Fractured gas injection pipe extraction device for vertical back sealing furnace

Abstract

The utility model discloses a fractured gas injection pipe extraction device for a vertical back sealing furnace, which comprises a telescopic rod, a thin rod is arranged at the top of the telescopic rod, and the thin rod is used for extending into a small hole of a fractured gas injection pipe; a camera support used for placing a camera is arranged on one side of the telescopic rod, the camera is connected with the top of the camera support through a universal bearing, the camera is arranged right opposite to the top of the thin rod by adjusting the universal bearing, and a picture display screen is further arranged on one side of the telescopic rod. When the device is used, the tip of the pinnacle rod is aligned with a small hole in the middle of the fractured gas injection pipe and then continuously extends into the hole of the fractured gas injection pipe, so that the slender rod extends into the hole of the fractured gas injection pipe, the fractured gas injection pipe is carried to slowly extend out of the quartziferous furnace pipe, and the fractured gas injection pipe is taken down, so that the device is simple, convenient and easy to operate; and operators and equipment can be prevented from being injured by the broken gas injection pipe in the dismounting process.

Description

Technical Field

[0001] The utility model belongs to the technical field of silicon polishing sheet processing, in particular to a fractured gas jet pipe extraction device for a vertical back-sealed furnace. Background Art

[0002] The integration level of KOKUSAI vertical POLY furnace is very high. The sheet picking and placing robot is located at the lower side of the furnace tube. Due to the process and material reasons, some broken gas injection tubes inside the furnace tube will fall to the adjacent gas injection tubes on the side and get stuck between the gas injection tubes and the quartz furnace tube. When the furnace is dismantled, this part of the broken gas injection tube will fall along with the removal of the adjacent gas injection tubes and injure the operator and the facilities under the furnace tube. Utility Model Content

[0003] In order to solve the above problems, the utility model proposes a broken gas injection pipe extraction device for a vertical back-sealed furnace, which is used to extract the broken gas injection pipe and prevent the broken gas injection pipe from injuring operators and equipment during the removal process.

[0004] The utility model is realized by the following technical solutions:

[0005] A device for extracting a broken gas injection pipe for a vertical back-sealed furnace, comprising a telescopic rod, a thin rod is arranged on the top of the telescopic rod, and the thin rod is used to extend into a small hole of the broken gas injection pipe;

[0006] A camera bracket for placing a camera is provided on one side of the telescopic rod. The camera is connected to the top of the camera bracket through a universal bearing. The camera can be set facing the top of the thin rod by adjusting the universal bearing. A picture display screen is also provided on one side of the telescopic rod.

[0007] Furthermore, the top of the thin rod is also connected to a pointed rod, which is used to align with the small hole of the broken gas injection tube so that the thin rod can extend into the small hole of the broken gas injection tube, and the camera is set directly opposite the top of the pointed rod by adjusting the universal bearing.

[0008] Furthermore, the diameter of the pointed rod is smaller than the diameter of the thin rod.

[0009] Furthermore, the diameter of the thin rod is smaller than the inner diameter of the fracture gas injection tube.

[0010] Furthermore, the diameter of the telescopic rod is larger than the inner diameter of the broken gas injection pipe.

[0011] Furthermore, the camera is connected to a micro light source.

[0012] The beneficial effects of the utility model are:

[0013] The device is used for extracting a broken gas jet tube. When in use, the tip of the pointed rod is aligned with the small hole in the middle of the broken gas jet tube and then the thin rod is extended into the hole of the broken gas jet tube. The broken gas jet tube is slowly extended out of the quartz furnace tube and the broken gas jet tube is removed. The process is simple, convenient and easy to operate, and can prevent the broken gas jet tube from injuring operators and equipment during the removal process. BRIEF DESCRIPTION OF THE DRAWINGS

[0014] Figure 1 It is a schematic diagram of the overall structure of the utility model;

[0015] Figure 2 It is a schematic diagram of the partial structure of the top of the utility model;

[0016] Figure 3 This is an application scenario diagram of the casting mold of the utility model;

[0017] Figure numerals: 1. broken gas injection tube, 2. rotating furnace cover, 3. robot, 4. human position, 5. gas injection tube, 6. furnace tube, 7. camera bracket, 8. pointed top rod, 9. thin rod, 10. screen display, 11. telescopic rod, 12. camera, 13. universal bearing, 14. micro light source. DETAILED DESCRIPTION

[0018] In order to make the purpose, technical solution and advantages of the embodiments of the present invention clearer, the technical solution in the embodiments of the present invention will be clearly and completely described below in conjunction with the accompanying drawings in the present invention.

[0019] Obviously, the described embodiments are only some embodiments of the present application, rather than all embodiments. Generally, the components of the embodiments of the present application described and shown in the drawings herein can be arranged and designed in various different configurations.

[0020] Therefore, the following detailed description of the embodiments of the present application provided in the accompanying drawings is not intended to limit the scope of the present application for which protection is sought, but merely represents selected embodiments of the present application. Based on the embodiments of the present application, all other embodiments obtained by those skilled in the art without creative work are within the scope of protection of the present application.

