Mechanism with lower cavity in floating connection with vacuum chamber

Abstract

The utility model relates to a mechanism with a lower cavity in floating connection with a vacuum chamber. The mechanism comprises a rack, and the rack is provided with an upper cavity, the lower cavity and a Z-axis servo motor for driving the upper cavity to move up and down; the upper cavity and the lower cavity are arranged in an up-down opposite mode, an upper cavity jig is arranged on the upper cavity, a lower cavity jig is fixedly arranged on the machine frame, and the upper cavity jig and the lower cavity jig are arranged in an up-down opposite mode. A floating guide rail device capable of floating up and down is arranged on the rack and is connected with the lower cavity jig; the Z-axis servo motor drives the upper cavity to move downwards, the upper cavity moves downwards to the cavity combining position of the upper cavity and the lower cavity, after cavity combining is completed, the Z-axis servo motor continues to drive the upper cavity to move downwards, downward pressing force is applied to the lower cavity, and the floating guide rail device is compressed downwards; therefore, a product of the upper cavity jig is combined with a product of the lower cavity jig, the attaching action is achieved, the attaching action is achieved through the Z-axis servo motor, and a Z-axis servo driving device of the upper cavity jig is omitted.

Description

Technical Field

[0001] The present application relates to the technical field of vacuum bonding mechanisms, and in particular to a lower cavity floating connection vacuum chamber mechanism. Background Art

[0002] During the vacuum bonding process, the upper cavity is pressed down by the servo Z-axis to merge with the lower cavity. After the merging is completed, the upper cavity fixture servo Z-axis is installed on the upper cavity, and the servo Z-axis continues to drive the fixture to press down and press the lower cavity fixture product together. Two separate servo Z-axes are used to merge the cavity and the product. For occasions where the space range of the upper cavity mechanism is limited, the upper cavity can no longer independently install a set of fixture lifting Z-axis, and the cost is increased. Utility Model Content

[0003] Based on this, it is necessary to provide a mechanism in which a lower cavity floats and is connected to a vacuum chamber, comprising a frame, on which an upper cavity, a lower cavity and a Z-axis servo motor for driving the upper cavity to move up and down are arranged; the upper cavity and the lower cavity are arranged opposite each other, an upper cavity fixture is arranged on the upper cavity, a lower cavity fixture is fixed on the frame, and the upper cavity fixture and the lower cavity fixture are arranged opposite each other; the frame is provided with a floating guide rail device that can float up and down, and the floating guide rail device is connected to the lower cavity fixture.

[0004] The floating guide rail device comprises a floating cylinder, and the floating end of the floating cylinder is connected to the lower cavity fixture.

[0005] The floating guide rail device includes an elastic member, which includes a mounting column, a spring, and a connecting block. The mounting column is installed on the frame, and two ends of the spring are respectively connected to the mounting column and the connecting block, and the connecting block is fixed on the lower cavity.

[0006] Elastic pieces are arranged on both sides of the floating cylinder.

[0007] The frame is provided with a plurality of floating guide rail devices which are arranged at intervals.

[0008] The bottom of the lower cavity is provided with a plurality of limiting grooves corresponding to the floating guide rail devices one by one, and the floating guide rail devices are located in the limiting grooves.

[0009] The lower cavity has a lower docking surface facing the upper cavity, and a positioning convex strip is convexly provided on the lower docking surface. The lower cavity has an upper docking surface facing the lower docking surface, and a groove corresponding to the convex strip is concavely provided on the upper docking surface.

[0010] When the upper docking surface is in contact with the lower docking surface, a sealed space is formed between the upper cavity and the lower cavity, and a vacuum pump is provided in the sealed space.

[0011] A transparent observation window is provided on the upper cavity.

[0012] Compared with the prior art, the advantages of the utility model are:

[0013] The utility model provides a lower cavity floating connection vacuum chamber mechanism, which drives the upper cavity downward by a Z-axis servo motor, and the upper cavity moves down to a cavity merging position with the lower cavity. After the cavity merging is completed, the Z-axis servo motor continues to drive the upper cavity downward, giving the lower cavity a downward pressure, so that the floating guide device is compressed downward, and since the height of the lower cavity fixture is fixed, the product of the upper cavity fixture is combined with the product of the lower cavity fixture to achieve a fitting action. In this process, the fitting action is achieved by a Z-axis servo motor, which reduces the independent Z-axis servo installation space of the upper cavity fixture, reduces the Z-axis servo drive device of the upper cavity fixture, and optimizes the cost. BRIEF DESCRIPTION OF THE DRAWINGS

[0014] In order to more clearly illustrate the embodiments of the present application or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present application. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0015] Figure 1 It is a schematic diagram of the three-dimensional structure of the lower cavity floatingly connected to the vacuum chamber mechanism of the embodiment of the present application;

[0016] Figure 2 This is a schematic diagram of the internal structure of the lower chamber floating connection vacuum chamber mechanism of the embodiment of the present application;

[0017] Figure 3 for Figure 1 Schematic diagram of the enlarged structure at point A in the middle.

