Jig for testing parallelism of upper electrode and lower electrode

Abstract

The utility model discloses a jig for testing the parallelism of an upper electrode and a lower electrode, belongs to the field of semiconductor equipment, solves the problem of conveniently and indirectly measuring the parallelism of the upper electrode and the lower electrode, and adopts the technical scheme that the jig for testing the parallelism of the upper electrode and the lower electrode comprises at least two groups of measuring assemblies, the measuring assembly comprises a first measuring piece and a second measuring piece, the first measuring piece is provided with a first contact part, the second measuring piece is provided with a second contact part, the first measuring piece is movably connected with the second measuring piece, and when the first measuring piece and the second measuring piece move relatively, the first contact part is in contact with the second contact part. A damping connection structure used for increasing the moving resistance between the first measuring piece and the second measuring piece is arranged between the first measuring piece and the second measuring piece, and the parallelism measuring device is mainly used for conveniently and indirectly measuring the parallelism of the upper electrode and the lower electrode.

Description

Technical Field

[0001] The utility model relates to semiconductor equipment, in particular to a fixture for testing the parallelism of upper and lower electrodes. Background Art

[0002] When measuring the parallelism between the upper electrode and the lower electrode inside the process chamber of a semiconductor device, the chamber needs to be closed, which makes it impossible to use the tool directly for measurement. Other tools are needed to achieve parallelism measurement. Currently, plastic materials are often used as indirect tools, such as plasticine. In addition, some equipment manufacturers have special tools for measuring the distance between the upper and lower electrodes. The tool is placed on the surface of the lower electrode and the distance between the upper and lower electrodes is measured by a photoelectric sensor.

[0003] Because the indirect tool such as plasticine is relatively soft, the error is relatively large when using the measuring tool for measurement. In addition, the material is not suitable for use in the process chamber, because after the upper electrode and the lower electrode surface contact, the surface atmosphere will change, and particles are easily generated, affecting the performance of the process chamber. The cost of special tools is high. In addition, because the material of the upper electrode affects the reflectivity of light, different equipment cannot be used interchangeably. Utility Model Content

[0004] In order to conveniently and indirectly measure the parallelism of upper and lower electrodes, the utility model provides a jig for testing the parallelism of upper and lower electrodes, thereby realizing convenient and indirect measurement of the parallelism of upper and lower electrodes.

[0005] In order to achieve the above-mentioned purpose, the utility model adopts the following technical scheme: a jig for testing the parallelism of upper and lower electrodes, comprising at least two groups of measuring components, the measuring components comprising a first measuring piece and a second measuring piece, the first measuring piece is provided with a first contact portion, the second measuring piece is provided with a second contact portion, the first measuring piece is movably connected to the second measuring piece, when the first measuring piece and the second measuring piece move relative to each other, the distance between the first contact portion and the second contact portion changes accordingly, and a damping connection structure is provided between the first measuring piece and the second measuring piece for increasing the movement resistance between the two.

[0006] After adopting the above technical scheme, the utility model has the following advantages: it only needs to measure the distance between at least two groups of first contact parts and second contact parts in the height direction to calculate the parallelism between the upper and lower electrodes, which simplifies the indirect measurement of the parallelism of the upper and lower electrodes in the cavity of the semiconductor device, and facilitates the calculation of the parallelism between the upper and lower electrodes. Moreover, due to the addition of the damping connection structure, the movement between the first measuring piece and the second measuring piece is smooth, and when there is no external force, the first measuring piece and the second measuring piece will not move relative to each other and can stop at an accurate position, making the measured data more accurate.

