Crystal growth weighing structure

Abstract

The utility model discloses a crystal growth weighing structure and belongs to the technical field of crystal growth. The weighing structure comprises a weighing mechanism, a rotating mechanism and a lifting mechanism; the weighing mechanism comprises a sealing shell, a weighing sensor, a connecting frame and a connecting plate, the weighing sensor, the connecting frame and the connecting plate are all located in a sealing cavity of the sealing shell, the weighing sensor is fixed to the sealing shell, the connecting frame is connected with the top face of the weighing sensor, and the connecting plate is fixed to the sealing shell. The connecting plate is located on the connecting frame, and the connecting plate is connected with the side face of the weighing sensor; the rotating mechanism is located on the connecting frame, and the output end of the rotating mechanism extends out of the sealing shell so as to drive a seed crystal to rotate; the output end of the lifting mechanism is in transmission connection with the sealing shell. The crystal growth weighing structure provided by the embodiment of the utility model is simple in structure and can effectively ensure the reading stability of the weighing sensor.

Description

Technical Field

[0001] The utility model belongs to the technical field of crystal growth, and in particular relates to a crystal growth weighing structure. Background Art

[0002] For various types of high-temperature furnaces such as silicon carbide single crystal furnaces and silicon single crystal furnaces, since the crystal growth conditions are mostly invisible, and the actual crystal growth conditions are the key to the success or failure of crystal growth, real-time and continuous measurement of the crystal growth rate that changes with time is crucial to crystal growth.

[0003] At present, crystal growth generally takes about 30 hours, and the weight of the entire crystal is about 2g heavier than before the growth begins, so the stability requirements of the weighing structure are very high. Any external factors will affect the sensitivity of the weighing sensor and affect the weight of the crystal during the growth process.

[0004] However, in the existing weighing structure, the weighing sensor is connected to the rotating mechanism at a single point, and the connection strength is poor, so that the rotating mechanism shakes during the process of driving the seed crystal to rotate, and the stability is poor, resulting in fluctuations in the reading of the weighing sensor when the weighing sensor is acted on. Utility Model Content

[0005] In view of the above defects or improvement needs of the prior art, the utility model provides a crystal growth weighing structure, which aims to have a simple structure and can effectively ensure the stability of the reading of the weighing sensor.

[0006] To achieve the above-mentioned purpose, the utility model provides a crystal growth weighing structure, which includes a weighing mechanism, a rotating mechanism and a lifting mechanism;

[0007] The weighing mechanism comprises a sealing shell, a weighing sensor, a connecting frame and a connecting plate, wherein the weighing sensor, the connecting frame and the connecting plate are all located in a sealing cavity of the sealing shell, and the weighing sensor is fixed on the sealing shell, the connecting frame is connected to the top surface of the weighing sensor, the connecting plate is located on the connecting frame, and the connecting plate is connected to the side surface of the weighing sensor;

[0008] The rotating mechanism is located on the connecting frame, and the output end of the rotating mechanism extends out of the sealing shell to drive the seed crystal to rotate;

[0009] The output end of the lifting mechanism is drivingly connected to the sealing shell to drive the sealing shell to rise and fall.

[0010] Optionally, the connecting frame is a square frame structure, the weighing sensor is located in the connecting frame, and the top plate of the connecting frame is fixed on the top surface of the weighing sensor, and the two ends of the connecting plate are respectively fixed on the two side plates of the connecting frame.

[0011] Optionally, a pad is sandwiched between the top plate of the connecting frame and the top surface of the weighing sensor.

[0012] Optionally, a fixing plate is provided on the connecting frame, two ends of the fixing plate are respectively fixed to two side plates of the connecting frame, and the rotating mechanism is located on the fixing plate.

[0013] Optionally, the weighing mechanism further includes a signal transmission module, the signal transmission module is located on the outer wall of the sealing shell, and the signal transmission module is electrically connected to the weighing sensor.

[0014] Optionally, the rotating mechanism includes a motor and a transmission shaft, the motor is located in the sealed cavity of the sealed shell and on the connecting frame, the output shaft of the motor is coaxially connected to the transmission shaft, and the transmission shaft extends out of the sealed shell.

