FFU (Fan Filter Unit) equipment for stably supplying air to high-integration chamber

Abstract

The utility model discloses FFU equipment for stably supplying air to a high-integration-level chamber. The FFU equipment comprises a chemical filter, the fan module comprises two fans which are distributed up and down and are used for guiding air in sequence; the air uniformizing assembly is used for dispersing the concentrated air flow generated by the fan module downwards and uniformizing air; the high-efficiency filter is used for carrying out secondary filtration on the air, and the air exhaust cavity is used for accumulating the filtered air and concentrating the air to one side of the middle part; the air outlet assembly is connected to the air collecting side of the air exhaust cavity and used for exhausting air from the side edge, and the control panel is used for controlling the air outlet speed according to the air speed sensor. The air conditioner is compact and reasonable in structure and convenient to operate, the fresh air quality is improved by filtering air twice, meanwhile, the air speed is increased by adopting the double-stacked draught fan, then the fresh air is subjected to air uniformizing treatment through the air uniformizing assembly, air outlet is more uniform, finally, the uniformized fresh air is subjected to lateral gathering air outlet through the air exhaust cavity, and the air quality is improved. And meanwhile, the air outlet effect is improved, and high practicability is achieved.

Description

Technical Field

[0001] The utility model relates to the technical field of filter fans, in particular to an FFU device which stably supplies air to a highly integrated chamber. Background Art

[0002] With the technological development of the semiconductor industry, the demand for FFU in domestic equipment has increased dramatically, and the requirements for FFU equipment have also emerged in an endless stream.

[0003] FFU fan filter units can be connected in modular form and are widely used in clean rooms, clean operating tables, clean production lines, assembled clean rooms and local Class 100 applications.

[0004] Currently, the air outlet surface of FFU on the market is at the bottom, and the wind speed is uneven and unstable. The uneven wind speed affects the filtering effect, and the unstable air outlet speed affects the air outlet effect. It cannot meet the needs of customers who have insufficient space on some machines or need to change the air outlet surface due to process requirements.

[0005] To this end, we propose an FFU device that can stably supply air to a highly integrated chamber. Utility Model Content

[0006] In view of the shortcomings of the above-mentioned existing production technology, the applicant provides a FFU device that stably supplies air to a highly integrated chamber, thereby improving the filtering effect, increasing the stable wind pressure and achieving side air outlet.

[0007] The technical solution adopted by the utility model is as follows:

[0008] An FFU device for stably supplying air to a highly integrated chamber, comprising:

[0009] A chemical filter connected to the air inlet and used to filter the air once;

[0010] A fan module, which includes two fans distributed up and down and guiding air in sequence;

[0011] A wind uniformity component is used to disperse the concentrated wind flow generated by the fan module downward and make it uniform;

[0012] High efficiency filter, which is used for secondary filtration of air

[0013] An exhaust chamber, which is used to accumulate filtered air and to concentrate the air to one side of the middle;

[0014] The air outlet component is connected to one side of the air collecting chamber and is used to discharge air from the side.

[0015] A control panel is also included for controlling the outlet wind speed according to the wind speed sensor.

[0016] It is further characterized by:

[0017] The fan module comprises a fan 1 and a fan 2 which are distributed up and down and are located on the same vertical line, and the fan 1 and the fan 2 are connected to each other through a connecting sleeve.

[0018] The wind uniformity component comprises:

[0019] The guide plates are at least two in number and are symmetrically distributed in an "L" shape on the air outlet side of the wind uniformity component and are used to disperse the concentrated wind flow;

[0020] The wind uniformity plate is horizontally distributed and located at the lower end of the guide plate to uniformly distribute the dispersed wind.

[0021] Furthermore, the exhaust cavity comprises:

[0022] Housing;

[0023] An inner cavity, one end of which is open and the other three side walls are all distributed in an arc shape, and is used to convert the vertical wind direction into the horizontal wind direction;

[0024] There are multiple air guide plates which are evenly distributed on the side walls of the long sides of the inner cavity, and the air guide plates are spirally distributed and point to the direction of the air outlet assembly, so as to evenly guide the wind blowing onto the inner cavity to the air outlet assembly.

[0025] The air guide plate is spirally arranged from the inner cavity side wall to the inner cavity bottom wall, and is slightly raised at one end of the air guide plate located at the inner cavity bottom wall, so as to form a vortex pointing to the direction of the air outlet component.

[0026] The gas outlet component comprises:

[0027] The bell mouth is used to gather the air in the exhaust cavity;

[0028] The air outlet is used to guide the air out, and a wind speed sensor is arranged in the air outlet to detect the wind speed.

[0029] The beneficial effects of the utility model are as follows:

[0030] A chemical filter connected to the air inlet and used to filter the air once;

[0031] A fan module, which includes two fans distributed up and down and guiding air in sequence;

[0032] A wind uniformity component is used to disperse the concentrated wind flow generated by the fan module downward and make it uniform;

[0033] High efficiency filter, which is used for secondary filtration of air

[0034] An exhaust chamber, which is used to accumulate filtered air and to concentrate the air to one side of the middle;

[0035] The air outlet component is connected to one side of the air collecting chamber and is used to discharge air from the side.

