Temperature-controllable CVD (Chemical Vapor Deposition) diamond growth substrate table

Abstract

The utility model relates to the technical field of CVD diamond growth substrate tables, and discloses a temperature-controllable CVD diamond growth substrate table, which comprises a connecting plate and a substrate table, the upper surface of the connecting plate is provided with a height adjusting mechanism, the height adjusting mechanism comprises a fixed sheet, a sliding U-shaped frame, a connecting shaft and a fixed bearing block, and the fixed bearing block is arranged on the connecting plate. The outer surface of the fixing piece is fixedly connected with the interior of the connecting plate, and the bottom of the sliding U-shaped frame is fixedly connected with the upper surface of the fixing piece. According to the temperature-controllable CVD diamond growth substrate table, an electric telescopic rod can stretch out and draw back, when the electric telescopic rod stretches out and draws back, a connecting rod can slide on the inner wall of a sliding groove, the position of the connecting rod can be achieved through the effect of a connecting shaft, and the problem of how to change the distance between the substrate table and a connecting plate is effectively solved; the effect that the height can be adjusted more conveniently in the using process can be achieved, use under different actual conditions is facilitated, and operation of different workers can be facilitated.

Description

Technical Field

[0001] The utility model relates to the technical field of CVD diamond growth substrate tables, in particular to a temperature-controllable CVD diamond growth substrate table. Background Art

[0002] CVD diamond is a type of polycrystalline diamond that grows in a metastable state under low pressure. It has excellent properties similar to natural diamond, such as high thermal conductivity, stable chemical properties, and excellent insulation. These properties make CVD diamond have broad application prospects in many fields, including heat dissipation of electronic devices, optical window production, cutting tool manufacturing, etc. The substrate table is the growth base of diamond. When producing CVD diamond, it also needs to be subjected to relevant temperature control.

[0003] According to a large-area hot-wire chemical vapor deposition (CVD) diamond film growth device with application number CN201721623900.7, this solution solves the problem of how to accurately control the main process parameters of diamond film deposition and achieve good process repeatability.

[0004] However, the following problems still exist in actual use:

[0005] (1) During operation, the overall height cannot be changed, so the convenience of operation is poor and it cannot be adapted to the use of different staff members, which is not conducive to its promotion and use in practice.

[0006] (2) When controlling the temperature change, the control operation is performed through infrared temperature measurement of the inner surface temperature of the workpiece and infrared thermometer of the hot wire temperature. In practice, the convenience of controlling the temperature is poor, which will reduce the actual use effect.

[0007] For this purpose, the utility model introduces a temperature-controllable CVD diamond growth substrate table. Utility Model Content

[0008] In view of the deficiencies in the prior art, the utility model provides a temperature-controllable CVD diamond growth substrate stage, which has the advantages of being able to control the overall height and actual changes and facilitating temperature control, and solves the problems raised in the background technology.

[0009] The utility model provides the following technical solutions: a temperature-controllable CVD diamond growth substrate stage, comprising a connecting plate and a substrate stage, wherein the upper surface of the connecting plate is provided with a height adjustment mechanism, wherein the height adjustment mechanism comprises a fixed plate, a sliding U-shaped frame, a connecting shaft and a fixed receiving block, wherein the outer surface of the fixed plate is fixedly connected to the interior of the connecting plate, the bottom of the sliding U-shaped frame is fixedly connected to the upper surface of the fixed plate, the outer surface of the connecting shaft is rotatably connected to the interior of the sliding U-shaped frame, and the interior of the fixed receiving block is fixedly connected to the outer surface of the connecting shaft.

[0010] Preferably, a temperature control mechanism is provided on the left side of the substrate stage, and the temperature control mechanism includes a water cooling box, a water cooling pipe, a hydraulic cylinder and a control panel, the outer surface of the water cooling box is fixedly connected to the inside of the substrate stage, the outer surface of the water cooling pipe is fixedly connected to the inside of the substrate stage, the back side of the hydraulic cylinder is fixedly connected to the front side of the substrate stage, the front side of the control panel is fixedly connected to the output shaft of the hydraulic cylinder, the left side of the control panel is in contact with the right side of the water cooling box, and the right side of the control panel is in contact with one end of the water cooling pipe.

[0011] Preferably, a sliding groove is provided at the bottom of the substrate stage, and a connecting rod is slidably connected to the inner wall of the sliding groove, and the left side of the connecting rod is fixedly connected to the right side of the fixed receiving block.

[0012] Preferably, a stabilizing plate is fixedly mounted on the bottom of the connecting plate, and the bottom of the sliding U-shaped frame is fixedly connected to the upper surface of the connecting plate.

[0013] Preferably, an electric telescopic rod is provided on the upper surface of the connecting plate, and one end of the electric telescopic rod is fixedly connected to the bottom of the substrate stage.

[0014] Preferably, a production table is provided on the upper surface of the substrate stage, and a control display is provided on the front surface of the substrate stage.