[0021] like Figure 3 As shown, the manipulator 3 for taking and placing the slices is located at the lower side of the furnace tube 6. The gas injection tube 5 inside the furnace tube 6 is made of quartz. Due to the process (cooling after high temperature) and material reasons, some gas injection tubes 5 will be broken. The broken gas injection tubes 1 will fall to the adjacent gas injection tubes on the side and get stuck between the gas injection tube 5 and the furnace tube 6. When the furnace is dismantled, this part of the broken gas injection tube 5 will fall and hit the operator and the facilities under the furnace tube along with the removal of the adjacent gas injection tubes.

[0022] like Figure 1~2 As shown, the present application proposes a device for extracting a broken gas injection pipe for a vertical back-sealed furnace, comprising a telescopic rod 11, the diameter of which is larger than the inner diameter of the broken gas injection pipe 1. A thin rod 9 is provided at the top of the telescopic rod 11, and the thin rod 9 is used to extend into the small hole of the broken gas injection pipe 1; the diameter of the thin rod 9 is smaller than the inner diameter of the gas injection pipe 1. A pointed rod 8 that is easy to extend into the gas injection pipe can also be connected to the top of the thin rod 9, and the diameter of the pointed rod 8 is smaller than the diameter of the thin rod 9. The pointed rod 8 is used to align with the small hole of the broken gas injection pipe 1 so that the thin rod 9 can easily extend into the small hole of the broken gas injection pipe 1; when in use, the broken gas injection pipe 1 slides along the pointed rod 8 toward the thin rod 9, and finally falls on the telescopic rod 11.

[0023] A camera bracket 7 for placing a camera 12 is provided on one side of the telescopic rod 11. The camera 12 is connected to the top of the camera bracket 7 through a universal bearing 13. The universal bearing 13 is adjusted so that the camera 12 is set opposite the top of the pointed rod 8. A picture display screen 10 is also provided on one side of the telescopic rod 11.

[0024] Furthermore, the camera 12 is connected to a micro light source 14 for increasing the brightness inside the furnace tube for easy operation.

[0025] Usage process:

[0026] When in use, a person is located at the human standing position 4, visually observes the position of the broken gas jet tube 1, adjusts the telescopic rod 11 to a suitable position, turns on the micro power supply 14, adjusts the universal bearing 13 so that the camera 12 is facing the pointed top rod 8, and the image of the tip of the pointed top rod 8 appears in the middle position of the screen 10. The device is held and inserted into the quartz furnace tube 6, and the tip of the pointed top rod 8 is aligned with the small hole in the middle of the broken gas jet tube 1, and then continues to be inserted so that the thin rod 9 is inserted into the hole of the broken gas jet tube 1. The device carries the broken gas jet tube 1 and slowly extends out of the quartz furnace tube 6, and the broken gas jet tube 1 is removed, and the operation is completed.

[0027] The basic principles, main features and advantages of the utility model are shown and described above. Those skilled in the art should understand that the utility model is not limited by the above embodiments. The above embodiments and descriptions are only for explaining the principles of the utility model. Without departing from the spirit and scope of the utility model, the utility model may have various changes and improvements, which shall fall within the scope of the utility model to be protected. The scope of protection of the utility model shall be defined by the attached claims and their equivalents.

Claims

1. A broken gas injection pipe extraction device for a vertical back-sealed furnace, characterized in that: It comprises a telescopic rod (11), a thin rod (9) being arranged on the top of the telescopic rod (11), and the thin rod (9) being used to extend into a small hole of the broken gas injection pipe (1); A camera bracket (7) for placing a camera (12) is provided on one side of the telescopic rod (11); the camera (12) is connected to the top of the camera bracket (7) via a universal bearing (13); the camera (12) is arranged facing the top of the thin rod (9) by adjusting the universal bearing (13); and a picture display screen (10) is also provided on one side of the telescopic rod (11).

2. The device for extracting a broken gas injection pipe for a vertical back-sealed furnace according to claim 1, characterized in that: The top of the thin rod (9) is also connected to a pointed rod (8), and the pointed rod (8) is used to align with the small hole of the broken gas injection tube (1) so that the thin rod (9) extends into the small hole of the broken gas injection tube (1), and the camera (12) is arranged to face the top of the pointed rod (8) by adjusting the universal bearing (13).

3. The device for extracting a broken gas injection pipe for a vertical back-sealed furnace according to claim 2, characterized in that: The diameter of the pointed rod (8) is smaller than the diameter of the thin rod (9).

4. A device for extracting a broken gas injection pipe for a vertical back-sealed furnace according to claim 1 or 3, characterized in that: The diameter of the thin rod (9) is smaller than the inner diameter of the fracture gas injection tube (1).

5. The device for extracting a broken gas injection pipe for a vertical back-sealed furnace according to claim 1, characterized in that: The diameter of the telescopic rod (11) is greater than the inner diameter of the broken gas injection tube (1).

6. The device for extracting a broken gas injection pipe for a vertical back-sealed furnace according to claim 1, characterized in that: The camera (12) is connected to a micro light source (14).

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