings are only for the purpose of clearly describing a certain embodiment and are not meant to be a required sequence, unless otherwise specified that a certain sequence must be followed.

[0021] The utility model provides a device for quantitatively discharging mixed materials in the semiconductor industry, such as Figure 1 and Figure 2 As shown, the device includes a buffer tank 1, a stirring mechanism, a radar level meter 2, a screw pump 3, a mass flow meter 4, an electric proportional control valve 5, a circulation pipeline 6 and a discharge pipe 7.

[0022] The stirring mechanism includes a stirring motor 8, a stirring shaft 9 and a stirring blade 10. The stirring motor 8 is arranged above the buffer tank 1. The stirring shaft 9 and the stirring blade 10 are arranged in the buffer tank 1. The stirring motor 8 is connected to the stirring shaft 9, and the stirring blade 10 is arranged on the stirring shaft 9.

[0023] The buffer tank 1 is provided with a radar level meter 2 for detecting the liquid level of the material in the tank. A discharge port is provided at the bottom of the buffer tank 1, and the discharge port is connected to the inlet of the screw pump 3. The outlet of the screw pump 3 is connected to one end of the circulation pipeline 6. The other end of the circulation pipeline 6 is connected to the circulation material inlet above the buffer tank 1. The mass flow meter 4 is arranged on the circulation pipeline 6. The discharge pipe 7 is connected to the circulation pipeline 6. The discharge pipe 7 is provided with an electric proportional control valve 5.

[0024] In this embodiment, the outlet of the screw pump 3 is connected to the circulation pipeline 6 through a manual three-way ball valve 11, and the manual three-way ball valve 11 is connected to a drainage pipeline for discharging cleaning water.

[0025] In this embodiment, the circulation pipeline 6 is connected to the circulation material inlet above the buffer tank 1 through the electric V-shaped ball valve 12. The electric V-shaped ball valve 12 is connected to the PLC controller.

[0026] In this embodiment, the electric proportional control valve 5 is connected to the PLC controller.

[0027] In this embodiment, the radar level meter 2 is connected to the PLC controller, and the PLC controller is connected to the feed valve.

[0028] In this embodiment, the mass flow meter 4 is connected to the PLC controller.

[0029] This embodiment adopts flow control as the main method and liquid level control as the auxiliary method, and comprehensively utilizes the two parameters of flow rate and liquid level to achieve more accurate quantitative discharge of the buffer tank 1.

[0030] (1) Flow control: An electric proportional control valve 5 is installed on the discharge pipe 7 to adjust the discharge flow. The flow control valve can adjust the opening according to the command of the control system to achieve precise control of the flow.

[0031] (2) Liquid level control: The liquid level in the buffer tank 1 is monitored by the radar level meter 2, and the liquid level signal is fed back to the control system. The control system controls the opening and closing of the feed valve according to the set liquid level value to maintain the liquid level in the tank within the set range.

[0032] (3) Logical control: The control system calculates the required discharging time according to the set discharging amount and discharging speed requirements. During the discharging process, the liquid level in the tank is ensured to be within the appropriate range through liquid level control, and the electric proportional control valve 5 is controlled by flow control to achieve the set discharging amount within the discharging time.

[0033] (4) Feedback correction: The mass flow meter 4 monitors the actual flow rate of the discharge in real time and feeds back the flow signal to the control system. The control system can make feedback corrections based on the difference between the actual flow rate and the set flow rate, and fine-tune the electric proportional control valve 5 to improve the accuracy of the discharge.

[0034] Since the material is a suspension, it is easy to precipitate and has high viscosity, so the material needs to be stirred all the time to prevent the material from precipitating and adhering to the surface of the tank body. When there is no material discharge, close the electric proportional control valve 5 and open the electric V-type ball valve 12 to allow the entire liquid to circulate in the pipeline to prevent blockage. After the equipment stops for a long time or works for a long time, the buffer tank 1 and the pipeline must be cleaned. After cleaning, open the manual three-way ball valve 11 to the discharge pipeline to drain the cleaning water.

[0035] The above specific examples are used to illustrate the present invention, which are only used to help understand the present invention and are not intended to limit the present invention. For those skilled in the art of the present invention, some simple deductions, deformations or substitutions can be made based on the idea of ​​the present invention.

Claims

1. A device for quantitatively discharging mixed materials in the semiconductor industry, characterized in that: The device comprises a buffer tank, a stirring mechanism, a radar level meter, a screw pump, a mass flow meter, an electric proportional regulating valve, a circulation pipeline and a discharge pipe; The stirring mechanism comprises a stirring motor, a stirring shaft and a stirring blade, wherein the stirring motor is arranged above the buffer tank, the stirring shaft and the stirring blade are arranged in the buffer tank, the stirring motor is connected to the stirring shaft, and the stirring blade is arranged on the stirring shaft; The cache tank is provided with a radar level meter for detecting the liquid level of the material in the tank. A discharge port is provided at the bottom of the cache tank, the discharge port is connected to the inlet of the screw pump, the outlet of the screw pump is connected to one end of the circulation pipeline, and the other end of the circulation pipeline is connected to the circulation material inlet above the cache tank. The mass flow meter is provided on the circulation pipeline, the discharge pipe is connected to the circulation pipeline, and an electric proportional control valve is provided on the discharge pipe.

2. A device for quantitatively discharging mixed materials in the semiconductor industry as claimed in claim 1, characterized in that: The outlet of the screw pump is connected to the circulation pipeline through a manual three-way ball valve, and the manual three-way ball valve is connected to a drainage pipeline for discharging cleaning water.

3. A device for quantitatively discharging mixed materials in the semiconductor industry as claimed in claim 1, characterized in that: The circulation pipeline is connected to the circulation material inlet above the buffer tank through an electric V-type ball valve.

4. A device for quantitatively discharging mixed materials in the semiconductor industry as claimed in claim 1, characterized in that: The electric proportional regulating valve is connected to a PLC controller.

5. A device for quantitatively discharging mixed materials in the semiconductor industry as claimed in claim 1, characterized in that: The radar level meter is connected to a PLC controller, and the PLC controller is connected to a feed valve.

6. A device for quantitatively discharging mixed materials in the semiconductor industry as claimed in claim 1, characterized in that: The mass flow meter is connected to a PLC controller.

7. A device for quantitatively discharging mixed materials in the semiconductor industry as claimed in claim 3, characterized in that: The electric V-type ball valve is connected to a PLC controller.

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