Additive supplementing device and electrochemical coating system

Abstract

The utility model relates to an additive supplementing device and an electrochemical coating system, and the additive supplementing device comprises a plurality of machine table boxes, each machine table box comprises a first door body, and a machine table bottle for accommodating an additive is stored in each machine table box; the driving part is configured to drive the first door body to be opened or closed; each source bottle is used for containing an additive to be supplemented and is provided with an information storage code for storing feature information of the additive to be supplemented, and the feature information at least comprises the category of the additive to be supplemented; the code scanning component is configured to scan the information storage code of the source bottle so as to obtain the feature information of the to-be-supplemented additive; and the controller is electrically connected with the driving part and the code scanning part, and is configured to receive the feature information of the to-be-supplemented additive and control the driving part based on the feature information of the to-be-supplemented additive. The additive supplementing device can improve the accuracy of additive supplementing.

Description

Technical Field

[0001] The utility model relates to the field of semiconductor wafer processing, in particular to an additive replenishing device and an electrochemical coating system. Background Art

[0002] In semiconductor wafer processing plants, there are multiple electrochemical metal plating machines with different concentrations according to the needs of different process technologies. A single machine needs to add multiple different types of additives during the plating process, and the multiple additives are stored in multiple machine bottles with the same appearance. After the electrochemical plating machine runs out of stock or runs for a period of time, it is necessary to manually replenish the machine bottles in multiple machine boxes of machines with different concentrations with additives regularly. When manually replenishing additives, it is very easy to add the wrong type of additives, resulting in machine problems and the scrapping of the entire batch of wafers, and a large amount of subsequent maintenance costs. Utility Model Content

[0003] In order to avoid at least some disadvantages of the prior art, the utility model provides an additive replenishing device and an electrochemical plating system having the additive replenishing device, which can improve the accuracy of replenishing additives.

[0004] According to one aspect of the utility model, there is provided an additive replenishing device for an electrochemical plating system, comprising:

[0005] A plurality of machine boxes, each of which includes a first door body and each of which stores a machine bottle for containing additives;

[0006] A driving component, configured to drive the first door body to open or close;

[0007] At least one source bottle, each source bottle is used to contain the additive to be supplemented and is provided with an information storage code for storing characteristic information of the additive to be supplemented, the characteristic information at least including the category of the additive to be supplemented;

[0008] A code scanning component configured to scan the information storage code of the source bottle to obtain characteristic information of the additive to be supplemented; and

[0009] The controller is electrically connected to the driving component and the code scanning component, and is configured to receive characteristic information of the additive to be replenished and control the driving component based on the characteristic information of the additive to be replenished.

[0010] In some embodiments, the controller is also configured to control a driving component to open a first door of a target machine box among multiple machine bottles based on characteristic information of the additive to be replenished, and the category of additives contained in the machine bottles in the target machine box is the same as the category of the additive to be replenished.

[0011] In some embodiments, the characteristic information also includes the validity period of the additive to be replenished, and the controller is also configured to control the driving component to open the first door of the target machine box among the multiple machine bottles based on the characteristic information of the additive to be replenished, the category of the additive contained in the machine bottle in the target machine box is the same as the category of the additive to be replenished and the additive to be replenished is within the validity period.

[0012] In some embodiments, a liquid level sensor is provided in the machine bottle, and is configured to detect whether the liquid level of the additive in the machine bottle reaches a preset height.

[0013] In some embodiments, the additive replenishing device further comprises:

[0014] The display is configured to output a prompt on the display interface when the liquid level in the bottle of the machine reaches a preset height.

[0015] In some embodiments, the additive replenishing device further comprises:

[0016] The display is electrically connected to the code scanning component and is configured to receive and display characteristic information of the additive to be supplemented.

[0017] In some embodiments, the display is further configured to receive user input, and the controller is further configured to control the driving component to drive the first door to close based on the user input.

[0018] In some embodiments, the driving component includes a first driving part and a second driving part. The first driving part is arranged on the outer wall surface of the machine box, the second driving part is arranged in the machine box and is rotatably connected to the first driving part, and the second driving part is fixed to the first door body.

[0019] In some embodiments, each platform cabinet further includes a second door body, and the second door body is configured to be opened or closed by mechanical means.

[0020] In some embodiments, labels for distinguishing the types of additives are provided on both the machine box and the source bottle.

[0021] In some embodiments, the additive replenishing device further comprises an explosion-proof cabinet, and the source bottle is stored in the explosion-proof cabinet; and / or

[0022] The information storage code is constructed as a barcode, a two-dimensional code, or an RFID.

