Uniform growth device for monocrystal diamond
By designing a single-crystal diamond uniform growth device including a low-frequency microwave source device and a water-guiding mechanism, the problem of uneven temperature distribution caused by electron density deviation in the existing technology is solved, and the uniform growth and high-efficiency single-crystal diamond are achieved. Quality preparation.
Patent Information
- Application Number
- CN202423004361.1
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-12-06
- Publication Date
- 2025-01-21
- Estimated Expiration
- 2034-12-06
AI Technical Summary
In the prior art, when preparing large-size, high-quality single-crystal diamonds, electron density shift leads to uneven temperature distribution and plasma deposition rate, resulting in advance polycrystals on the diamond surface, reducing the quality of the sample.
A single crystal diamond uniform growth device is designed, including a low-frequency microwave source equipment, a cooling table, a molybdenum holder, a substrate and a water guide mechanism. By accurately controlling the position of the microwave source equipment and the distribution of plasma, the substrate is ensured to be in the microwave state. The central position of the glow enables uniform growth of single crystal diamond.
Through this device, the uniform growth of single crystal diamond can be achieved, the quality of the sample can be improved, the cutting loss and cost can be reduced, and the preparation of large-sized, high-quality single crystal diamond can be achieved.
Smart Images
Figure CN222374833U_ABST
Abstract
Description
Technical Field
[0001] The utility model relates to the technical field of single crystal diamond manufacturing devices, in particular to a single crystal diamond uniform growth device. Background Art
[0002] The preparation of large-sized, high-quality single-crystal diamond is the development trend of semiconductor manufacturing technology. It has excellent optical properties, thermal conductivity, and high hardness, and is used in aerospace, ultra-precision machining, semiconductors and other fields. Therefore, the preparation technology of large-sized, high-quality single-crystal diamond has received widespread attention and has become a current research hotspot and focus. Microwave plasma chemical vapor deposition (MPCVD) technology can produce large-sized and high-quality single-crystal diamonds at high power and high rate, and is a method recognized by many researchers for depositing single-crystal diamond films. However, the electron density offset leads to uneven temperature distribution and plasma deposition rate, causing the diamond surface to appear polycrystalline in advance, reducing the quality of the sample, increasing cutting loss and high cost burden. Establishing a uniform and stable microwave plasma discharge zone is the primary goal of achieving large-sized, high-quality single-crystal diamonds. Utility Model Content
[0003] In view of the deficiencies in the prior art, the utility model provides a single crystal diamond uniform growth device, which solves the problems raised by the above background technology.
[0004] To achieve the above purpose, the utility model is implemented through the following technical solutions: a single crystal diamond uniform growth device, including a box body, a low-frequency microwave source device is fixed at the center of the inner upper surface of the box body, a cooling table is provided inside the box body, a molybdenum holder is fixed on the top of the cooling table, a substrate is fixed inside the molybdenum holder, a fixing plate is provided at the bottom of the cooling table, a connecting rod is slidably connected inside the fixing plate, the top of the connecting rod is fixedly connected to the bottom of the cooling table, a displacement mechanism is provided at the bottom of the fixing plate, the displacement mechanism includes a screw, a motor, a moving block and a threaded barrel, guide rails are fixed on the left and right sides of the cooling table, the guide rails are fixedly connected to the inner side wall of the box body, a box door is fixed at the front end of the guide rail, an observation port is fixed inside the box door, and an air intake pipe is fixed on the right side inside the box body.
[0005] A circular ring is arranged inside the box body, two connecting strips are fixed on the outer side wall of the circular ring, a bearing is fixed inside the circular ring, the inner side wall of the bearing is fixedly connected to the outer side wall of the screw rod, and the rear surface of the box body is fixedly connected to the motor.
[0006] The output shaft of the motor passes through the box and is fixedly connected with the screw, the screw and the threaded barrel are threadedly connected, two abutment rods are fixed on the inner rear surface of the box, the front end of the abutment rods is in contact with the rear surface of the moving block, the threaded barrel is located inside the moving block and is rotatably connected to the moving block, and the top of the moving block is fixedly connected to the bottom of the fixed plate.
[0007] Two ratchet grooves are provided on the outer wall of the threaded cylinder, four storage holes are provided inside the moving block, one end of the spring is fixed inside the storage hole, and a clamping block is fixed to the other end of the spring. Two pressing holes are provided on the front surface of the moving block, and two pressing rods are provided inside the pressing holes. Pull ropes are fixed on the opposite sides of the two rear clamping blocks, and the other ends of the pull ropes pass through the pressure rods and are fixedly connected to the pressure holes. The ratchets on the front ratchet groove and the rear ratchet groove face opposite directions.