[0018] Description of reference numerals:

[0019] 1. Frame; 2. Upper cavity; 20. Transparent observation window; 3. Lower cavity; 30. Lower docking surface; 31. Raised strip; 32. Limiting groove; 4. Z-axis servo motor; 5. Floating guide device; 50. Floating cylinder; 51. Mounting column; 52. Spring; 53. Connecting block; 6. Upper cavity fixture; 7. Lower cavity fixture. DETAILED DESCRIPTION

[0020] In order to make the above-mentioned purposes, features and advantages of the present application more obvious and easy to understand, the specific implementation methods of the present application are described in detail below in conjunction with the accompanying drawings. In the following description, many specific details are set forth to facilitate a full understanding of the present application. However, the present application can be implemented in many other ways different from those described herein, and those skilled in the art can make similar improvements without violating the connotation of the present application, so the present application is not limited by the specific embodiments disclosed below.

[0021] In the description of the present application, it should be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", "clockwise", "counterclockwise", "axial", "radial", "circumferential" and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present application and simplifying the description, and do not indicate or imply that the referred device or element must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be understood as a limitation on the present application.

[0022] In addition, the terms "first" and "second" are used for descriptive purposes only and should not be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features. Therefore, the features defined as "first" and "second" may explicitly or implicitly include at least one of the features. In the description of this application, the meaning of "plurality" is at least two, such as two, three, etc., unless otherwise clearly and specifically defined.

[0023] In this application, unless otherwise clearly specified and limited, the terms "installed", "connected", "connected", "fixed" and the like should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium, it can be the internal connection of two elements or the interaction relationship between two elements, unless otherwise clearly defined. For ordinary technicians in this field, the specific meanings of the above terms in this application can be understood according to specific circumstances.

[0024] In the present application, unless otherwise clearly specified and limited, a first feature being “above” or “below” a second feature may mean that the first and second features are in direct contact, or the first and second features are in indirect contact through an intermediate medium. Moreover, a first feature being “above”, “above”, and “above” a second feature may mean that the first feature is directly above or obliquely above the second feature, or simply means that the first feature is higher in level than the second feature. A first feature being “below”, “below”, and “below” a second feature may mean that the first feature is directly below or obliquely below the second feature, or simply means that the first feature is lower in level than the second feature.

[0025] It should be noted that when an element is referred to as being "fixed to" or "disposed on" another element, it may be directly on the other element or there may be a central element. When an element is considered to be "connected to" another element, it may be directly connected to the other element or there may be a central element at the same time. The terms "vertical", "horizontal", "upper", "lower", "left", "right" and similar expressions used herein are for illustrative purposes only and are not intended to be the only implementation method.

[0026] A mechanism in which a lower cavity 3 is floatingly connected to a vacuum chamber comprises a frame 1, on which an upper cavity 2, a lower cavity 3 and a Z-axis servo motor 4 for driving the upper cavity 2 to move up and down are arranged; the upper cavity 2 and the lower cavity 3 are arranged opposite each other, an upper cavity fixture 6 is arranged on the upper cavity 2, a lower cavity fixture 7 is fixedly arranged on the frame 1, and the upper cavity fixture 6 and the lower cavity fixture 7 are arranged opposite each other; a floating guide rail device 5 which can float up and down is provided on the frame 1, and the floating guide rail device 5 is connected to the lower cavity fixture 7. The upper cavity 2 is driven downward by the Z-axis servo motor 4, and the upper cavity 2 moves down to the cavity merging position with the lower cavity 3. After the cavity merging is completed, the Z-axis servo motor 4 continues to drive the upper cavity 2 downward, giving the lower cavity 3 a downward pressure, so that the floating guide device 5 is compressed downward. Since the height of the lower cavity fixture 7 is fixed, the product of the upper cavity fixture 6 is combined with the product of the lower cavity fixture 7 to achieve the bonding action. In this process, the bonding action is achieved by a Z-axis servo motor 4, which reduces the independent Z-axis servo installation space of the upper cavity fixture 6, reduces the Z-axis servo drive device of the upper cavity fixture 6, and optimizes the cost.

[0027] In this embodiment, the floating guide device 5 includes a floating cylinder 50, and the floating end of the floating cylinder 50 is connected to the lower cavity fixture 7. The floating guide device 5 also includes an elastic member, which includes a mounting column 51, a spring 52, and a connecting block 53. The mounting column 51 is installed on the frame 1, and the two ends of the spring 52 are respectively connected to the mounting column 51 and the connecting block 53. The connecting block 53 is fixed on the lower cavity 3. Specifically, elastic members are provided on both sides of the floating cylinder 50. When the lower cavity 3 is pressed down by the upper cavity 2, the floating cylinder 50 is pressed down and the spring 52 is compressed. When the product is bonded, the Z-axis servo motor 4 drives the upper cavity 2 to move up, and at the same time, the floating cylinder 50 and the spring 52 are released, driving the lower cavity 3 to automatically return to the original position, ready for the next round of bonding.