[0023] According to another aspect of the present invention, an electrochemical plating system is provided, comprising the additive replenishing device of the above embodiment.

[0024] In some embodiments, the electrochemical plating system further includes a machine platform, wherein a machine box, a source bottle, a code scanning component and a controller are installed on a side of the machine platform.

[0025] Based on the above technical scheme, the additive replenishing device according to the embodiment of the utility model has the following advantages: by using a code scanning component to scan the information storage code of the source bottle, it can at least automatically obtain the category of the additive to be replenished in the source bottle, and the controller controls the driving component based on the category of the additive to be replenished. There is no need to pay attention to the category of additives in the source bottle and the category of additives required for the machine bottle. The accuracy of replenishing additives can be improved, the safety of the additive replenishing device can be improved, and the problems of easily taking the wrong additives to be replenished, easily adding additives to the wrong machine, and easily adding additives to the wrong machine box can be solved. BRIEF DESCRIPTION OF THE DRAWINGS

[0026] The drawings described herein are used to provide a further understanding of the present invention and constitute a part of the present invention. The exemplary embodiments of the present invention and their descriptions are used to explain the present invention and do not constitute an improper limitation on the present invention. In the drawings:

[0027] Figure 1 It is a schematic structural diagram of some embodiments of the electrochemical plating system of the utility model.

[0028] Figure 2 Schematic diagram of the structure of some embodiments of the additive replenishing device of the present invention with the first door of the machine box opened.

[0029] Figure 3 Schematic diagram of the structure of some embodiments of the additive replenishing device of the present invention with the second door of the machine box opened.

[0030] Figure 4 It is a schematic structural diagram of some embodiments of the source bottle of the additive replenishing device of the utility model.

[0031] Figure 5 The following is a flow chart of some embodiments of the conventional method of using the additive replenishing device of the present invention.

[0032] Figure 6 Schematic diagram of the flow chart of other embodiments of the emergency use method of the additive replenishing device of the utility model.

[0033] Description of Reference Numerals

[0034] 1. Machine box; 2. Driving component; 3. Source bottle; 4. Scanning component; 5. Display; 6. Controller; 10. Machine bottle; 11. First door body; 12. Second door body; 121. Key port; 21. First driving part; 22. Second driving part; 31. Information storage code; 32. Label; 101. Machine. DETAILED DESCRIPTION

[0035] The utility model is described in detail below. In the following paragraphs, different aspects of the embodiments are defined in more detail. Each aspect defined in this way can be combined with any other aspect or aspects, unless it is clearly stated that it cannot be combined. In particular, any feature that is considered to be preferred or advantageous can be combined with one or more other features that are considered to be preferred or advantageous.

[0036] The terms "first" and "second" appearing in the present invention are only for the convenience of description to distinguish different components with the same name, and do not indicate a sequence or primary and secondary relationship.

[0037] In the description of the present invention, it is necessary to understand that the terms "upper", "lower", "inside", "outside", "left" or "right" etc. indicating directions or positional relationships are defined based on a machine box or source bottle etc., and are only for the convenience of describing the present invention, and do not indicate or imply that the device referred to must have a specific direction, be constructed and operated in a specific direction, and therefore cannot be understood as limiting the scope of protection of the present invention.

[0038] First, the utility model provides an additive replenishing device for an electrochemical plating system, such as Figures 1 to 4 As shown, the additive replenishing device includes:

[0039] A plurality of machine boxes 1, each of which comprises a first door 11 and a machine bottle 10 for containing additives is stored in each of the machine boxes 1;

[0040] A driving component 2, configured to drive the first door body 11 to open or close;

[0041] At least one source bottle 3, each source bottle 3 is used to contain the additive to be supplemented and is provided with an information storage code 31 for storing characteristic information of the additive to be supplemented, the characteristic information at least including the category of the additive to be supplemented;

[0042] A code scanning component 4 is configured to scan the information storage code 31 of the source bottle 3 to obtain characteristic information of the additive to be supplemented; and

[0043] The controller 6 is electrically connected to the driving component 2 and the code scanning component 4, and is configured to receive characteristic information of the additive to be replenished and control the driving component 2 based on the characteristic information of the additive to be replenished.

[0044] This embodiment uses a code scanning component to scan the information storage code of the source bottle, and can at least automatically obtain the category of the additive to be replenished in the source bottle. The controller controls the driving component based on the category of the additive to be replenished. There is no need for human attention to the category of the additive in the source bottle and the category of the additive required for the machine bottle. The accuracy of replenishing additives can be improved, the safety of the additive replenishing device can be improved, and the problems of easily taking the wrong additive to be replenished, easily adding additives to the wrong machine, and easily adding additives to the wrong machine box can be solved.