[0008] A water guiding mechanism is provided inside the box, which includes a water inlet hose, a water outlet hose, a round shell, a fixed ring, a swivel and a plurality of extrusion blocks. The rear surface of the round shell is fixedly connected to the inner rear surface of the box, the outer side wall of the screw passes through the round shell, the outer side wall of the screw is fixedly connected to the inner side wall of the fixed ring, and the outer side wall of the fixed ring is rotatably connected to the inner side wall of the swivel.
[0009] The extrusion block is fixed to the outer wall of the swivel, the water inlet hose passes through the round shell, the left end of the water inlet hose and the left end of the water outlet hose pass through the fixed plate and the bottom of the cooling table for fixed connection, a ratchet groove is provided on the outer wall of the fixed ring, a plurality of storage holes are provided inside the swivel, a spring is fixed inside the storage hole, a clamping block is fixed to the other end of the spring, and the ratchet groove at the rear on the threaded cylinder and the ratchet on the ratchet groove on the fixed ring have the same direction.
[0010] Beneficial Effects
[0011] The utility model provides a single crystal diamond uniform growth device, which has the following beneficial effects compared with the prior art:
[0012] 1. The single crystal diamond uniform growth device is provided with a low-frequency microwave source device, a stopper rod, and a displacement mechanism. The motor is started, and the motor drives the screw to rotate. The rotation of the screw drives the threaded barrel and the moving block to move. The moving block drives the fixed plate, the cooling table, the molybdenum support, and the substrate to move. The stopper rod stops the moving block, so that the moving block stops moving, and the substrate is located at the bottom center of the low-frequency microwave source device. In this way, after the glow is generated inside the box of the low-frequency microwave source device, the substrate is located at the center of the glow, so that the single crystal diamond grows more uniformly. In addition, the use of the low-frequency microwave source device can expand the wavelength to obtain a large-sized plasma sphere, so that it completely covers the substrate.
[0013] 2. The single crystal diamond uniform growth device is provided with a water guiding mechanism. When the screw rotates, the screw drives the fixed ring to rotate. The fixed ring drives the rotating ring and the extrusion block to rotate through the clamping block and the ratchet groove. The extrusion block rotates to squeeze the water inlet hose, so that cooling water enters the interior of the cooling table. The resistance rod squeezes the pressure rod. The pressure rod pulls the pull rope. The pull rope pulls the clamping block at the rear of the moving block to move out of the ratchet groove at the rear of the threaded barrel. In this way, the screw can rotate continuously without getting stuck. BRIEF DESCRIPTION OF THE DRAWINGS
[0014] Figure 1 It is a schematic diagram of the structure of the utility model;
[0015] Figure 2 It is a cross-sectional structural schematic diagram of the utility model;
[0016] Figure 3 It is a schematic diagram of the side section structure of the utility model;
[0017] Figure 4 It is a schematic diagram of the side section structure of the fixing plate in the utility model;
[0018] Figure 5 It is a structural schematic diagram of the threaded barrel in the utility model;
[0019] Figure 6 It is a schematic cross-sectional structure diagram of the circular shell in the utility model.
[0020] In the figure: 1. water guide mechanism; 2. box body; 3. water outlet hose; 4. box door; 5. observation port; 6. circular ring; 7. bearing; 8. connecting strip; 9. guide rail; 10. screw; 11. cooling table; 12. molybdenum support; 13. motor; 14. substrate; 15. low-frequency microwave source equipment; 16. water inlet hose; 17. round shell; 18. push rod; 19. displacement mechanism; 20. ratchet groove; 21. block; 22. spring; 23. storage hole; 24. threaded cylinder; 25. moving block; 26. pull rope; 27. pressure hole; 28. swivel; 29. extrusion block; 30. fixing ring; 31. pressure rod; 32. air inlet pipe; 33. fixing plate; 34. connecting rod. DETAILED DESCRIPTION
