Gas-liquid separation device for waste gas of mask cleaning machine

Abstract

The utility model discloses a gas-liquid separation device for waste gas of a mask cleaning machine. The gas-liquid separation device comprises a transparent liquid separation box, a separation and filtration mechanism and a fan, wherein the separation and filtration mechanism is detachably arranged in the transparent liquid separation box; and the fan is arranged on one side of the transparent liquid separation box and is connected with the transparent liquid separation box through a pipeline. An air inlet, an air outlet and a water outlet are formed in the transparent liquid separating box body, the separating and filtering mechanism is arranged in the transparent liquid separating box body in a suspended manner and is connected with one side of the air outlet, and the fan is connected with the other side of the air outlet. Waste gas exhausted by the mask cleaning machine contains more moisture, and the waste gas firstly enters the transparent liquid separation box for natural sedimentation of liquid; and then secondary filtration is carried out through the separation and filtration mechanism, liquid particles doped in the gas are effectively separated, the filtered gas is discharged through the fan on the side face of the transparent liquid separation box, gas-liquid separation is effectively achieved, meanwhile, kinetic energy needed by the fan is greatly reduced, energy consumption of the fan is reduced, and energy conservation and emission reduction are achieved.

Description

Technical Field

[0001] The utility model relates to the technical field of gas-liquid separation devices, and more specifically to a gas-liquid separation device for waste gas of a mask cleaning machine. Background Art

[0002] Photomask, also known as mask or MASK for short, is an important tool used to make fine patterns in semiconductor-related fields. The use of mask can achieve rapid replication of target patterns, making it possible to produce large quantities of semiconductor devices and display devices. As a master pattern, the mask has a complex manufacturing process and can be divided into front-end and back-end processes. The process flow of mask products mainly includes CAM image processing, photoresist coating, laser lithography, development, etching, film stripping, cleaning, macro inspection, automatic optical inspection, precision measurement, defect processing, optical film application and other links. Among them, the mask cleaning production process is to use chemical liquid and pure water to clean the mask to obtain a mask product with a certain surface cleanliness specification.

[0003] The mask cleaning line is mainly composed of mask cleaning machines, automated transmission equipment and other process equipment. The mask cleaning machine will produce organic, acidic and alkaline waste gas during the cleaning process, so a dedicated waste gas discharge device is set under the cleaning machine. The waste gas is extracted by the tail exhaust fan, and the waste gas first passes through the gas-liquid separator to separate the waste liquid mixed in the waste gas, and then flows to the terminal treatment device, and finally discharged into the atmosphere after being treated to meet the standards.

[0004] The existing gas-liquid separation device has the following technical problems:

[0005] 1. The air inlet pipe of the existing gas-liquid separation device is arranged above the air outlet pipe, and is filtered through a separation filter in the middle. During the gas-liquid separation process, the cleaning waste gas and the waste liquid mixed in the waste gas are not precipitated in advance, but are directly sucked away by the tail exhaust fan through the filter. The required wind pressure is high and the separation effect is poor.

[0006] 2. The existing gas-liquid separator is packaged with steel plates, and the internal conditions of the gas-liquid separator cannot be directly observed, which is not convenient for daily monitoring and maintenance. Utility Model Content

[0007] The utility model aims to provide a gas-liquid separation device for waste gas of a mask cleaning machine, so as to solve the technical problems existing in the above-mentioned background technology.

[0008] The utility model provides a gas-liquid separation device for waste gas of a mask cleaning machine, comprising a transparent liquid separation box, a filter mechanism detachably arranged in the transparent liquid separation box, and a fan arranged on one side of the transparent liquid separation box and connected to the transparent liquid separation box through a pipeline;

[0009] The transparent liquid separation box is provided with an air inlet, an air outlet and a drain outlet. The filter mechanism is suspended in the transparent liquid separation box and connected to one side of the air outlet. The fan is connected to the other side of the air outlet. A support mechanism is provided in the transparent liquid separation box, and the filter mechanism is supported by the support mechanism.

[0010] In a preferred embodiment, the sub-filtration mechanism includes a fixed frame and a filter screen arranged in the fixed frame, and a connecting port is arranged on a side of the fixed frame close to the air outlet pipe.

[0011] In a preferred embodiment, a sealing ring is arranged outside the connecting port.

