Intelligent surface quality detector for polishing process

Abstract

The utility model discloses an intelligent surface quality detector for a polishing process, which belongs to the technical field of detection equipment, and comprises a cabinet, the top of the cabinet is fixedly connected with a machine table, the upper part of the machine table is rotatably connected with a rotary table, the surface of the rotary table is provided with a spiral adjusting groove, and the spiral adjusting groove is provided with a rotating shaft. A rotating disc is arranged on the machine table, a driving motor with a power output end in transmission connection with the rotating disc is installed on the inner side of the machine cabinet, a carrier plate is arranged above the rotating disc, the carrier plate is fixedly connected with the machine table through a support, multiple sliding grooves are formed in the surface of the carrier plate, the inner sides of the multiple sliding grooves are slidably connected with clamping blocks, and the clamping blocks are fixedly connected with the rotating disc. A workpiece can be clamped in the middle through the clamping block, then the first electric telescopic rod stretches to enable the detection head to abut against the surface of the workpiece, then the second electric telescopic rod stretches gradually, the detection head moves in a spiral track, and therefore the detection range of the surface of the workpiece can be widened.

Description

Technical Field

[0001] The utility model relates to the technical field of detection equipment, and more specifically to an intelligent surface quality detector for polishing technology. Background Art

[0002] At present, the chemical mechanical polishing surface detection device in the prior art includes a base, a rotating shaft is rotatably connected below the base, a grinding pad is provided on the upper surface of the base, a trimmer for trimming wear is provided on the edge surface of the grinding pad, a polishing head is located above the grinding pad, a shaft connected to the polishing head, and a clamping ring for fixing the wafer is provided on the polishing head. The grinding liquid is sprayed onto the surface of the grinding pad through a spray head located above the grinding pad, the surface of the wafer reacts chemically with the grinding liquid, and the reaction product is removed under the mechanical grinding action of the polishing pad, thereby realizing the flattening of the wafer surface and achieving the detection effect of the wafer surface.

[0003] However, the spray liquid required by the spray head during the polishing process needs to be continuously provided to ensure that the chemical mechanical polishing step will not be stopped due to insufficient spray liquid during chemical mechanical polishing. An existing patent for a polishing surface detection device with the patent authorization number CN 211332765 U links the rotation of the spray head with a rotating rod, and the rotating rod is provided with a through hole. The rotation of the rotating rod changes the direction of the through hole to control the circulation and cutoff of the grinding liquid in the liquid replenishing channel.

[0004] However, the signal emitted by one of the two infrared transmitters 20 in patent authorization number CN 211332765 U is received by the corresponding infrared receiver 21, indicating that the surface of the wafer is uneven. Since the infrared transmitter 20 and the infrared receiver 21 can only detect the workpiece point-to-point, the detection range is limited and the flatness of the workpiece cannot be accurately detected. Therefore, we propose an intelligent surface quality detector for polishing process to solve the above problems. Utility Model Content

[0005] 1. Technical issues to be solved

[0006] In view of the problems existing in the prior art, the purpose of the utility model is to provide an intelligent surface quality detector for polishing process, which can use a clamp to clamp the workpiece in the center, then use the first electric telescopic rod to extend so that the detection head abuts against the surface of the workpiece, and then gradually extend the second electric telescopic rod to move the detection head in a spiral trajectory, thereby increasing the detection range of the workpiece surface.

[0007] 2. Technical solution

[0008] To solve the above problems, the utility model adopts the following technical solutions.

