Pressing jig

Abstract

The utility model discloses a pressing jig, and relates to the technical field of semiconductor packaging. The pressing jig comprises a pressing piece and a carrier with a containing groove, and the containing groove is used for containing a substrate to be pressed. The pressing piece is arranged on the carrier, moves relative to the carrier, and can act on the surface, deviating from the carrier, of the to-be-pressed substrate so as to press the to-be-pressed substrate on the carrier; when the pressing piece presses the substrate to be pressed on the carrier, the contact area of the pressing piece and the substrate to be pressed is smaller than the area of the substrate to be pressed. The pressing jig can improve the heat dissipation effect of the substrate.

Description

Technical Field

[0001] The utility model relates to the technical field of semiconductor packaging, in particular to a pressing fixture. Background Art

[0002] Chip packaging mainly provides chip support and structural protection functions to prevent external forces or other physical damage and chemical erosion during the placement process, ensure the energy transfer path and chip signal distribution, avoid signal delays that affect system operation, and provide a way to dissipate heat.

[0003] With the rapid development of the semiconductor industry, in the manufacturing process of semiconductor packaging, a pressing process is often required for single products and substrate products during the manufacturing process. Among them, the pressing jig for the pressing process provided by the prior art usually includes a carrier and a cover plate with a magnetic iron block, and the cover plate is adsorbed on the carrier through the magnetic iron block to achieve pressing of the substrate. However, since the existing pressing jig adopts a large-area pressing method, and the carrier and the cover plate are usually made of metal materials, in the high-temperature process, there is a problem that the metal material easily absorbs heat, resulting in slow cooling of the substrate and poor heat dissipation effect. Utility Model Content

[0004] The utility model aims to provide a pressing jig, which can improve the heat dissipation effect of a substrate to be pressed.

[0005] The embodiment of the utility model is achieved as follows:

[0006] In one aspect of the utility model, a pressing jig is provided, which comprises a pressing part and a carrier with a receiving groove, wherein the receiving groove is used to place a substrate to be pressed; the pressing part is arranged on the carrier, and the pressing part moves relative to the carrier, and can act on a side of the substrate to be pressed away from the carrier to press the substrate to be pressed onto the carrier; when the pressing part presses the substrate to be pressed onto the carrier, the contact area between the pressing part and the substrate to be pressed is smaller than the area of ​​the substrate to be pressed. The pressing jig can improve the heat dissipation effect of the substrate.

[0007] Optionally, the pressing member is rotatably connected to the carrier, and the pressing member has a pressing portion. The pressing member rotates relative to the carrier so that the pressing portion acts on a side of the substrate to be pressed away from the carrier.

[0008] Optionally, the carrier is provided with a avoidance groove communicated with the accommodating groove, and the pressing piece is rotatably connected in the avoidance groove.

[0009] Optionally, the pressing fixture further includes a rotating shaft, the pressing piece is fixedly connected to the rotating shaft, the rotating shaft is rotatably connected to at least one inner wall of the avoidance groove, and the rotating shaft is driven to rotate relative to the carrier to drive the pressing piece to rotate.

[0010] Optionally, the rotating shaft includes a first part and a second part which are connected to each other, wherein the first part is located in the avoidance groove, and the second part passes through the carrier and extends out of the carrier.

[0011] Optionally, two opposite ends of the first part are rotatably connected to the avoidance groove and two corresponding inner walls thereof respectively.

[0012] Optionally, the pressing fixture further includes a pressing switch, which is connected to the second part, and the pressing switch can drive the rotating shaft to rotate relative to the carrier through the second part.

[0013] Optionally, the pressing part is a prism, and the central axis of the prism is colinear with the rotation axis of the prism; the prism rotates along a first direction relative to the carrier, and the first edge of the prism can act on the side of the substrate to be pressed away from the carrier to press the substrate to be pressed onto the carrier; the prism rotates along a second direction, and the second edge of the prism can act on the side of the substrate to be pressed close to the carrier to lift the substrate to be pressed out of the accommodating groove; the first direction is opposite to the second direction, and the first edge is the pressing part.