[0012] In a preferred embodiment, the support mechanism includes two symmetrically arranged support plates and two limit plates arranged on the support plates, the spacing between the two limit plates is adapted to the width of the fixed frame, and the fixed frame is supported by the two support plates and is located between the two limit plates.

[0013] In a preferred embodiment, a transparent cover plate is provided on the top of the transparent liquid separation box, and the transparent cover plate is bolted to the transparent liquid separation box.

[0014] In a preferred embodiment, a liquid level sensor is installed on the transparent liquid separation box.

[0015] In a preferred embodiment, the air inlet and the air outlet are both connected to a negative pressure monitor.

[0016] The beneficial effects of the technical solution of the utility model are:

[0017] The exhaust gas discharged from the mask cleaning machine contains a lot of water. The exhaust gas first enters the transparent liquid separation box for natural sedimentation of the liquid; then it is filtered twice through the filter mechanism to effectively separate the liquid particles mixed in the gas. The filtered gas is discharged through the fan on the side of the transparent liquid separation box. While effectively realizing the gas-liquid separation, it greatly reduces the kinetic energy required by the fan, reduces the fan energy consumption, and achieves energy conservation and emission reduction.

[0018] The transparent liquid separation box is set up to facilitate observation of the internal situation. It is also equipped with a detachable transparent cover, which is convenient for putting in and taking out the filter mechanism and cleaning the transparent liquid separation box. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] Figure 1 This is a schematic diagram of the overall structure of the utility model.

[0020] Figure 2 This is a schematic diagram of the internal structure of the utility model.

[0021] Figure 3This is a partial structural diagram of the utility model.

[0022] Figure 4 This is a schematic diagram of part of the mechanism of the utility model from another perspective.

[0023] Explanation of the accompanying reference numerals: 1 transparent liquid separation box, 2 air inlet, 3 air outlet, 4 drain outlet, 5 liquid level sensor, 6 negative pressure monitor, 7 filter mechanism, 8 fixed frame, 9 filter screen, 10 connection port, 11 sealing ring, 12 supporting mechanism, 13 supporting plate, 14 limit plate, 15 air inlet pipe, 16 automatic valve, 17 manual valve, 18 fan, 19 transparent cover. DETAILED DESCRIPTION

[0024] The present invention is further described in detail below in conjunction with the accompanying drawings and specific embodiments. The embodiments of the present invention are provided for the sake of illustration and convenience of description, and are not intended to be exhaustive or to limit the present invention to the disclosed forms. Many modifications and variations are obvious to those of ordinary skill in the art. The embodiments are selected and described in order to better illustrate the principles and practical applications of the present invention, and to enable those of ordinary skill in the art to understand the present invention and thereby design various embodiments with various modifications suitable for specific purposes.

[0025] like Figure 1-4 As shown, the technical solution of the utility model provides a gas-liquid separation device for waste gas of a mask cleaning machine, comprising a transparent liquid separation box 1, a filter mechanism 7 detachably arranged in the transparent liquid separation box 1, and a fan 18 arranged on one side of the transparent liquid separation box 1 and connected to the transparent liquid separation box 1 through a pipeline, the transparent liquid separation box 1 is provided with an air inlet 2, an air outlet 3 and a drain outlet 4, and an automatic valve 16 and a manual valve 17 are provided on the air inlet pipe 15 connected to the air inlet 2.

[0026] The exhaust gas discharged from the mask cleaning machine contains a lot of water. The exhaust gas first enters the transparent liquid separation box 1 for natural sedimentation of the liquid; then it is filtered twice through the filter mechanism 7 to effectively separate the liquid particles mixed in the gas. The filtered gas is discharged through the fan 18 on the side of the transparent liquid separation box 1. While effectively achieving gas-liquid separation, it greatly reduces the kinetic energy required by the fan 18, reduces the energy consumption of the fan 18, and achieves energy conservation and emission reduction. The setting of the transparent liquid separation box 1 is convenient for observing the internal situation. The transparent liquid separation box 1 adopts acrylic sheet.

[0027] A transparent cover plate 19 is provided on the top of the transparent liquid separation box 1, and the transparent cover plate 19 is bolted to the transparent liquid separation box 1. The transparent cover plate 19 can be opened to clean the inside of the transparent liquid separation box 1. After the transparent cover plate 19 is opened, the filter mechanism 7 is placed from the opening of the transparent liquid separation box 1.

