Substrate carrying chamber with water-cooling automatic loading and unloading

Abstract

The utility model discloses a base plate carrying chamber with water cooling automatic loading and unloading, which comprises a mounting chamber and a mounting plate, the mounting plate is arranged in the inner space of the mounting chamber, the bottom of the mounting plate is provided with two dust cleaning components, and each dust cleaning component comprises a gas ejector pipe I fixedly connected with one side of the outer wall of the bottom of the mounting plate; two limiting rods are slidably connected to the two sides of the first air spraying pipe in an inserted mode, one ends of the bottoms of the two limiting rods are fixedly connected with the same second air spraying pipe, the outer walls of one ends of the first air spraying pipe and the second air spraying pipe are each fixedly provided with a fan, and the two fans communicate with the first air spraying pipe and the second air spraying pipe correspondingly; according to the dust removal device for the substrate clamping device, the dust removal assembly is arranged, dust removal treatment can be conducted on the upper face and the lower face of a clamped substrate, and therefore it is guaranteed that the surface of the substrate is clean enough, and dust attached to the surface of the substrate is prevented from affecting follow-up machining.

Description

Technical Field

[0001] The utility model relates to the technical field of substrate conveying chambers, in particular to a substrate conveying chamber with water-cooled automatic loading and unloading functions. Background Art

[0002] The substrate transfer chamber is an indispensable part of the manufacturing process of semiconductors or liquid crystal panels. It is mainly responsible for safely and efficiently transferring substrates between substrate processing devices, and transferring substrates between each substrate processing device to ensure that the substrates can be smoothly processed to the next step according to the production process.

[0003] The transport device in the existing substrate transport chamber generally only realizes the transport function, but the surface of the substrate will be more or less attached with some dust and impurities. If these impurities are not cleaned, the subsequent processing will also be affected. Utility Model Content

[0004] The utility model aims to provide a substrate transfer chamber with water-cooled automatic loading and unloading plates to solve the problems raised in the above-mentioned background technology.

[0005] To achieve the above-mentioned purpose, the utility model provides the following technical solutions: a substrate transport chamber with water-cooled automatic upper and lower sheets, comprising an installation chamber and a installation plate, characterized in that: the installation plate is in the internal space of the installation chamber, and two dust cleaning components are installed at the bottom of the installation plate, and the dust cleaning component comprises an air jet pipe 1 fixedly connected to one side of the outer wall of the bottom of the installation plate, and two limit rods are slidably inserted on both sides of the air jet pipe 1, and one end of the bottom of the two limit rods is fixedly connected to the same air jet pipe 2, and an air fan is fixedly installed on the outer wall of one end of the air jet pipe 1 and the air jet pipe 2, and the two air fans are respectively connected to the air jet pipe 1 and the air jet pipe 2, and a spring is sleeved on the outside of the two limit rods, and the two ends of the two springs are respectively fixedly connected to the air jet pipe 1 and the air jet pipe 2, and the air nozzles of the air jet pipe 1 and the air jet pipe 2 are both arranged in an inclined trumpet shape.

[0006] The upper and lower surfaces of the clamped substrate can be cleaned to ensure that the surface of the substrate is clean enough to prevent the dust attached thereto from affecting the subsequent processing. When the mounting plate contacts the external device, the second jet pipe cannot move downward due to limitation, and the first jet pipe will approach the second jet pipe along the limit rod until the second jet pipe and the mounting frame are kept at the same level. After the substrate is clamped, the compressed spring drives the second jet pipe back to its original position so that the airflow it ejects can touch the lower surface of the substrate, and the two fans are started to supply air. The inclined airflow generated by the two jet pipes can clean both sides of the substrate. At the same time, the driving device inside the mounting frame is started to drive the roller to start moving close to the cleaning component, thereby ensuring that the cleaning is comprehensive enough.

[0007] As a further preferred embodiment of the present technical solution, a cylinder 1 is fixedly mounted on the top inner wall of the mounting chamber, a motor is fixedly mounted on the output end of the cylinder 1, and the mounting plate is fixedly connected to the bottom outer wall of the motor output end.

[0008] As a further preferred embodiment of the present technical solution, a clamping assembly is installed inside the mounting plate, and the clamping assembly includes two limit grooves opened on both sides of the top outer wall of the mounting plate, and two mounting frames are slidably connected inside the two limit grooves, and the top outer walls of multiple mounting frames are rotatably connected to a driving rod, and one end of the four driving rods is rotatably connected to the same connecting rod.

[0009] As a further preferred embodiment of the present technical solution, a second cylinder is fixedly mounted on one side of the top outer wall of the mounting plate, and an output end of the second cylinder is fixedly connected to one end of a connecting rod.

