Integrated pressure sensor

Abstract

The utility model relates to the technical field of sensors, in particular to an integrated pressure sensor which comprises a bottom plate, a shell, a pressure sensor body and a taking-out mechanism, the taking-out mechanism comprises a fixing assembly, a sliding plate, a plurality of first springs and a guide assembly, the sliding plate is provided with a fixing hole, and the bottom plate and the shell provide installation conditions for the taking-out mechanism. Measurement can be carried out through the pressure sensor body, when the pressure sensor body needs to be taken out, the fixing assembly is moved out of the fixing hole, the sliding plate is pushed to slide towards the side away from the shell through resilience force of a plurality of first springs, meanwhile, the sliding plate is guided by the guide assembly, and when the sliding plate is completely moved out of the shell, measurement is carried out. According to the device, the pressure sensor body can be rapidly taken out from the shell, the taking-out efficiency of the pressure sensor body is improved, meanwhile, the device can be repeatedly used, the packaging cost is reduced, and therefore the problem that the taking-out efficiency of an existing pressure sensor is low is solved.

Description

Technical Field

[0001] The utility model relates to the technical field of sensors, in particular to an integrated pressure sensor. Background Art

[0002] The traditional pressure sensor semiconductor piezoresistive diffusion pressure sensor forms semiconductor deformation pressure on the surface of a thin film, and produces a piezoresistive impedance effect by deforming the thin film through external force, thereby converting the impedance change into an electrical signal. However, when the sensitivity requirement is high, a small deformation of the thin film will affect the actual measurement.

[0003] At present, the prior art (CN 206593787 U) discloses a high-sensitivity integrated pressure sensor, including an external packaging structure, the external packaging structure including a shell and a substrate, a pressure sensor chip and an integrated circuit chip are arranged inside the external packaging structure, the pressure sensor chip includes an elastic diaphragm, a silicon dioxide protective layer and a support ring, the elastic diaphragm is located on the support ring, and limit blocks are arranged at both ends of the elastic diaphragm, the limit blocks are inverted L-shaped structures, the limit blocks are provided with a piezoresistor at a position in contact with the elastic diaphragm, a buffer layer is arranged at the center of the elastic diaphragm, and a silicon dioxide protective layer is arranged on the upper surface of the buffer layer. The external force is amplified under the action of the support ring, and the elastic diaphragm causes the resistance of the piezoresistor to change, thereby converting the impedance change into an electrical signal. The sensor has the advantages of simple structure, high measurement accuracy, good use effect, etc.

[0004] In the above manner, the pressure sensor is arranged in the housing. When it needs to be taken out, a lot of time is required to remove the external packaging structure and then take out the pressure sensor, which reduces the efficiency of taking out the pressure sensor. Utility Model Content

[0005] The utility model aims to provide an integrated pressure sensor, aiming to solve the problem of low extraction efficiency of the existing pressure sensor.

[0006] To achieve the above object, the utility model provides an integrated pressure sensor, including a base plate, a housing, a pressure sensor body and a take-out mechanism, wherein the take-out mechanism includes a fixing assembly, a slide plate, a plurality of first springs and a guide assembly, and the slide plate has a fixing hole;

[0007] The shell is fixedly connected to the base plate and is located on the base plate, the fixing assembly is arranged in the base plate, the slide plate is slidably connected to the shell and is located on one side of the shell, a plurality of the first springs are respectively fixedly connected to the slide plate and are respectively fixedly connected to the shell, and are all located between the shell and the slide plate, the guide assembly is arranged on the base plate and connected to the slide plate, and the pressure sensor body is arranged on the slide plate.

[0008] Among them, the fixing assembly includes a fixing head, a second spring and a pull rod, the fixing head is slidably connected to the base plate and is located inside the base plate, the second spring is fixedly connected to the fixing head and to the base plate and is located between the base plate and the fixing head, and the pull rod is fixedly connected to the fixing head and to the base plate and slidably connected to the base plate and passes through the base plate.