[0028] The filter mechanism 7 is suspended in the transparent liquid separation box 1 and connected to one side of the air outlet 3, the fan 18 is connected to the other side of the air outlet 3, a support mechanism 12 is provided in the transparent liquid separation box 1, and the filter mechanism 7 is supported by the support mechanism 12. The filter mechanism 7 includes a fixed frame 8 and a filter screen 9 provided in the fixed frame 8, and a connection port 10 is provided on the fixed frame 8 near the air outlet pipe.

[0029] The filter screen 9 is made of polypropylene and has a certain acid and alkali resistance. It can filter out the moisture in the gas after sedimentation. A fixed frame 8 is arranged outside the filter screen 9. The fixed frame 8 is provided with a vent to prevent the filter screen 9 from deforming while ensuring that the gas passes through the filter screen 9 smoothly. The connection port 10 on the fixed frame 8 is used to connect with the gas outlet 3. The filtered gas enters the fan 18 pipeline through the gas outlet 3 and is then extracted to the next processing station by the fan 18. A sealing ring 11 is arranged outside the connection port 10 to ensure the sealing of the connection with the gas outlet 3.

[0030] The support mechanism 12 includes two symmetrically arranged support plates 13 and two limit plates 14 provided with the support plates 13. The spacing between the two limit plates 14 is adapted to the width of the fixed frame 8. The fixed frame 8 is supported by the two support plates 14 and is located between the two limit plates 14. After the fixed frame 8 is placed on the support plate 13, it is limited by the limit plates 14, and then the fixed frame 8 is pushed to move toward the air outlet 3 to complete the docking of the connection port 10 with the air outlet 3. The above-mentioned arrangement facilitates the installation and disassembly of the filter mechanism 7 and facilitates the timely replacement or cleaning of the filter screen 9.

[0031] The transparent liquid separation box 1 is equipped with a liquid level sensor 5, which detects the liquid level and then controls the automatic discharge of the liquid. The air inlet 2 and the air outlet 3 are both connected to a negative pressure monitor 6 to monitor the exhaust pressure difference in real time and provide a certain parameter basis for adjusting the cleaning process parameters of the cleaning machine.

[0032] Obviously, the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field and related fields without creative work should fall within the scope of protection of the present invention. Structures, devices and operating methods not specifically described and explained in the present invention shall be implemented according to conventional means in the field unless otherwise specified and limited.

Claims

1. A gas-liquid separation device for waste gas from a mask cleaning machine, characterized in that: It comprises a transparent liquid separation box, a filter mechanism detachably arranged in the transparent liquid separation box, and a fan arranged at one side of the transparent liquid separation box and connected to the transparent liquid separation box through a pipeline; The transparent liquid separation box is provided with an air inlet, an air outlet and a drain outlet. The filter mechanism is suspended in the transparent liquid separation box and connected to one side of the air outlet. The fan is connected to the other side of the air outlet. A support mechanism is provided in the transparent liquid separation box, and the filter mechanism is supported by the support mechanism.

2. The gas-liquid separation device for waste gas of a mask cleaning machine according to claim 1, characterized in that: The filter mechanism comprises a fixed frame and a filter screen arranged in the fixed frame, and a connecting port is arranged on a side of the fixed frame close to the air outlet.

3. The gas-liquid separation device for waste gas of a mask cleaning machine according to claim 2, characterized in that: A sealing ring is arranged outside the connecting port.

4. The gas-liquid separation device for waste gas of a mask cleaning machine according to claim 2, characterized in that: The support mechanism includes two symmetrically arranged support plates and two limit plates arranged on the support plates, the spacing between the two limit plates is adapted to the width of the fixed frame, and the fixed frame is supported by the two support plates and is located between the two limit plates.

5. The gas-liquid separation device for waste gas of a mask cleaning machine according to claim 1, characterized in that: A transparent cover plate is arranged on the top of the transparent liquid separation box, and the transparent cover plate is connected with the transparent liquid separation box by bolts.

6. The gas-liquid separation device for waste gas of a mask cleaning machine according to claim 1, characterized in that: A liquid level sensor is installed on the transparent liquid separation box.

7. The gas-liquid separation device for waste gas of a mask cleaning machine according to claim 1, characterized in that: The air inlet and the air outlet are both connected to a negative pressure monitor.

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