Power generation system using heat recovery principle and applied to integrated circuit field

Abstract

The utility model relates to the technical field of integrated circuit heat recovery, in particular to a power generation system using a heat recovery principle, which is applied to the field of integrated circuits and comprises an acid supply device, the acid supply device is connected with a wet process device through a pipeline and supplies acid to the wet process device, and the wet process device is connected with a heat exchange device through a pipeline. The heat exchange device comprises an outer tank and an inner tank, waste acid generated by the wet process device is conveyed into the outer tank through a pipeline, the inner tank is arranged in the outer tank, a waste heat source is introduced into the inner tank, and the waste heat source in the inner tank exchanges heat with waste liquid in the outer tank. On the basis of a traditional heat exchanger, the low-temperature waste heat power generation system is innovatively developed by referring to the existing organic Rankine cycle technology in the market. The system aims at effectively solving the problem of waste of heat energy in the industrial production process, power is generated by recycling waste heat, and recycling of energy and improvement of economic benefits are achieved. The system has wide applicability.

Description

Technical Field

[0001] The utility model relates to the technical field of integrated circuit heat recovery, in particular to a power generation system using a heat recovery principle and applied in the field of integrated circuits. Background Art

[0002] In the semiconductor manufacturing process, the wafer bumping wet process is one of the key steps, but this process will produce a large amount of high-temperature waste liquid. These waste liquids not only need to be properly handled to avoid environmental pollution, but also contain huge thermal energy potential. However, traditional treatment methods often lead to the waste of this heat energy because the heat energy carried by the waste liquid is not effectively utilized during the cooling process.

[0003] Organic Rankine Cycle (ORC) is a Rankine cycle with low-boiling-point organic matter as the working fluid. It is mainly composed of four major parts: waste heat boiler (or heat exchanger), expander, condenser and working fluid pump. Its working principle is shown in the figure. The organic working fluid absorbs heat from the waste heat flow in the heat exchanger to generate steam with a certain pressure and temperature. The steam enters the turbine machinery to expand and do work, thereby driving the generator or dragging other power machinery. The steam discharged from the turbine releases heat to the cooling water in the condenser, condenses into liquid, and finally returns to the heat exchanger with the help of the working fluid pump, and the cycle continues. However, there is currently no method for recycling the high-temperature waste liquid generated in the wet process of wafer bumping through the organic Rankine cycle. Utility Model Content

[0004] The purpose of the utility model is to solve the shortcomings existing in the prior art and to propose a power generation system using the heat recovery principle and applied to the field of integrated circuits.

[0005] In order to achieve the above-mentioned purpose, the utility model adopts the following technical scheme: a power generation system using the heat recovery principle applied to the field of integrated circuits, comprising an acid supply device, the acid supply device is connected to a wet process device through a pipeline and supplies acid to the wet process device, the wet process device is connected to a heat exchange device through a pipeline, the heat exchange device comprises an outer tank and an inner tank, the waste acid generated by the wet process device is transported to the outer tank through a pipeline, the inner tank is arranged inside the outer tank, a waste heat source is passed through the inner tank, the waste heat source in the inner tank exchanges heat with the waste liquid in the outer tank, the waste acid in the outer tank is connected to a waste liquid recovery barrel through a pipeline after the heat exchange and is stored in the waste liquid recovery barrel, the inner tank is connected to an ORC system, the heat of the waste heat source in the inner tank is used to generate electricity through the ORC system, the ORC system comprises an evaporator, the evaporator is connected to the inner tank through a pipeline and exchanges heat, the evaporator is connected to an expander through a pipeline, the expander is connected to a condenser through a pipeline, the condenser is connected to a working fluid pump through a pipeline, and the working fluid pump is connected to the evaporator.

[0006] As a further description of the above technical solution:

[0007] The expander is connected to a generator to generate electricity, the generator is connected to a battery, and the electricity generated by the generator is stored in the battery.

[0008] As a further description of the above technical solution:

[0009] The acid provided by the acid supply device is at room temperature.