[0015] Compared with the prior art, the utility model has the following beneficial effects:

[0016] 1. This temperature-controlled CVD diamond growth substrate stage, through the use of a height adjustment mechanism, when this temperature-controlled CVD diamond growth substrate stage is in use, when the use height of the substrate stage is changed according to actual conditions, first, the electric telescopic rod can be extended and retracted. When the electric telescopic rod is extended and retracted, the connecting rod can slide on the inner wall of the sliding groove, and the position of the connecting rod can be adjusted by rotating the right side of the fixed receiving block through the action of the connecting shaft, so as to adjust the use height of the substrate stage, effectively solve the problem of how to change the distance between the substrate stage and the connecting plate, and can achieve the effect of more convenient height adjustment during use, and is conducive to adapting to the use in different actual situations, and can be convenient for different staff members to operate, and is convenient for promotion and use in practice.

[0017] 2. This temperature-controllable CVD diamond growth substrate stage, through the use of a temperature control mechanism, when this temperature-controllable CVD diamond growth substrate stage is in use, when controlling the temperature of the substrate stage, first, through the action of the hydraulic cylinder, the position of the control board fixedly connected to the hydraulic cylinder output shaft is changed, so that the condensed water inside the water cooling box can enter the inside of the water cooling tube, thereby achieving the effect of controlling the temperature change, effectively solving the problem of how to control the temperature, and can achieve the effect of adapting to different temperature requirements in practice, and improves the convenience of temperature control, thereby improving the actual use effect. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] Figure 1 It is a schematic diagram of the overall structure of the utility model;

[0019] Figure 2 For this utility model Figure 1 Schematic diagram of the structure viewed from above;

[0020] Figure 3 For this utility model Figure 1 Schematic diagram of the height adjustment mechanism structure;

[0021] Figure 4 For this utility model Figure 1 Schematic diagram of the temperature control mechanism structure.

[0022] In the figure: 1. connecting plate; 2. stabilizing plate; 3. fixing plate; 4. sliding U-shaped frame; 5. connecting shaft; 6. fixing receiving block; 7. connecting rod; 8. substrate table; 9. sliding groove; 10. electric telescopic rod; 11. production table; 12. control display; 13. water cooling box; 14. water cooling pipe; 15. hydraulic cylinder; 16. control panel; 17. height adjustment mechanism; 18. temperature control mechanism. DETAILED DESCRIPTION

[0023] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0024] See also Figure 2 and Figure 3, a temperature-controllable CVD diamond growth substrate stage, comprising a connecting plate 1 and a substrate stage 8, a height adjustment mechanism 17 is arranged on the upper surface of the connecting plate 1, the height adjustment mechanism 17 comprises a fixed plate 3, a sliding U-shaped frame 4, a connecting shaft 5 and a fixed receiving block 6, the outer surface of the fixed plate 3 is fixedly connected to the inside of the connecting plate 1, the bottom of the sliding U-shaped frame 4 is fixedly connected to the upper surface of the fixed plate 3, the outer surface of the connecting shaft 5 is rotatably connected to the inside of the sliding U-shaped frame 4, the inside of the fixed receiving block 6 is fixedly connected to the outer surface of the connecting shaft 5, a sliding groove 9 is provided at the bottom of the substrate stage 8, a connecting rod 7 is slidably connected to the inner wall of the sliding groove 9, and the left side of the connecting rod 7 is fixedly connected to the right side of the fixed receiving block 6, through the use of the fixed plate 3, the sliding U-shaped frame 4, the connecting shaft 5 and the fixed receiving block 6 as well as the connecting rod 7 and the sliding groove 9, the effect of more convenient height adjustment can be achieved during use, and it is conducive to adapting to the use in different situations in practice, and it can be convenient for different staff members to operate, and it is convenient to promote and use in practice.

[0025] See also Figure 4 A temperature control mechanism 18 is arranged on the left side of the substrate stage 8, and the temperature control mechanism 18 includes a water cooling box 13, a water cooling pipe 14, a hydraulic cylinder 15 and a control board 16. The outer surface of the water cooling box 13 is fixedly connected to the inside of the substrate stage 8, the outer surface of the water cooling pipe 14 is fixedly connected to the inside of the substrate stage 8, the back of the hydraulic cylinder 15 is fixedly connected to the front of the substrate stage 8, and the front of the control board 16 is fixedly connected to the output shaft of the hydraulic cylinder 15. The left side of the control board 16 is in contact with the right side of the water cooling box 13, and the right side of the control board 16 is in contact with one end of the water cooling pipe 14. A production table 11 is arranged on the upper surface of the substrate stage 8, and a control display 12 is arranged on the front of the substrate stage 8. Through the use of the water cooling box 13, the water cooling pipe 14, the hydraulic cylinder 15 and the control board 16, the effect of adapting to different temperature requirements in practice can be achieved, and the convenience of temperature control is improved, which improves the actual use effect.