[0007] Specifically, during measurement, it is only necessary to combine the first measuring piece and the second measuring piece, place the first measuring piece on the lower electrode in the cavity of the semiconductor device, make the first contact part contact the lower electrode, then close the cavity, make the upper electrode press downward on the second contact part, so that the second measuring piece overcomes the friction force and moves relative to the first measuring piece until the cavity is completely closed, then open the cavity, measure the distance in the height direction of each group of the first contact part and the second contact part, and the parallelism between the upper and lower electrodes can be measured. It can be understood that when measuring the linear parallelism of the upper electrode and the lower electrode, only two groups of the first measuring piece and the second measuring piece are needed to be used in combination, while when measuring the surface parallelism of the upper electrode and the lower electrode, three groups of the first measuring piece and the second measuring piece are needed to be used in combination.

[0008] Furthermore, the first measuring piece and the second measuring piece are slidably connected, and the connection between the first measuring piece and the second measuring piece is an interference fit, which constitutes the damping connection structure. The aforementioned technical solution is adopted, and the interference fit between the first measuring piece and the second measuring piece is used as the damping connection structure to ensure that the structure between the first measuring piece and the second measuring piece is more stable and the measurement of parallelism is more accurate.

[0009] Furthermore, the second measuring piece is provided with a deformation groove at one end connected to the first measuring piece, and the deformation groove penetrates the second measuring piece in a direction perpendicular to the sliding direction of the second measuring piece.

[0010] By adopting the above-mentioned technical solution, the upper electrode sheet can apply pressure to the second contact part, and the second measuring piece can be deformed toward the deformation groove when sliding relative to the first measuring piece, leaving enough space for the deformation of the second measuring piece, so that the second measuring piece can be restored after deformation, ensuring that the second measuring piece can be restored to its original state after the first measuring piece and the second measuring piece are separated. Moreover, because the material of the second measuring piece is an elastic material such as plastic, the elastic force of the second measuring piece will cause the side wall of the second measuring piece to press the first measuring piece, so that after the second measuring piece is deformed toward the deformation groove, it still does not affect the interference fit between the first measuring piece and the second measuring piece.

[0011] Furthermore, one end of the second measuring member away from the first measuring member is a second contact portion, and the second contact portion is hemispherical.

[0012] By adopting the above technical solution, the upper electrode can be smoother when contacting the first contact part, and the surface of the upper electrode can be better protected compared with the square or cylindrical end. Specifically, the material of the second contact part is a material that is not easy to deform, that is, the pressure when the upper electrode presses the first contact part can overcome the friction between the first measuring piece and the second measuring piece, and at the same time, the deformation of the second contact part can be avoided, so that the measured data can be guaranteed to be more accurate.

[0013] Furthermore, the first measuring member and the second measuring member are connected in rotation, and the damping connection structure is a pressing member provided at the rotation connection of the first measuring member and the second measuring member, and the pressing member is used to bring the first measuring member and the second measuring member closer to each other and press them. With the above technical solution, compared with the sliding connection, the rotation connection is more convenient and quicker when restoring the initial position.

[0014] Furthermore, the clamping member is a bolt.

[0015] By adopting the above-mentioned technical solution, the first measuring piece and the second measuring piece are pressed together using bolts. The operation is simple, and it is easy to manually adjust the friction between the first measuring piece and the second measuring piece. After the friction between the first measuring piece and the second measuring piece is increased, the rotation speed between the first measuring piece and the second measuring piece is guaranteed to be smooth, thereby ensuring the accuracy of the measured data.

[0016] Furthermore, the pressing member is an elastic element, which is installed on the rotation connection shaft between the second measuring member and the first measuring member. By adopting the above technical solution, the pressure and friction between the first measuring member and the second measuring member can still be guaranteed after multiple operations, thereby increasing the life of the damping connection structure. It can be understood that the elastic element can be a spring.

[0017] Furthermore, the side wall of the second measuring member is extended along the sliding direction and is printed with scales.

[0018] By adopting the above technical solution, the operator can determine the height between the first contact portion and the second contact portion by observing the scale on the second measuring wall, thereby measuring the distance between the upper and lower electrodes, which facilitates and simplifies the operator's work steps.