[0045] In some embodiments, the additives in the platform bottle 10 can be automatically added to the platform 101 of the electrochemical coating system to participate in the coating process.

[0046] In some embodiments, each additive in each source bottle 3 may correspond to one machine box 1 or machine bottle 10, or may correspond to multiple machine boxes 1 or machine bottles 10. Optionally, the additive in the source bottle 3 may be manually poured and added to the machine bottle 10.

[0047] In some specific examples, the source bottle 3 includes unopened additives, and different categories of additives are stored in different source bottles 3. Specifically, the additive replenishing device includes a plurality of source bottles 3 with the same appearance, and it is easy to mistake different models or categories of additives when manually selecting. Each category of additive corresponds to a machine box 1 and a machine bottle 10, and a machine box 1 is separately provided for each machine bottle 10. The code scanning component 4 can identify the category of the additive to be replenished in the source bottle 3, so that the controller controls the driving component 2 to open the first door 11 of the machine box 1 corresponding to the category of the additive to be replenished, which can solve the problem of replenishing the wrong additive.

[0048] In some embodiments, the controller 6 is further configured to control the driving component 2 to open the first door 11 of a target machine box among the plurality of machine bottles 10 based on the characteristic information of the additive to be supplemented, and the type of additive contained in the machine bottle 10 in the target machine box is the same as the type of the additive to be supplemented. By automatically opening the first door 11 of the machine box corresponding to the type of the additive to be supplemented, the problem of supplementing the wrong additive can be solved.

[0049] The inventors discovered during the research process that if expired additives are added to the machine 101, it will lead to problems such as decreased coating efficiency and film defects.

[0050] To solve the above problem, in some embodiments, the characteristic information also includes the validity period of the additive to be replenished, and the controller 6 is also configured to control the driving component 2 to open the first door 11 of the target machine box among the multiple machine bottles 10 based on the characteristic information of the additive to be replenished, and the category of the additive contained in the machine bottle 10 in the target machine box is the same as the category of the additive to be replenished and the additive to be replenished is within the validity period.

[0051] Here, the category and expiration date of the additive stored in the information storage code 31 of the source bottle 3 can be quickly extracted by the code scanning component 4, and only additives of the same category within the validity period can trigger the next step of automatic door opening and closing control. That is to say, the controller automatically opens the first door 11 of the machine box corresponding to the category of the additive to be replenished when the additive to be replenished is within the validity period, so that there is no need for human attention to the category and expiration date of the additive to be replenished in the source bottle, which can improve the safety factor while improving the accuracy of additive replenishment.

[0052] In some embodiments, a liquid level sensor is provided in the machine bottle 10, configured to detect whether the liquid level of the additive in the machine bottle 10 reaches a preset height. The liquid level sensor of this embodiment can prevent the user from adding excessive additives, thereby improving the convenience of using the additive replenishing device.

[0053] In some embodiments, Figure 1 As shown, the additive replenishing device also includes:

[0054] The display 5 is configured to output a prompt on the display interface when the liquid level of the additive in the machine bottle 10 reaches a preset height. The display of this embodiment can output a prompt when the liquid level reaches a preset height, which can prevent the user from replenishing excessive additives and improve the convenience of using the additive replenishing device.

[0055] For example, the display 5 may be connected to the liquid level sensor signal in each machine bottle 10 so as to output a prompt based on the trigger signal of the liquid level sensor.

[0056] Optionally, the display 5 may be an integrated touch screen, etc. Optionally, the prompt signal output on the display interface may be an audio-visual signal, etc.

[0057] In some embodiments, Figure 1 As shown, the additive replenishing device further includes: a display 5, which is electrically connected to the code scanning component 4 and is configured to receive and display characteristic information of the additive to be replenished.

[0058] The display of this embodiment can receive and display the category and validity period of the additive to be replenished, so that the user can intuitively understand the additive information in the source bottle.

[0059] In some embodiments, the display 5 is further configured to receive user input, and the controller 6 is further configured to control the driving component 2 to drive the first door body 11 to close based on the user input.

[0060] For example, when the liquid level of the additive in the machine bottle 10 reaches a preset height, the liquid level sensor is triggered, and then the display 5 outputs a prompt message on the display interface to prompt that the machine bottle 10 is full. The user can click the button on the display interface to confirm to stop replenishing the liquid. The controller 6 controls the drive component 2 to drive the first door 11 of the machine box storing the machine bottle 10 to close in response to the user's confirmation operation.