[0015] Optionally, a bellows is fixedly connected to the outer wall of the sealing shell, and the transmission shaft is inserted into the bellows and arranged at a distance from the bellows.

[0016] Optionally, the lifting mechanism includes a support seat, a connecting block, a screw and a driving motor, the driving motor is located on the support seat, the driving motor is connected to the screw in a transmission manner to drive the screw to rotate, the connecting block is slidably arranged on the support seat along the vertical direction, the connecting block is fixedly connected to the sealing shell, and the screw passes through the connecting block and cooperates with the connecting block.

[0017] Optionally, the support seat has a slide rail extending in a vertical direction, a slider is slidably inserted on the slide rail, and the slider is fixedly connected to the connecting block.

[0018] Optionally, the sealing shell includes a front cover, a rear cover and an outer frame, the front cover, the rear cover and the outer frame surround and form the sealing cavity, the output end of the lifting mechanism is connected to the rear cover, and the weighing sensor is fixed on the rear cover.

[0019] The above-mentioned improved technical features can be combined with each other as long as they do not conflict with each other.

[0020] In general, the above technical solutions conceived by the utility model have the following beneficial effects compared with the prior art:

[0021] For a crystal growth weighing structure of an embodiment of the utility model, on the one hand, since the weighing sensor is located in the sealed cavity of the sealed shell, and the connecting frame and the connecting plate are both located in the sealed cavity, a sealed arrangement is achieved, which prevents the weighing sensor and its corresponding connecting structure from being affected by external factors (such as temperature and airflow changes) when the weighing sensor and its corresponding connecting structure are lifting and rotating, thereby avoiding the reading fluctuation of the weighing sensor. On the other hand, since the connecting frame is connected to the top surface of the weighing sensor, and the rotating mechanism is located on the connecting frame, the connection between the top surface of the weighing sensor and the rotating mechanism is achieved through the connecting frame. In addition, since the connecting plate is located on the connecting frame, and the connecting plate is connected to the side of the weighing sensor, the connection between the side of the weighing sensor and the rotating mechanism is achieved through the connecting frame and the connecting plate, thereby finally achieving a reliable connection between the weighing sensor and the rotating mechanism at multiple points and in multiple directions, ensuring the stability of the rotating mechanism when it is fixed on the weighing sensor when it is working, avoiding its shaking, and making the reading of the weighing sensor stable when it acts on the weighing sensor.

[0022] That is to say, the crystal growth weighing structure provided by the embodiment of the utility model has a simple structure and can effectively ensure the stability of the reading of the weighing sensor. BRIEF DESCRIPTION OF THE DRAWINGS

[0023] Figure 1 It is a side view of a crystal growth weighing structure provided by an embodiment of the utility model;

[0024] Figure 2 This is a front view of an open sealed shell in a crystal growth weighing structure provided by an embodiment of the utility model;

[0025] Figure 3 It is a structural schematic diagram of a weighing mechanism provided in an embodiment of the utility model.

[0026] In all the drawings, the same reference numerals represent the same technical features, specifically:

[0027] 1. Weighing mechanism; 11. Sealing shell; 111. Front cover; 112. Rear cover; 113. Outer frame; 12. Weighing sensor; 13. Connecting frame; 14. Connecting plate; 15. Pad; 16. Fixing plate; 17. Signal transmission module; 18. Bellows; 19. Mounting plate; 2. Rotating mechanism; 21. Motor; 22. Transmission shaft; 23. Coupling; 3. Lifting mechanism; 31. Support seat; 311. Support plate; 32. Connecting block; 33. Screw rod; 34. Slide rail; 35. Slider; 36. Adapter plate. DETAILED DESCRIPTION

[0028] In order to make the purpose, technical solution and advantages of the utility model more clear, the utility model is further described in detail below in conjunction with the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are only used to explain the utility model and are not used to limit the utility model. In addition, the technical features involved in each embodiment of the utility model described below can be combined with each other as long as they do not conflict with each other.