[0036] A control panel is also included for controlling the outlet wind speed according to the wind speed sensor.

[0037] The utility model has a compact and reasonable structure and is easy to operate. The quality of fresh air is improved by filtering the air twice, and the wind speed is increased by using a double-stacked fan. The fresh air is then evenly treated by an air uniforming component to make the air outlet more uniform. Finally, the evenly distributed fresh air is laterally gathered and discharged through an exhaust chamber, thereby improving the air outlet effect and having strong practicality.

[0038] At the same time, the utility model also has the following advantages:

[0039] (1) The fan module is one of the improvements. The fan module includes two fans that are distributed up and down and guide air in sequence, which can increase the wind speed. After the wind speed is increased, it is convenient to provide stable wind pressure later.

[0040] (2) The wind uniformity component is used to disperse the concentrated wind flow generated by the fan module downward and evenly distribute the wind, which can improve the filtering effect of the second high-efficiency filter and avoid uneven filtering.

[0041] (3) The exhaust chamber is the biggest improvement. It includes a cover, an inner cavity and an air guide plate, which are used to form a vortex pointing to the direction of the air outlet component, so as to facilitate the gathering of the peripheral wind to the lower end of the middle part, and then gather to the position of the air outlet component through upward movement for air discharge. BRIEF DESCRIPTION OF THE DRAWINGS

[0042] Figure 1 It is a structural schematic diagram of the utility model.

[0043] Figure 2 It is an exploded view of the utility model.

[0044] Figure 3 for Figure 2 Top view of the .

[0045] Figure 4 for Figure 2 Cross-sectional view of section AA.

[0046] Figure 5 for Figure 3 Cross-sectional view of section BB.

[0047] Wherein: 100, exhaust chamber; 200, air outlet assembly; 300, high efficiency filter; 400, air uniformity assembly; 500, fan module; 600, chemical filter; 700, control panel;

[0048] 101, housing; 102, inner cavity; 103, air guide plate;

[0049] 201, bell mouth; 202, air outlet;

[0050] 401, guide plate; 402, wind uniforming plate;

[0051] 501, fan one; 502, fan two; 503, connecting sleeve. DETAILED DESCRIPTION

[0052] The specific implementation of the present utility model is described below in conjunction with the accompanying drawings.

[0053] like Figure 1-Figure 5 As shown, this embodiment discloses an FFU device for stably supplying air to a highly integrated chamber, including a chemical filter 600, a fan module 500, a uniform air component 400, a high-efficiency filter 300, an exhaust chamber 100 and an air outlet component 200, which are used to deeply filter the air while controlling the air flow rate and outlet direction for better air supply.

[0054] In this embodiment, the chemical filter 600 and the high efficiency filter 300 are made of the structural materials of the prior art and mainly play a filtering effect. In this patent, except for the change of position, no change is made in the material and structure. Figure 1-Figure 5 As shown, the chemical filter 600 is connected to the air inlet and is used to filter the air once, and the high efficiency filter 300 is connected to the lower end of the air uniforming component 400 to filter the air twice;

[0055] like Figure 4 and Figure 5 As shown, in this embodiment, the fan module 500 is one of the improvements. The fan module 500 includes two fans that are distributed up and down and guide air in sequence, which can increase the wind speed. Specifically, the fan module 500 includes a fan 1 501 and a fan 2 502 that are distributed up and down and are on the same vertical line, and the fan 1 501 and the fan 2 502 are connected to each other through a connecting sleeve 503. The connecting sleeve 503 is a sleeve that connects the two air ducts together, which is convenient for providing stable wind pressure later after increasing the wind speed.

[0056] like Figure 4 and Figure 5 As shown, in this embodiment, the wind uniformity component 400 is used to disperse the concentrated wind flow generated by the fan module 500 downwardly and uniformly; the wind uniformity component 400 specifically includes a guide plate 401 and a wind uniformity plate 402;

[0057] like Figure 4 As shown, there are at least two guide plates 401, which are symmetrically distributed in an "L" shape on the air outlet side of the wind uniforming component 400 and are used to disperse the concentrated wind flow;

[0058] The wind uniformity plate 402 is horizontally distributed and located at the lower end of the guide plate 401 for uniformizing the dispersed wind. The wind uniformity plate 402 is a PVC mesh plate that can perform wind uniformity processing, improve the filtering effect of the second high-efficiency filter 300, and avoid uneven filtering.

[0059] In this embodiment, the exhaust cavity 100 is the biggest improvement. The exhaust cavity 100 includes a housing 101, an inner cavity 102 and an air guide plate 103, which is used to accumulate filtered air and to concentrate the air to one side of the middle;

[0060] The cover 101 is connected with other components to form a stable whole.

[0061] like Figure 4 and Figure 5 The inner cavity 102 shown has one end open and the other three side walls are all arc-shaped and used to convert the vertical wind direction into the horizontal wind direction. The open side of the inner cavity 102 faces the air outlet assembly 200 for guiding the wind.

