Testing device for interface of cold and hot ends of heating wire
By designing a testing device for the interface between the hot and cold ends of the heating wire, and using magnetic suction and X-ray technology to detect the interface between the hot and cold ends of the heating wire, the problem of loose control of the length of the hot and cold ends of the heating wire in the existing technology has been solved, achieving This ensures the temperature distribution consistency of heated products and equipment stability.
Patent Information
- Application Number
- CN202421166313.X
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-05-27
- Publication Date
- 2025-01-24
- Estimated Expiration
- 2034-05-27
AI Technical Summary
Existing heating wire suppliers do not strictly control the length of the hot and cold ends of the heating wire, which leads to inconsistent temperature distribution of the heating plate, poor product repeatability, and easily leads to equipment failure or damage.
Design a test device with a heating wire cold and cold end interface interface, detect the heating wire cold and cold end interface through magnetic and X -ray digital imaging equipment, and compare it with the standard location on the test disk Accurate control of the interface.
It improves the standard uniformity of the interface between the hot and cold ends of the heating wire, ensures the consistency of the same heating product, reduces the risk of equipment failure, and improves the uniformity of the heating effect.
Smart Images
Figure CN222393768U_ABST
Abstract
Description
Technical Field
[0001] The utility model relates to the technical field of heating wire testing in the semiconductor industry, and in particular to a testing device for the interface between hot and cold ends of a heating wire. Background Art
[0002] The heater is a core component in the semiconductor industry. The heater has very high requirements for temperature uniformity, and the separation position of the hot and cold ends of the heating wire will affect the temperature uniformity of the finished heater.
[0003] At present, domestic heating wire suppliers are not strict in controlling the length of the hot and cold ends of the heating wires, and there is no unified testing standard. The inconsistent position of the interface between the hot and cold ends of the heating wire will cause the same heating plate to have different temperature distributions, poor product repeatability, and increase the difficulty of use for customers. When the tolerance is serious and the hot end extends out of the heating plate, the heating wire will burn dry, and the local temperature will be too high, which may cause thermal stress or mechanical stress in the heating wire material, thereby causing equipment failure or damage. Therefore, in order to ensure the normal operation and heating effect of the heating wire, it is necessary to strictly control the interface between the hot and cold ends of the heating wire to ensure that it is within the appropriate range. A test device for the interface between the hot and cold ends of the heating wire is proposed. Utility Model Content
[0004] In order to solve the above problems, the utility model provides a testing device for the interface between the hot and cold ends of a heating wire. The testing device for the interface between the hot and cold ends of the heating wire detects the interface between the hot and cold ends of the heating wire by means of magnetic attraction, X-rays, etc., and compares it with the standard position on the test disk to achieve precise control of the interface between the hot and cold ends of the heating wire, thereby ensuring the consistency of the same type of heating products. The utility model has the advantages of simple structure, convenient detection, and accurate results.
[0005] The technical solution of the utility model is as follows:
[0006] A testing device for the interface between the hot and cold ends of a heating wire comprises a testing disc, on which a groove is arranged that is consistent with the shape of the heating wire, an installation and disassembly gap is left between the groove and the heating wire, and a mark is arranged on the testing disc to identify the center of the groove and the required range of the interface between the hot and cold ends of the heating wire.
[0007] Optionally, the marking is provided on the test disc by means of engraved lines.
[0008] Optionally, the markings are provided on the test disc by drilling.
[0009] The testing device for the hot and cold end interface of the heating wire also includes a magnet, which is used to determine the actual hot and cold end interface of the heating wire to be tested.
[0010] The testing device for the hot and cold end interface of the heating wire also includes an X-ray digital imaging device, which is used to re-measure the actual hot and cold end interface of the heating wire to be tested.
[0011] The beneficial effects of the utility model are:
[0012] The utility model discloses a testing device for the interface between the hot and cold ends of a heating wire. The testing device for the interface between the hot and cold ends of a heating wire can detect the interface between the hot and cold ends of the heating wire and determine whether it is within a required range by the detection, thereby improving the standard uniformity of the interface between the hot and cold ends of the heating wire. BRIEF DESCRIPTION OF THE DRAWINGS
[0013] By reading the detailed description of the preferred embodiment below, the scheme and advantages of the present application will become clear to those skilled in the art. The accompanying drawings are only used to illustrate the preferred embodiment and are not considered to be limiting of the present invention.
