Quartz boat bearing strengthening structure
By designing support plates, support rods, snap rings and placement rods on the quartz boat, its stability in high temperature environment is enhanced, and the problem of existing quartz boats being prone to deformation or fragmentation at high temperatures is solved, ensuring silicon The baking process of the slices goes smoothly.
Patent Information
- Application Number
- CN202323331034.2
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2023-12-07
- Publication Date
- 2024-12-27
- Estimated Expiration
- 2033-12-07
AI Technical Summary
The existing quartz boat load-bearing reinforced structure is prone to deform or fragmentation due to gravity in high temperature environments, resulting in the inability to use the silicon wafer and economic losses.
A structure including a first support plate, a second support plate, a support rod, a connecting plate, a lifting column, a snap ring, a reinforced load-bearing rod and a placement rod are designed. The configuration of the snap ring, a reinforced load-bearing rod and a placement rod is enhanced. The stability of the quartz boat prevents deformation or fragmentation.
It effectively prevents the quartz boat from deforming or breaking due to gravity in a high temperature environment, ensures the stability and integrity of the silicon wafer during baking, and extends the service life of the quartz boat.
Smart Images
Figure CN222260987U_ABST
Abstract
Description
Technical Field
[0001] The utility model belongs to the field of solar cell production and semiconductor manufacturing related technical fields, and specifically relates to a quartz boat load-bearing reinforcement structure. Background Art
[0002] In the preparation process of photovoltaic cells, a quartz boat carrying silicon wafers is required in a process furnace (such as a diffusion furnace or a deposition furnace), and a push-pull boat lifts the boat carrying the silicon wafers to send the silicon wafers into the process furnace. In the production process of silicon wafers, the quartz boat plays an important bearing role, especially in the process in a high-temperature environment, the quartz boat even plays an irreplaceable role. The existing quartz boat load-bearing reinforcement structure is mainly composed of a first support plate, a second support plate, a first support rod, a second support rod, a third support rod, a fourth support rod, a connecting plate, a lifting column and other components. When the existing quartz boat load-bearing reinforcement structure is in use, the quartz boat is deformed or broken due to the effect of gravity in a high-temperature environment, thereby making the baked silicon wafers unusable, which in turn causes certain economic losses. Therefore, a quartz boat load-bearing reinforcement structure is indispensable. Utility Model Content
[0003] The purpose of the utility model is to provide a quartz boat load-bearing reinforcement structure to solve the problem proposed in the above background technology that when the existing quartz boat load-bearing reinforcement structure is used, the quartz boat may be deformed or broken due to the effect of gravity in a high temperature environment, thereby rendering the baked silicon wafer unusable, thereby causing certain economic losses.
[0004] To achieve the above purpose, the utility model provides the following technical solutions: a quartz boat load-bearing reinforcement structure, comprising
[0005] A first support plate and a second support plate disposed at the right side of the first support plate;
[0006] A connection plate is disposed at the outer side of each of the first support plate and the second support plate, and a lifting column is disposed at the outer side of each of the connection plates;
[0007] A third support rod and a fourth support rod are respectively installed at the front and rear sides of the inner sides of the first support plate and the second support plate;
[0008] The first support rod and the second support rod are installed on the front and rear sides of the inner sides of the first support plate and the second support plate and below the third support rod and the fourth support rod;
[0009] The first support rod, the second support rod, the third support rod and the fourth support rod are all provided with a clamping ring at the external position, the reinforcing load-bearing rod is provided at the inner position of the clamping ring, and the inner position of the reinforcing load-bearing rod is provided with a placement rod. The setting of the clamping ring, the reinforcing load-bearing rod and the placement rod enhances the stability of the load-bearing reinforcement structure of the quartz boat, and prevents the quartz boat from being deformed or broken due to the action of gravity in a high temperature environment.
[0010] Preferably, a through hole is provided at an inner position of the clamping ring, and connecting holes are provided inside the first support rod, the second support rod, the third support rod and the fourth support rod at positions corresponding to the through hole.
[0011] Preferably, the diameters of the connecting hole and the through hole are the same, and internal threads are provided at the inner walls of the connecting hole and the through hole.
[0012] Preferably, a fastening nut is provided inside the connecting hole and the through hole and at an outer side of the clamping ring, and an external thread is provided at an outer wall of the fastening nut.
