Input airflow distribution control valve of substrate high-temperature baking furnace

Abstract

The utility model discloses an input airflow allocation control valve of a substrate high-temperature baking furnace, which comprises an allocation valve body, a fresh air interface, a backflow interface and an air supply interface are arranged on the allocation valve body, an allocation valve core is rotatably arranged in a valve cavity of the allocation valve body, and a valve core allocation window is arranged on the allocation valve core; the position of the valve element allocation window corresponds to the fresh air connector and the backflow connector. And the central lines of the fresh air interface, the backflow interface and the air supply interface are vertically crossed in space. The blending valve element is of a cylindrical cup-shaped structure, and a cup opening of the blending valve element faces the air supply connector. And the valve core blending window is arranged along the cylindrical wall surface of the blending valve core. And the window wrap angle delta of the valve core blending window is 160-200 degrees. The opening end sectional areas of the fresh air connector and the backflow connector are equal. The airflow distribution control valve not only can effectively reduce the heating energy consumption of the baking furnace, but also can effectively stabilize the baking temperature of the baking cavity so as to ensure the baking quality of the glass substrate of the flat-panel display.

Description

Technical Field

[0001] The utility model relates to a glass substrate production device used for a liquid crystal display, in particular to a hot air baking device for baking a glass substrate at a high temperature, specifically a control valve for inputting external airflow into a baking chamber of the hot air baking device. Background Art

[0002] The glass substrate baking furnace is a special hard film baking equipment for curing the photoresist coated on the surface of the substrate. The existing glass substrate baking equipment is mainly composed of a baking furnace body, a glass card rack and a heating and blowing device. The baking furnace cavity is a very large chamber that can accommodate multiple layers of glass substrates. The glass card rack and the heating and blowing device are both located in the heating chamber of the baking furnace body. The fresh air outside the furnace cavity is heated into high-temperature hot air by the heating chamber and blown to the glass substrate to be baked on the glass card rack and then discharged through the exhaust pipe. In the baking process of the glass substrate, the baking hot air in the baking chamber is discharged out of the cavity and fresh air outside the cavity is replenished at the same time. Although this structure can discharge harmful substances such as organic volatiles and dust particles in the baking hot air out of the baking cavity, during the heating, emptying and replacement of the fresh air in the baking furnace, it will cause a drastic fluctuation in the furnace cavity temperature, which is not conducive to the photoresist curing of the glass substrate, and directly affects the stability of the performance indicators of the glass substrate and the qualified rate of the substrate; on the other hand, it wastes a lot of heat energy in the baking hot air, increases the energy consumption of the baking furnace, greatly limits the improvement of baking efficiency, and increases baking production costs. Utility Model Content

[0003] In view of the above-mentioned deficiencies in the prior art, the technical problem to be solved by the utility model is to provide an input airflow allocation control valve for a substrate high-temperature baking furnace which can effectively reduce the heating energy consumption of the baking furnace and stabilize the baking temperature of the baking chamber.

[0004] In order to solve the above technical problems, the utility model discloses an air flow adjustment control valve for inputting into a substrate high-temperature baking furnace, comprising an adjustment valve body, on which a fresh air interface, a return flow interface and an air supply interface are arranged, and an adjustment valve core is rotatably arranged in a valve cavity of the adjustment valve body, and a valve core adjustment window is arranged on the adjustment valve core; the position of the valve core adjustment window corresponds to the fresh air interface and the return flow interface.

[0005] Preferably, the center lines of the fresh air interface, the return flow interface and the air supply interface intersect vertically in space, and the mouth ends of the fresh air interface, the return flow interface and the air supply interface are provided with corresponding connecting flanges.

[0006] Preferably, the regulating valve core is in a cylindrical cup-shaped structure, and the cup mouth of the regulating valve core faces the air supply interface; the valve core regulating window is arranged along the cylindrical wall surface of the regulating valve core.

[0007] Preferably, the window wrap angle δ of the valve core adjustment window is 160°-200°.

[0008] Preferably, the center line of the regulating valve core and the center line of the air supply interface are on the same straight line.

[0009] Preferably, the cross-sectional areas of the fresh air interface and the return air interface are equal.

[0010] In the above technical solution, since the valve body of the mixed flow regulating valve is provided with a fresh air interface, a return flow interface and an air supply interface, and a regulating valve core is rotatably provided in the valve cavity of the regulating valve body, the replenishment flow rate and flow of the fresh air and the replenishment flow rate and flow of the recycled high-temperature hot air are precisely adjusted and controlled by changing the position of the regulating window on the regulating valve core relative to the fresh air interface and the return flow interface, so as to form a supply air flow rate and flow rate with a suitable temperature and a suitable replenishment air flow freshness, reduce the energy loss of baking, and smooth the excessive fluctuation of the baking temperature, so as to realize the precise control of the cleanliness of the baking hot air. After the high-temperature hot air is returned and mixed with the replenished fresh air, the air is supplied to the heating cavity, thereby increasing the basic temperature of the newly input air in the furnace cavity, reducing the heating energy consumption of the entire baking furnace, stabilizing the baking temperature in the baking cavity, effectively smoothing the temperature fluctuation in the baking cavity, and avoiding the adverse effects of temperature fluctuation on the glass substrate. The valve structure is not only simple to implement, but also easy to adjust and control. BRIEF DESCRIPTION OF THE DRAWINGS

[0011] The input air flow adjustment control valve of the substrate high temperature baking furnace of the utility model is further described in detail below in conjunction with the drawings and specific implementation methods.