[0010] Start cylinder 1 inside the installation room, and cylinder 1 drives the motor to move downward, and then the clamping assembly will also move synchronously with cylinder 1, and the two ends of the installation plate will move to the outside of the two processing devices, and then start cylinder 2 to drive the connecting rod to move, and one end of the connecting rod drives the two driving rods on one side to reduce the angle, and then the two mounting frames will also approach each other along the limit groove, and the substrate will also be clamped by the two mounting frames, and the angles of the other two driving rods will also decrease, and the corresponding clamped substrate will also be released, and then the motor will rotate half a circle to realize the transfer of the substrate, and finally the motor will reverse half a circle to return to its original position, thereby realizing automatic loading and unloading.

[0011] As a further preferred embodiment of the present technical solution, a plurality of rollers are rotatably connected inside the plurality of mounting frames, and a driving device adapted to the rollers is provided inside the mounting frames.

[0012] As a further preferred embodiment of the present technical solution, a cooling pipe is arranged outside the installation chamber, a refrigerator is fixedly installed on the outer wall of the bottom of the installation chamber, a pump body is fixedly installed outside the refrigerator outlet, and both ends of the cooling pipe are respectively connected to the pump body outlet and the refrigerator inlet.

[0013] As a further preferred embodiment of the present technical solution, a stabilizing sleeve is fixedly connected to the middle of the inner wall at one end of the mounting plate, and the connecting rod is slidably inserted in the stabilizing sleeve.

[0014] The utility model provides a substrate transport chamber with water-cooled automatic loading and unloading, which has the following beneficial effects:

[0015] (1) The utility model can clean both the upper and lower surfaces of the clamped substrate by providing a dust cleaning component, thereby ensuring that the surface of the substrate is sufficiently clean and preventing dust adhering thereto from affecting subsequent processing. When the mounting plate contacts the external device, the second jet pipe cannot be moved downward due to limitation, and the first jet pipe will approach the second jet pipe along the limit rod until the second jet pipe and the mounting frame are kept at the same level. After the substrate is clamped, the compressed spring drives the second jet pipe back to its original position, so that the airflow ejected by it can touch the lower surface of the substrate, and the two fans are started to supply air. The inclined airflow generated by the two jet pipes can clean both sides of the substrate, and at the same time, the driving device inside the mounting frame is started to drive the roller to start moving close to the dust cleaning component, thereby ensuring that the cleaning is sufficiently comprehensive.

[0016] (2) The utility model sets a clamping assembly and starts the cylinder 1 inside the installation chamber. The cylinder 1 drives the motor to move downward, and then the clamping assembly will also move synchronously with the cylinder 1. The two ends of the installation plate move to the outside of the two processing devices, and then the cylinder 2 is started to drive the connecting rod to move. One end of the connecting rod drives the two driving rods on one side to reduce the angle, and then the two installation frames will also approach each other along the limit groove, and the substrate will also be clamped by the two installation frames, and the angles of the other two driving rods will also be reduced. The corresponding clamped substrate will also be released, and then the motor will rotate half a circle to realize the transfer of the substrate, and finally the motor will reverse half a circle to return to its original position, thereby realizing automatic loading and unloading. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] Figure 1 It is a schematic diagram of the overall structure of the utility model;

[0018] Figure 2 It is an enlarged structural schematic diagram of the clamping assembly of the utility model;

[0019] Figure 3 It is an enlarged structural schematic diagram of the dust cleaning component of the utility model;

[0020] Figure 4 For the utility model Figure 2 The enlarged structural diagram at A in the middle;

[0021] In the figure: 1. installation room; 2. refrigerator; 3. pump body; 4. cooling pipe; 5. cylinder one; 6. motor; 7. clamping assembly; 8. cleaning assembly; 701. mounting plate; 702. limiting groove; 703. mounting frame; 704. driving rod; 705. connecting rod; 706. cylinder two; 801. jet pipe one; 802. limiting rod; 803. spring; 804. jet pipe two; 805. fan; 806. roller. DETAILED DESCRIPTION

[0022] The technical solutions in the embodiments of the present invention will be described clearly and completely below in conjunction with the accompanying drawings in the embodiments of the present invention.

[0023] The utility model provides a technical solution: Figure 2 and Figure 3 As shown, in this embodiment, a substrate transport chamber with automatic loading and unloading of water-cooled substrates comprises an installation chamber 1 and an installation plate 701, characterized in that: the installation plate 701 is in the internal space of the installation chamber 1, and two dust cleaning components 8 are installed at the bottom of the installation plate 701, and the dust cleaning component 8 comprises an air jet 801 fixedly connected to one side of the outer wall of the bottom of the installation plate 701, and two limiting rods 802 are slidably inserted on both sides of the air jet 801, and one end of the bottom of the two limiting rods 802 is fixedly connected to the same air jet 804, and a fan 805 is fixedly installed on the outer wall of one end of the air jet 801 and the air jet 804, and the two fans 805 are respectively connected to the air jet 801 and the air jet 804, and the two limiting rods 802 are respectively provided with a spring 803, and the two ends of the two springs 803 are respectively fixedly connected to the air jet 801 and the air jet 804, and the air nozzles of the air jet 801 and the air jet 804 are both arranged in an inclined trumpet shape.