[0013] Preferably, the fastening nut is connected with the internal threads of the connecting hole and the inner wall of the through hole through the external threads of the outer wall, so as to fix the clamping ring on the outside of the first support rod, the second support rod, the third support rod and the fourth support rod.
[0014] Preferably, a placement groove is provided inside the reinforced load-bearing rod and at an external position of the placement rod, and a magnet plate is embedded at an inner wall position of the placement groove.
[0015] Preferably, the outer diameter of the placement rod is equal to the inner diameter of the placement slot, and the placement rod is connected to the placement slot by plugging.
[0016] Preferably, the placement rod is connected to the magnet plate by magnetic adsorption, and the stability of the placement rod is enhanced by the provision of the magnet plate.
[0017] Compared with the prior art, the utility model provides a quartz boat load-bearing reinforcement structure, which has the following beneficial effects:
[0018] 1. In the quartz boat load-bearing reinforcement structure, when using the quartz boat load-bearing reinforcement structure, first weld the clamping rings at the two end positions of the reinforcement load-bearing rod, and then clamp the clamping rings at the left and right sides of the upper ends of the first support rod, the second support rod, the third support rod and the fourth support rod respectively, and then fix the clamping ring to the outside of the first support rod, the second support rod, the third support rod and the fourth support rod by tightening the nut, and then insert the placement rod into the placement groove on the inner side of the reinforcement load-bearing rod, then the silicon wafer can be placed on the placement rod, and then the quartz boat load-bearing reinforcement structure is placed in the process furnace for baking through the lifting column. Through the setting of the clamping ring, the reinforcement load-bearing rod and the placement rod, the stability of the quartz boat load-bearing reinforcement structure is enhanced, and the quartz boat is prevented from being deformed or broken due to the action of gravity in a high temperature environment, so that the quartz boat load-bearing reinforcement structure can be better used for baking silicon wafers. BRIEF DESCRIPTION OF THE DRAWINGS
[0019] Figure 1 It is a schematic diagram of the overall structure of the load-bearing reinforcement structure of the quartz boat of the utility model.
[0020] Figure 2 It is a structural schematic diagram of the back side of the second supporting plate of the load-bearing reinforcement structure of the quartz boat of the utility model.
[0021] Figure 3 It is a structural schematic diagram of an inclined side view of the load-bearing reinforcement structure of a quartz boat of the utility model.
[0022] Figure 4 It is a structural schematic diagram of a top view of the load-bearing reinforcement structure of a quartz boat of the utility model.
[0023] Figure 5 It is a structural schematic diagram of the front view of the load-bearing reinforcement structure of the quartz boat of the utility model.
[0024] Figure 6 It is a schematic diagram of the enlarged structure of the load-bearing reinforcement structure clamp ring of the quartz boat of the utility model.
[0025] Figure 7 It is a structural schematic diagram of the interior of the placement groove of the load-bearing reinforcement structure of the quartz boat of the utility model.
[0026] In the figure: 1. first support rod; 2. second support rod; 3. connecting plate; 4. lifting column; 5. first support plate; 6. snap ring; 7. fourth support rod; 8. placement rod; 9. second support plate; 10. fourth support rod; 11. fastening nut; 12. connecting hole; 13. through hole; 14. external thread; 15. internal thread; 16. reinforced load-bearing rod; 17. magnet plate; 18. placement groove. DETAILED DESCRIPTION
[0027] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.
[0028] The utility model provides Figure 1-7 The quartz boat load-bearing reinforcement structure shown in the figure is a quartz boat load-bearing reinforcement structure, comprising a first support plate 5 and a second support plate 9 arranged at the right side of the first support plate 5; a connecting plate 3 is arranged at the outer side of the first support plate 5 and the second support plate 9, and a lifting column 4 is arranged at the outer side of the connecting plate 3; a third support rod 10 and a fourth support rod 7 are respectively installed at the inner front and rear sides of the first support plate 5 and the second support plate 9; the inner front and rear sides of the first support plate 5 and the second support plate 9 and the third support rod 10 and The first support rod 1 and the second support rod 2 are installed at the lower position of the fourth support rod 7; the first support rod 1, the second support rod 2, the third support rod 10 and the fourth support rod 7 are all provided with a clamping ring 6 at the external position, the inner position of the clamping ring 6 is provided with a reinforcing load-bearing rod 16, and the inner position of the reinforcing load-bearing rod 16 is provided with a placing rod 8. The setting of the clamping ring 6, the reinforcing load-bearing rod 16 and the placing rod 8 strengthens the stability of the load-bearing reinforcement structure of the quartz boat, and prevents the quartz boat from being deformed or broken due to the action of gravity in a high temperature environment.