[0026] See also Figure 1 , Figure 2 and Figure 3 A stabilizing plate 2 is fixedly installed at the bottom of the connecting plate 1 to stabilize the overall placement. The bottom of the sliding U-shaped frame 4 is fixedly connected to the upper surface of the connecting plate 1. An electric telescopic rod 10 is provided on the upper surface of the connecting plate 1, and one end of the electric telescopic rod 10 is fixedly connected to the bottom of the substrate table 8, which can achieve a more stable effect when adjusting the overall height.

[0027] Working principle: when in use, when the overall height is adjusted, the electric telescopic rod 10 can be extended and retracted by fixing the electric telescopic rod 10 between the substrate stage 8 and the connecting plate 1. When the electric telescopic rod 10 is extended and retracted, the connecting rod 7 can slide on the inner wall of the sliding groove 9, and the position of the connecting rod 7 can be adjusted by rotating on the right side of the fixed supporting block 6 through the action of the connecting shaft 5, so that the distance between the substrate stage 8 and the connecting plate 1 can be stably changed.

[0028] When the temperature is changed, the control display 12 installed on the front of the substrate table 8 can be used to understand the temperature changes of the production table 11 set inside the substrate table 8. When the temperature of the production table 11 is adjusted, the position of the control board 16 fixedly connected to the output shaft of the hydraulic cylinder 15 can be changed through the action of the hydraulic cylinder 15, so that the condensed water inside the water cooling box 13 can enter the inside of the water cooling pipe 14, thereby cooling the production table 11.

[0029] It should be noted that, in this article, relational terms such as first and second, etc. are only used to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Moreover, the terms "include", "comprise" or any other variants thereof are intended to cover non-exclusive inclusion, so that a process, method, article or device including a series of elements includes not only those elements, but also other elements not explicitly listed, or also includes elements inherent to such process, method, article or device.

[0030] Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that various changes, modifications, substitutions and variations may be made to the embodiments without departing from the principles and spirit of the present invention, and that the scope of the present invention is defined by the appended claims and their equivalents.

Claims

1. A temperature-controllable CVD diamond growth substrate stage, characterized in that: The invention comprises a connecting plate (1) and a substrate table (8), wherein the upper surface of the connecting plate (1) is provided with a height adjustment mechanism (17), wherein the height adjustment mechanism (17) comprises a fixed plate (3), a sliding U-shaped frame (4), a connecting shaft (5) and a fixed receiving block (6), wherein the outer surface of the fixed plate (3) is fixedly connected to the inside of the connecting plate (1), the bottom of the sliding U-shaped frame (4) is fixedly connected to the upper surface of the fixed plate (3), the outer surface of the connecting shaft (5) is rotatably connected to the inside of the sliding U-shaped frame (4), and the inside of the fixed receiving block (6) is fixedly connected to the outer surface of the connecting shaft (5).

2. The temperature-controllable CVD diamond growth substrate stage according to claim 1, characterized in that: A temperature control mechanism (18) is arranged on the left side of the substrate stage (8), and the temperature control mechanism (18) comprises a water cooling box (13), a water cooling pipe (14), a hydraulic cylinder (15) and a control panel (16); the outer surface of the water cooling box (13) is fixedly connected to the inside of the substrate stage (8); the outer surface of the water cooling pipe (14) is fixedly connected to the inside of the substrate stage (8); the back surface of the hydraulic cylinder (15) is fixedly connected to the front surface of the substrate stage (8); the front surface of the control panel (16) is fixedly connected to the output shaft of the hydraulic cylinder (15); the left side of the control panel (16) is in contact with the right side of the water cooling box (13), and the right side of the control panel (16) is in contact with one end of the water cooling pipe (14).

3. The temperature-controllable CVD diamond growth substrate stage according to claim 1, characterized in that: A sliding groove (9) is provided at the bottom of the substrate stage (8), and a connecting rod (7) is slidably connected to the inner wall of the sliding groove (9), and the left side of the connecting rod (7) is fixedly connected to the right side of the fixed receiving block (6).

4. The temperature-controllable CVD diamond growth substrate stage according to claim 1, characterized in that: A stabilizing plate (2) is fixedly mounted on the bottom of the connecting plate (1), and the bottom of the sliding U-shaped frame (4) is fixedly connected to the upper surface of the connecting plate (1).

5. The temperature-controllable CVD diamond growth substrate stage according to claim 1, characterized in that: An electric telescopic rod (10) is provided on the upper surface of the connecting plate (1), and one end of the electric telescopic rod (10) is fixedly connected to the bottom of the substrate stage (8).

6. The temperature-controllable CVD diamond growth substrate stage according to claim 1, characterized in that: The upper surface of the substrate stage (8) is provided with a production table (11), and the front surface of the substrate stage (8) is provided with a control display (12).

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