[0012] Figure 1 It is a cross-sectional structural schematic diagram of a specific implementation of the input airflow adjustment control valve of the substrate high-temperature baking furnace of the utility model;

[0013] Figure 2 yes Figure 1 A-A section view;

[0014] Figure 3 yes Figure 1 Schematic diagram of the cross-sectional structure of the middle adjustment valve core;

[0015] Figure 4 yes Figure 3 B-B section view.

[0016] In the figure, 1 is the regulating valve body, 2 is the fresh air interface, 3 is the return flow interface, 4 is the regulating valve core, 5 is the valve core regulating window, 6 is the air supply interface, and 7 is the valve core motor. DETAILED DESCRIPTION

[0017] like Figure 1 and Figure 2The substrate high-temperature baking furnace shown in the figure has an input air flow adjustment control valve, which includes an adjustment valve body 1, on which a fresh air interface 2, a reflux interface 3 and an air supply interface 6 are arranged, and the center lines of the fresh air interface 2, the reflux interface 3 and the air supply interface 6 are vertically intersected in space, and the mouth positions of the fresh air interface 2, the reflux interface 3 and the air supply interface 6 are all provided with corresponding connecting flanges, and the cross-sectional areas of the flow mouth ends of the fresh air interface 2 and the reflux interface 3 are equal, so as to facilitate proportional adjustment of the flow rate of the flowing gas.

[0018] A regulating valve core 4 is rotatably arranged in the valve cavity of the regulating valve body 1. The regulating valve core 4 is in a round cup-shaped structure. The cup mouth of the regulating valve core 4 faces the air supply interface 6. The cup bottom position of the regulating valve core 4 is connected to the output shaft of the valve core motor 7 through a coupling. The center line of the regulating valve core 4 and the center line of the air supply interface 6 are on the same straight line.

[0019] like Figure 3 and Figure 4 As shown, a valve core adjustment window 5 is provided on the valve core wall of the adjustment valve core 4, and the valve core adjustment window 5 corresponds to the fresh air interface 2 and the return interface 3, that is, the valve core adjustment window 5 can be connected with the fresh air interface 2 and the return interface 3 at the same time, or it can be connected with the fresh air interface 2 and closed with the return interface 3, or it can be connected with the return interface 3 and closed with the fresh air interface 2. The valve core adjustment window 5 is arranged along the circumference of the valve core wall of the adjustment valve core 4, and the window wrap angle of the valve core adjustment window 5 is 180°, and it can also be preferably within the wrap angle range of 160°-200°. The adjustment valve core 4 is made of non-metallic materials such as nylon, and the adjustment valve body 1 is made of materials such as cast aluminum.

[0020] The above only lists some preferred embodiments of the present invention, but the present invention is not limited thereto, and many improvements and changes can be made. As long as the improvements and changes are made on the basis of the basic principles of the present invention, they should be regarded as falling within the scope of protection of the present invention.

Claims

1. A substrate high temperature baking furnace input air flow adjustment control valve, comprising an adjustment valve body (1), characterized in that: The regulating valve body (1) is provided with a fresh air interface (2), a return flow interface (3) and an air supply interface (6); a regulating valve core (4) is rotatably provided in a valve cavity of the regulating valve body (1); a valve core regulating window (5) is provided on the regulating valve core (4); the position of the valve core regulating window (5) corresponds to the fresh air interface (2) and the return flow interface (3).

2. The air flow control valve for inputting the substrate high temperature baking furnace according to claim 1 is characterized in that: The center lines of the fresh air interface (2), the return flow interface (3) and the air supply interface (6) intersect vertically in space, and the mouth ends of the fresh air interface (2), the return flow interface (3) and the air supply interface (6) are provided with corresponding connecting flanges.

3. The air flow control valve for inputting the substrate high temperature baking furnace according to claim 1, characterized in that: The regulating valve core (4) is in the form of a cylindrical cup, with the cup opening of the regulating valve core (4) facing the air supply interface (6); the valve core regulating window (5) is arranged along the cylindrical wall surface of the regulating valve core (4).

4. The air flow control valve for inputting the substrate high temperature baking furnace according to claim 1, characterized in that: The window wrap angle δ of the valve core adjustment window (5) is 160°-200°.

5. The air flow control valve for inputting the substrate high temperature baking furnace according to claim 1, characterized in that: The center line of the regulating valve core (4) and the center line of the air supply interface (6) are on the same straight line.

6. The air flow control valve for inputting into a substrate high temperature baking furnace according to claim 1, characterized in that: The cross-sectional areas of the fresh air interface (2) and the return air interface (3) are equal.

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