[0029] like Figure 1 and Figure 4 As shown, in order to prevent the quartz boat from being deformed or broken due to the effect of gravity in a high temperature environment, when using the quartz boat load-bearing reinforcement structure, the clamping ring 6 is first welded to the two end positions of the reinforcing load-bearing rod 16, and then the clamping ring 6 is clamped at the left and right sides of the upper ends of the first support rod 1, the second support rod 2, the third support rod 10, and the fourth support rod 7 respectively, and then the clamping ring 6 is fixed to the outside of the first support rod 1, the second support rod 2, the third support rod 10 and the fourth support rod 7 by tightening the nut 11, and then the placement rod 8 is inserted into the placement groove 18 on the inner side of the reinforcing load-bearing rod 16. At this time, the silicon wafer can be placed on the placement rod 8, and then the quartz boat load-bearing reinforcement structure is placed in the process furnace for baking through the lifting column 4. Through the arrangement of the clamping ring 6, the reinforcing load-bearing rod 16 and the placement rod 8, the stability of the quartz boat load-bearing reinforcement structure is enhanced, and the quartz boat is prevented from being deformed or broken due to the effect of gravity in a high temperature environment, so that the quartz boat load-bearing reinforcement structure can be better used for baking silicon wafers.
[0030] A through hole 13 is provided at the internal position of the clamping ring 6, and connecting holes 12 are provided inside the first support rod 1, the second support rod 2, the third support rod 10 and the fourth support rod 7 and at positions corresponding to the through hole 13. The diameters of the connecting hole 12 and the through hole 13 are the same, and internal threads 15 are provided at the inner wall positions of the connecting hole 12 and the through hole 13. A fastening nut 11 is provided inside the connecting hole 12 and the through hole 13 and at the outer position of the clamping ring 6, and an external thread 14 is provided at the outer wall position of the fastening nut 11. The fastening nut 11 is connected with the internal thread 15 on the inner wall of the connecting hole 12 and the through hole 13 through the external thread 14 on the outer wall, thereby fixing the clamping ring 6 to the outside of the first support rod 1, the second support rod 2, the third support rod 10 and the fourth support rod 7.
[0031] like Figure 1 and Figure 6 As shown, in order to facilitate the installation and removal of the clamping ring 6, when using the quartz boat load-bearing reinforcement structure, the clamping ring 6 is first welded to the two ends of the reinforcing load-bearing rod 16, and then the clamping ring 6 is clamped on the left and right sides of the upper ends of the first support rod 1, the second support rod 2, the third support rod 10, and the fourth support rod 7, so that the through hole 13 inside the clamping ring 6 is aligned with the connecting hole 12 inside the first support rod 1, the second support rod 2, the third support rod 10, and the fourth support rod 7, and then the fastening nut 11 is inserted into the connecting hole 12 and the through hole 1 3, the fastening nut 11 is connected with the internal thread 15 on the inner wall of the connecting hole 12 and the through hole 13 through the external thread 14 on the outer wall, so that the clamping ring 6 is fixed to the outside of the first support rod 1, the second support rod 2, the third support rod 10 and the fourth support rod 7. The coordinated use of the connecting hole 12, the through hole 13 and the fastening nut 11 facilitates the installation and disassembly of the clamping ring 6, making the installation and disassembly of the clamping ring 6 more convenient, so that the strengthening load-bearing rod 16 can better enhance the stability of the load-bearing reinforcement structure of the quartz boat.
[0032] A placement groove 18 is provided inside the reinforced load-bearing rod 16 and outside the placement rod 8. A magnet plate 17 is embedded on the inner wall of the placement groove 18. The outer diameter of the placement rod 8 is equal to the inner diameter of the placement groove 18. The placement rod 8 is connected to the placement groove 9 by plugging. The placement rod 8 is connected to the magnet plate 17 by magnetic adsorption. The stability of the placement rod 8 is enhanced by the setting of the magnet plate 17.