[0014] Optionally, the pressing parts include at least two groups, and the two groups of pressing parts are evenly distributed on the carrier.

[0015] Optionally, the carrier further has a through groove, which is connected to the accommodating groove.

[0016] The beneficial effects of the utility model include:

[0017] The pressing jig provided by the present application includes a pressing part and a carrier with a receiving groove, wherein the receiving groove is used to place the substrate to be pressed; the pressing part is arranged on the carrier, and the pressing part moves relative to the carrier, and can act on the side of the substrate to be pressed away from the carrier to press the substrate to be pressed onto the carrier; when the pressing part presses the substrate to be pressed onto the carrier, the contact area between the pressing part and the substrate to be pressed is smaller than the area of ​​the substrate to be pressed. The present application uses a pressing part to press the substrate to be pressed arranged in the receiving groove of the carrier, so that the substrate to be pressed can be pressed onto the carrier; and when the pressing part presses the substrate to be pressed onto the carrier, the contact area between the pressing part and the substrate to be pressed is smaller than the area of ​​the substrate to be pressed. In this way, during pressing, the present application can reduce the contact area between the substrate to be pressed and the pressing jig, thereby improving the heat dissipation effect of the substrate to be pressed and improving the warping phenomenon. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] In order to more clearly illustrate the technical solutions of the embodiments of the utility model, the drawings required for use in the embodiments will be briefly introduced below. It should be understood that the following drawings only show certain embodiments of the utility model and therefore should not be regarded as limiting the scope. For ordinary technicians in this field, other relevant drawings can be obtained based on these drawings without paying creative work.

[0019] Figure 1 One of the structural schematic diagrams of the pressing fixture provided in the embodiment of the utility model;

[0020] Figure 2 A second structural schematic diagram of a pressing fixture provided in an embodiment of the utility model;

[0021] Figure 3 The third structural schematic diagram of the pressing fixture provided by the embodiment of the utility model;

[0022] Figure 4 A fourth structural schematic diagram of a pressing fixture provided in an embodiment of the utility model;

[0023] Figure 5 A schematic structural diagram of a pressing piece provided in an embodiment of the utility model.

[0024] Icons: 10-pressing piece; 11-pressing part; 12-lifting part; 20-carrier; 21-accommodating groove; 22-avoiding groove; 23-through groove; 30-rotating shaft; 31-first part; 32-second part; 40-pressing switch. DETAILED DESCRIPTION

[0025] In order to make the purpose, technical scheme and advantages of the embodiments of the utility model clearer, the technical scheme in the embodiments of the utility model will be clearly and completely described below in conjunction with the drawings in the embodiments of the utility model. Obviously, the described embodiments are part of the embodiments of the utility model, not all of the embodiments. Generally, the components of the embodiments of the utility model described and shown in the drawings here can be arranged and designed in various different configurations.

[0026] Therefore, the following detailed description of the embodiments of the present invention provided in the accompanying drawings is not intended to limit the scope of the present invention to be protected, but merely represents selected embodiments of the present invention. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0027] It should be noted that similar reference numerals and letters denote similar items in the following drawings, and therefore, once an item is defined in one drawing, further definition and explanation thereof is not required in subsequent drawings.

[0028] In the description of the present utility model, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inside", "outside", etc. indicate positions or positional relationships based on the positions or positional relationships shown in the accompanying drawings, or the positions or positional relationships in which the utility model product is usually placed when in use, and are only for the convenience of describing the present utility model and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific position, be constructed and operated in a specific position, and therefore cannot be understood as a limitation on the present utility model. In addition, the terms "first", "second", "third", etc. are only used to distinguish the description, and cannot be understood as indicating or implying relative importance.

[0029] In addition, the terms "horizontal", "vertical" and the like do not mean that the components are required to be absolutely horizontal or suspended, but can be slightly tilted. For example, "horizontal" only means that its direction is more horizontal than "vertical", and does not mean that the structure must be completely horizontal, but can be slightly tilted.