[0028] In this embodiment, under the guidance of the floating cylinder 50, the lower cavity 3 and the upper cavity 2 will not produce deviations in the X and Y axis directions during the movement in the Z axis direction, which well ensures the accuracy of the product after bonding. Combined with the elastic force of the spring 52, the pressed lower cavity 3 can be restored to its original position smoothly and quickly.

[0029] In this embodiment, a plurality of floating guide rail devices 5 are arranged at intervals on the frame 1. The plurality of floating guide rail devices 5 are arranged at intervals around the lower cavity 3, making it easier for the lower cavity 3 to move downward, and return to its original position more smoothly, with better elasticity, and more stable when moving downward and upward.

[0030] In this embodiment, a plurality of limit grooves 32 corresponding to the floating guide rail devices 5 are provided at the bottom of the lower cavity 3. The floating guide rail devices 5 are located in the limit grooves 32, which can limit the spring 52 to prevent the spring 52 from shifting, causing the lower cavity 3 to shift during the downward movement process, thereby affecting the fitting effect.

[0031] In this embodiment, the lower cavity 3 has a lower docking surface 30 facing the upper cavity 2, and a positioning convex strip 31 is convexly provided on the lower docking surface 30. The lower cavity 3 has an upper docking surface facing the lower docking surface 30, and a groove corresponding to the convex strip 31 is concavely provided on the upper docking surface. When the upper docking surface and the lower docking surface 30 are in contact with each other, the convex strip 31 is embedded in the groove, and a sealed space is formed between the upper cavity 2 and the lower cavity 3. A vacuum pump is provided in the sealed space. In a sealed environment, the vacuum pump can easily fill the sealed space with vacuum. The cooperation between the convex strip 31 and the groove makes the upper cavity 2 and the lower cavity 3 fit tighter and the sealing effect is better. In the downward movement process, displacement between the upper cavity 2 and the lower cavity 3 can also be avoided, which affects the subsequent product fitting effect.

[0032] In this embodiment, a transparent observation window 20 is provided on the upper cavity 2 to facilitate the user to observe the product bonding process from the outside.

[0033] The above-described embodiments only express several implementation methods of the present application, and the descriptions thereof are relatively specific and detailed, but they cannot be construed as limiting the scope of the patent application. It should be pointed out that, for a person of ordinary skill in the art, several variations and improvements can be made without departing from the concept of the present application, and these all belong to the protection scope of the present application. Therefore, the protection scope of the patent application shall be subject to the attached claims.

Claims

1. A lower cavity floating connection vacuum chamber mechanism, characterized in that: The machine comprises a frame, on which an upper cavity, a lower cavity and a Z-axis servo motor for driving the upper cavity to move up and down are provided; the upper cavity and the lower cavity are arranged opposite to each other one above and one below, an upper cavity jig is provided on the upper cavity, a lower cavity jig is fixed on the frame, and the upper cavity jig and the lower cavity jig are arranged opposite to each other one above and one below; a floating guide rail device which can float up and down is provided on the frame, and the floating guide rail device is connected to the lower cavity jig.

2. A lower cavity floating connection vacuum chamber mechanism according to claim 1, characterized in that: The floating guide rail device comprises a floating cylinder, and the floating end of the floating cylinder is connected to the lower cavity fixture.

3. A lower cavity floating connection vacuum chamber mechanism according to claim 2, characterized in that: The floating guide rail device includes an elastic member, which includes a mounting column, a spring, and a connecting block. The mounting column is installed on the frame, and two ends of the spring are respectively connected to the mounting column and the connecting block, and the connecting block is fixed on the lower cavity.

4. A lower cavity floating connection vacuum chamber mechanism according to claim 3, characterized in that: Elastic pieces are arranged on both sides of the floating cylinder.

5. The lower cavity floating connection vacuum chamber mechanism according to claim 1, characterized in that: The frame is provided with a plurality of floating guide rail devices which are arranged at intervals.

6. The lower cavity floating connection vacuum chamber mechanism according to claim 1, characterized in that: The bottom of the lower cavity is provided with a plurality of limiting grooves corresponding to the floating guide rail devices one by one, and the floating guide rail devices are located in the limiting grooves.

7. The lower cavity floating connection vacuum chamber mechanism according to claim 1, characterized in that: The lower cavity has a lower docking surface facing the upper cavity, and a positioning convex strip is convexly provided on the lower docking surface. The lower cavity has an upper docking surface facing the lower docking surface, and a groove corresponding to the convex strip is concavely provided on the upper docking surface.

8. The lower cavity floating connection vacuum chamber mechanism according to claim 7, characterized in that: When the upper docking surface is in contact with the lower docking surface, a sealed space is formed between the upper cavity and the lower cavity, and a vacuum pump is provided in the sealed space.

9. The lower cavity floating connection vacuum chamber mechanism according to claim 1, characterized in that: A transparent observation window is provided on the upper cavity.

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