[0019] Furthermore, the first measuring member is provided with a sliding channel with one end open, and the depth of the sliding channel is less than the length of the second measuring member.

[0020] The above-mentioned technical solution can prevent the second measuring piece from falling completely into the sliding channel during the test, and can form a closed space after the depth of the second measuring piece entering the sliding channel exceeds the deformation groove, further preventing the second measuring piece from being difficult to remove after entering the sliding channel.

[0021] Furthermore, the second measuring piece is divided into a small rod and a large rod along the axial direction, and a through hole is provided in the first measuring piece, and the through hole is divided into a small sliding cavity and a large sliding cavity along the axial direction, the small rod is slidably connected in the small sliding cavity, and the diameter of the small sliding cavity is smaller than the diameter of the small rod, and the large rod is slidably connected in the large sliding cavity, and the diameter of the large sliding cavity is larger than the diameter of the large rod.

[0022] The above-mentioned technical solution makes it easier to reset the first measuring piece and the second measuring piece. After the test, the second measuring piece only needs to be pushed away from the first measuring piece until the large rod abuts against the small sliding cavity to complete the reset.

[0023] Beneficial effects: The fixture only needs to measure the distance between at least two groups of first contact parts and second contact parts in the height direction to calculate the parallelism between the upper and lower electrodes, which simplifies the indirect measurement of the parallelism of the upper and lower electrodes in the cavity of the semiconductor device, and facilitates the calculation of the parallelism between the upper and lower electrodes. Moreover, due to the addition of the damping connection structure, the movement between the first measuring piece and the second measuring piece is smooth, and when there is no external force, the first measuring piece and the second measuring piece will not move relative to each other and can stop at an accurate position, making the measured data more accurate. BRIEF DESCRIPTION OF THE DRAWINGS

[0024] The utility model is further described below in conjunction with the accompanying drawings:

[0025] Figure 1 It is a schematic diagram of a jig for testing the parallelism of upper and lower electrodes of the utility model;

[0026] Figure 2 is a schematic diagram of a first measuring member in the first embodiment;

[0027] Figure 3 is a cross-sectional view of the first embodiment;

[0028] Figure 4 is a cross-sectional view of a second embodiment;

[0029] Figure 5 is a cross-sectional view of a third embodiment;

[0030] Figure 6 It is a front view of the fourth embodiment;

[0031] Figure 7 It is a right side view of the fourth embodiment;

[0032] Figure 8 It is a front view of the fifth embodiment;

[0033] Fig. 9 It is a right view of the fifth embodiment.

[0034] Description of the drawings: 1. First measuring piece; 2. Second measuring piece; 3. Deformation groove; 41. First contact portion; 42. Second contact portion; 5. Sliding channel; 6. Small sliding cavity; 7. Large sliding cavity; 8. Small rod; 9. Large rod; 10A. Bolt; 10B. Elastic element. DETAILED DESCRIPTION

[0035] In order to make the purpose, technical solutions and advantages of the embodiments of the utility model clearer, the technical solutions in the embodiments of the utility model will be clearly and completely described below in conjunction with the drawings in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, rather than all the embodiments.

[0036] The terms "first", "second", etc. (if any) in the specification and claims of the present utility model are used to distinguish similar objects, rather than to describe a specific order or sequence. Even if "second" is used to distinguish a certain technical feature, it does not necessarily mean that it has "first". It should be understood that in the present utility model, "including" and "having" and any of their variations are intended to cover non-exclusive inclusions. It should be understood that in the present utility model, "multiple" refers to two or more. "And / or" is only a description of the association relationship of associated objects, indicating that there can be three relationships. For example, X and / or Y can represent: X exists alone, X and Y exist at the same time, and Y exists alone. The character " / " generally indicates that the related objects before and after are in an "or" relationship. "Contains X, Y and Z", "Contains X, Y, Z" means that X, Y, and Z are all included, "Contains X, Y or Z" means that one of X, Y, and Z is included, and "Contains X, Y and / or Z" means that any one, any two, or three of X, Y, and Z are included.

