Oil-filled pressure sensor core body with good insulating strength

Abstract

The utility model discloses an oil-filled pressure sensor core body with good insulating strength, which relates to the technical field of pressure sensor core bodies, and comprises a base main body, Kovar tube legs, an insulator, a ceramic gasket, a pressure chip, a diaphragm and a compression ring, the center of the base main body is provided with a stepped channel, the diameter of the stepped channel is sequentially reduced from top to bottom, and the diameter of the stepped channel is smaller than that of the pressure chip. The insulator and the ceramic gasket are both installed in the stepped channel, the insulator is located at the upper end of the ceramic gasket, a plurality of insulating tube leg holes are formed in the insulator, a plurality of gasket tube leg holes are formed in the ceramic gasket, the lower end of each Kovar tube leg sequentially penetrates through the corresponding insulating tube leg hole and the corresponding gasket tube leg hole, and the pressure chip is installed on the ceramic gasket. The Kovar tube legs are electrically connected with the pressure chip, a pressing ring is arranged at the lower end of the base body, a pressure inlet is formed in the center of the pressing ring, a diaphragm is clamped between the pressing ring and the lower end of the base body, and the space between the diaphragm and the pressure chip is filled with a pressure transmitting medium. The high-voltage power cable has good insulating strength.

Description

Technical Field

[0001] The utility model relates to the technical field of pressure sensor cores, in particular to an oil-filled pressure sensor core with good insulation strength. Background Art

[0002] Usually, when packaging MEMS silicon pressure sensors, it is necessary to connect the semiconductor silicon pads to the Kovar leads through a metal seat with Kovar leads, so as to lead the sensor signal to the outside of the packaging structure to achieve signal transmission.

[0003] However, in real applications, some occasions require very high insulation strength, such as air conditioning, automobile and other industries. The conventional way is to solve this problem by using ceramic pressure sensors with slightly lower accuracy but better insulation strength, but their insulation strength is still not very good.

[0004] In this regard, the existing announcement number CN215448263U discloses "a diaphragm type micro pressure sensitive element", in which an insulating member is used to improve the overall insulation. However, since the diameter of the tube leg hole provided therein is small and the gold-plated Kovar tube leg needs to be installed in the tube leg hole, the distance between the gold-plated Kovar tube leg and the inner wall of the tube leg hole is small. Even if an insulating member is provided between the two, the insulation effect is still not very ideal.

[0005] Therefore, there is an urgent need in the art for an oil-filled pressure sensor core with good insulation strength to solve the above problems. Utility Model Content

[0006] The purpose of the utility model is to provide an oil-filled pressure sensor core with good insulation strength to solve the problems existing in the above-mentioned prior art. The distance between the Kovar tube legs and the inner wall of the stepped channel is large, thereby effectively improving the overall insulation strength.

[0007] To achieve the above purpose, the utility model provides the following solutions:

[0008] The utility model discloses an oil-filled pressure sensor core with good insulation strength, comprising a base body, a Kovar tube leg, an insulator, a ceramic gasket, a pressure chip, a diaphragm and a pressure ring, wherein a stepped channel is arranged at the center of the base body, the diameter of the stepped channel decreases from top to bottom, the insulator and the ceramic gasket are both installed in the stepped channel, the insulator is located at the upper end of the ceramic gasket, a plurality of insulation tube leg holes are arranged on the insulator, a plurality of gasket tube leg holes are arranged on the ceramic gasket, and a plurality of insulation tubes are arranged on the ceramic gasket. The positions of the leg holes and the plurality of gasket leg holes correspond one to one, the Kovar leg is provided with a plurality of legs, the lower end of each Kovar leg passes through the corresponding insulating leg hole and the gasket leg hole in sequence, the pressure chip is mounted on the ceramic gasket, each Kovar leg is electrically connected to the pressure chip, the lower end of the base body is provided with the pressure ring, the center of the pressure ring is provided with a pressure inlet, the diaphragm is clamped between the pressure ring and the lower end of the base body, and the space between the diaphragm and the pressure chip is filled with a pressure transmission medium.