[0009] The guide assembly includes a guide rail and a guide block, wherein the guide rail is fixedly connected to the base plate and is located inside the base plate, and the guide block is slidably connected to the guide rail and fixedly connected to the slide plate.

[0010] In which, the taking-out mechanism also includes a supporting plate, a third spring and a protrusion, the supporting plate is slidably connected to the slide plate and is located on one side of the slide plate, the third spring is fixedly connected to the supporting plate and fixedly connected to the slide plate and is located between the slide plate and the supporting plate, and the protrusion is fixedly connected to the supporting plate and is located on one side of the supporting plate.

[0011] Wherein, the taking-out mechanism further comprises a guide rod and a limit block, wherein the guide rod is slidably connected to the slide plate and is located on one side of the slide plate, and the limit block is fixedly connected to the guide rod and slidably connected to the slide plate.

[0012] The utility model provides an integrated pressure sensor, wherein the base plate and the shell provide installation conditions for the removal mechanism, and measurement can be performed through the pressure sensor body. When the pressure sensor body needs to be removed, the fixing assembly is moved out of the fixing hole, and the slide plate is pushed to slide to the side away from the shell by the resilience of the plurality of first springs, and the guide assembly guides the slide plate at the same time. When the slide plate is completely moved out of the shell, the pressure sensor body on the slide plate can be removed. The device can quickly remove the pressure sensor body from the shell, thereby improving the removal efficiency of the pressure sensor body, and can be reused to reduce the packaging cost, thereby solving the problem of low removal efficiency of the existing pressure sensor. BRIEF DESCRIPTION OF THE DRAWINGS

[0013] In order to more clearly illustrate the embodiments of the present application or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art are briefly introduced below.

[0014] Figure 1 It is a structural schematic diagram of an integrated pressure sensor according to the first embodiment of the utility model.

[0015] Figure 2It is a cross-sectional view of an integrated pressure sensor according to the first embodiment of the utility model along the direction of the first spring.

[0016] Figure 3 It is a cross-sectional view of an integrated pressure sensor according to the first embodiment of the utility model along the direction of the third spring.

[0017] Figure 4 It is a cross-sectional view of an integrated pressure sensor according to the second embodiment of the utility model along the direction of the limit block.

[0018] 101-bottom plate, 102-housing, 103-pressure sensor body, 104-removal mechanism, 105-fixing assembly, 106-slide plate, 107-first spring, 108-guide assembly, 109-holding plate, 110-third spring, 111-bump, 112-fixing hole, 113-fixing head, 114-second spring, 115-pull rod, 116-guide rail, 117-guide block, 201-guide rod, 202-limiting block. DETAILED DESCRIPTION

[0019] The first embodiment of the present application is:

[0020] See also Figure 1-Figure 3 , Figure 1 It is a schematic diagram of the structure of an integrated pressure sensor. Figure 2 is a cross-sectional view of an integrated pressure sensor along the direction of the first spring, Figure 3 It is a cross-sectional view of an integrated pressure sensor along the direction of the third spring.

[0021] The utility model provides an integrated pressure sensor, including a bottom plate 101, a housing 102, a pressure sensor body 103 and a take-out mechanism 104, wherein the take-out mechanism 104 includes a fixing assembly 105, a slide plate 106, a plurality of first springs 107, a guide assembly 108, a holding plate 109, a third spring 110 and a bump 111, wherein the slide plate 106 has a fixing hole 112, the fixing assembly 105 includes a fixing head 113, a second spring 114 and a pull rod 115, and the guide assembly 108 includes a guide rail 116 and a guide block 117. The above solution solves the problem of low efficiency in taking out the existing pressure sensor, and it can be understood that the above solution can be used in the scenario of taking out the pressure sensor body 103.