[0037] The following specific embodiments are used to describe the technical solution of the utility model in detail. The following specific embodiments can be combined or replaced with each other according to actual conditions, and the same or similar concepts or processes may not be described in detail in some embodiments.

[0038] like Figures 1 to 9 As shown:

[0039] The utility model provides a jig for testing the parallelism of upper and lower electrodes, comprising at least two groups of measuring components, wherein the measuring components include a first measuring piece 1 and a second measuring piece 2, wherein the first measuring piece 1 is provided with a first contact portion 41, and the second measuring piece 2 is provided with a second contact portion 42, and the first measuring piece 1 is movably connected to the second measuring piece 2. When the first measuring piece 1 and the second measuring piece 2 move relative to each other, the distance between the first contact portion 41 and the second contact portion 42 changes accordingly, and a damping connection structure for increasing the movement resistance between the first measuring piece 1 and the second measuring piece 2 is provided between the first measuring piece 1 and the second measuring piece 2.

[0040] After adopting the above technical scheme, the utility model has the following advantages: it only needs to measure the distance in the height direction of the two groups of first contact parts 41 and the second contact parts 42 to calculate the parallelism between the upper and lower electrodes, which simplifies the indirect measurement of the parallelism of the upper and lower electrodes in the cavity of the semiconductor device, and facilitates the calculation of the parallelism between the upper and lower electrodes. Moreover, due to the addition of the damping connection structure, the movement between the first measuring piece 1 and the second measuring piece 2 is smooth, and the measured data is more accurate.

[0041] Specifically, during measurement, it is only necessary to combine the first measuring piece 1 and the second measuring piece 2, place the first measuring piece 1 on the lower electrode in the cavity of the semiconductor device, and then close the cavity so that the upper electrode applies downward pressure to the second contact portion 42, causing the second measuring piece 2 to overcome the friction force and move downward until the cavity is completely closed, and then open the cavity, measure the distance in the height direction between the first contact portion 41 and the second contact portion 42 of each group, and the parallelism between the upper and lower electrodes can be measured.

[0042] Embodiment 1:

[0043] like Figures 1 to 5 As shown, in order to facilitate the measurement of the height distance between the first contact portion and the second contact portion, the first measuring piece 1 and the second measuring piece 2 are slidably connected, and the connection between the first measuring piece 1 and the second measuring piece 2 is an interference fit, which constitutes the damping connection structure. The aforementioned technical solution is adopted, and the connection relationship between the first measuring piece 1 and the second measuring piece 2 is used as the damping connection structure to ensure that the structure between the first measuring piece 1 and the second measuring piece 2 is more stable and the measurement of parallelism is more accurate.

[0044] It can be understood that in one embodiment, since the material of the first measuring piece 1 is a deformable material and the second measuring piece 2 is a non-deformable material, the first measuring piece 1 will also be deformed when the second measuring piece 2 enters the first measuring piece 1, and pressure will be generated on the first measuring piece 1, thereby increasing the friction between the first measuring piece 1 and the second measuring piece 2. In the absence of external force, the first measuring piece 1 and the second measuring piece 2 remain relatively still due to the friction in the damping connection structure.

[0045] In another embodiment, the materials of the first measuring piece 1 and the second measuring piece 2 are both deformable materials, and the first measuring piece 1 and the second measuring piece 2 can be deformed, so that the friction between the first measuring piece 1 and the second measuring piece 2 is increased when the first measuring piece 1 and the second measuring piece 2 slide relative to each other.

[0046] Furthermore, in order to increase the deformation space of the second measuring piece 2, a deformation groove 3 is provided at one end of the second measuring piece 2 connected to the first measuring piece 1, and the deformation groove 3 passes through the second measuring piece 2 in a direction perpendicular to the sliding direction of the second measuring piece 2.