[0029] In the description of the present invention, it should be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", "clockwise", "counterclockwise", "axial", "radial", "circumferential" and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the referred device or element must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be understood as a limitation on the present invention.

[0030] In addition, the terms "first" and "second" are used for descriptive purposes only and should not be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features. Therefore, the features defined as "first" and "second" may explicitly or implicitly include at least one of the features. In the description of the present utility model, the meaning of "plurality" is at least two, such as two, three, etc., unless otherwise clearly and specifically defined.

[0031] In the present invention, unless otherwise clearly specified and limited, the terms "installed", "connected", "connected", "fixed" and the like should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium, it can be the internal connection of two elements or the interaction relationship between two elements, unless otherwise clearly defined. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0032] In the present utility model, unless otherwise clearly specified and limited, a first feature being "above" or "below" a second feature may mean that the first and second features are in direct contact, or the first and second features are in indirect contact through an intermediate medium. Moreover, a first feature being "above", "above" or "above" a second feature may mean that the first feature is directly above or obliquely above the second feature, or simply means that the first feature is higher in level than the second feature. A first feature being "below", "below" or "below" a second feature may mean that the first feature is directly below or obliquely below the second feature, or simply means that the first feature is lower in level than the second feature.

[0033] Example:

[0034] Figure 1 : is a side view of a crystal growth weighing structure provided by an embodiment of the utility model, such as Figure 1 As shown, the weighing structure includes a weighing mechanism 1, a rotating mechanism 2 and a lifting mechanism 3.

[0035] Figure 2 This is a front view of an open sealed shell in a crystal growth weighing structure provided by an embodiment of the utility model. Figure 3 This is a schematic diagram of the structure of the weighing mechanism provided by the embodiment of the utility model, combined with Figure 2 and Figure 3 As shown, the weighing mechanism 1 includes a sealed shell 11, a weighing sensor 12, a connecting frame 13 and a connecting plate 14. The weighing sensor 12, the connecting frame 13 and the connecting plate 14 are all located in a sealed cavity of the sealed shell 11, and the weighing sensor 12 is fixed on the sealed shell 11, the connecting frame 13 is connected to the top surface of the weighing sensor 12, the connecting plate 14 is located on the connecting frame 13, and the connecting plate 14 is connected to the side of the weighing sensor 12.

[0036] The rotating mechanism 2 is located on the connecting frame 13 , and the output end of the rotating mechanism 2 extends out of the sealing shell 11 to drive the seed crystal to rotate.

[0037] The output end of the lifting mechanism 3 is drivingly connected to the sealing shell 11 to drive the sealing shell 11 to rise and fall.

[0038] For a crystal growth weighing structure of an embodiment of the utility model, on the one hand, since the weighing sensor 12 is located in the sealed cavity of the sealed shell 11, and the connecting frame 13 and the connecting plate 14 are both located in the sealed cavity, a sealed arrangement is achieved, which prevents the weighing sensor 12 and its corresponding connecting structure from being affected by external factors (such as temperature and airflow changes) when they are lifting and rotating, thereby avoiding fluctuations in the readings of the weighing sensor 12. On the other hand, since the connecting frame 13 is connected to the top surface of the weighing sensor 12, and the rotating mechanism 2 is located on the connecting frame 13, the connection between the top surface of the weighing sensor 12 and the rotating mechanism 2 is achieved through the connecting frame 13. Furthermore, since the connecting plate 14 is located on the connecting frame 13 and the connecting plate 14 is connected to the side of the weighing sensor 12, the connection between the side of the weighing sensor 12 and the rotating mechanism 2 is realized through the connecting frame 13 and the connecting plate 14, thereby finally realizing a reliable connection between the weighing sensor 12 and the rotating mechanism 2 at multiple points and in multiple directions, ensuring the stability of the rotating mechanism 2 when it is fixed on the weighing sensor 12 when working, avoiding its shaking, and making the reading of the weighing sensor 12 stable when it acts on the weighing sensor 12.

