MEMS gas sensor substrate with protective material layer structure

Abstract

The utility model discloses an MEMS gas sensitive sensor substrate with a protective material layer structure, which comprises a substrate module and a connecting block, slots are arranged on the outer walls of two sides of the substrate module, each slot comprises an abutting end, a horizontal part, an inclined part and an edge end, the edge end is close to the side edge part of the substrate module, and the connecting block is connected with the abutting end. The abutting end and the edge end are oppositely distributed, the horizontal part is located at the top end of the inserting groove, the inclined part is located at the bottom end of the inserting groove, the connecting blocks are matched with the inserting groove, the number of the base modules and the number of the connecting blocks are both multiple, and every two adjacent base modules are assembled and spliced through the connecting blocks. According to the MEMS gas sensor substrate with the protective material layer structure, the sensor substrate is composed of one or more substrate blocks, gas sensor substrates of different sizes can be assembled at any time according to the size of a sensor, operation is convenient and fast, and meanwhile the use cost of equipment can be reduced.

Description

Technical Field

[0001] The utility model relates to the technical field of gas sensitive sensors, in particular to a MEMS gas sensitive sensor substrate with a protective material layer structure. Background Art

[0002] MEMS stands for Micro Electromechanical System, which refers to high-tech devices with a size of several millimeters or even smaller. Its internal structure is generally at the micrometer or even nanometer level. It is an independent intelligent system. It is developed on the basis of microelectronics technology (semiconductor manufacturing technology) and is a high-tech electronic mechanical device made by integrating technologies such as lithography, corrosion, thin film, silicon micromachining, non-silicon micromachining and precision machining.

[0003] The main applications of gas sensors include: detection of carbon monoxide, detection of gas, detection of coal gas, detection of Freon (R11, R12), detection of ethanol in exhaled breath, detection of bad breath in human mouth, etc.

[0004] In long-term work practice, operators need to prepare substrates of different sizes according to the size of the sensor when using the gas sensor substrate, which increases the operator's workload and reduces the efficiency of using the gas sensor substrate.

[0005] Therefore, it is necessary to propose a MEMS gas sensor substrate with a protective material layer structure to solve the above problems. Utility Model Content

[0006] The purpose of the utility model is to provide a MEMS gas sensor substrate with a protective material layer structure to solve the problem that in long-term work practice, operators need to prepare substrates of different sizes according to the size of the sensor when using the gas sensor substrate, which increases the operator's work intensity and reduces the use efficiency of the gas sensor substrate.

[0007] To achieve the above-mentioned purpose, the utility model provides the following technical solutions: a MEMS gas sensor substrate with a protective material layer structure, including a substrate block and a connecting block, slots are opened on the outer walls of both sides of the substrate block, the slots include abutment ends, horizontal parts, inclined parts and edge ends, the edge ends are close to the side parts of the substrate block, the abutment ends and the edge ends are relatively distributed, the horizontal parts are located at the top of the slots, the inclined parts are located at the bottom of the slots, and the connecting blocks cooperate with the slots.

[0008] Preferably, the base assembly blocks and the connection blocks are provided in plurality, and two adjacent base assembly blocks are assembled and spliced ​​via the connection blocks.

[0009] Preferably, the length of the slot is smaller than the length of the base block.

[0010] Preferably, electrodes are arranged at the four corners of the upper surface of the substrate block, a sensitive material layer is arranged on the electrodes, and first electrode pads are arranged at the four corners of the upper surface of the substrate block, and the four first electrode pads correspond to the four electrodes one by one.

[0011] Preferably, a second electrode pad is disposed on the upper surface of the substrate block, and the four first electrode pads are all connected to the second electrode pad to output electrical signals.

[0012] The beneficial technical effect of the utility model is that by configuring the sensor substrate to be composed of one or more substrate blocks, gas sensor substrates of different sizes can be assembled at any time according to the size of the sensor, which is convenient to operate and can reduce the cost of equipment use; by arranging multiple groups of first electrode pads, electrodes and other structures on the substrate blocks, a multi-channel array combination electrode device is realized, thereby improving the sensor's recognition accuracy of the object to be measured. BRIEF DESCRIPTION OF THE DRAWINGS

[0013] Figure 1 This is a schematic diagram of the substrate structure of the MEMS gas sensor with a protective material layer structure of the utility model.

[0014] Figure 2 For this utility model Figure 1 A schematic diagram of the enlarged structure in the middle.

[0015] Figure 3 For this utility model Figure 2 Enlarged schematic diagram of the structure at point B in the middle.

[0016] Figure 4 This is a schematic diagram of the structure of the base assembly block, slot and connection block of the utility model.

[0017] In the figure: 1, base assembly block; 2, slot; 3, abutment end; 4, horizontal part; 5, inclined part; 6, edge end; 7, first electrode pad; 8, electrode; 9, second electrode pad; 10, connection block. DETAILED DESCRIPTION

[0018] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0019] like Figure 1-Figure 4As shown, the utility model provides a MEMS gas sensor substrate with a protective material layer structure, including a substrate block 1 and a connecting block 10, wherein the substrate block 1 and the connecting block 10 are both provided in a plurality, and two adjacent substrate blocks 1 are assembled and spliced ​​through the connecting block 10. By providing the sensor substrate to be composed of one or more substrate blocks 1, the size of the gas sensor substrate can be adjusted at any time.

