Spraying disc and CVD (Chemical Vapor Deposition) equipment

Abstract

The utility model provides a spray tray and CVD (chemical vapor deposition) equipment, the spray tray comprises a main body, a cavity is arranged in the main body, the main body is detachably connected with at least one spray head, a spray hole is arranged in the spray head, and the spray hole is communicated with the cavity; the CVD equipment comprises a reaction chamber and a spraying disc, wherein the spraying disc is arranged in the reaction chamber; when one or some spraying in the spraying disc causes poor uniformity of wafer surface film thickness or too high number of impurity particles, the corresponding spraying head can be independently replaced, and the spraying device has the advantages of saving cost and saving time and labor.

Description

Technical Field

[0001] The utility model relates to the field of semiconductor production equipment, in particular to a spray plate and CVD equipment. Background Art

[0002] CVD, or chemical vapor deposition, is a chemical technology that mainly uses one or more gas phase compounds or single substances containing thin film elements to chemically react on the surface of a substrate to form a thin film. The CVD equipment has a reaction chamber in which a spray plate is arranged.

[0003] like Figure 1 As shown, the existing spray plate 10 is generally set in a disc shape, and a plurality of spray holes 101 are opened on the spray plate 10. During the deposition process, the gas is sprayed from each spray hole 101 to the wafer and a chemical vapor deposition reaction occurs to form a thin film on the surface of the wafer. Since the spray holes 101 and the spray plate 10 are integrally formed, when one or some of the spray holes 101 of the spray plate 10 cause poor uniformity of the film thickness on the surface of the wafer or a high number of impurity particles, the entire spray plate 10 needs to be replaced as a whole, which is not only costly, but also time-consuming, financially and labor-intensive. Utility Model Content

[0004] The first object of the utility model is to provide a spray plate with a replaceable spray head.

[0005] The second object of the utility model is to provide a CVD device comprising the above-mentioned spray plate.

[0006] In order to achieve the above-mentioned first purpose, the utility model provides a spray plate, including a main body, a cavity is arranged in the main body, at least one spray head is detachably connected to the main body, a spray hole is arranged in the spray head, and the spray hole is connected to the cavity.

[0007] It can be seen from the above scheme that by setting a detachable connection between the spray head and the main body, when one or some spray heads cause poor uniformity of film thickness on the wafer surface or a high number of impurity particles, the spray head can be removed individually and replaced with other spray heads. Compared with the existing technology, it has the advantages of low cost, time saving and labor saving.

[0008] A further solution is that the connection end of the shower head is threadedly connected to the main body, or the connection end of the shower head is snap-fitted to the main body, or the connection end of the shower head is magnetically connected to the main body.

[0009] A further solution is that there is a preset distance between the free end of the shower head and the main body.

[0010] It can be seen from the above solution that by setting the preset distance, it is convenient for workers to hold the sprinkler head when installing or removing the sprinkler head, which is convenient for operation.

[0011] A further solution is that one or more spray holes are arranged in the spray head.

[0012] A further solution is that the number of the spray heads is set to be multiple, and the multiple spray heads are evenly distributed on one side wall of the cavity.

[0013] A further solution is that the plurality of spray heads include a central spray head and a plurality of edge spray heads, the central spray head is arranged at the center of the main body, and the plurality of edge spray heads are arranged in a circumferential direction of the central spray head.

[0014] A further solution is that a plurality of edge spray heads are arranged along a circle, or a plurality of edge spray heads are arranged along two or more circles, and all the circles are coaxially arranged.

[0015] A further solution is that the spray plate also includes multiple spare spray heads, which can be detachably connected to the main body, and at least one spare spray hole is arranged in the spare spray head, and the spare spray hole is connected to the cavity, and the aperture of the spare spray hole is equal to the aperture of the spray hole, or the aperture of the spare spray hole is not equal to the aperture of the spray hole.

[0016] It can be seen from the above scheme that by setting up a spare spray head, it is convenient to replace the broken spray head on the main body to ensure that the spray disk can spray evenly; by setting up spare spray holes with different apertures, it is convenient to select a spare spray head with an aperture of appropriate specifications according to the actual needs of the uniformity of the generated film thickness.

[0017] A further solution is that at least one integrated spray hole is opened on the main body, the integrated spray hole is integrally formed with the main body, the integrated spray hole is connected with the cavity, and the integrated spray hole is staggered with the spray head.

