Laser ultrasonic gantry type combined processing machine tool of microstructure array

Abstract

The utility model discloses a laser ultrasonic gantry type combined processing machine tool of a microstructure array, which relates to the technical field of laser precision processing, and comprises a gantry type numerical control machine tool, a light shaping laser ultrasonic combined processing device, a charge coupled device (CCD) camera, an X-axis moving working platform and a contact type measuring device, the light shaping laser ultrasonic combined machining device comprises a laser transmitter, a digital micromirror array, an ultrasonic vibration device, a supporting frame and a focusing lens. Laser emitted by the laser emitter is reflected by the digital micro-mirror array, vertically passes through the internal hollow structure of the ultrasonic vibration device and penetrates through the focusing lens to act on the rotary part, so that micro-array structure processing on the surface of the part is realized, and in the processing process, the CCD camera detects the position information of a micro-structure array on the surface of the rotary part on line; and the position offset after the multi-column dot matrix is prepared is avoided.

Description

Technical Field

[0001] The utility model relates to a laser ultrasonic gantry type composite processing machine tool of a microstructure array, and relates to the technical field of laser precision processing. Background Art

[0002] With the rapid development of high-end fields such as aerospace, national defense and military industry, higher requirements are placed on the surface quality, precision and processing efficiency of microstructure arrays of rotating parts. Traditional ceramic-based rotating parts microstructure preparation methods such as film transfer and printed electronics have problems such as poor applicability, low processing precision and efficiency. In recent years, laser processing technology has developed rapidly, with a wide processing range and low requirements on processing conditions.

[0003] Laser ultrasonic composite processing technology introduces ultrasonic energy field into laser energy field, so that the material is removed by photon, acoustic flow effect and cavitation effect at the same time, which improves processing quality and efficiency. It has unique processing advantages compared with single laser processing. To achieve high-quality and high-efficiency laser ultrasonic composite processing of microstructure arrays of rotating parts, the integration of motion control system, optical system, ultrasonic vibration system and online detection system is also required. Existing microstructure array laser processing machine tools cannot accurately locate and detect feedback of workpieces, and lack workpiece contour measurement and pattern preparation planning. At the same time, single laser processing is difficult to avoid problems such as recasting layer thickness, surface accuracy and low efficiency. The utility model provides a laser ultrasonic gantry composite processing machine tool for microstructure arrays to solve the problems raised in the above background technology. Utility Model Content

[0004] The technical solution adopted by the utility model is as follows: the composite processing machine tool comprises a gantry type CNC machine tool, a light shaping laser ultrasonic composite processing device, a CCD camera, an X-axis movable working platform, and a contact measuring device; the X-axis movable working platform is fixedly mounted on the base of the gantry type CNC machine tool; the light shaping laser ultrasonic composite processing device is mounted on the Z axis of the gantry type CNC machine tool; the contact measuring device is mounted on the other Z axis of the gantry type CNC machine tool; the CCD camera is fixedly connected to the front side of the light shaping laser ultrasonic composite processing device; the light shaping laser ultrasonic composite processing device comprises a digital micromirror array, an ultrasonic vibration device, a support frame, a focusing lens, and a laser emitter; the laser emitter is fixedly connected to the right side of the digital micromirror array; the support frame is fixedly connected to the bottom of the digital micromirror array; the ultrasonic vibration device is mounted on the support frame; the focusing lens is fixedly connected to the bottom of the ultrasonic vibration device; and rotary parts are horizontally clamped on the X-axis movable working platform.

[0005] Preferably, the ultrasonic vibration device adopts a cylindrical hollow structure inside and drives the focusing lens to vibrate at high frequency. The laser emitted by the laser transmitter is reflected by the digital micromirror array and then passes vertically through the hollow structure inside the ultrasonic vibration device, through the focusing lens and acts on the rotating parts.

[0006] The present invention can realize the preparation of the surface microstructure of rotating parts according to the following steps:

[0007] Step 1: The contact measuring device directly contacts the surface of the rotating part using a probe measurement method, rotates with the indexing of the rotating part, and measures and analyzes the three-dimensional contour information of the part surface online.

[0008] Step 2: Based on the acquired three-dimensional contour information of the workpiece, a point cloud model of the rotating parts is generated. According to the precise position information of the rotating parts, the light shaping laser ultrasonic composite processing device acts on the microstructure array area along the generatrix of the rotating parts in a small area, and gradually completes the preparation of the microstructure array of the rotating parts.

[0009] Step 3: During the processing, the CCD camera detects the position information of the microstructure array on the surface of the rotating parts online, and feeds back the data to the control system to further adjust the processing parameters of the light shaping laser ultrasonic composite processing device to avoid position deviation after the preparation of multiple rows of lattices.

[0010] Compared with the prior art, the beneficial effects of the utility model are as follows: 1. The utility model uses the coordinated movement of the working platform, the light shaping laser ultrasonic composite processing device, the CCD camera, the rotating parts, and the contact measurement device to accurately obtain the three-dimensional contour of the workpiece before processing, plan the processing plan, and detect and feedback the position information of the microstructure array online. The processing plan is automatically adjusted according to the feedback. The degree of automation is high, and the preparation accuracy of the microstructure array is easy to control. 2. The utility model uses an ultrasonic vibration device to assist laser processing, making the inner surface of the microstructure array smoother, while reducing the heat-affected zone and splash height of laser processing, thereby improving the surface quality and processing accuracy of the microstructure. 3. The utility model uses a digital micromirror array to realize multi-beam parallel processing technology, which can process multiple microstructures at the same time and improve processing efficiency. BRIEF DESCRIPTION OF THE DRAWINGS

[0011] Figure 1 The schematic diagram of the structure of the laser ultrasonic gantry type composite machining machine tool for microstructure array;

[0012] Figure 2 This is a schematic diagram of the structure of the light shaping laser ultrasonic composite processing device.