[0039] That is to say, the crystal growth weighing structure provided by the embodiment of the utility model has a simple structure and can effectively ensure the stability of the reading of the weighing sensor 12.

[0040] It should be noted that the rotating mechanism 2 can drive the seed crystal to rotate to stir the high temperature furnace, and the lifting mechanism 3 can lift the seed crystal, so as to adjust the position of the seed crystal and crystallize after stirring. During the crystal generation process, the rotating mechanism 2 acts on the weighing sensor 12 to collect the required weight data.

[0041] For example, when the crystal needs to be weighed, first, the output end of the rotating mechanism 2 and the seed crystal are lowered into the high-temperature furnace through the lifting mechanism 3, and the rotating mechanism 2 stirs the liquid in the high-temperature furnace. Then, the lifting mechanism 3 drives the rotating mechanism 2 to rise, so that the seed crystal just contacts the liquid surface and crystallizes. Finally, the mass of the seed crystal will gradually increase during the crystallization process, and the transmission between the rotating mechanism 2 and the connecting plate 14 and the connecting frame 13 will generate downward pressure on the weighing sensor 12, and the weighing sensor 12 can achieve accurate weighing.

[0042] Continue to see Figure 3 The connecting frame 13 is a square frame structure, the weighing sensor 12 is located in the connecting frame 13, and the top plate of the connecting frame 13 is fixed on the top surface of the weighing sensor 12, and the two ends of the connecting plate 14 are respectively fixed on the two side plates of the connecting frame 13.

[0043] In the above embodiment, the connecting frame 13 is a square frame structure with a small volume, a stable center of gravity, and higher stability, which facilitates the consolidation of its top plate with the top surface of the weighing sensor 12 and avoids interference with the side of the connecting plate 14 on the weighing sensor 12. In addition, the connecting plate 14 can also be reliably fixed on the connecting frame 13.

[0044] Furthermore, a pad 15 is sandwiched between the top plate of the connecting frame 13 and the top surface of the weighing sensor 12. The pad 15 can lift the connecting frame 13 as a whole, so as to prevent the connecting frame 13 from being pressed against the components on the upper surface of the weighing sensor 12 during the installation process of the weighing sensor 12, thereby avoiding interference with the components.

[0045] It should be noted that the fixed end of the weighing sensor 12 is located on the inner wall of the sealing shell 11 , and the pad 15 and the connecting plate 14 below the connecting frame 13 are fixed on the weighing end of the weighing sensor 12 .

[0046] Exemplarily, the connecting frame 13 is provided with a plurality of bolts, which penetrate the pad 15 and are fixed to the weighing sensor 12. In addition, the connecting plate 14 is also provided with a plurality of bolts, the bolts on both sides connect the connecting plate 14 and the connecting frame 13, and the bolts in the middle are used to connect the connecting plate 14 and the weighing sensor 12.

[0047] In this embodiment, a fixing plate 16 is provided on the connecting frame 13 , and both ends of the fixing plate 16 are respectively fixed to the two side plates of the connecting frame 13 . The rotating mechanism 2 is located on the fixing plate 16 , so that the rotating mechanism 2 is supported by the fixing plate 16 .

[0048] Exemplarily, the fixing plate 16 is inserted in the middle of the connecting frame 13 and is parallel to the top plate of the connecting frame 13 .

[0049] Continue to see Figure 3 The rotating mechanism 2 includes a motor 21 and a transmission shaft 22. The motor 21 is located in the sealed cavity of the sealed shell 11 and is located on the connecting frame 13. The output shaft of the motor 21 is coaxially connected with the transmission shaft 22, and the transmission shaft 22 extends out of the sealed shell 11, so that the transmission shaft 22 is driven to rotate by the motor 21, and finally drives the seed crystal to rotate.

[0050] The motor 21 is located on the fixed plate 16 , and the motor 21 and the transmission shaft 22 are driven by a coupling 23 . The coupling 23 is located between the fixed plate 16 and the bottom plate of the connecting frame 13 .