[0018] It can be seen from the above scheme that by staggering the integrated spray hole and the spray head, the spray head is set in an area where problems are likely to occur during the spraying process, and the integrated spray hole is set in an area where problems are not likely to occur during the spraying process. This can not only replace the spray head in time, but also improve the spray uniformity of the spray disk.

[0019] In order to achieve the second objective mentioned above, the utility model provides a CVD device, comprising a reaction chamber and the above-mentioned spray plate, wherein the spray plate is arranged in the reaction chamber. BRIEF DESCRIPTION OF THE DRAWINGS

[0020] Figure 1 It is a front view of a spray plate in the prior art.

[0021] Figure 2 It is a cross-sectional view of a spray plate in the prior art.

[0022] Figure 3 It is a front view of an embodiment of a spray plate of the utility model.

[0023] Figure 4 It is a cross-sectional view of an embodiment of a spray plate of the utility model.

[0024] Figure 5 yes Figure 4 Enlarged view of point A in the middle.

[0025] The present invention will be further described below with reference to the accompanying drawings and embodiments. DETAILED DESCRIPTION

[0026] Spray plate embodiment:

[0027] See also Figures 3 to 5 The present embodiment provides a spray plate, which includes a main body 1 and at least one spray head 2. The present embodiment takes a plurality of spray heads 2 as an example.

[0028] The main body 1 is set to be disc-shaped, and a cavity 11 is set in the main body 1. The cavity 11 has a peripheral wall and at least one side cavity wall 12. The cavity wall 12 is set in the peripheral wall. A plurality of mounting holes 121 are opened on the cavity wall 12. The plurality of mounting holes 121 are evenly arranged on the entire cavity wall 12.

[0029] The spray head 2 is detachably connected to the main body 1. Specifically, one end of the spray head 2 is detachably connected to the corresponding mounting hole 121. At least one spray hole 23 is provided in the spray head 2, and the spray hole 23 is connected to the cavity 11. In this embodiment, one spray hole 23 is provided in the spray head 2 as an example. In other embodiments, more than two spray holes 23 may be provided in the spray head 2, and each spray hole 23 is connected to the cavity 11.

[0030] In order to achieve a detachable connection, in this embodiment, the connecting end of the spray head 2 is threadedly connected to the main body 1. Specifically, the mounting hole 121 is set as a threaded hole, and an external thread structure is provided on the outer side of the connecting end of the spray head 2, and the external thread structure is matched and connected with the threaded hole.

[0031] In another embodiment, the connection end of the spray head 2 is snap-connected with the main body 1. Specifically, a snap is provided in the mounting hole 121, and a protrusion is provided at the connection end of the spray head 2. The connection end of the spray head 2 is embedded in the mounting hole 121, and the snap is snap-connected with the protrusion.

[0032] In another embodiment, the connecting end of the spray head 2 is magnetically connected to the main body 1, and magnetic components with opposite magnetic properties are respectively provided on the mounting hole 121 and the connecting end of the spray head 2. When the connecting end of the spray head 2 is arranged in the mounting hole 121, the two magnetic components are magnetically connected, and the magnetic components can be permanent magnets and / or electromagnets.

[0033] In order to facilitate installation and / or disassembly operations, there is a preset distance between the free end of the spray head 2 and the main body 1, and the preset distance is greater than or equal to the thickness of the main body 1, which is convenient for workers to hold the spray head 2 for operation.

[0034] In order to achieve uniform spraying, the plurality of spray heads 2 are evenly distributed on a side cavity wall 12 of the main body 1. Specifically, the plurality of spray heads 2 include a central spray head 2a and a plurality of edge spray heads 2b, wherein the central spray head 2a is arranged at the center of the main body 1, and preferably the central spray head 2a is coaxially arranged with the main body 1; and the plurality of edge spray heads 2b are evenly arranged on the periphery of the central spray head 2a.

[0035] Multiple edge spray heads 2b can be arranged along a circle, or, multiple edge spray heads 2b can be arranged along more than two circles. This embodiment preferably takes three circles as an example for explanation. The three circles are coaxially arranged with the axis of the main body 1. The diameters of the three circles are different, and the diameters of the three circles increase in an equidistant manner. The largest circle is set as close to the edge of the main body 1 as possible.