[0030] In the description of the present invention, it is also necessary to explain that, unless otherwise clearly specified and limited, the terms "set", "install", "connect", and "connect" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or it can be indirectly connected through an intermediate medium, or it can be the internal communication of two components. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0031] Please refer to Figures 1 to 3 The present embodiment provides a laminating jig, which includes a laminating member 10 and a carrier 20 having a receiving groove 21, wherein the receiving groove 21 is used to place a substrate to be laminating; the laminating member 10 is disposed on the carrier 20, and the laminating member 10 moves relative to the carrier 20, and can act on a side of the substrate to be laminating away from the carrier 20 to press the substrate to be laminating onto the carrier 20; when the laminating member 10 presses the substrate to be laminating onto the carrier 20, the contact area between the laminating member 10 and the substrate to be laminating is smaller than the area of ​​the substrate to be laminating. The laminating jig can improve the heat dissipation effect of the substrate.

[0032] The pressing fixture provided in the present application includes a carrier 20 and a pressing member 10, wherein Figure 1 and Figure 2 As shown, the carrier 20 has a receiving groove 21. In this embodiment, the receiving groove 21 is used to place the substrate to be pressed. The present application does not limit the specific type of the substrate to be pressed.

[0033] In this embodiment, the receiving groove 21 can be basically adapted to the outer shape of the substrate to be pressed. For example, the shape and size of the receiving groove 21 are basically consistent with the outer shape and size of the substrate to be pressed. In this way, the setting of the above-mentioned receiving groove 21 can play a certain limiting role on the substrate to be pressed, and can avoid large lateral displacement of the substrate to be pressed during the pressing process.

[0034] The above-mentioned pressing part 10 is arranged on the carrier 20, and the pressing part 10 can move relative to the carrier 20. For example, the pressing part 10 can move linearly or rotate relative to the carrier 20. The pressing part 10 is used to act on the side of the substrate to be pressed away from the carrier 20 when moving relative to the carrier 20, so as to press the substrate to be pressed onto the carrier 20.

[0035] It should be noted that when the pressing piece 10 moves linearly relative to the carrier 20, it can be that when the pressing piece 10 is driven close to the substrate to be pressed, it can act on the side of the substrate to be pressed away from the carrier 20, so that the substrate to be pressed is pressed on the carrier 20; when the pressing piece 10 is driven away from the substrate to be pressed, the pressing piece 10 is separated from the substrate to be pressed, and the pressure applied by the pressing piece 10 on the substrate to be pressed is cancelled.

[0036] When the pressing piece 10 rotates relative to the carrier 20, the pressing piece 10 can be driven to rotate in the forward direction, so that one side or one end of the pressing piece 10 can act on the side of the substrate to be pressed away from the carrier 20, and the substrate to be pressed is pressed onto the carrier 20; when the pressing piece 10 is driven to rotate in the reverse direction, the one side or one end applied to the side of the substrate to be pressed away from the carrier 20 can be separated from the substrate to be pressed, so that the pressure applied by the pressing piece 10 on the substrate to be pressed is cancelled.

[0037] That is to say, the present application does not limit the specific movement form of the pressing member 10 relative to the carrier 20, as long as the movement of the pressing member 10 relative to the carrier 20 can act on the side of the substrate to be pressed away from the carrier 20 so that it presses the substrate to be pressed onto the carrier 20.

[0038] In the present application, a pressing piece 10 is used to press the substrate to be pressed onto the carrier 20, and when the pressing piece 10 presses the substrate to be pressed onto the carrier 20, the contact area between the pressing piece 10 and the substrate to be pressed is smaller than the area of ​​the substrate to be pressed. In this way, the contact area between the substrate to be pressed and the pressing jig during the pressing process can be reduced, the heat dissipation effect of the substrate to be pressed can be improved, and the problem of poor heat dissipation caused by excessive contact area between the substrate to be pressed and the pressing jig can be avoided. Furthermore, the warping problem of the substrate to be pressed caused by the mismatch of thermal expansion coefficient due to poor heat dissipation in the prior art can be improved.

