Single-guide-rail type moving mechanism for upper shaft of zone melting furnace

Abstract

The utility model relates to an upper shaft single guide rail type moving mechanism of a zone melting furnace, which is structurally characterized in that a transition plate is fixed at the top of an upper furnace chamber, a guide rail mounting plate is arranged at the top of the transition plate, M-shaped guide rails mounted along the X direction are oppositely arranged on two sides of the top of the guide rail mounting plate, the M-shaped guide rails are matched and connected with V-shaped guide rails, and a retainer is arranged between the M-shaped guide rails and the V-shaped guide rails. An electric push rod support extending outwards in the X direction is fixed to the center of one end of the guide rail mounting plate, a servo motor and an electric push rod which are connected with each other are installed on the electric push rod support, the electric push rod is parallel to the guide rail mounting plate, and the end of the electric push rod is connected with the center of one side of a connecting rod. And two ends of the other side of the connecting rod are connected with V-shaped guide rails. The utility model has the advantages that the accuracy when the upper lifting frame drives the upper main shaft to move in the X direction can be effectively ensured, the deviation is avoided, the precision error caused by manual assembly can be greatly reduced, and the sealing property of the whole structure can be ensured.

Description

Technical Field

[0001] The utility model relates to an upper shaft single-guide rail type moving mechanism of a zone melting furnace, belonging to the technical field of zone melting equipment. Background Art

[0002] A zone furnace is a device for producing single crystal silicon. The temperature gradient is controlled so that a narrow molten zone moves through the material to grow a single crystal.

[0003] In the prior art, the movement of the upper axis of the zone melting furnace equipment usually relies on a double-layer guide rail to move in the XY direction. The two layers of guide rails are generally fixed only by four M8 bolts, without any fixation or support in the middle. The preload amount during the assembly process cannot be controlled, and the assembly accuracy is purely manually controlled. Under the action of the positive pressure in the furnace chamber, the deformation between the two layers of guide rails is large and uneven, which will cause the upper spindle to deviate, causing the polycrystalline material fixed at the lower end of the upper spindle to deviate from the center of the coil. During the crystal growth process, as the upper axis moves upward, the melting zone gradually deviates from the center, which will seriously affect the single crystal formation rate and single crystal quality.

[0004] On the other hand, the MV-type guide rail mechanism used in the prior art has sliding friction between the moving slider and the sealing fixing ring and O-ring, and coupled with deformation due to positive pressure, there is a large deviation between the actual change of the upper spindle in the X and Y directions and the theoretical change of the servo motor position. At the same time, there is also a risk of air leakage, and maintenance is time-consuming and labor-intensive. Utility Model Content

[0005] The utility model provides a single-guide rail type moving mechanism for the upper shaft of a zone melting furnace, which aims to overcome the above-mentioned shortcomings of the prior art and improve the stability and reliability of the moving mechanism.

[0006] The technical solution of the utility model is: a single-guide rail type moving mechanism for the upper axis of a zone melting furnace, which structure includes an upper furnace chamber, a transition plate is fixed on the top of the upper furnace chamber, a guide rail mounting plate is arranged on the top of the transition plate, M-shaped guide rails installed along the X direction are arranged on both sides of the top of the guide rail mounting plate, the M-shaped guide rails are connected to the V-shaped guide rails, a retaining frame is arranged between the M-shaped guide rails and the V-shaped guide rails, the V-shaped guide rails on both sides are fixed to the bottom of the upper lifting frame, the inner side of the upper lifting frame is the upper spindle, an electric push rod bracket extending outward in the X direction is fixed to the center of one end of the guide rail mounting plate, and a servo motor and an electric push rod connected to each other are installed on the electric push rod bracket, the electric push rod is parallel to the guide rail mounting plate, the end of the electric push rod is connected to the center of one side of the connecting rod, and the two ends of the other side of the connecting rod are connected to one end of the V-shaped guide rails on both sides. The servo motor drives the V-shaped guide rail to move in the X direction along the M-shaped guide rail through the electric push rod and the connecting rod, so that the upper lifting frame moves along the X direction with the upper spindle.

[0007] Preferably, a square sealing block is fixed to the bottom of the upper lifting frame outside the upper spindle, the V-shaped guide rail fits the outer side of the square sealing block, and a tooling rod is connected between the other ends of the V-shaped guide rails on both sides. The V-shaped guide rails are connected into a square by the tooling rods, which can effectively control the gap between the M-shaped guide rail, the V-shaped guide rail and the retaining frame, ensure that the guide rail does not deviate when moving along the X direction, and reduce the precision error caused by manual assembly.

[0008] Preferably, a partition is provided outside the M-shaped guide rail, a top plate is provided outside the partition, and a plurality of M10 bolts are evenly provided along the top plate to contact the bottom of the upper lifting frame in the Y direction. The M10 bolts can be manually adjusted to push the lifting frame out in the Y direction.