[0009] An intelligent surface quality detector for a polishing process, comprising a cabinet;

[0010] The top of the cabinet is fixedly connected to a platform;

[0011] A turntable is rotatably connected to the top of the machine platform, a spiral adjustment groove is provided on the surface of the turntable, and a driving motor with a power output end drivingly connected to the turntable is installed on the inner side of the cabinet;

[0012] A carrier plate is arranged above the turntable, and the carrier plate is fixedly connected to the machine platform through a bracket, a slide groove is provided on the surface of the carrier plate, and a plurality of the slide grooves are provided, and a clamp block is slidably connected to the inner side of the plurality of slide grooves, and a column head which matches the clearance of the spiral adjustment groove is integrally formed on the lower surface of the clamp block;

[0013] A stepper motor is installed above the carrier plate through a bracket, a first electric telescopic rod is installed at the power output end of the stepper motor, a second electric telescopic rod is installed at the movable end of the first electric telescopic rod, and a detection head is installed at the movable end of the second electric telescopic rod;

[0014] A control host is installed at the bottom of the inner cavity of the cabinet, and a buzzer is installed on the edge of the upper surface of the machine platform.

[0015] Furthermore, a shaft head is integrally formed on the lower surface of the turntable, and the shaft head passes through the machine platform and is connected to the power output end of the driving motor by a coupling.

[0016] Furthermore, a bearing which is interference-connected with the shaft head is installed on the machine platform.

[0017] Furthermore, three slide grooves are specifically provided, and the angle between two adjacent slide grooves corresponding to the center of the carrier plate is 120°.

[0018] Furthermore, the axes of the turntable, the carrier plate and the first electric telescopic rod are located on the same straight line.

[0019] Furthermore, the axes of the first electric telescopic rod and the second electric telescopic rod are perpendicular to each other.

[0020] Furthermore, the input ends of the driving motor, the first electric telescopic rod, the second electric telescopic rod and the stepping motor are all electrically connected to the output end of the control host;

[0021] The control host and the buzzer are bidirectionally electrically connected.

[0022] 3. Beneficial effects

[0023] Compared with the prior art, the advantages of the present invention are:

[0024] (1) In this scheme, the workpiece is placed on the upper surface of the carrier plate, and then the power output end of the driving motor is used to drive the turntable to rotate clockwise, and the column head is used to slide on the inner side of the spiral adjustment groove, so that the clamping block slides on the inner side of the slide groove, so that the workpiece is clamped in the center by the clamping block, and then the first electric telescopic rod is extended to make the detection head contact with the surface of the workpiece, and then the second electric telescopic rod is gradually extended, and the detection head moves in a spiral trajectory, so that the detection range of the workpiece surface can be increased.

[0025] (2) In this solution, the control host is used to set a qualified detection range for the detection head. When the detection range of the polished surface of the workpiece by the detection head is greater than the set value, the buzzer will alarm and send out a signal, thereby realizing intelligent detection of the workpiece. BRIEF DESCRIPTION OF THE DRAWINGS

[0026] Figure 1 It is a three-dimensional structural schematic diagram of the utility model;

[0027] Figure 2 This is a schematic diagram of the turntable structure of the utility model;

[0028] Figure 3 This is a schematic diagram of the carrier structure of the utility model;

[0029] Figure 4 This is a schematic diagram of the inner structure of the cabinet of the utility model;

[0030] Figure 5 This is a schematic diagram of the structure of the detection head of the utility model.

[0031] Description of the numbers in the figure:

[0032] 1. Cabinet; 2. Machine table; 3. Turntable; 4. Screw adjustment slot; 5. Shaft head; 6. Driving motor; 7. Carrier plate; 8. Slide slot; 9. Clamp block; 10. Column head; 11. First electric telescopic rod; 12. Second electric telescopic rod; 13. Detection head; 14. Control host; 15. Buzzer; 16. Stepper motor. DETAILED DESCRIPTION

[0033] The technical solutions in the embodiments of the utility model will be clearly and completely described below in conjunction with the drawings in the embodiments of the utility model; it is obvious that the described embodiments are only part of the embodiments of the utility model, rather than all of the embodiments, and all other embodiments obtained by ordinary technicians in this field based on the embodiments of the utility model without making creative work are within the scope of protection of the utility model.