[0009] Preferably, the insulator is made of glass;

[0010] The base body and the insulator, and the insulator and the Kovar tube leg are fixed by sintering.

[0011] Preferably, the Kovar tube legs are connected to the pressure chip via gold wires.

[0012] Preferably, the pressure transmission medium is silicone oil;

[0013] An oil injection channel is provided between the base body and the insulator, an oil hole seal is provided at the upper end of the oil injection channel, and a lower end of the oil injection channel is located between the diaphragm and the pressure chip.

[0014] Preferably, the oil hole sealing member is a steel ball.

[0015] Preferably, a tapered opening is provided at the center of the lower end of the base body, the inner diameter of the tapered opening gradually increases from top to bottom, and the tapered opening is connected to the stepped passage.

[0016] Preferably, a chip mounting groove is provided at the center of the ceramic gasket, and the pressure chip is bonded in the chip mounting groove by an adhesive.

[0017] Preferably, a sealing groove is provided on the outer wall of the base body, and a sealing ring is provided in the sealing groove.

[0018] Preferably, an air duct is fixed on the insulator, the upper end of the air duct passes through the upper surface of the insulator, and the lower end of the air duct is connected to the pressure chip.

[0019] Preferably, the Kovar tube leg is also connected to a thick film circuit.

[0020] Compared with the prior art, the utility model has achieved the following technical effects:

[0021] The utility model can effectively increase the distance between the Kovar tube leg and the inner wall of the base body, and fix the Kovar tube leg by the insulator, thereby effectively improving the overall insulation strength and ensuring the electrical performance, safety and reliability of the pressure sensor core. BRIEF DESCRIPTION OF THE DRAWINGS

[0022] In order to more clearly illustrate the embodiments of the utility model or the technical solutions in the prior art, the drawings required for use in the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the utility model. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0023] Figure 1 It is a cross-sectional view of the core of the oil-filled pressure sensor with good insulation strength according to an embodiment of the utility model;

[0024] Figure 2 It is a front view of the core of the oil-filled pressure sensor with good insulation strength according to an embodiment of the utility model;

[0025] Figure 3 A top view of an oil-filled pressure sensor core having good insulation strength according to an embodiment of the utility model;

[0026] In the figure: 1-base body; 2-Kovar tube leg; 3-insulator; 4-ceramic gasket; 5-pressure ring; 6-diaphragm; 7-gold wire; 8-oil injection channel; 9-oil hole seal; 10-sealing ring; 11-thick film circuit; 12-air guide tube; 13-pressure chip. DETAILED DESCRIPTION

[0027] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0028] The purpose of the utility model is to provide an oil-filled pressure sensor core with good insulation strength to solve the problems existing in the above-mentioned prior art. The distance between the Kovar tube legs and the inner wall of the stepped channel is large, thereby effectively improving the overall insulation strength.

[0029] In order to make the above-mentioned purposes, features and advantages of the present invention more obvious and easy to understand, the present invention is further described in detail below in conjunction with the accompanying drawings and specific implementation methods.