[0009] Preferably, there is a 0.2mm gap between the bottom of the square sealing block and the top of the circular sealing block for dynamic friction, so as to ensure the sealing performance.

[0010] Preferably, the bottom surface of the square sealing block is provided with a DLC coating to reduce friction as much as possible.

[0011] Preferably, the two sides and the two sides of the top of the lifting frame are respectively provided with linear displacement sensors, which can monitor the upward deformation displacement and horizontal movement accuracy of the lifting frame under positive pressure in real time, and facilitate judgment of whether the vertical deformation is greater than a preset value or the deviation between the horizontal change detection and the actual motor position input is greater than a preset value.

[0012] The advantages of the utility model are as follows: the structural design is reasonable, which can effectively ensure the accuracy of the upper lifting frame when it moves with the upper spindle in the X direction, avoid deviation, greatly reduce the precision error caused by manual assembly, and ensure the sealing of the overall structure. BRIEF DESCRIPTION OF THE DRAWINGS

[0013] Figure 1 The utility model is a schematic diagram of the top structure of the single-guide rail type moving mechanism of the upper shaft of the zone melting furnace.

[0014] Figure 2 yes Figure 1 AA section view.

[0015] Figure 3 yes Figure 1 BB section view.

[0016] Figure 4 It is a three-dimensional structural schematic diagram of the utility model of the upper shaft single guide rail type moving mechanism of the zone melting furnace when the top of the upper lifting frame is hidden.

[0017] In the figure, 1 is the upper furnace chamber, 2 is the transition plate, 3 is the guide rail mounting plate, 4 is the M-type guide rail, 5 is the V-type guide rail, 6 is the retaining frame, 7 is the upper lifting frame, 8 is the electric push rod bracket, 9 is the servo motor, 10 is the electric push rod, 11 is the connecting rod, 12 is the square sealing block, 13 is the tooling rod, 14 is the partition, 15 is the top plate, 16 is the circular sealing block, and 17 is the linear displacement sensor. DETAILED DESCRIPTION

[0018] The present invention is further described in detail below in conjunction with embodiments and specific implementation methods.

[0019] like Figure 1-4 As shown, a single-guide rail moving mechanism for the upper axis of a zone melting furnace, whose structure includes an upper furnace chamber 1, a transition plate 2 is fixed on the top of the upper furnace chamber 1, a guide rail mounting plate 3 is arranged on the top of the transition plate 2, M-shaped guide rails 4 installed along the X direction are arranged on both sides of the top of the guide rail mounting plate 3, the M-shaped guide rail 4 is connected to the V-shaped guide rail 5, a retaining frame 6 is arranged between the M-shaped guide rail 4 and the V-shaped guide rail 5, the V-shaped guide rails 5 on both sides are fixed on the bottom of an upper lifting frame 7, the inner side of the upper lifting frame 7 is the upper main shaft, an electric push rod bracket 8 extending outward in the X direction is fixed at the center of one end of the guide rail mounting plate 3, a servo motor 9 and an electric push rod 10 connected to each other are installed on the electric push rod bracket 8, the electric push rod 10 is parallel to the guide rail mounting plate 3, the end of the electric push rod 10 is connected to the center of one side of a connecting rod 11, and the two ends of the other side of the connecting rod 11 are connected to one end of the V-shaped guide rails 5 on both sides.

[0020] According to the above structure, the servo motor 9 drives the electric push rod 10 to extend and retract, and the electric push rod 10 drives the V-shaped guide rail 5 to move along the M-shaped guide rail 4 in the X direction through the connecting rod 11, so that the upper lifting frame 7 moves along the X direction with the upper spindle.

[0021] A square sealing block 12 is fixed to the bottom of the upper lifting frame 7 outside the upper spindle, and the V-shaped guide rail 5 fits the outer side of the square sealing block 12. A tooling rod 13 is connected between the other ends of the V-shaped guide rails 5 on both sides.

[0022] According to the above structure, the outer side surface of the square sealing block 12 serves as the installation reference surface of the V-shaped guide rail 5. The square sealing block 12 fixed at the bottom of the upper lifting frame 7 moves with the V-shaped guide rail 5 and always maintains a constant relative position with the V-shaped guide rail 5. The V-shaped guide rail 5 is connected into a square by the tooling rod 13, which can achieve effective control of the gap between the M-shaped guide rail 4, the V-shaped guide rail 5 and the retaining frame 6, ensuring that the guide rail runs in a straight line when moving along the X direction without deviation. This solution can greatly reduce the precision error caused by manual assembly.