[0039] In addition, it should be noted that the pressing part 10 and the carrier 20 of the present application can be made of metal materials or non-metallic materials. When metal materials are used, the present application can improve the serious heat absorption and poor heat dissipation problems caused by the contact of large-area metal materials in the prior art because the contact area between the pressing part 10 and the substrate to be pressed is smaller than that in the prior art; when non-metallic materials are used, the present application can further improve the problem of serious heat absorption of metal materials.

[0040] In summary, the pressing jig provided in the present application includes a pressing piece 10 and a carrier 20 having a receiving groove 21, wherein the receiving groove 21 is used to place the substrate to be pressed; the pressing piece 10 is arranged on the carrier 20, and the pressing piece 10 moves relative to the carrier 20, and can act on the side of the substrate to be pressed away from the carrier 20 to press the substrate to be pressed onto the carrier 20; when the pressing piece 10 presses the substrate to be pressed onto the carrier 20, the contact area between the pressing piece 10 and the substrate to be pressed is smaller than the area of ​​the substrate to be pressed. The present application uses a pressing piece 10 to press the substrate to be pressed in the receiving groove 21 of the carrier 20, so that the substrate to be pressed can be pressed on the carrier 20; and when the pressing piece 10 presses the substrate to be pressed on the carrier 20, the contact area between the pressing piece 10 and the substrate to be pressed is smaller than the area of ​​the substrate to be pressed. In this way, when pressing, the present application can reduce the contact area between the substrate to be pressed and the pressing jig, thereby improving the heat dissipation effect of the substrate to be pressed and improving the warping phenomenon.

[0041] The pressing piece 10 can be slidably connected to the carrier 20 or rotatably connected to the carrier 20 . For ease of understanding and description, the following mainly uses the example of the pressing piece 10 being rotatably connected to the carrier 20 for explanation.

[0042] Alternatively, if Figure 3 and Figure 5 As shown, the pressing member 10 is rotatably connected to the carrier 20 , and the pressing member 10 has a pressing portion 11 . The pressing member 10 rotates relative to the carrier 20 so that the pressing portion 11 acts on a side of the substrate to be pressed away from the carrier 20 .

[0043] The pressing member 10 rotates relative to the carrier 20 , so that the pressing portion 11 acts on the side of the substrate to be pressed away from the carrier 20 , thereby achieving pressing of the substrate to be pressed.

[0044] In this embodiment, the pressing member 10 has at least a pressing portion 11. When the pressing portion 11 acts on a side of the substrate to be pressed away from the carrier 20, the pressing portion 11 can make surface contact or line contact with the substrate to be pressed. To further reduce the contact area, line contact can be preferred.

[0045] In order to make the structure of the pressing fixture more compact, optionally, in this embodiment, a avoiding groove 22 communicating with the accommodating groove 21 is provided on the carrier 20 , and the pressing member 10 is rotatably connected in the avoiding groove 22 .

[0046] It should be noted that the avoidance groove 22 is used to avoid the pressing piece 10 , that is, when the pressing piece 10 rotates, the avoidance groove 22 should at least not interfere with the normal operation of the pressing piece 10 .

[0047] In addition, it should be noted that the avoidance groove 22 can be used only to accommodate the pressing part 10, and can also have a limiting effect on the rotation angle of the pressing part 10 on the basis of accommodating the pressing part 10. In other words, the avoidance groove 22 can also be used to limit the rotation angle of the pressing part 10, so that the rotation angle of the pressing part 10 is limited within a certain range.

[0048] Optionally, the pressing fixture may further include a rotating shaft 30, the pressing part 10 is fixedly connected to the rotating shaft 30, the rotating shaft 30 is rotatably connected to at least one inner wall of the avoidance groove 22, and the rotating shaft 30 is driven to rotate relative to the carrier 20 to drive the pressing part 10 to rotate. In this way, the setting of the rotating shaft 30 can play a fixing role on the pressing part 10, so that the pressing part 10 can be rotatably connected to the avoidance groove 22.