[0036] In order to facilitate the replacement of the spray head 2, the spray plate of this embodiment also includes a plurality of spare spray heads, which can be detachably connected to the main body 1. A spare spray hole is provided in the spare spray head, and the spare spray hole can be connected to the cavity. The aperture of the spare spray hole is equal to the aperture of the spray hole 23, or the aperture of the spare spray hole is not equal to the aperture of the spray hole 23. In the actual production process, spray holes 23 or spare spray holes of different specifications can be customized according to different process steps. Before spraying, a spray head or spare spray head with a suitable aperture can be selected according to the uniformity requirement of the generated film thickness.

[0037] This embodiment uses a detachably connected spray head to replace the integrally formed integral spray hole in the existing spray plate. Of course, in another embodiment, the integral spray hole and the detachably connected spray head can also exist on the same spray plate at the same time. Specifically: a plurality of integral spray holes are provided on the spray plate, and the integral spray holes are integrally formed with the spray plate. At the same time, at least one spray head is detachably connected to the spray plate, and the spray head and the integral spray hole are staggered. The integral spray hole is set in an area of ​​the spray plate where problems are not likely to occur, and the spray head is set in an area of ​​the spray plate where problems are likely to occur. When problems occur, other spray heads can be replaced in time.

[0038] CVD equipment example:

[0039] A CVD device provided in this embodiment includes a reaction chamber and the spray plate of the above embodiment, wherein a wafer is arranged at the lower inner part of the reaction chamber, and the spray plate is arranged in the reaction chamber and directly above the wafer.

[0040] In summary, the utility model provides a detachable connection between the spray head and the main body. When one or some spray heads cause poor uniformity of film thickness on the wafer surface or a high number of impurity particles, the spray head can be removed individually and replaced with other spray heads. Compared with the prior art, the utility model has the advantages of low cost, time saving and labor saving.

[0041] Finally, it should be emphasized that the above are only preferred embodiments of the present invention and are not intended to limit the present invention. For those skilled in the art, the present invention may have various changes and modifications. Any modifications, equivalent substitutions, improvements, etc. made within the spirit and principles of the present invention should be included in the scope of protection of the present invention.

Claims

1. A spray plate, comprising a main body, wherein a cavity is provided in the main body, characterized in that: A plurality of spray heads are detachably connected to the main body, and spray holes are arranged in the spray heads, and the spray holes are connected to the cavity; The plurality of shower heads include a central shower head and a plurality of edge shower heads. The central shower head is arranged at the center of the main body, and the plurality of edge shower heads are arranged in a circle on the circumference of the central shower head.

2. The spray plate according to claim 1, characterized in that: The connection end of the shower head is threadedly connected to the main body, or the connection end of the shower head is clamped to the main body, or the connection end of the shower head is magnetically connected to the main body.

3. The spray plate according to claim 2, characterized in that: There is a preset distance between the free end of the shower head and the main body.

4. The spray plate according to claim 3, characterized in that: One or more than two spray holes are arranged in the spray head.

5. The spray plate according to any one of claims 1 to 4, characterized in that: The plurality of shower heads are evenly distributed on a cavity wall on one side of the cavity.

6. The spray plate according to any one of claims 1 to 4, characterized in that: The plurality of edge shower heads are arranged along a circle, or the plurality of edge shower heads are arranged along more than two circles, and all the circles are coaxially arranged.

7. The spray plate according to any one of claims 1 to 4, characterized in that: The spray plate also includes a plurality of spare spray heads, which can be detachably connected to the main body, and at least one spare spray hole is arranged in the spare spray head, and the spare spray hole is connected to the cavity, and the aperture of the spare spray hole is equal to the aperture of the spray hole, or the aperture of the spare spray hole is not equal to the aperture of the spray hole.

8. The spray plate according to any one of claims 1 to 4, characterized in that: At least one integrated spray hole is provided on the main body, the integrated spray hole is integrally formed with the main body, the integrated spray hole is communicated with the cavity, and the integrated spray hole is staggered with the spray head.

9. The spray plate according to any one of claims 1 to 4, characterized in that: The cavity body has a peripheral wall and at least one side cavity wall, the cavity wall is arranged inside the peripheral wall, a plurality of mounting holes are opened on the cavity wall, and one end of the shower head is detachably connected to the corresponding mounting hole.

10. CVD equipment, characterized in that: The invention comprises a reaction chamber and the spray plate according to any one of claims 1 to 9, wherein the spray plate is arranged in the reaction chamber.

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