[0023] A partition plate 14 is arranged outside the M-shaped guide rail 4 , a top plate 15 is arranged outside the partition plate 14 , and a plurality of M10 bolts contacting the bottom of the upper lifting frame 7 in the Y direction are evenly arranged along the top plate 15 .

[0024] According to the above structure, in view of the small actual demand in the Y direction, partitions 14 and top plates 15 and a row of M10 bolts are set on both sides of the M-shaped guide rail 4. The M10 bolts can be manually adjusted to push the lifting frame 7 out in the Y direction by less than 15 mm.

[0025] There is dynamic friction between the bottom of the square sealing block 12 and the top of the circular sealing block 16 and a gap of 0.2 mm is provided. The bottom surface of the square sealing block 12 is provided with a DLC coating.

[0026] According to the above structure, the maximum weight of the upper spindle under full load condition is 1.8t. In order to reduce the friction between the square sealing block 12 and the circular sealing block 16 and ensure the sealing under positive pressure (5bar), dynamic friction is adopted between the square sealing block 12 and the circular sealing block 16, and a gap of 0.2mm is retained between the square sealing block and the circular sealing block 16. At the same time, a DLC coating process is added to the friction surface at the bottom end of the square sealing block 12 to reduce friction as much as possible.

[0027] Linear displacement sensors 17 are respectively provided on both sides of the upper lifting frame 7 and both sides of the top.

[0028] According to the above structure, in order to monitor the deformation of the upper lifting frame 7 in real time, the linear displacement sensor 17 can monitor the upward deformation displacement and horizontal movement accuracy of the upper lifting frame 7 under positive pressure in real time. If the vertical deformation is greater than a preset value (such as 0.1mm), an alarm can be issued. When the alarm is displayed, the operator should check the centering of the polycrystalline material again. If the deviation between the horizontal change detection and the actual motor position input is greater than the preset value (such as 0.05mm), an alarm will be issued. The above functions can be realized according to the existing technical control system and method.

[0029] All the components mentioned above are prior art, and those skilled in the art can use any model and existing design that can achieve their corresponding functions.

[0030] The above is only a preferred embodiment of the present invention. It should be pointed out that a person skilled in the art can make several modifications and improvements without departing from the inventive concept of the present invention, and these modifications and improvements all fall within the protection scope of the present invention.

Claims

1. A single-guide rail moving mechanism for an upper shaft of a zone melting furnace, the structure of which comprises an upper furnace chamber (1), characterized in that: A transition plate (2) is fixed on the top of the upper furnace chamber (1), a guide rail mounting plate (3) is provided on the top of the transition plate (2), M-shaped guide rails (4) installed along the X direction are provided on both sides of the top of the guide rail mounting plate (3), the M-shaped guide rail (4) is connected to the V-shaped guide rail (5), a retaining frame (6) is provided between the M-shaped guide rail (4) and the V-shaped guide rail (5), the V-shaped guide rails (5) on both sides are fixed to the bottom of the upper lifting frame (7), the inner side of the upper lifting frame (7) is the upper spindle, an electric push rod bracket (8) extending outward in the X direction is fixed at the center of one end of the guide rail mounting plate (3), a servo motor (9) and an electric push rod (10) connected to each other are installed on the electric push rod bracket (8), the electric push rod (10) is parallel to the guide rail mounting plate (3), the end of the electric push rod (10) is connected to the center of one side of the connecting rod (11), and the two ends of the other side of the connecting rod (11) are connected to one end of the V-shaped guide rails (5) on both sides.

2. A zone furnace upper shaft single guide rail moving mechanism as claimed in claim 1, characterized in that: A square sealing block (12) is fixed to the bottom of the upper lifting frame (7) outside the upper main shaft, the V-shaped guide rail (5) fits the outer side of the square sealing block (12), and a tooling rod (13) is connected between the other ends of the V-shaped guide rails (5) on both sides.

3. The single-guide rail moving mechanism for the upper shaft of a zone melting furnace as claimed in claim 1, characterized in that: A partition plate (14) is arranged outside the M-shaped guide rail (4), a top plate (15) is arranged outside the partition plate (14), and a plurality of M10 bolts are evenly arranged along the top plate (15) for contacting the bottom of the upper lifting frame (7) in the Y direction.

4. A zone furnace upper shaft single guide rail moving mechanism as claimed in claim 2, characterized in that: There is dynamic friction between the bottom of the square sealing block (12) and the top of the circular sealing block (16), and a gap of 0.2 mm is provided.

5. A zone furnace upper shaft single guide rail moving mechanism as claimed in claim 4, characterized in that: The bottom surface of the square sealing block (12) is provided with a DLC coating.

6. A single-guide rail moving mechanism for the upper shaft of a zone melting furnace as described in any one of claims 1 to 5, characterized in that: Linear displacement sensors (17) are respectively provided on both sides of the upper lifting frame (7) and both sides of the top end.

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