[0034] Example:

[0035] See also Figure 1-5, an intelligent surface quality detector for polishing process, comprising a cabinet 1;

[0036] The top of the cabinet 1 is fixedly connected to the machine platform 2;

[0037] A turntable 3 is rotatably connected to the top of the machine platform 2, and a spiral adjustment groove 4 is provided on the surface of the turntable 3. A driving motor 6 whose power output end is transmission-connected to the turntable 3 is installed inside the cabinet 1;

[0038] A carrier plate 7 is arranged above the turntable 3, and the carrier plate 7 is fixedly connected to the machine table 2 through a bracket. A slide groove 8 is provided on the surface of the carrier plate 7, and a plurality of slide grooves 8 are provided. A clamping block 9 is slidably connected to the inner side of each of the plurality of slide grooves 8. A column head 10 that matches the clearance of the spiral adjustment groove 4 is integrally formed on the lower surface of the clamping block 9.

[0039] A stepper motor 16 is mounted above the carrier plate 7 through a bracket, a first electric telescopic rod 11 is mounted on the power output end of the stepper motor 16, a second electric telescopic rod 12 is mounted on the movable end of the first electric telescopic rod 11, and a detection head 13 is mounted on the movable end of the second electric telescopic rod 12;

[0040] A control host 14 is installed at the bottom of the inner cavity of the cabinet 1, and a buzzer 15 is installed on the upper surface edge of the machine table 2;

[0041] It should be noted that the control host 14 is used to set a qualified detection range for the detection head 13. When the detection range of the polishing surface of the workpiece by the detection head 13 is greater than the set value, the buzzer 15 sends an alarm signal, and the control host 14 is used to set a forward and reverse program for the drive motor 6;

[0042] By placing the workpiece on the upper surface of the carrier plate 7, and then using the power output end of the drive motor 6 to drive the turntable 3 to rotate clockwise, the column head 10 is used to slide on the inner side of the spiral adjustment groove 4, so that the clamping block 9 slides on the inner side of the slide groove 8, so that the workpiece is clamped in the center by the clamping block 9, and then the first electric telescopic rod 11 is extended to make the detection head 13 abut against the surface of the workpiece, and then the second electric telescopic rod 12 is gradually extended, and the detection head 13 moves in a spiral trajectory, so that the detection range of the workpiece surface can be improved, and intelligent detection of the workpiece can be realized.

[0043] like Figure 1 , Figure 2 , Figure 4 As shown, the lower surface of the turntable 3 is integrally formed with a shaft head 5, and the shaft head 5 passes through the machine table 2 and is connected to the power output end of the drive motor 6 by a coupling, and a bearing that is interference-connected with the shaft head 5 is installed on the machine table 2;

[0044] It should be noted that the resistance of the turntable 3 during rotation is reduced, and the rotation accuracy of the turntable 3 is guaranteed.

[0045] like Figure 1 , Figure 3 As shown, three chutes 8 are specifically provided, and the angle between two adjacent chutes 8 corresponding to the center of the carrier plate 7 is 120°, and the axes of the turntable 3, the carrier plate 7 and the first electric telescopic rod 11 are located on the same straight line;

[0046] It should be noted that the workpiece can be centrally clamped, thereby facilitating the inspection of the polished surface of the workpiece.

[0047] like Figure 5 As shown, the axes of the first electric telescopic rod 11 and the second electric telescopic rod 12 are perpendicular to each other;

[0048] It should be noted that the first electric telescopic rod 11 is extended to make the detection head 13 contact the surface of the workpiece, and then the second electric telescopic rod 12 is gradually extended to move the detection head 13 in a spiral trajectory, thereby increasing the detection range of the workpiece surface.

[0049] The input ends of the driving motor 6, the first electric telescopic rod 11, the second electric telescopic rod 12 and the stepping motor 16 are all electrically connected to the output end of the control host 14;

[0050] The control host 14 and the buzzer 15 are bidirectionally electrically connected.