[0021] See also Figure 1-6A single crystal diamond uniform growth device comprises a box body 2, a low-frequency microwave source device 15 is fixed at the center of the inner upper surface of the box body 2, a cooling platform 11 is arranged inside the box body 2, a molybdenum holder 12 is fixed on the top of the cooling platform 11, a substrate 14 is fixed inside the molybdenum holder 12, a fixing plate 33 is arranged at the bottom of the cooling platform 11, a connecting rod 34 is slidably connected inside the fixing plate 33, the top of the connecting rod 34 is fixedly connected to the bottom of the cooling platform 11, a displacement mechanism 19 is arranged at the bottom of the fixing plate 33, the displacement mechanism 19 comprises a screw 10, a motor 13, a moving block 25 and a threaded barrel 24, guide rails 9 are fixed on both the left and right sides of the cooling platform 11, and the guide rails 9 and The inner wall of the box body 2 is fixedly connected, a box door 4 is fixed at the front end of the guide rail 9, an observation port 5 is fixed inside the box door 4, an air intake pipe 32 is fixed on the right side of the inside of the box body 2, a circular ring 6 is provided inside the box body 2, two connecting strips 8 are fixed to the outer wall of the circular ring 6, a bearing 7 is fixed inside the circular ring 6, the inner wall of the bearing 7 and the outer wall of the screw 10 are fixedly connected, the rear surface of the box body 2 and the motor 13 are fixedly connected, the output shaft of the motor 13 passes through the box body 2 and is fixedly connected to the screw 10, the screw 10 and the threaded barrel 24 are threadedly connected, two push rods 18 are fixed on the inner rear surface of the box body 2, the front end of the push rod 18 is in contact with the rear surface of the moving block 25, and the threaded barrel 2 4 is located inside the moving block 25 and is rotatably connected to the moving block 25. The top of the moving block 25 is fixedly connected to the bottom of the fixing plate 33. The outer wall of the threaded cylinder 24 is provided with two ratchet grooves 20. The inside of the moving block 25 is provided with four receiving holes 23. One end of the spring 22 is fixed inside the receiving hole 23. The other end of the spring 22 is fixed with a clamping block 21. The front surface of the moving block 25 is provided with two pressing holes 27. Two pressing rods 31 are provided inside the pressing holes 27. The opposite sides of the two clamping blocks 21 at the rear are fixed with pull ropes 26. The other ends of the pull ropes 26 pass through the pressing rods 31 and are fixedly connected with the pressing holes 27. The ratchet grooves 20 at the front and the ratchet grooves 20 at the rear are fixedly connected with the pull ropes 26. The teeth are in opposite directions, and the motor 13 is started. The motor 13 rotates the screw 10, and the rotation of the screw 10 moves the threaded barrel 24 and the moving block 25. The moving block 25 moves with the fixed plate 33, the cooling table 11, the molybdenum support 12 and the substrate 14. The stop rod 18 stops the moving block 25, so that the moving block 25 stops moving, and the substrate 14 is located at the bottom center of the low-frequency microwave source device 15. In this way, after the low-frequency microwave source device 15 is started and a glow is generated inside the box 2, the substrate 14 is located at the center of the glow, so that the single crystal diamond grows more evenly. In addition, the use of the low-frequency microwave source device 15 can expand the wavelength to obtain a large-sized plasma sphere, so that it completely covers the substrate 14.
[0022] A water guide mechanism 1 is provided inside the housing 2, and the water guide mechanism 1 includes a water inlet hose 16, a water outlet hose 3, a round shell 17, a fixing ring 30, a swivel 28 and a plurality of extrusion blocks 29. The rear surface of the round shell 17 is fixedly connected to the inner rear surface of the housing 2, the outer wall of the screw 10 passes through the round shell 17, the outer wall of the screw 10 is fixedly connected to the inner wall of the fixing ring 30, the outer wall of the fixing ring 30 is rotatably connected to the inner wall of the swivel 28, the extrusion block 29 is fixed to the outer wall of the swivel 28, the water inlet hose 16 passes through the round shell 17, the left end of the water inlet hose 16 and the left end of the water outlet hose 3 are both fixedly connected to the bottom of the cooling table 11 through the fixing plate 33, the outer wall of the fixing ring 30 is provided with a ratchet groove 20, and the interior of the swivel 28 is provided with a There are multiple storage holes 23, a spring 22 is fixed inside the storage hole 23, a block 21 is fixed to the other end of the spring 22, the ratchet groove 20 on the threaded barrel 24 at the rear and the ratchet groove 20 on the fixing ring 30 face the same direction, the screw 10 rotates, the screw 10 rotates with the fixing ring 30, the fixing ring 30 rotates with the swivel 28 and the extrusion block 29 through the block 21 and the ratchet groove 20, the extrusion block 29 rotates to squeeze the water inlet hose 16, so that the cooling water enters the interior of the cooling table 11, the push rod 18 squeezes the pressure rod 31, the pressure rod 31 pulls the pull rope 26, and the pull rope 26 pulls the block 21 at the rear of the moving block 25 to move out of the ratchet groove 20 behind the threaded barrel 24, so that the screw 10 can rotate continuously without getting stuck.