[0033] like Figure 1 and Figure 7As shown, in order to enhance the stability of the placement rod 8, when using the quartz boat load-bearing reinforcement structure, the clamping ring 6 is first welded to the two end positions of the reinforcement load-bearing rod 16, and then the clamping ring 6 is fixed to the outside of the first support rod 1, the second support rod 2, the third support rod 10 and the fourth support rod 7 by tightening the nut 11, and then the placement rod 8 is inserted into the placement groove 18 on the inner side of the reinforcement load-bearing rod 16. When the placement rod 6 enters the placement groove 18, it will be adsorbed by the magnet plate 17 on the inner side of the placement groove 18, so that the placement rod 6 is restricted. At this time, the silicon wafer can be placed on the placement rod 8, and then the quartz boat load-bearing reinforcement structure is placed in the process furnace for baking through the lifting column 4. Through the setting of the magnet plate 17, the stability of the placement rod 8 is enhanced, so that the silicon wafer placed on the placement rod 8 becomes more stable, so that the quartz boat load-bearing reinforcement structure can be better used.
[0034] Finally, it should be noted that the above is only a preferred embodiment of the present invention and is not intended to limit the present invention. Although the present invention has been described in detail with reference to the aforementioned embodiments, those skilled in the art can still modify the technical solutions described in the aforementioned embodiments or make equivalent substitutions for some of the technical features therein. Any modifications, equivalent substitutions, improvements, etc. made within the spirit and principles of the present invention should be included in the protection scope of the present invention.
Claims
1. A quartz boat load-bearing reinforcement structure, comprising: A first support plate (5) and a second support plate (9) arranged at the right side of the first support plate (5); A connection plate (3) is provided at the outer side of each of the first support plate (5) and the second support plate (9), and a lifting column (4) is provided at the outer side of each of the connection plates (3); A third support rod (10) and a fourth support rod (7) are respectively installed at the front and rear sides of the inner sides of the first support plate (5) and the second support plate (9); A first support rod (1) and a second support rod (2) are installed on the front and rear sides of the inner sides of the first support plate (5) and the second support plate (9) and below the third support rod (10) and the fourth support rod (7); Features: A clamping ring (6) is arranged at the outer position of the first support rod (1), the second support rod (2), the third support rod (10) and the fourth support rod (7); a reinforcing load-bearing rod (16) is arranged at the inner position of the clamping ring (6); and a placement rod (8) is arranged at the inner position of the reinforcing load-bearing rod (16). The arrangement of the clamping ring (6), the reinforcing load-bearing rod (16) and the placement rod (8) strengthens the stability of the load-bearing reinforcement structure of the quartz boat, thereby preventing the quartz boat from being deformed or broken due to the effect of gravity in a high temperature environment.
2. The quartz boat load-bearing reinforcement structure according to claim 1, characterized in that: A through hole (13) is provided at an internal position of the clamping ring (6), and connecting holes (12) are provided inside the first support rod (1), the second support rod (2), the third support rod (10) and the fourth support rod (7) at positions corresponding to the through hole (13).
3. The quartz boat load-bearing reinforcement structure according to claim 2, characterized in that: The diameters of the connecting hole (12) and the through hole (13) are the same, and internal threads (15) are provided at the inner walls of the connecting hole (12) and the through hole (13).
4. The quartz boat load-bearing reinforcement structure according to claim 3, characterized in that: A fastening nut (11) is provided inside the connecting hole (12) and the through hole (13) and at an outer position of the clamping ring (6), and an external thread (14) is provided at an outer wall position of the fastening nut (11).
5. The quartz boat load-bearing reinforcement structure according to claim 4, characterized in that: The fastening nut (11) is connected to the internal threads (15) on the inner walls of the connecting hole (12) and the through hole (13) via the external threads (14) on the outer wall, thereby fixing the clamping ring (6) on the outside of the first support rod (1), the second support rod (2), the third support rod (10) and the fourth support rod (7).
6. The quartz boat load-bearing reinforcement structure according to claim 1, characterized in that: A placement groove (18) is provided inside the reinforcing load-bearing rod (16) and at an external position of the placement rod (8), and a magnet plate (17) is embedded at an inner wall position of the placement groove (18).
7. The quartz boat load-bearing reinforcement structure according to claim 6, characterized in that: The outer diameter of the placement rod (8) is equal to the inner diameter of the placement groove (18), and the placement rod (8) is connected to the placement groove (9) by plugging.
8. The quartz boat load-bearing reinforcement structure according to claim 7, characterized in that: The placement rod (8) is connected to the magnet plate (17) by means of magnetic adsorption, and the stability of the placement rod (8) is enhanced by the provision of the magnet plate (17).