[0049] The present application can drive the rotating shaft 30 to rotate to drive the pressing piece 10 to rotate relative to the carrier 20, or can directly drive the pressing piece 10 to rotate so that the pressing piece 10 rotates relative to the carrier 20, so that the pressing piece 10 can act on the substrate to be pressed.

[0050] In addition, it should be noted that the rotating shaft 30 can be rotatably connected to one of the inner walls of the avoidance groove 22 at only one end, or the two ends can be rotatably connected to the two corresponding inner walls of the avoidance groove 22 respectively, and this application does not make specific limitations.

[0051] In addition, when a solution is adopted in which the pressing part 10 is directly driven to rotate so that the pressing part 10 rotates relative to the carrier 20, the present application may not be limited to the specific method of fixing the pressing part 10 on the rotating shaft 30 and rotatably connecting the rotating shaft 30 to the inner wall of the avoidance groove 22. In other embodiments, the rotating shaft 30 may be fixedly connected to the inner wall of the avoidance groove 22, and the pressing part 10 may be rotatably connected to the rotating shaft 30.

[0052] When the pressing member 10 is fixedly connected to the rotating shaft 30, and the rotating shaft 30 is rotatably connected to at least one inner wall of the avoiding groove 22, please refer to Figure 4Optionally, the rotating shaft 30 may further include a first portion 31 and a second portion 32 connected to each other, wherein the first portion 31 is located in the avoidance groove 22 , and the second portion 32 passes through the carrier 20 and extends out of the carrier 20 .

[0053] In this way, the second portion 32 passing through the carrier 20 and extending out of the carrier 20 can be used for driving, so that the user can drive the second portion 32 extending out of the carrier 20 to rotate, so that the rotating shaft 30 drives the pressing piece 10 to rotate.

[0054] Of course, in this embodiment, the two opposite ends of the first portion 31 located in the avoidance groove 22 can be rotatably connected to the two corresponding inner walls of the avoidance groove 22, respectively. In this way, the rotation of the pressing member 10 is more reliable.

[0055] To facilitate driving the second part 32 , the pressing fixture may optionally further include a pressing switch 40 , which is connected to the second part 32 . The pressing switch 40 can drive the rotating shaft 30 to rotate relative to the carrier 20 through the second part 32 .

[0056] Among them, the pressing switch 40 can be just a driving handle, so that the pressing switch 40 can be manually driven to drive the rotating shaft 30 to rotate; or, the pressing switch 40 can also drive the rotating shaft 30 to rotate by electric drive. The present application does not impose any restrictions on this, as long as the pressing switch 40 can realize the driving of the second part 32 of the rotating shaft 30.

[0057] Please refer to Figure 1 and Figure 3 Optionally, the pressing piece 10 is a prism, and the central axis of the prism is colinear with the rotation axis 30 of the prism; the prism rotates along a first direction relative to the carrier 20, and the first edge of the prism can act on the side of the substrate to be pressed away from the carrier 20 to press the substrate to be pressed onto the carrier 20; the prism rotates along a second direction, and the second edge of the prism can act on the side of the substrate to be pressed close to the carrier 20 to lift the substrate to be pressed from the accommodating groove 21; the first direction is opposite to the second direction, and the first edge is the pressing portion 11.

[0058] In this way, the first edge can be used as the pressing portion 11, and the second edge can be used as the lifting portion 12. In this way, when the prism rotates along the first direction, the first edge of the prism can act on the side of the substrate to be pressed away from the carrier 20 to press the substrate to be pressed onto the carrier 20; when the prism rotates along the second direction, the second edge of the prism can act on the side of the substrate to be pressed close to the carrier 20 to lift the substrate to be pressed from the receiving groove 21, thereby facilitating the removal of the carrier 20 to be pressed from the receiving groove 21.

[0059] Among them, one of the first direction and the second direction is a positive direction, and the other is a negative direction.

[0060] In order to make the pressing force of the pressing fixture on the substrate to be pressed more balanced, optionally, the pressing parts 10 include at least two groups, and the two groups of pressing parts 10 are evenly distributed on the carrier 20. Figure 1 As shown, four groups of pressing parts 10 can be provided, and the four groups of pressing parts 10 are respectively provided at the four corners of the accommodating groove 21; for another example, two groups of pressing parts 10 can be provided, and the two groups of pressing parts 10 are symmetrically distributed on two opposite sides of the accommodating groove 21.