[0024] When the mounting plate 701 contacts the external device, the second jet tube 804 cannot move downward due to limitation, and the first jet tube 801 will approach the second jet tube 804 along the limit rod 802 until the second jet tube 804 and the mounting frame 703 are kept at the same level. After the substrate is clamped, the compressed spring 803 drives the second jet tube 804 back to its original position, so that the airflow it ejects can touch the lower surface of the substrate, and the two fans 805 are started to supply air. The inclined airflow generated by the two jet tubes can clean both sides of the substrate.

[0025] like Figure 1 As shown in FIG2 , a cylinder 5 is fixedly mounted on the top inner wall of the installation chamber 1, a motor 6 is fixedly mounted on the output end of the cylinder 5, and a mounting plate 701 is fixedly connected to the bottom outer wall of the output end of the motor 6. When the cylinder 5 inside the installation chamber 1 is started, the cylinder 5 drives the motor 6 to move downward, and then the clamping assembly 7 will also move synchronously with the cylinder 5.

[0026] like Figure 2 and Figure 4 As shown, a clamping assembly 7 is installed inside the mounting plate 701, and the clamping assembly 7 includes two limiting grooves 702 opened on both sides of the top outer wall of the mounting plate 701, and two mounting frames 703 are slidably connected inside the two limiting grooves 702, and the top outer walls of multiple mounting frames 703 are rotatably connected to a driving rod 704, and one end of the four driving rods 704 is rotatably connected to the same connecting rod 705.

[0027] A second cylinder 706 is fixedly mounted on one side of the top outer wall of the mounting plate 701 , and an output end of the second cylinder 706 is fixedly connected to one end of the connecting rod 705 .

[0028] The two ends of the mounting plate 701 are moved to the outside of the two processing devices, and then the cylinder 2 706 is started to drive the connecting rod 705 to move. One end of the connecting rod 705 drives the two driving rods 704 on one side to reduce the angle, and then the two mounting frames 703 will also approach each other along the limiting groove 702, and the substrate will also be clamped by the two mounting frames 703, and the angle of the other two driving rods 704 will also be reduced, and the corresponding clamped substrate will also be released, and then the motor 6 will rotate half a circle to realize the transfer of the substrate, and finally the motor 6 will reverse half a circle to return to its original position, thereby realizing automatic loading and unloading.

[0029] like Figure 2 As shown, multiple mounting frames 703 are rotatably connected to multiple rollers 806, and a driving device adapted to the rollers 806 is provided inside the mounting frames 703. Starting the driving device inside the mounting frames 703 drives the rollers 806 to start moving closer to the dust cleaning assembly 8, thereby ensuring sufficiently comprehensive cleaning.

[0030] like Figure 1 As shown, a cooling pipe 4 is arranged outside the installation room 1, a refrigerator 2 is fixedly installed on the outer wall of the bottom of the installation room 1, a pump body 3 is fixedly installed outside the outlet of the refrigerator 2, and both ends of the cooling pipe 4 are connected to the outlet of the pump body 3 and the inlet of the refrigerator 2 respectively.

[0031] Start the pump body 3 to start delivering water to the cooling pipe 4. The water will flow along the cooling pipe 4, thereby absorbing the heat emitted from the installation room 1 and finally entering the refrigerator 2. The reciprocating flow can greatly reduce the water temperature, which is beneficial to increase the cooling effect.

[0032] like Figure 2 As shown, a stabilizing sleeve is fixedly connected to the middle of the inner wall at one end of the mounting plate 701, and the connecting rod 705 is slidably inserted in the stabilizing sleeve to ensure that the moving state of the connecting rod 705 is sufficiently stable.