[0047] By adopting the above-mentioned technical solution, the upper electrode sheet can apply pressure to the second contact portion 42, and the second measuring piece 2 can be deformed toward the deformation groove 3 when entering the first measuring piece 1, leaving enough space for the deformation of the second measuring piece 2, so that the second measuring piece 2 can be restored after deformation, ensuring that the second measuring piece 2 can be restored to its original state after the first measuring piece 1 and the second measuring piece 2 are separated. Moreover, because the material of the second measuring piece 2 is an elastic material such as plastic, the elastic force of the second measuring piece 2 will cause the side wall of the second measuring piece 2 to press the first measuring piece 1, so that after the second measuring piece 2 is deformed toward the deformation groove 3, it still does not affect the interference fit between the first measuring piece 1 and the second measuring piece 2.

[0048] It is understandable that if there is no deformation groove 3, after long-term use, an indentation will be formed on the second measuring piece 2, resulting in a reduction in the friction between the first measuring piece 1 and the second measuring piece 2. Even in the absence of external force, the first measuring piece 1 and the second measuring piece 2 will slide relative to each other due to the reduction in friction, resulting in inaccurate measured data.

[0049] Specifically, the deformation groove 3 can be a square groove extending from the bottom of the second measuring piece 2 in the axial direction, and the four corners of the square groove are inscribed in the circle of the second measuring piece 2, and the end of the second measuring piece 2 away from the second contact portion 42 is disconnected to form four deformation bodies.

[0050] Specifically, the second measuring piece 2 has a cylindrical shape, the sliding channel 5 in which the second measuring piece 2 and the first measuring piece 1 cooperate is circular, and the diameter of the second measuring piece 2 is greater than the diameter of the sliding channel 5 .

[0051] Furthermore, the end of the second measuring piece 2 away from the first measuring piece 1 is a second contact portion 42, and the second contact portion 42 is hemispherical. By adopting the above-mentioned technical solution, the upper electrode can be smoother when it contacts the second contact portion 42, and the surface of the upper electrode can be better protected compared with the square or cylindrical end. Specifically, the material of the second contact portion 42 is a material that is not easy to deform, that is, the pressure when the upper electrode squeezes the second contact portion 42 can overcome the friction between the first measuring piece 1 and the second measuring piece 2, and at the same time, it can also avoid the deformation of the second contact portion 42, so that the measured data can be guaranteed to be more accurate.

[0052] It can be understood that when the upper electrode abuts against the second contact portion 42, since the contact portion 42 is hemispherical, even if the upper electrode and the contact portion slide relative to each other after contact, scratching of the upper electrode can be avoided.

[0053] Furthermore, in order to facilitate the operator to quickly calculate the parallelism between the upper and lower electrodes, the side wall of the second measuring piece 2 is printed with scales extending along the sliding direction. The aforementioned technical solution is adopted to facilitate the operator to determine the height between the first contact part 41 and the second contact part 42 by observing the scales on the side wall of the second measuring piece 2, thereby being able to measure the distance between the upper and lower electrodes, which facilitates and simplifies the operator's work steps.

[0054] Specifically, the height numbers of the length scale decrease gradually from bottom to top, and the operator can directly obtain the distance from the first contact part 41 to the second contact part 42 from the displayed value on the length scale pointed by the pointing part on the first measuring piece 1.

[0055] Embodiment 2:

[0056] On the basis of Example 1, Figure 4 As shown, the first measuring piece 1 is provided with a sliding channel 5 with an opening at one end, and the depth of the sliding channel 5 is less than the length of the second measuring piece 2. The aforementioned technical solution is adopted to prevent the second measuring piece 2 from falling completely into the sliding channel 5 during the test process, and to form an enclosed space after the second measuring piece 2 enters the sliding channel 5 to a depth exceeding the deformation groove 3, thereby further preventing the second measuring piece 2 from being difficult to remove after entering the sliding channel 5.