[0022] For this specific embodiment, the shell 102 is fixedly connected to the base plate 101 and is located on the base plate 101, the fixing assembly 105 is arranged in the base plate 101, the slide plate 106 is slidably connected to the shell 102 and is located on one side of the shell 102, and multiple first springs 107 are respectively fixedly connected to the slide plate 106 and respectively fixedly connected to the shell 102, and are all located between the shell 102 and the slide plate 106, the guide assembly 108 is arranged on the base plate 101 and connected to the slide plate 106, and the pressure sensor body 103 is arranged on the slide plate 106. The bottom plate 101 and the housing 102 provide installation conditions for the removal mechanism 104. Measurement can be performed through the pressure sensor body 103. The pressure sensor body 103 is a "pressure sensor chip and integrated circuit chip" recorded in the prior art. The pressure sensor chip includes an elastic diaphragm, a silicon dioxide protective layer and a support ring. The elastic diaphragm is located on the support ring. Limit blocks are provided at both ends of the elastic diaphragm. The limit blocks are in an inverted L-shaped structure. A piezoresistor is provided at the position where the limit block contacts the elastic diaphragm. A buffer is provided at the center of the elastic diaphragm. The buffer layer is provided with a silicon dioxide protective layer on the upper surface of the buffer layer. The external force is amplified under the action of the support ring. The elastic diaphragm causes the resistance change of the varistor, thereby converting the impedance change into an electrical signal. The fixing component 105 cooperates with the fixing hole 112 to limit the slide plate 106. The slide plate 106 can be moved to a side away from the housing 102 by the resilience of the first springs 107. The slide plate 106 provides a placement condition for the pressure sensor body 103. The guide block 117 can guide and limit the slide plate 106.

[0023] The fixing head 113 is slidably connected to the bottom plate 101 and is located inside the bottom plate 101. The second spring 114 is fixedly connected to the fixing head 113 and is fixedly connected to the bottom plate 101 and is located between the bottom plate 101 and the fixing head 113. The pull rod 115 is fixedly connected to the fixing head 113 and is slidably connected to the bottom plate 101 and penetrates the bottom plate 101. The fixing head 113 can be matched with the fixing hole 112 to fix the slide plate 106. The fixing head 113 can be bounced into the corresponding fixing hole 112 by the rebound force of the second spring 114. The fixing head 113 can be moved to a side away from the fixing hole 112 by pulling the pull rod 115.

[0024] Secondly, the guide rail 116 is fixedly connected to the bottom plate 101 and is located inside the bottom plate 101, and the guide block 117 is slidably connected to the guide rail 116 and is fixedly connected to the slide plate 106. The guide rail 116 provides installation conditions for the guide block 117, and the slide plate 106 can be guided and limited by the guide block 117.

[0025] Meanwhile, the abutment plate 109 is slidably connected to the slide plate 106 and is located on one side of the slide plate 106. The third spring 110 is fixedly connected to the abutment plate 109 and is fixedly connected to the slide plate 106 and is located between the slide plate 106 and the abutment plate 109. The protrusion 111 is fixedly connected to the abutment plate 109 and is located on one side of the abutment plate 109. The abutment plate 109 can abut the pressure sensor body 103 on the slide plate 106, and the resilience of the third spring 110 can push the abutment plate 109 to contact the pressure sensor body 103, and pulling the protrusion 111 can drive the abutment plate 109 to move toward the side close to the third spring 110.

[0026] When the pressure sensor body 103 needs to be taken out, the pull rod 115 is pulled, and the pull rod 115 drives the fixed head 113 to move to the side away from the fixing hole 112 until the fixed head 113 completely leaves the fixing hole 112, and the rebound force of the first springs 107 pushes the slide plate 106 to slide to the side away from the shell 102, and at the same time, the slide plate 106 drives the guide block 117 to slide on the guide rail 116 to guide the slide plate 106. When the slide plate 106 is completely moved out of the shell 102, the pressure sensor body 103 on the slide plate 106 can be removed. The device can quickly remove the pressure sensor body 103 from the shell 102, thereby improving the removal efficiency of the pressure sensor body 103. At the same time, it can be reused to reduce the packaging cost, thereby solving the problem of low removal efficiency of the existing pressure sensor.

[0027] The second embodiment of the present application is:

[0028] See also Figure 4 , Figure 4 It is a cross-sectional view of an integrated pressure sensor along the direction of the limit block.

[0029] On the basis of the first embodiment, the utility model is an integrated pressure sensor, wherein the taking-out mechanism 104 further includes a guide rod 201 and a limit block 202 .