[0033] The utility model provides a substrate transport chamber with water-cooled automatic loading and unloading, and the specific working principle is as follows:

[0034] When the device is working, the cylinder 15 inside the installation chamber 1 is started, and the cylinder 15 drives the motor 6 to move downward, and then the clamping assembly 7 will also move synchronously with the cylinder 15, and the two ends of the installation plate 701 will move to the outside of the two processing devices, and then the cylinder 2 706 will be started to drive the connecting rod 705 to move, and one end of the connecting rod 705 drives the two driving rods 704 on one side to reduce the angle, and then the two mounting frames 703 will also approach each other along the limiting groove 702, and the substrate will also be clamped by the two mounting frames 703, and the angles of the other two driving rods 704 will also be reduced, and the corresponding clamped substrate will also be released, and then the motor 6 will rotate half a circle to realize the transfer of the substrate, and finally the motor 6 will reverse half a circle to return to its original position, thereby realizing automatic loading and unloading. When the installation plate 701 contacts the external device, the jet pipe 2 804 cannot move downward due to limitation, and the jet The air pipe 1 801 will approach the jet pipe 2 804 along the limit rod 802 until the jet pipe 2 804 and the mounting frame 703 are kept at the same level. After the substrate is clamped, the compressed spring 803 drives the jet pipe 2 804 back to its original position so that the airflow it ejects can touch the lower surface of the substrate, and the two fans 805 are started to supply air. The inclined airflow generated by the two jet pipes can clean both sides of the substrate. At the same time, the driving device inside the mounting frame 703 is started to drive the roller 806 to start moving close to the dust cleaning component 8, so as to ensure that the cleaning is comprehensive enough, and then the pump body 3 is started to start conveying water from the cooling pipe 4. The water will flow along the cooling pipe 4, so as to absorb the heat emitted from the inside of the installation chamber 1, and finally enter the refrigerator 2. The reciprocating motion can greatly reduce the water temperature, which is beneficial to increase the cooling effect.

[0035] Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that various changes, modifications, substitutions and variations may be made to the embodiments without departing from the principles and spirit of the present invention, and that the scope of the present invention is defined by the appended claims and their equivalents.

Claims

1. A substrate transport chamber with water-cooled automatic loading and unloading, comprising an installation chamber (1) and an installation plate (701), characterized in that: The mounting plate (701) is located in the interior space of the mounting chamber (1), and two dust cleaning components (8) are installed at the bottom of the mounting plate (701). The dust cleaning components (8) include an air jet pipe (801) fixedly connected to one side of the outer wall of the bottom of the mounting plate (701), and two limit rods (802) are slidably inserted on both sides of the air jet pipe (801). One end of the bottom of the two limit rods (802) is fixedly connected to the same air jet pipe (804). The air jet pipe (801) and the air jet pipe (804) are fixedly connected to each other. A fan (805) is fixedly installed on the outer wall of one end of the second air pipe (804), and the two fans (805) are respectively connected to the first air jet pipe (801) and the second air jet pipe (804). A spring (803) is sleeved on the outside of the two limit rods (802), and the two ends of the two springs (803) are respectively fixedly connected to the first air jet pipe (801) and the second air jet pipe (804), and the air jet nozzles of the first air jet pipe (801) and the second air jet pipe (804) are both arranged in an inclined trumpet shape.

2. A substrate transport chamber with water-cooled automatic loading and unloading according to claim 1, characterized in that: A cylinder 1 (5) is fixedly mounted on the top inner wall of the installation chamber (1), a motor (6) is fixedly mounted on the output end of the cylinder 1 (5), and the installation plate (701) is fixedly connected to the bottom outer wall of the output end of the motor (6).

3. A substrate transport chamber with water-cooled automatic loading and unloading according to claim 1, characterized in that: A clamping assembly (7) is installed inside the mounting plate (701), and the clamping assembly (7) comprises two limiting grooves (702) opened on both sides of the top outer wall of the mounting plate (701), two mounting frames (703) are slidably connected inside the two limiting grooves (702), and the top outer walls of the plurality of mounting frames (703) are rotatably connected to a driving rod (704), and one end of the four driving rods (704) is rotatably connected to the same connecting rod (705).

4. A substrate transport chamber with water-cooled automatic loading and unloading according to claim 3, characterized in that: A second cylinder (706) is fixedly mounted on one side of the top outer wall of the mounting plate (701), and an output end of the second cylinder (706) is fixedly connected to one end of a connecting rod (705).

5. The substrate transport chamber with water-cooled automatic loading and unloading according to claim 3, characterized in that: A plurality of rollers (806) are rotatably connected inside the plurality of mounting frames (703), and a driving device adapted to the rollers (806) is provided inside the mounting frames (703).

6. The substrate transport chamber with water-cooled automatic loading and unloading according to claim 1, characterized in that: A cooling pipe (4) is arranged outside the installation chamber (1), a refrigerator (2) is fixedly mounted on the outer wall of the bottom of the installation chamber (1), a pump body (3) is fixedly mounted outside the outlet of the refrigerator (2), and two ends of the cooling pipe (4) are respectively connected to the outlet of the pump body (3) and the inlet of the refrigerator (2).

7. The substrate transfer chamber with water-cooled automatic loading and unloading according to claim 3, characterized in that: A stabilizing sleeve is fixedly connected to the middle of the inner wall of one end of the mounting plate (701), and the connecting rod (705) is slidably inserted into the interior of the stabilizing sleeve.

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