[0013] In the figure: 1. Gantry CNC machine tool; 2. Light shaping laser ultrasonic composite processing device; 3. CCD camera; 4. X-axis moving work platform; 5. Contact measurement device; 6. Digital micromirror array; 7. Ultrasonic vibration device; 8. Support frame; 9. Focusing lens; 10. Laser transmitter. DETAILED DESCRIPTION

[0014] Specific implementation method 1: Combination Figure 1 , Figure 2 Description: The composite machining machine tool described in this embodiment includes a gantry CNC machine tool 1, a light shaping laser ultrasonic composite machining device 2, a CCD camera 3, an X-axis movable working platform 4, and a contact measuring device 5. The X-axis movable working platform 4 is fixedly installed on the base of the gantry CNC machine tool 1, the light shaping laser ultrasonic composite machining device 2 is installed on the Z axis of the gantry CNC machine tool 1, and the contact measuring device 5 is installed on the other Z axis of the gantry CNC machine tool 1. The CCD camera 3 is fixedly connected to the front side of the light shaping laser ultrasonic composite machining device 2. The light shaping laser ultrasonic composite machining device 2 includes a digital micromirror array 6, an ultrasonic vibration device 7, a support frame 8, a focusing lens 9, and a laser emitter 10. The laser emitter 10 is fixedly connected to the right side of the digital micromirror array 6, the support frame 8 is fixedly connected to the bottom of the digital micromirror array 6, the ultrasonic vibration device 7 is installed on the support frame 8, and the focusing lens 9 is fixedly connected to the bottom of the ultrasonic vibration device 7. Rotary parts are horizontally clamped on the X-axis movable working platform 4.

[0015] Specific implementation method 2: Combination Figure 2 It is explained that the ultrasonic vibration device 7 described in this embodiment adopts a cylindrical hollow structure inside, and drives the focusing lens 9 to vibrate at high frequency. The laser emitted by the laser emitter 10 is reflected by the digital micromirror array 6 and then vertically passes through the hollow structure inside the ultrasonic vibration device 7, and passes through the focusing lens 9 to act on the rotating parts.

[0016] Specific implementation method three: Combination Figure 1 , Figure 2 Description The utility model is to realize the preparation of the surface microstructure of rotating parts, and the specific working process is as follows:

[0017] Step 1: The contact measuring device 5 directly contacts the surface of the rotating part by a probe measuring method, rotates with the indexing of the rotating part, and measures and analyzes the three-dimensional contour information of the part surface online.

[0018] Step 2: Based on the acquired three-dimensional contour information of the workpiece, a point cloud model of the rotating parts is generated. According to the precise position information of the rotating parts, the light shaping laser ultrasonic composite processing device 2 acts on the microstructure array area along the main line of the rotating parts in a small area, and gradually completes the preparation of the microstructure array of the rotating parts.

[0019] Step 3: During the processing, the CCD camera 3 detects the position information of the microstructure array on the surface of the rotating parts online, feeds back the data to the control system, and further adjusts the processing parameters of the light shaping laser ultrasonic composite processing device 2 to avoid position deviation after the preparation of multiple rows of lattices.

[0020] The description is not restrictive, and the drawings are only one of the embodiments of the present invention, and the actual structure is not limited thereto. Therefore, if ordinary technicians in the field are inspired by it, the structural methods and embodiments that do not deviate from the creative purpose of the present invention should all fall within the protection scope of the present invention.

Claims

1. A laser ultrasonic gantry type composite processing machine tool for microstructure array, characterized in that: The invention comprises a gantry type numerical control machine tool (1), a light shaping laser ultrasonic composite processing device (2), a CCD camera (3), an X-axis movable working platform (4), and a contact measuring device (5), wherein the X-axis movable working platform (4) is fixedly mounted on a base of the gantry type numerical control machine tool (1), the light shaping laser ultrasonic composite processing device (2) is mounted on a Z axis of the gantry type numerical control machine tool (1), the contact measuring device (5) is mounted on another Z axis of the gantry type numerical control machine tool (1), and the CCD camera (3) is fixedly connected to the light shaping laser ultrasonic composite processing device (2). The optical shaping laser ultrasonic composite processing device (2) comprises a digital micromirror array (6), an ultrasonic vibration device (7), a support frame (8), a focusing lens (9), and a laser emitter (10); the laser emitter (10) is fixedly connected to the right side of the digital micromirror array (6); the support frame (8) is fixedly connected to the bottom of the digital micromirror array (6); the ultrasonic vibration device (7) is mounted on the support frame (8); the focusing lens (9) is fixedly connected to the bottom of the ultrasonic vibration device (7); and the rotary parts are horizontally clamped on the X-axis movable working platform (4).

2. The laser ultrasonic gantry type composite processing machine tool for microstructure array according to claim 1, characterized in that: The interior of the ultrasonic vibration device (7) adopts a cylindrical hollow structure and drives the focusing lens (9) to vibrate at high frequency. The laser emitted by the laser emitter (10) is reflected by the digital micromirror array (6) and then vertically passes through the hollow structure inside the ultrasonic vibration device (7), passes through the focusing lens (9) and acts on the rotating parts.

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