[0051] When in use: the control host 14 is used to set a qualified detection range for the detection head 13. When the detection range of the polishing surface of the workpiece by the detection head 13 is greater than the set value, the buzzer 15 sends an alarm signal, and the control host 14 is used to set a forward and reverse program for the drive motor 6;

[0052] By placing the workpiece on the upper surface of the carrier plate 7, and then using the power output end of the drive motor 6 to drive the turntable 3 to rotate clockwise, the column head 10 is used to slide on the inner side of the spiral adjustment groove 4, so that the clamping block 9 slides on the inner side of the slide groove 8, so that the workpiece is clamped in the center by the clamping block 9, and then the first electric telescopic rod 11 is extended to make the detection head 13 abut against the surface of the workpiece, and then the second electric telescopic rod 12 is gradually extended, and the detection head 13 moves in a spiral trajectory, so that the detection range of the workpiece surface can be improved.

[0053] The above is only a preferred specific implementation of the utility model; however, the protection scope of the utility model is not limited thereto. Any technician familiar with the technical field can make equivalent replacements or changes according to the technical solution and improved ideas of the utility model within the technical scope disclosed by the utility model, which should be included in the protection scope of the utility model.

Claims

1. An intelligent surface quality detector for polishing process, characterized in that: comprising a cabinet (1); The top of the cabinet (1) is fixedly connected to a platform (2); A turntable (3) is rotatably connected to the top of the machine platform (2), a spiral adjustment groove (4) is provided on the surface of the turntable (3), and a driving motor (6) whose power output end is transmission-connected to the turntable (3) is installed on the inner side of the cabinet (1); A carrier plate (7) is arranged above the turntable (3), and the carrier plate (7) is fixedly connected to the machine platform (2) through a bracket, a slide groove (8) is provided on the surface of the carrier plate (7), and a plurality of the slide grooves (8) are provided, and a clamping block (9) is slidably connected to the inner side of the plurality of slide grooves (8), and a column head (10) which is gap-matched with the spiral adjustment groove (4) is integrally formed on the lower surface of the clamping block (9); A stepper motor (16) is installed above the carrier plate (7) via a bracket, a first electric telescopic rod (11) is installed at the power output end of the stepper motor (16), a second electric telescopic rod (12) is installed at the movable end of the first electric telescopic rod (11), and a detection head (13) is installed at the movable end of the second electric telescopic rod (12); A control host (14) is installed at the bottom of the inner cavity of the cabinet (1), and a buzzer (15) is installed on the edge of the upper surface of the machine platform (2).

2. The intelligent surface quality detector for polishing process according to claim 1, characterized in that: The lower surface of the turntable (3) is integrally formed with a shaft head (5), and the shaft head (5) passes through the machine platform (2) and is connected to the power output end of the drive motor (6) by means of a coupling.

3. The intelligent surface quality detector for polishing process according to claim 2, characterized in that: A bearing which is interference-connected with the shaft head (5) is installed on the machine platform (2).

4. The intelligent surface quality detector for polishing process according to claim 1, characterized in that: Specifically, three slide grooves (8) are provided, and the angle between two adjacent slide grooves (8) corresponding to the center of the carrier plate (7) is 120°.

5. The intelligent surface quality detector for polishing process according to claim 1, characterized in that: The axes of the rotating disk (3), the carrier plate (7) and the first electric telescopic rod (11) are located on the same straight line.

6. The intelligent surface quality detector for polishing process according to claim 1, characterized in that: The axes of the first electric telescopic rod (11) and the second electric telescopic rod (12) are perpendicular to each other.

7. The intelligent surface quality detector for polishing process according to claim 1, characterized in that: The input ends of the driving motor (6), the first electric telescopic rod (11), the second electric telescopic rod (12) and the stepping motor (16) are all electrically connected to the output end of the control host (14); The control host (14) and the buzzer (15) are bidirectionally electrically connected.

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