[0020] During specific use, gas sensor substrates of different sizes can be assembled at any time according to the size of the sensor, which is convenient to operate and can reduce the cost of equipment use.

[0021] The utility model configures the sensor substrate to be composed of one or more substrate blocks 1, so that gas sensor substrates of different sizes can be assembled at any time according to the size of the sensor, which is convenient to operate and can reduce the cost of using the equipment.

[0022] In order to facilitate the assembly of the base block 1, slots 2 are provided on the outer walls of both sides of the base block 1. The slots 2 include abutment ends 3, horizontal portions 4, inclined portions 5 and edge ends 6. The edge ends 6 are close to the side portions of the base block 1. The abutment ends 3 and the edge ends 6 are relatively distributed. The horizontal portions 4 are located at the top of the slots 2. The inclined portions 5 are located at the bottom of the slots 2. The connecting blocks 10 cooperate with the slots 2. The horizontal portions 4 and the inclined portions 5 are provided so that the height of the slots 2 gradually increases from the edge ends 6 toward the abutment ends 3. When the connecting blocks 10 are inserted into the slots 2, they are not easy to fall off, thereby improving the stability of the connection between the two adjacent base blocks 1.

[0023] To enable quick alignment between two adjacent base blocks 1, the length of the slot 2 is smaller than the length of the base block 1. Compared with the direct penetration method, when the connecting block 10 is fully inserted between the two slots 2, the two adjacent base blocks 1 are fully aligned without misalignment.

[0024] Electrodes 8 are arranged at the four corners of the upper surface of the substrate block 1, and a sensitive material layer is arranged on the electrode 8. Specifically, the sensitive material layer is formed by using a spotting machine to spot the sensitive material on the electrode 8. First electrode pads 7 are arranged at the four corners of the upper surface of the substrate block 1, and the four first electrode pads 7 correspond to the four electrodes 8 one by one.

[0025] The upper surface of the substrate block 1 is provided with a second electrode pad 9, and the four first electrode pads 7 are connected to the second electrode pad 9 to output electrical signals, and the second electrode pad 9 is used for grounding. In addition, the two ends of each electrode 8 are respectively connected to the corresponding first electrode pad 7 and the second electrode pad 9 to output electrical signals.

[0026] In addition, a protective material layer is provided on the substrate assembly block 1 at a position outside the first electrode pad 7 , the electrode 8 and the second electrode pad 9 , and the protective material layer is made of an insulating material.

[0027] The material of the electrode 8 is a common metal electrode material, such as gold, platinum, aluminum, copper, tungsten or related alloys. The overall length of the electrode 8 can be 600μm, 700μm or 1.2mm, or any other value in the range of 600μm-1.5mm. The overall width of the electrode 2 can be 400μm, 600μm or 1.5mm, or any other value in the range of 400μm-1.6mm, and the length and width of the electrode 8 are relatively small, which meets the requirements of MEMS.

[0028] The utility model provides a plurality of groups of first electrode pads 7, electrodes 8 and other structures on the base block 1 to realize a multi-channel array combination electrode device mode, thereby improving the recognition accuracy of the sensor to the object to be measured.

Claims

1. A MEMS gas sensor substrate with a protective material layer structure, comprising a substrate assembly block (1) and a connecting block (10), characterized in that: The outer walls of both sides of the base block (1) are provided with slots (2), the slots (2) comprising abutting ends (3), a horizontal portion (4), an inclined portion (5) and an edge end (6), the edge end (6) being close to the side portion of the base block (1), the abutting ends (3) and the edge ends (6) being arranged opposite to each other, the horizontal portion (4) being located at the top end of the slots (2), the inclined portion (5) being located at the bottom end of the slots (2), and the connecting block (10) being matched with the slots (2).

2. The MEMS gas sensor substrate with a protective material layer structure according to claim 1, characterized in that: The base assembly blocks (1) and the connection blocks (10) are both provided in plurality, and two adjacent base assembly blocks (1) are assembled and spliced ​​via the connection blocks (10).

3. The MEMS gas sensor substrate with a protective material layer structure according to claim 1, characterized in that: The length of the slot (2) is smaller than the length of the base assembly block (1).

4. The MEMS gas sensor substrate with a protective material layer structure according to claim 1, characterized in that: Electrodes (8) are arranged at the four corners of the upper surface of the substrate assembly block (1), a sensitive material layer is arranged on the electrode (8), and first electrode pads (7) are arranged at the four corners of the upper surface of the substrate assembly block (1), and the four first electrode pads (7) correspond to the four electrodes (8) one by one.

5. The MEMS gas sensor substrate with a protective material layer structure according to claim 1, characterized in that: A second electrode pad (9) is provided on the upper surface of the substrate assembly block (1), and the four first electrode pads (7) are all connected to the second electrode pad (9) to output electrical signals.

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