[0061] This embodiment receives user input through the display and closes the first door based on the user input, which can avoid accidental closing of the first door and ensure that the first door is closed only when the fluid replenishment is completed. In some embodiments, the driving component 2 can be a motor or a driving motor.

[0062] In some embodiments, Figure 2 As shown, the driving component 2 includes a first driving part 21 and a second driving part 22, the first driving part 21 is arranged on the outer wall surface of the machine box 1, the second driving part 22 is arranged in the machine box 1 and is rotatably connected to the first driving part 21, and the second driving part 22 is fixed to the first door body 11. Specifically, the first driving part 21 may include a motor body, etc., and the second driving part 22 may include a motor output shaft, etc.

[0063] In some embodiments, Figure 5 As shown, the conventional method of using the additive replenishing device includes:

[0064] Step 1: The user enters the account and password on the display 5 and successfully logs into the interface;

[0065] Step 2: The user aligns or brings the information storage code 31 of the source bottle 3 containing any type of additive to be replenished with the code scanning component 4, thereby identifying the type and validity period of the additive to be replenished;

[0066] Step 3: The controller 6 determines that the additive to be replenished is not expired, further selects a target machine box 1 according to the type of the additive to be replenished, and controls the driving component 2 to open the first door 11 of the target machine box 1;

[0067] Step 4: Add the additive to be added in the source bottle 3 to the machine bottle 10 until the liquid level sensor is triggered and the display interface prompts that the machine bottle 10 is full;

[0068] Step 5: The user clicks a button on the display interface to confirm stopping the liquid replenishment, and the controller 6 controls the driving component 2 to drive the first door 11 to close in response to the user operation;

[0069] Step 6: The user manually closes the display interface or the display interface automatically closes after a timeout, ending the current rehydration. Figures 1 to 3As shown, each machine box 1 further includes a second door body 12, and the second door body 12 is configured to be opened or closed by mechanical means.

[0070] For example, a key slot 121 may be provided on the second door body 12 , so that the second door body 12 can be opened or closed by inserting a mechanical key into the key slot 121 .

[0071] By providing an emergency manual switch device, that is, a second door body 12 that can be manually controlled, the problem of occasional failure of automation hardware can be effectively solved.

[0072] In some embodiments, Figure 4 As shown, both the machine box 1 and the source bottle 3 are provided with labels 32 for distinguishing the types of additives.

[0073] By providing labels 32 for distinguishing the types of additives on both the machine box 1 and the source bottle 3, the problem of errors in human identification of additives can be effectively solved.

[0074] In some examples, the label 32 may be a color label, for example, a color label is attached to the surface of each source bottle 3 and the machine box 1. In other examples, the label 32 may be a digital label.

[0075] In some embodiments, Figures 1 to 4 As shown, each machine box 1 further includes a second door 12, which is configured to be opened or closed mechanically, and labels 32 for distinguishing the types of additives are provided on the machine box 1 and the source bottle 3.

[0076] Here, by setting up a second door body 12 that can be manually controlled and sticking color labels on the surface of each source bottle 3 and the machine box 1, problems such as occasional failure or power outage of automation hardware can be effectively solved, and at the same time, human errors in identifying additives can be avoided.

[0077] In some embodiments, Figure 6 As shown, the emergency use method of the additive replenishing device includes:

[0078] Step 1: The user takes out a source bottle 3 containing any type of additive to be supplemented from the explosion-proof cabinet;

[0079] Step 2: Manually find the expiration date on the surface of the source bottle 3 to determine that the additive to be replenished is not expired;

[0080] Step 3: Find the target machine box with the same color label as the color label of source bottle 3;

[0081] Step 4: Use the emergency key to open the second door 12 of the target machine box;

[0082] Step 5: Continue to slowly add the additive to be added in the source bottle 3 to the machine bottle 10 in the target machine box, and visually observe that the liquid level is full;

[0083] Step 6: Use the emergency key to close the second door of the target machine box to end the refilling.

[0084] In some embodiments, the additive replenishing device further includes an explosion-proof cabinet, and the source bottle 3 is stored in the explosion-proof cabinet.

[0085] In some embodiments, the information storage code is constructed as a barcode or a QR code or an RFID.

[0086] In some embodiments, the controller 6 is configured as an electric control box.

[0087] Secondly, the present disclosure also provides an electrochemical plating system, including the additive replenishing device of the above embodiment.

[0088] In some embodiments, Figure 1 As shown, the electrochemical plating system also includes a machine platform 101 , and a machine box 1 , a source bottle 3 , a code scanning component 4 and a controller 6 are installed on the side of the machine platform 101 .