[0057] Specifically, the depth of the deformation groove 3 in Example 2 is smaller than the depth of the sliding channel 5. In case of misoperation, when the first measuring piece 1 enters the sliding channel 5 and the deformation groove 3 completely enters the sliding channel 5, since the sliding channel 5 is a closed space at this time, continued squeezing will cause high pressure to form in this space, and it cannot be easily pressed in, preventing the second measuring piece 2 from entering the sliding channel 5 and being difficult to take out. The operator can take out the second measuring piece 2 through the part of the second measuring piece 2 that is higher than the sliding channel 5. During installation, the bottom of the second measuring piece 2 is inserted into the sliding channel 5 of the first measuring piece 1, and the second measuring piece 2 is adjusted so that the axis of the first measuring piece 1 is parallel to the axis of the second measuring piece 2. Then, the first measuring piece 1 is placed face down on the lower electrode sheet, and the cavity of the semiconductor device is closed for measurement.

[0058] Embodiment 3:

[0059] On the basis of Example 1, Figure 5 As shown, the second measuring piece 2 is divided into a small rod 8 and a large rod 9 along the axial direction, and a through hole is provided in the first measuring piece 1, and the through hole is divided into a small sliding cavity 6 and a large sliding cavity 7 along the axial direction. The small rod 8 is slidably connected in the small sliding cavity 6, and the diameter of the small sliding cavity 6 is smaller than the diameter of the small rod 8. The large rod 9 is slidably connected in the large sliding cavity 7, and the diameter of the large sliding cavity 7 is larger than the diameter of the large rod 9.

[0060] The above-mentioned technical solution makes it easier to reset the first measuring piece 1 and the second measuring piece 2. After the test, it is only necessary to push the second measuring piece 2 away from the first measuring piece 1 until the large rod 9 abuts against the small sliding cavity 6 to complete the reset.

[0061] Specifically, when assembling the first measuring piece 1 and the second measuring piece 2, the small rod 8 of the second measuring piece 2 can be inserted into the large sliding cavity 7 of the first measuring piece 1, and the small rod 8 of the second measuring piece 2 can then pass through the small sliding cavity 6 of the first measuring piece 1. Since the diameter of the large sliding cavity 7 is larger than the diameter of the large rod 9, it is ensured that no closed space is formed inside the large sliding cavity. Therefore, the small rod 8 of the second measuring piece 2 can be smoothly passed through the small sliding cavity 6 of the second measuring piece 2, and then the small rod 8 of the second measuring piece 2 can be pulled out. After the large rod 9 is against the small sliding cavity 6, the second measuring piece 2 is adjusted to be parallel to the axis of the first measuring piece 1 and the axis of the second measuring piece 2 to complete the assembly. Subsequently, the first measuring piece 1 is placed on the lower electrode sheet so that the first contact portion 41 contacts the lower electrode, and the cavity of the semiconductor device is closed for measurement.

[0062] like Figures 6 to 9 As shown:

[0063] Furthermore, the first measuring piece 1 and the second measuring piece 2 are rotationally connected, and the damping connection structure is a clamping piece arranged at the rotational connection between the first measuring piece 1 and the second measuring piece 2, and the clamping piece is used to bring the first measuring piece 1 and the second measuring piece 2 closer to each other and press them. By adopting the above-mentioned technical solution, compared with the sliding connection, the rotational connection is more convenient and quicker when restoring the initial position.

[0064] Specifically, before the first measuring piece 1 and the second measuring piece 2 are combined and connected and placed into the semiconductor device cavity, the second measuring piece 2 is tilted so that the upper electrode can push the second measuring piece 2 to rotate around the first measuring piece 1.

[0065] Embodiment 4:

[0066] like Figures 6 to 7 As shown, the clamping member is a bolt 10A.