[0051] In one implementation of the utility model, a bellows 18 is fixedly connected to the outer wall of the sealed shell 11, and the transmission shaft 22 is inserted into the bellows 18 and arranged at a distance from the bellows 18. The bellows 18 can cover and protect the transmission shaft 22 to prevent the external factors of the weighing structure from affecting the transmission shaft 22 during operation, thereby further ensuring the stability of the weighing sensor 12.

[0052] Exemplarily, the bottom end of the bellows 18 is used to connect to the high temperature furnace. A sealing ring is sandwiched between the top end of the bellows 18 and the bottom of the sealing shell 11 , and the sealing ring is inserted into the opening at the bottom of the sealing shell 11 .

[0053] In this embodiment, the weighing mechanism 1 further includes a signal transmission module 17, which is located on the outer wall of the sealed shell 11, and the signal transmission module 17 is electrically connected to the weighing sensor 12, so that the weighing data transmitted by the weighing sensor 12 is received through the signal transmission module 17. In addition, the signal transmission module 17 is located outside the sealed shell 11, so that it can avoid occupying the space of the sealed cavity.

[0054] Exemplarily, the signal transmission module 17 is located at the top of the sealed shell 11. Meanwhile, a power source (not shown) is also provided on the top outer wall of the sealed shell 11, which is used to supply power to the weighing sensor 12.

[0055] In one implementation of the utility model, the lifting mechanism 3 includes a support seat 31, a connecting block 32, a screw rod 33 and a driving motor (not shown in the figure), the driving motor is located on the support seat 31, the driving motor is connected to the screw rod 33 in a transmission manner to drive the screw rod 33 to rotate, the connecting block 32 is slidably arranged on the support seat 31 along the vertical direction, the connecting block 32 is fixedly connected to the sealing shell 11, and the screw rod 33 passes through the connecting block 32 and cooperates with the connecting block 32.

[0056] In the above embodiment, the driving motor drives the screw rod 33 to rotate, and converts the rotation of the screw rod 33 into the lifting movement of the connecting block 32 , thereby driving the sealing shell 11 to rise and fall on the supporting seat 31 .

[0057] It is easy to understand that when the transmission is performed through the screw rod 33, the lifting stability and precision of the connecting block 32 are higher.

[0058] Exemplarily, the screw rod 33 is rotatably inserted on the support plates 311 arranged at intervals on the support seat 31. The driving motor can directly drive the screw rod 33 to rotate, or drive the screw rod 33 to rotate through a chain sprocket, which is not limited in the present invention.

[0059] Furthermore, the support seat 31 has a slide rail 34 extending in the vertical direction, and a slider 35 is slidably inserted on the slide rail 34, and the slider 35 is fixedly connected to the connecting block 32. The slide rail 34 and the slider 35 can guide the lifting and lowering of the connecting block 32.

[0060] Exemplarily, the slider 35 and the connecting block 32 are connected via an adapter plate 36 .

[0061] It should be noted that in other embodiments of the present invention, the lifting mechanism 3 may also be a cylinder, and the present invention does not limit this.

[0062] Combination Figure 1 and Figure 3 As shown, in this embodiment, the sealing shell 11 includes a front cover 111, a rear cover 112 and an outer frame 113. The front cover 111, the rear cover 112 and the outer frame 113 (square structure) are arranged to form a sealed cavity. The output end of the lifting mechanism 3 is connected to the rear cover 112, and the weighing sensor 12 is fixed on the rear cover 112.

[0063] Exemplarily, the connection block 32 is connected to the rear cover 112, and the fixed end of the weighing sensor 12 and the rear cover 112 are connected through the mounting plate 19. The mounting plate 19 is provided with a waist-shaped hole, and a bolt is inserted into the waist-shaped hole, so that the position of the weighing sensor 12 on the mounting plate 19 can be conveniently adjusted. The front cover 111, the rear cover 112 and the outer frame 113 are both provided with sealing rings, thereby forming a sealed environment.

[0064] Exemplarily, the back cover 112 is provided with a plurality of sealing holes for wiring.