[0089] The additive replenishing device of the electrochemical plating system of this embodiment has high accuracy in replenishing additives, the machine 101 has high operating stability and low maintenance cost, and the wafer yield is high.

[0090] In other embodiments, the additive replenishing device further includes an explosion-proof cabinet disposed at any position, and the source bottle 3 is stored in the explosion-proof cabinet.

[0091] The above is a detailed introduction to an additive replenishing device and an electrochemical plating system provided by the utility model. This article uses specific embodiments to illustrate the principle and implementation method of the utility model. The description of the above embodiments is only used to help understand the method and core idea of ​​the utility model. It should be pointed out that for ordinary technicians in this technical field, without departing from the principle of the utility model, the utility model can also be improved and modified, and these improvements and modifications also fall within the scope of protection of the claims of the utility model.

Claims

1. An additive replenishing device for an electrochemical plating system, characterized in that: include: A plurality of machine boxes (1), each of the machine boxes (1) comprising a first door body (11) and each of the machine boxes (1) storing a machine bottle (10) for containing additives; A driving component (2) configured to drive the first door body (11) to open or close; at least one source bottle (3), each of the source bottles (3) being used to contain the additive to be supplemented and being provided with an information storage code (31) for storing characteristic information of the additive to be supplemented, the characteristic information at least including the category of the additive to be supplemented; A code scanning component (4) is configured to scan the information storage code (31) of the source bottle (3) to obtain characteristic information of the additive to be supplemented; and The controller (6) is electrically connected to the driving component (2) and the code scanning component (4), and is configured to receive characteristic information of the additive to be replenished and control the driving component (2) based on the characteristic information of the additive to be replenished.

2. The additive replenishing device according to claim 1, characterized in that: The controller (6) is also configured to control the driving component (2) to open the first door (11) of the target machine box among the multiple machine bottles (10) based on the characteristic information of the additive to be replenished, and the type of additives contained in the machine bottles (10) in the target machine box is the same as the type of the additive to be replenished.

3. The additive replenishing device according to claim 1, characterized in that: The characteristic information also includes a validity period of the additive to be replenished, and the controller (6) is further configured to control the driving component (2) to open the first door (11) of the target machine box among the multiple machine bottles (10) based on the characteristic information of the additive to be replenished, the category of the additive contained in the machine bottle (10) in the target machine box is the same as the category of the additive to be replenished and the additive to be replenished is within the validity period.

4. The additive replenishing device according to claim 1, characterized in that: A liquid level sensor is provided in the machine bottle (10) and is configured to detect whether the liquid level of the additive in the machine bottle (10) reaches a preset height.

5. The additive replenishing device according to claim 4, characterized in that: Also includes: The display (5) is configured to output a prompt on a display interface when the liquid level of the additive in the machine bottle (10) reaches a preset height.

6. The additive replenishing device according to any one of claims 1 to 3, characterized in that: Also includes: A display (5) is electrically connected to the code scanning component (4) and is configured to receive and display characteristic information of the additive to be supplemented.

7. The additive replenishing device according to claim 6, characterized in that: The display (5) is further configured to receive user input, and the controller (6) is further configured to control the driving component (2) to drive the first door body (11) to close based on the user input.

8. The additive replenishing device according to any one of claims 1 to 5, characterized in that: The driving component (2) comprises a first driving part (21) and a second driving part (22), wherein the first driving part (21) is arranged on the outer wall surface of the machine box (1), and the second driving part (22) is arranged in the machine box (1) and is rotatably connected to the first driving part (21), and the second driving part (22) is fixed to the first door body (11).

9. The additive replenishing device according to any one of claims 1 to 5, characterized in that: Each of the machine boxes (1) further comprises a second door body (12), wherein the second door body (12) is configured to be able to be opened or closed mechanically.

10. The additive replenishing device according to claim 9, characterized in that: The machine box (1) and the source bottle (3) are both provided with labels (32) for distinguishing the types of additives.

11. The additive replenishing device according to any one of claims 1 to 5, characterized in that: The additive replenishing device further comprises an explosion-proof cabinet, in which the source bottle (3) is stored; and / or The information storage code is configured as a barcode, a two-dimensional code or an RFID.

12. An electrochemical plating system, characterized in that: It comprises the additive replenishing device according to any one of claims 1 to 11.

13. The electrochemical plating system according to claim 12, characterized in that: It also includes a machine platform (101), wherein the machine platform box (1), the source bottle (3), the code scanning component (4) and the controller (6) are installed on the side of the machine platform (101).

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