[0062] like Figure 4 and Figure 5 As shown, there are multiple air guide plates 103 equidistantly distributed on the side walls of the long sides of the inner cavity 102 , and the air guide plates 103 are spirally distributed and point toward the air outlet assembly 200 , so as to evenly guide the wind blowing toward the inner cavity 102 into the air outlet assembly 200 .

[0063] In another embodiment, Figure 4 As shown, the air guide plate 103 is spirally arranged from the side wall of the inner cavity 102 to the bottom wall of the inner cavity 102, and is slightly raised at one end of the air guide plate 103 located on the bottom wall of the inner cavity 102, so as to form a vortex pointing in the direction of the air outlet component 200, so as to facilitate the gathering of the peripheral wind to the lower middle end, and then gather to the position of the air outlet component 200 through the upward gathering for air discharge.

[0064] like Figure 1-Figure 5 As shown, the air outlet assembly 200 includes a bell mouth 201 and an air outlet 202, which is connected to one side of the exhaust cavity 100 where air is collected and is used to discharge air from the side.

[0065] The bell mouth 201 is used to gather the air in the exhaust cavity 100 , the air outlet 202 is used to guide the air out, and a wind speed sensor is provided in the air outlet 202 for detecting the wind speed.

[0066] In this embodiment, a control panel 700 is also included, which is used to control the wind speed according to the wind speed sensor to provide a stable wind speed.

[0067] To sum up, the utility model has a compact and reasonable structure and is easy to operate. The quality of fresh air is improved by filtering the air twice, and the wind speed is increased by using a double-stacked fan. The fresh air is then evenly treated by the wind uniformity component 400 to make the air output more uniform. Finally, the evenly-evened fresh air is laterally gathered and discharged through the exhaust chamber 100, thereby improving the air output effect, and has strong practicality.

[0068] The above description is an explanation of the utility model, not a limitation of the utility model. The scope of the utility model is defined by the claims. Any form of modification can be made within the protection scope of the utility model.

Claims

1. An FFU device for stably supplying air to a highly integrated chamber, characterized in that: include: A chemical filter (600) connected to the air inlet and used to filter the air once; A fan module (500) comprises two fans which are arranged vertically and guide air in sequence; The wind uniformity component (400) is used to disperse the concentrated wind flow generated by the fan module (500) downward and make it uniform; A high efficiency filter (300) is located at the lower end of the air distribution assembly (400) and is used for secondary filtering of the air. An exhaust chamber (100) is located at the lower end of the high efficiency filter (300) and is used to accumulate filtered air and to concentrate the air to one side of the middle portion; The air outlet assembly (200) is connected to the air collecting side of the air exhaust chamber (100) and is used to exhaust the air from the side.

2. The FFU device for stably supplying air to a highly integrated chamber as claimed in claim 1, characterized in that: The fan module (500) comprises a fan 1 (501) and a fan 2 (502) which are distributed up and down and located on the same vertical line, and the fan 1 (501) and the fan 2 (502) are connected to each other via a connecting sleeve (503).

3. The FFU device for stably supplying air to a highly integrated chamber as claimed in claim 1, characterized in that: The wind uniformity component (400) comprises: The guide plates (401) are at least two in number and are symmetrically distributed in an "L" shape on the air outlet side of the wind uniforming component (400) and are used to disperse the concentrated wind flow; The wind leveling plate (402) is horizontally distributed and located at the lower end of the guide plate (401) for leveling the dispersed wind.

4. The FFU device for stably supplying air to a highly integrated chamber as claimed in claim 1, characterized in that: The exhaust chamber (100) comprises: A cover (101); The inner cavity (102) has an open end and the other three side walls are all distributed in an arc shape, and is used to convert the vertical wind direction into the horizontal wind direction; There are a plurality of air guide plates (103) which are evenly distributed on the side walls of the long sides of the inner cavity (102), and the air guide plates (103) are distributed in a spiral shape and point in the direction of the air outlet component (200), so as to evenly guide the wind blowing toward the inner cavity (102) toward the air outlet component (200).

5. The FFU device for stably supplying air to a highly integrated chamber as claimed in claim 4, characterized in that: The air guide plate (103) is spirally arranged from the side wall of the inner cavity (102) to the bottom wall of the inner cavity (102), and is slightly raised at one end of the air guide plate (103) located on the bottom wall of the inner cavity (102), so as to form a vortex pointing in the direction of the air outlet component (200).

6. The FFU device for stably supplying air to a highly integrated chamber as claimed in claim 1, characterized in that: The gas outlet component (200) comprises: A bell mouth (201) for gathering air in the exhaust cavity (100); The air outlet (202) is used to guide the air out, and a wind speed sensor is arranged in the air outlet (202) to detect the wind speed.

7. The FFU device for stably supplying air to a highly integrated chamber as claimed in claim 6, characterized in that: It also includes a control panel (700) for controlling the wind speed according to the wind speed sensor.

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