[0067] By adopting the above-mentioned technical solution, the first measuring piece 1 and the second measuring piece 2 are pressed together using bolts 10A. The operation is simple, and it is easy to manually adjust the friction between the first measuring piece 1 and the second measuring piece 2. After the friction between the first measuring piece 1 and the second measuring piece 2 is increased, the rotation speed between the first measuring piece 1 and the second measuring piece 2 is ensured to be smooth, thereby ensuring the accuracy of the measured data.

[0068] Embodiment 5:

[0069] like Figures 8 to 9As shown, on the basis of Example 1, the pressing member is an elastic element 10B, and the elastic element 10B is installed on the rotation connection shaft between the second measuring member 2 and the first measuring member 1. By adopting the above technical solution, the pressure and friction between the first measuring member 1 and the second measuring member 2 can still be guaranteed after multiple operations, thereby increasing the life of the damping connection structure. It can be understood that the elastic element 10B can be a spring.

[0070] In addition to the above-mentioned preferred embodiments, the present invention also has other implementation modes. Based on the embodiments in the present invention, all other embodiments obtained by ordinary technicians in this field without making any creative work are within the scope of protection requested by the present invention.

Claims

1. A jig for testing the parallelism of upper and lower electrodes, comprising at least two sets of measuring components, wherein the measuring components include a first measuring piece and a second measuring piece, characterized in that: The first measuring piece is provided with a first contact portion, and the second measuring piece is provided with a second contact portion. The first measuring piece is movably connected to the second measuring piece. When the first measuring piece and the second measuring piece move relative to each other, the distance between the first contact portion and the second contact portion changes accordingly. A damping connection structure is provided between the first measuring piece and the second measuring piece to increase the movement resistance between the two.

2. A jig for testing the parallelism of upper and lower electrodes according to claim 1, characterized in that: The first measuring member and the second measuring member are slidably connected, and the connection between the first measuring member and the second measuring member is an interference fit, which constitutes the damping connection structure.

3. A jig for testing the parallelism of upper and lower electrodes according to claim 2, characterized in that: The second measuring piece is provided with a deformation groove at one end connected to the first measuring piece, and the deformation groove penetrates the second measuring piece in a direction perpendicular to the sliding direction of the second measuring piece.

4. A jig for testing the parallelism of upper and lower electrodes according to claim 2, characterized in that: One end of the second measuring member away from the first measuring member is a second contact portion, and the second contact portion is hemispherical.

5. The jig for testing the parallelism of upper and lower electrodes according to claim 1, characterized in that: The first measuring piece and the second measuring piece are rotationally connected, and the damping connection structure is a clamping piece arranged at the rotationally connected position of the first measuring piece and the second measuring piece, and the clamping piece is used to bring the first measuring piece and the second measuring piece closer to each other and press them.

6. A jig for testing the parallelism of upper and lower electrodes according to claim 5, characterized in that: The pressing member is a bolt.

7. A jig for testing the parallelism of upper and lower electrodes according to claim 5, characterized in that: The pressing member is an elastic element, and the elastic element is installed on the rotation connection shaft between the second measuring member and the first measuring member.

8. The jig for testing the parallelism of upper and lower electrodes according to claim 2, characterized in that: The side wall of the second measuring member extends along the sliding direction and is printed with scales.

9. A jig for testing the parallelism of upper and lower electrodes according to claim 2, characterized in that: The first measuring member is provided with a sliding channel with one end open, and the depth of the sliding channel is less than the length of the second measuring member.

10. A jig for testing the parallelism of upper and lower electrodes according to claim 2, characterized in that: The second measuring piece is divided into a small rod and a large rod along the axial direction. The first measuring piece is provided with a through hole, and the through hole is divided into a small sliding cavity and a large sliding cavity along the axial direction. The small rod is slidably connected in the small sliding cavity, and the diameter of the small sliding cavity is smaller than the diameter of the small rod. The large rod is slidably connected in the large sliding cavity, and the diameter of the large sliding cavity is larger than the diameter of the large rod.

Images