[0023] During operation, the motor 13 is started, and the motor 13 rotates the screw 10. The rotation of the screw 10 moves the threaded barrel 24 and the moving block 25. The moving block 25 moves with the fixed plate 33, the cooling table 11, the molybdenum support 12 and the substrate 14. The stop rod 18 stops the moving block 25, so that the moving block 25 stops moving, and the substrate 14 is located at the bottom center of the low-frequency microwave source device 15. In this way, after the low-frequency microwave source device 15 is started and a glow is generated inside the box 2, the substrate 14 is located at the center of the glow, so that the single crystal diamond grows more evenly. In addition, the use of the low-frequency microwave source device 15 can expand the wavelength to obtain a large-sized plasma sphere, so that it completely covers the substrate 14.
Claims
1. A single crystal diamond uniform growth device, comprising a housing (2), characterized in that: A low-frequency microwave source device (15) is fixed at the center of the inner upper surface of the box (2); a cooling platform (11) is provided inside the box (2); a molybdenum support (12) is fixed on the top of the cooling platform (11); a substrate (14) is fixed inside the molybdenum support (12); a fixing plate (33) is provided at the bottom of the cooling platform (11); a connecting rod (34) is slidably connected inside the fixing plate (33); the top of the connecting rod (34) is fixedly connected to the bottom of the cooling platform (11); A displacement mechanism (19) is provided at the bottom of the fixed plate (33), and the displacement mechanism (19) comprises a screw (10), a motor (13), a moving block (25) and a threaded cylinder (24). Guide rails (9) are fixed on both the left and right sides of the cooling table (11), and the guide rails (9) are fixedly connected to the inner side wall of the box body (2). A box door (4) is fixed at the front end of the guide rail (9), and an observation port (5) is fixed inside the box door (4). An air intake pipe (32) is fixed on the right side inside the box body (2).
2. The single crystal diamond uniform growth device according to claim 1, characterized in that: A circular ring (6) is provided inside the box body (2), two connecting strips (8) are fixed to the outer side wall of the circular ring (6), a bearing (7) is fixed inside the circular ring (6), the inner side wall of the bearing (7) and the outer side wall of the screw rod (10) are fixedly connected, and the rear surface of the box body (2) and the motor (13) are fixedly connected.
3. The single crystal diamond uniform growth device according to claim 2, characterized in that: The output shaft of the motor (13) passes through the housing (2) and is fixedly connected to the screw rod (10), the screw rod (10) is threadedly connected to the threaded barrel (24), two abutment rods (18) are fixed to the inner rear surface of the housing (2), the front ends of the abutment rods (18) are in contact with the rear surface of the moving block (25), the threaded barrel (24) is located inside the moving block (25) and is rotatably connected to the moving block (25), and the top of the moving block (25) is fixedly connected to the bottom of the fixed plate (33).
4. The single crystal diamond uniform growth device according to claim 3, characterized in that: The outer wall of the threaded cylinder (24) is provided with two ratchet grooves (20), the interior of the moving block (25) is provided with four receiving holes (23), one end of a spring (22) is fixed inside the receiving hole (23), the other end of the spring (22) is fixed with a clamping block (21), the front surface of the moving block (25) is provided with two pressing holes (27), the interior of the pressing holes (27) is provided with two pressing rods (31), the opposite sides of the two rear clamping blocks (21) are fixed with pull ropes (26), the other ends of the pull ropes (26) pass through the pressing rods (31) and are fixedly connected with the pressing holes (27), and the ratchets on the front ratchet groove (20) and the rear ratchet groove (20) face in opposite directions.
5. The single crystal diamond uniform growth device according to claim 4, characterized in that: A water guide mechanism (1) is provided inside the box body (2), and the water guide mechanism (1) comprises a water inlet hose (16), a water outlet hose (3), a round shell (17), a fixed ring (30), a swivel (28) and a plurality of extrusion blocks (29). The rear surface of the round shell (17) is fixedly connected to the inner rear surface of the box body (2), the outer wall of the screw rod (10) passes through the round shell (17), the outer wall of the screw rod (10) is fixedly connected to the inner wall of the fixed ring (30), and the outer wall of the fixed ring (30) is rotatably connected to the inner wall of the swivel (28).
6. The single crystal diamond uniform growth device according to claim 5, characterized in that: The extrusion block (29) is fixed to the outer wall of the rotating ring (28), the water inlet hose (16) passes through the round shell (17), the left end of the water inlet hose (16) and the left end of the water outlet hose (3) pass through the fixing plate (33) and are fixedly connected to the bottom of the cooling table (11), the outer wall of the fixing ring (30) is provided with a ratchet groove (20), the inside of the rotating ring (28) is provided with a plurality of receiving holes (23), the inside of the receiving hole (23) is fixed with the spring (22), the other end of the spring (22) is fixed with the clamping block (21), and the ratchet groove (20) located at the rear of the threaded cylinder (24) and the ratchet on the ratchet groove (20) on the fixing ring (30) are oriented in the same direction.