[0030] like Figure 1-Figure 3 As shown, the utility model provides an oil-filled pressure sensor core with good insulation strength, including a base body 1, a Kovar tube leg 2, an insulator 3, a ceramic gasket 4, a pressure chip 13, a diaphragm 6 and a pressure ring 5. Figure 1 As shown, a stepped channel is provided at the center of the base body 1, and the stepped channel has a total of three steps, and the diameter of the stepped channel decreases from top to bottom. The insulator 3 and the ceramic gasket 4 are both installed in the stepped channel, and the insulator 3 is located at the upper end of the ceramic gasket 4. The insulator 3 is provided with a plurality of insulating tube leg holes, and the ceramic gasket 4 is provided with a plurality of gasket tube leg holes. The positions of the plurality of insulating tube leg holes and the plurality of gasket tube leg holes correspond to each other. The Kovar tube leg 2 is provided with a plurality of holes, and the number is the same as the number of insulating tube leg holes and gasket tube leg holes, specifically including but not limited to six. The lower end of each Kovar tube leg 2 passes through the corresponding insulating tube leg hole and gasket tube leg hole in turn, and the lower end of the Kovar tube leg 2 is located in the gasket tube leg hole. The pressure chip 13 is installed on the ceramic gasket 4, and each Kovar tube leg 2 is electrically connected to the pressure chip 13. A pressure ring 5 is provided at the lower end of the base body 1, and the edge of the pressure ring 5 can be fixed to the lower end of the base body 1 by welding or screws. A pressure inlet is provided at the center of the pressure ring 5. A diaphragm 6 is clamped between the pressure ring 5 and the lower end of the base body 1. The diaphragm 6 is an existing corrugated diaphragm 6. The corrugated diaphragm 6 is usually a circular diaphragm 6 with concentric rings. The corrugated diaphragm 6 is often divided into arc shape, sinusoidal shape, triangle shape and trapezoid shape according to its shape. A pressure transmission medium is filled between the diaphragm 6 and the pressure chip 13, and the pressure transmission medium can transmit the pressure exerted on the diaphragm 6 to the pressure chip 13.

[0031] In actual use, when the external pressure squeezes the diaphragm 6, the diaphragm 6 will deform, and then the pressure generated by the deformation of the diaphragm 6 will be transmitted to the pressure chip 13 through the pressure transmission medium. The pressure chip 13 detects the pressure value and transmits the relevant data to the outside world through the Kovar tube leg 2.

[0032] In this embodiment, the insulator 3 is made of glass.

[0033] Furthermore, the base body 1 and the insulator 3, and the insulator 3 and the kovar tube leg 2 are fixed by sintering glass powder. This arrangement is not only firmly fixed, but also can utilize the insulator 3 to improve the overall insulation strength.

[0034] In this embodiment, each Kovar tube leg 2 is connected to the pressure chip 13 via a gold wire 7 , so that the pressure value detected by the pressure chip 13 is transmitted to the outside through the Kovar tube leg 2 .

[0035] As for the pressure chip 13, an existing silicon chip can be used.

[0036] In this embodiment, the pressure transmission medium is silicone oil.

[0037] In order to realize the injection of silicone oil, an oil injection channel 8 is provided between the base body 1 and the insulator 3 , an oil hole seal 9 is provided at the upper end of the oil injection channel 8 , and the lower end of the oil injection channel 8 is located between the diaphragm 6 and the pressure chip 13 .

[0038] Before actual use, silicone oil can be injected along the oil injection channel 8 until the cavity between the diaphragm 6 and the pressure chip 13 is filled with silicone oil. Then the upper end of the oil injection channel 8 is sealed with an oil hole seal 9 to ensure its sealing and prevent silicone oil from leaking.

[0039] In this embodiment, the oil hole sealing member 9 is a steel ball, which is fixed to the upper end of the oil injection channel 8 by welding, so as to seal the oil injection channel 8 and prevent silicone oil leakage.

[0040] In other embodiments, the oil hole seal 9 may also be replaced by a pin.

[0041] In this embodiment, a conical opening is provided at the center of the lower end of the base body 1, the inner diameter of the conical opening gradually increases from top to bottom, and the conical opening is connected to the stepped channel. The ceramic gasket 4 is arranged at the upper end of the conical opening, and the diaphragm 6 is arranged at the lower end of the conical opening. The conical opening can be used to accommodate the deformation of the silicone oil, and there is enough space to meet the deformation of the diaphragm 6.

[0042] In this embodiment, a chip mounting groove is provided at the center of the ceramic gasket 4, and the pressure chip 13 is bonded in the chip mounting groove by an adhesive.

[0043] In this embodiment, a sealing groove is provided on the outer wall of the base body 1, and a sealing ring 10 is provided in the sealing groove. When the base body 1 needs to be installed, the sealing ring 10 can ensure the sealing between the base body 1 and the device to be installed.