[0014] In the attached picture:
[0015] Figure 1 It is a schematic diagram of the composition of a testing device for the interface between the hot and cold ends of a heating wire according to an embodiment of the utility model;
[0016] Figure 2 It is a three-dimensional structural schematic diagram of a test plate of a test device for testing the interface between the hot and cold ends of a heating wire according to an embodiment of the present utility model;
[0017] The components represented by the reference numerals in the figure are:
[0018] The utility model comprises: 1. a test disk; 1a. a groove; 1b. a mark; 2. a magnet; 3. an X-ray digital imaging device. DETAILED DESCRIPTION
[0019] like Figure 1 As shown, the testing device for the interface between the hot and cold ends of the heating wire includes a test disk 1, on which a groove 1a consistent with the shape of the heating wire is provided, and an installation and disassembly gap is left between the groove 1a and the heating wire. A mark 1b is provided on the test disk 1 to mark the center of the groove 1a and the required range of the interface between the hot and cold ends of the heating wire.
[0020] like Figure 2 As shown, a heating wire-shaped groove 1a is processed on the test disk 1, and a mark 1b is made at the middle position of the groove 1a and the required range of the hot and cold end interface. According to the center mark position, the heating wire is bent from the middle to both sides to form.
[0021] Optionally, the mark 1b is set on the test disc 1 by engraving, and the mark 1b can also be set on the test disc 1 by drilling.
[0022] like Figure 1 As shown, the testing device for the hot and cold end interface of the heating wire further includes a magnet 2, and the magnet 2 is used to determine the actual hot and cold end interface of the heating wire to be tested.
[0023] Magnet 2 tests and calibrates the position of the hot and cold interface of the heating wire, marks it with a fine marker, and compares the marker mark with the scale mark 1b of the test disk. If it is within the scale position range, it is qualified, otherwise it is unqualified. In a specific embodiment, the hot and cold end interface of the heating wire is required to be within 10-30mm of the outlet end.
[0024] like Figure 1 As shown, the testing device for the hot and cold end interface of the heating wire further includes an X-ray digital imaging device 3, and the X-ray digital imaging device 3 is used to re-measure the actual hot and cold end interface of the heating wire to be tested.
[0025] After the magnet 2 passes the test, it is retested using the X-ray digital imaging device 3. The test disk 1 with the heating wire to be tested is installed to take an X-ray image. The interface between the spiral and straight lines of the heating wire is the interface between the hot and cold ends of the heating wire. It is compared with the engraved mark 1b of the test disk. If it is within the engraved position range, it is qualified; otherwise, it is unqualified.
[0026] Heating wire testing device and testing method applicable to the semiconductor industry, device and method for testing the hot and cold end interface of heating wire; determine the position of the hot and cold end interface by magnetic attraction, X-ray and other methods and compare it with the standard position on the test plate to judge the error size, effectively improving the temperature equalization effect of the heating equipment.
[0027] In the semiconductor industry, temperature control is extremely important. The distribution of the heating wire and the interface between the hot and cold ends have a great influence on the temperature uniformity. Currently, various types of heating equipment do not strictly control the interface between the hot and cold ends of the heating wire, resulting in differences in temperature uniformity for the same device.
[0028] The utility model detects the interface between the hot and cold ends of the heating wire by means of magnetic attraction, X-rays, etc., and compares it with the standard position on the test plate to achieve accurate control of the interface between the hot and cold ends of the heating wire, ensuring the consistency of the same heating products. The invention has the advantages of simple structure, convenient detection, and accurate results.
Claims
1. A device for testing the interface between the hot and cold ends of a heating wire, characterized in that: The invention comprises a test disc (1), wherein a groove (1a) having the same shape as a heating wire is arranged on the test disc (1), a gap for installation and removal is left between the groove (1a) and the heating wire, and a mark (1b) is arranged on the test disc (1) to mark the center of the groove (1a) and the required range of the interface between the hot and cold ends of the heating wire.
2. A device for testing the interface between hot and cold ends of a heating wire according to claim 1, characterized in that: The mark (1b) is arranged on the test disc (1) in the form of engraved lines.
3. A device for testing the interface between hot and cold ends of a heating wire according to claim 1, characterized in that: The mark (1b) is provided on the test disc (1) by drilling.
4. A device for testing the interface between hot and cold ends of a heating wire according to claim 1, characterized in that: It also comprises a magnet (2), wherein the magnet (2) is used to determine the actual interface between the hot and cold ends of the heating wire to be tested.
5. A device for testing the interface between hot and cold ends of a heating wire according to claim 1, characterized in that: It also comprises an X-ray digital imaging device (3), wherein the X-ray digital imaging device (3) is used to re-measure the actual interface between the hot and cold ends of the heating wire to be tested.