[0030] According to the present specific embodiment, the guide rod 201 is slidably connected to the slide plate 106 and is located on one side of the slide plate 106. The limit block 202 is fixedly connected to the guide rod 201 and is slidably connected to the slide plate 106. The guide rod 201 can guide the abutment plate 109, and the limit block 202 can limit the guide rod 201 to prevent the guide rod 201 from moving out of a preset range.

[0031] The supporting plate 109 can be guided by the guide rod 201 , and the guide rod 201 can be limited by the limit block 202 to prevent the guide rod 201 from moving out of a preset range.

[0032] In the description of the present utility model, it should be understood that if the terms "center", "longitudinal", "lateral", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside" and the like appear, the orientation or position relationship indicated is based on the orientation or position relationship shown in the drawings, which is only for the convenience of describing the present utility model and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present utility model. In addition, if the terms "first", "second", etc. appear, they are only used for descriptive purposes, and cannot be understood as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Therefore, features defined as "first", "second", etc. may explicitly or implicitly include one or more of the features. In the description of the present utility model, unless otherwise specified, "multiple" means two or more.

[0033] In the description of the present invention, it should be noted that, unless otherwise clearly specified and limited, the terms "installed", "connected", and "connected" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or it can be indirectly connected through an intermediate medium, or it can be the internal communication of two components. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood by specific circumstances.

Claims

1. An integrated pressure sensor, comprising a base plate (101), a shell (102) and a pressure sensor body (103), wherein the shell (102) is fixedly connected to the base plate (101) and is located on the base plate (101), characterized in that: It also includes a taking-out mechanism (104), the taking-out mechanism (104) including a fixing assembly (105), a slide plate (106), a plurality of first springs (107) and a guide assembly (108), the slide plate (106) having a fixing hole (112); The fixing assembly (105) is arranged in the base plate (101); the slide plate (106) is slidably connected to the shell (102) and is located on one side of the shell (102); a plurality of the first springs (107) are respectively fixedly connected to the slide plate (106) and are respectively fixedly connected to the shell (102), and are all located between the shell (102) and the slide plate (106); the guide assembly (108) is arranged on the base plate (101) and is connected to the slide plate (106); and the pressure sensor body (103) is arranged on the slide plate (106).

2. An integrated pressure sensor as claimed in claim 1, characterized in that: The fixing assembly (105) comprises a fixing head (113), a second spring (114) and a pull rod (115); the fixing head (113) is slidably connected to the base plate (101) and is located inside the base plate (101); the second spring (114) is fixedly connected to the fixing head (113) and is fixedly connected to the base plate (101) and is located between the base plate (101) and the fixing head (113); the pull rod (115) is fixedly connected to the fixing head (113) and is slidably connected to the base plate (101) and passes through the base plate (101).

3. An integrated pressure sensor as claimed in claim 2, characterized in that: The guide assembly (108) comprises a guide rail (116) and a guide block (117); the guide rail (116) is fixedly connected to the base plate (101) and is located inside the base plate (101); the guide block (117) is slidably connected to the guide rail (116) and is fixedly connected to the slide plate (106).

4. An integrated pressure sensor as claimed in claim 3, characterized in that: The taking-out mechanism (104) further comprises a supporting plate (109), a third spring (110) and a protrusion (111); the supporting plate (109) is slidably connected to the slide plate (106) and is located on one side of the slide plate (106); the third spring (110) is fixedly connected to the supporting plate (109) and is fixedly connected to the slide plate (106) and is located between the slide plate (106) and the supporting plate (109); and the protrusion (111) is fixedly connected to the supporting plate (109) and is located on one side of the supporting plate (109).

5. An integrated pressure sensor as claimed in claim 4, characterized in that: The taking-out mechanism (104) further comprises a guide rod (201) and a limit block (202); the guide rod (201) is slidably connected to the slide plate (106) and is located on one side of the slide plate (106); the limit block (202) is fixedly connected to the guide rod (201) and is slidably connected to the slide plate (106).

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