[0065] It is easy for those skilled in the art to understand that the above description is only a preferred embodiment of the present invention and is not intended to limit the present invention. Any modifications, equivalent substitutions and improvements made within the spirit and principles of the present invention should be included in the protection scope of the present invention.

Claims

1. A crystal growth weighing structure, characterized in that: The weighing structure comprises a weighing mechanism (1), a rotating mechanism (2) and a lifting mechanism (3); The weighing mechanism (1) comprises a sealed shell (11), a weighing sensor (12), a connecting frame (13) and a connecting plate (14); the weighing sensor (12), the connecting frame (13) and the connecting plate (14) are all located in a sealed cavity of the sealed shell (11); the weighing sensor (12) is fixed on the sealed shell (11); the connecting frame (13) is connected to the top surface of the weighing sensor (12); the connecting plate (14) is located on the connecting frame (13); and the connecting plate (14) is connected to the side surface of the weighing sensor (12); The rotating mechanism (2) is located on the connecting frame (13), and the output end of the rotating mechanism (2) extends out of the sealing shell (11) to drive the seed crystal to rotate; The output end of the lifting mechanism (3) is drivingly connected to the sealing shell (11) to drive the sealing shell (11) to rise and fall.

2. A crystal growth weighing structure according to claim 1, characterized in that: The connecting frame (13) is a square frame structure, the weighing sensor (12) is located in the connecting frame (13), and the top plate of the connecting frame (13) is fixed on the top surface of the weighing sensor (12), and the two ends of the connecting plate (14) are respectively fixed on the two side plates of the connecting frame (13).

3. A crystal growth weighing structure according to claim 2, characterized in that: A pad (15) is sandwiched between the top plate of the connecting frame (13) and the top surface of the weighing sensor (12).

4. A crystal growth weighing structure according to claim 2, characterized in that: A fixing plate (16) is provided on the connecting frame (13), and two ends of the fixing plate (16) are respectively fixed to two side plates of the connecting frame (13), and the rotating mechanism (2) is located on the fixing plate (16).

5. A crystal growth weighing structure according to claim 1, characterized in that: The weighing mechanism (1) further comprises a signal transmission module (17), wherein the signal transmission module (17) is located on the outer wall of the sealing shell (11), and the signal transmission module (17) is electrically connected to the weighing sensor (12).

6. A crystal growth weighing structure according to any one of claims 1 to 5, characterized in that: The rotating mechanism (2) comprises a motor (21) and a transmission shaft (22); the motor (21) is located in a sealed cavity of the sealed shell (11) and on the connecting frame (13); an output shaft of the motor (21) is coaxially connected to the transmission shaft (22), and the transmission shaft (22) extends out of the sealed shell (11).

7. A crystal growth weighing structure according to claim 6, characterized in that: A bellows (18) is fixedly connected to the outer wall of the sealing shell (11), and the transmission shaft (22) is inserted into the bellows (18) and arranged at a distance from the bellows (18).

8. A crystal growth weighing structure according to any one of claims 1 to 5, characterized in that: The lifting mechanism (3) comprises a support seat (31), a connecting block (32), a screw rod (33) and a driving motor. The driving motor is located on the support seat (31). The driving motor is drivingly connected to the screw rod (33) to drive the screw rod (33) to rotate. The connecting block (32) is slidably arranged on the support seat (31) along a vertical direction. The connecting block (32) is fixedly connected to the sealing shell (11), and the screw rod (33) passes through the connecting block (32) and cooperates with the connecting block (32).

9. A crystal growth weighing structure according to claim 8, characterized in that: The support seat (31) is provided with a slide rail (34) extending in a vertical direction, a slider (35) is slidably inserted on the slide rail (34), and the slider (35) is fixedly connected to the connection block (32).

10. A crystal growth weighing structure according to any one of claims 1 to 5, characterized in that: The sealed shell (11) comprises a front cover (111), a rear cover (112) and an outer frame (113); the front cover (111), the rear cover (112) and the outer frame (113) are arranged to form the sealed cavity; the output end of the lifting mechanism (3) is connected to the rear cover (112); and the weighing sensor (12) is fixed on the rear cover (112).

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