[0044] In this embodiment, an air duct 12 is fixed on the insulator 3, the upper end of the air duct 12 passes through the upper surface of the insulator 3, and the lower end of the air duct 12 is connected to the pressure chip 13. Since the pressure chip 13 is an existing silicon chip with holes, when it senses the pressure from below, the internal gas will be discharged upward through the air duct 12.

[0045] In this embodiment, the Kovar tube leg 2 is also connected to a thick film circuit 11. The thick film circuit 11 can be an existing circuit board. It is used to receive and process the electrical signal from the pressure chip 13 and transmit it to the rear control terminal.

[0046] The present invention uses specific examples to illustrate the principle and implementation of the present invention. The above examples are only used to help understand the method and core idea of ​​the present invention. At the same time, for those skilled in the art, according to the idea of ​​the present invention, there will be changes in the specific implementation and application scope. In summary, the content of this specification should not be understood as limiting the present invention.

Claims

1. An oil-filled pressure sensor core with good insulation strength, characterized in that: The invention comprises a base body, a Kovar leg, an insulator, a ceramic gasket, a pressure chip, a diaphragm and a pressure ring. A stepped channel is provided at the center of the base body, and the diameter of the stepped channel decreases from top to bottom. The insulator and the ceramic gasket are both installed in the stepped channel. The insulator is located at the upper end of the ceramic gasket. A plurality of insulating leg holes are provided on the insulator, and a plurality of gasket leg holes are provided on the ceramic gasket. The positions of the plurality of insulating leg holes and the plurality of gasket leg holes correspond to each other. A plurality of Kovar legs are provided, and the lower end of each Kovar leg passes through the corresponding insulating leg hole and the gasket leg hole in sequence. The pressure chip is installed on the ceramic gasket, and each Kovar leg is electrically connected to the pressure chip. The pressure ring is provided at the lower end of the base body, and a pressure inlet is provided at the center of the pressure ring. The diaphragm is sandwiched between the pressure ring and the lower end of the base body, and a pressure transmission medium is filled between the diaphragm and the pressure chip.

2. The oil-filled pressure sensor core with good insulation strength according to claim 1, characterized in that: The insulator is made of glass; The base body and the insulator, and the insulator and the Kovar tube leg are fixed by sintering.

3. The oil-filled pressure sensor core with good insulation strength according to claim 1, characterized in that: The Kovar tube legs are connected to the pressure chip via gold wires.

4. The oil-filled pressure sensor core with good insulation strength according to claim 1, characterized in that: The pressure transmission medium is silicone oil; An oil injection channel is provided between the base body and the insulator, an oil hole seal is provided at the upper end of the oil injection channel, and a lower end of the oil injection channel is located between the diaphragm and the pressure chip.

5. The oil-filled pressure sensor core with good insulation strength according to claim 4, characterized in that: The oil hole sealing element is a steel ball.

6. The oil-filled pressure sensor core with good insulation strength according to claim 1, characterized in that: A tapered opening is provided at the center of the lower end of the base body, the inner diameter of the tapered opening gradually increases from top to bottom, and the tapered opening is communicated with the stepped passage.

7. The oil-filled pressure sensor core with good insulation strength according to claim 1, characterized in that: A chip mounting groove is provided at the center of the ceramic gasket, and the pressure chip is bonded in the chip mounting groove by an adhesive.

8. The oil-filled pressure sensor core with good insulation strength according to claim 1, characterized in that: A sealing groove is arranged on the outer wall of the base body, and a sealing ring is arranged in the sealing groove.

9. The oil-filled pressure sensor core with good insulation strength according to claim 1, characterized in that: An air guide tube is fixed on the insulator, the upper end of the air guide tube passes through the upper surface of the insulator, and the lower end of the air guide tube is connected to the pressure chip.

10. The oil-filled pressure sensor core with good dielectric strength according to claim 1, characterized in that: The Kovar leg is also connected to a thick film circuit.

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