[0061] Of course, it should be noted that when the pressing part 10 includes at least two groups, the above-mentioned rotating shaft 30, the avoidance groove 22, the pressing switch 40, etc. are correspondingly arranged. Those skilled in the art should know this and will not be elaborated in this application.

[0062] In addition, in order to further improve the heat dissipation effect of the pressing jig, optionally, the carrier 20 also has a through groove 23, and the through groove 23 is connected to the receiving groove 21. The through groove 23 is located on the side of the receiving groove 21 away from the substrate to be pressed, so that when the substrate to be pressed is pressed in the receiving groove 21 of the carrier 20, the side of the substrate to be pressed close to the receiving groove 21 can be effectively cooled through the through groove 23.

[0063] The above description is only an optional embodiment of the utility model and is not intended to limit the utility model. For those skilled in the art, the utility model can have various modifications and changes. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the utility model shall be included in the protection scope of the utility model.

[0064] It should also be noted that the various specific technical features described in the above specific embodiments can be combined in any suitable manner without contradiction. In order to avoid unnecessary repetition, the present utility model will not further describe various possible combinations.

Claims

1. A pressing jig, characterized in that: The invention comprises a pressing member and a carrier having a receiving groove, wherein the receiving groove is used to place a substrate to be pressed; the pressing member is arranged on the carrier, and the pressing member moves relative to the carrier, and can act on a side of the substrate to be pressed away from the carrier to press the substrate to be pressed onto the carrier; When the pressing member presses the substrate to be pressed onto the carrier, a contact area between the pressing member and the substrate to be pressed is smaller than an area of ​​the substrate to be pressed.

2. The pressing jig according to claim 1, characterized in that: The pressing piece is rotatably connected to the carrier, and the pressing piece has a pressing portion. The pressing piece rotates relative to the carrier so that the pressing portion acts on a side of the substrate to be pressed away from the carrier.

3. The pressing jig according to claim 2, characterized in that: The carrier is provided with a avoiding groove which is communicated with the containing groove, and the pressing member is rotatably connected in the avoiding groove.

4. The pressing jig according to claim 3, characterized in that: The pressing fixture further includes a rotating shaft, the pressing member is fixedly connected to the rotating shaft, the rotating shaft is rotatably connected to at least one inner wall of the avoidance groove, and the rotating shaft is driven to rotate relative to the carrier to drive the pressing member to rotate.

5. The pressing jig according to claim 4, characterized in that: The rotating shaft comprises a first part and a second part connected to each other, wherein the first part is located in the avoidance groove, and the second part passes through the carrier and extends out of the carrier.

6. The pressing jig according to claim 5, characterized in that: The opposite ends of the first part are rotatably connected to the avoidance groove and two corresponding inner walls thereof respectively.

7. The pressing jig according to claim 5, characterized in that: The pressing fixture further includes a pressing switch, which is connected to the second part. The pressing switch can drive the rotating shaft to rotate relative to the carrier through the second part.

8. The pressing jig according to any one of claims 2 to 6, characterized in that: The pressing member is a prism, and the central axis of the prism is colinear with the rotation axis of the prism; the prism rotates along a first direction relative to the carrier, and the first edge of the prism can act on the side of the substrate to be pressed away from the carrier to press the substrate to be pressed onto the carrier; The prism rotates along the second direction, and the second edge of the prism can act on the side of the substrate to be pressed close to the carrier to lift the substrate to be pressed from the containing groove; The first direction is opposite to the second direction, and the first edge is the pressing portion.

9. The pressing jig according to claim 1, characterized in that: The pressing parts include at least two groups, and the two groups of pressing parts are evenly distributed on the carrier.

10. The pressing jig according to claim 1 or 9, characterized in that: The carrier also has a through groove, and the through groove is communicated with the accommodating groove.

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