[0010] As a further description of the above technical solution:

[0011] The temperature of the waste acid discharged from the wet process device is 50-80°C.

[0012] The utility model has the following beneficial effects:

[0013] 1. Based on the traditional heat exchanger, this utility model draws on the existing organic Rankine cycle technology on the market and innovatively develops a low-temperature waste heat power generation system. The system aims to effectively solve the problem of heat energy waste in the industrial production process, and to generate electricity by recycling waste heat, thereby achieving energy reuse and improving economic benefits;

[0014] 2. The innovation of this system lies in its wide applicability. In addition to treating waste heat in the semiconductor manufacturing process, it is also suitable for other industrial equipment such as chillers and freezers. The system also has significant advantages in civil facilities such as office buildings and large venues. Especially in the high temperature period of summer, the system can use high-temperature hot air for cooling. At the same time, as the input hot air temperature increases and the flow rate increases, the output cold air temperature is lower, and the power generation efficiency is correspondingly improved. BRIEF DESCRIPTION OF THE DRAWINGS

[0015] Figure 1 This is a schematic structural diagram of a power generation system using the heat recovery principle and applied to the field of integrated circuits proposed by the utility model.

[0016] Legend:

[0017] 1. Acid supply device; 2. Wet process device; 3. Heat exchange device; 31. Outer tank; 32. Inner tank; 4. Waste liquid recovery barrel; 5. ORC system; 51. Evaporator; 52. Expander; 53. Condenser; 54. Working fluid pump; 6. Generator; 7. Battery. DETAILED DESCRIPTION

[0018] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0019] Reference Figure 1 The utility model provides an embodiment: a power generation system using the heat recovery principle applied in the field of integrated circuits, comprising an acid supply device 1, the acid supply device 1 is connected to a wet process device 2 through a pipeline and supplies acid to the wet process device 2, the wet process device 2 is connected to a heat exchange device 3 through a pipeline, the heat exchange device 3 comprises an outer tank 31 and an inner tank 32, the waste acid generated by the wet process device 2 is transported to the outer tank 31 through a pipeline, the inner tank 32 is arranged inside the outer tank 31, a waste heat source is passed through the inner tank 32, and the waste heat source in the inner tank 32 is reacted with the waste liquid in the outer tank 31 Heat exchange, the waste acid in the outer tank 31 is connected to the waste liquid recovery tank 4 through a pipeline after heat exchange and is stored in the waste liquid recovery tank 4, the inner tank 32 is connected to the ORC system 5, the heat of the waste heat source in the inner tank 32 is used to generate electricity through the ORC system 5, the ORC system 5 includes an evaporator 51, the evaporator 51 is connected to the inner tank 32 through a pipeline and performs heat exchange, the evaporator 51 is connected to the expander 52 through a pipeline, the expander 52 is connected to the condenser 53 through a pipeline, the condenser 53 is connected to the working fluid pump 54 through a pipeline, and the working fluid pump 54 is connected to the evaporator 51.

[0020] The expander 52 is connected to a generator 6 for generating electricity. The generator 6 is connected to a battery 7 . The electricity generated by the generator 6 is stored in the battery 7 .

[0021] The acid provided by the acid supply device 1 is at room temperature, and the temperature of the waste acid discharged by the wet process device 2 is 50-80°C.

[0022] The evaporator 51 is connected to the inner tank 32, absorbs the heat of the waste acid and evaporates the working fluid. The evaporated high-temperature and high-pressure working fluid enters the expander 52 and is converted into mechanical energy. The working fluid output by the expander 52 is condensed in the condenser 53 to release heat. The working fluid pump 54 transports the condensed working fluid back to the evaporator 51 to complete the cycle.

[0023] The expander 52 is connected to a generator 6 to convert mechanical energy into electrical energy. The electrical energy generated by the generator 6 is stored in a battery 7 .

[0024] Working principle:

[0025] Acid supply stage: The acid supply device 1 transports room temperature acid liquid to the wet process device 2 through a pipeline, providing the necessary chemical treatment environment for the production of integrated circuits.

[0026] Production process: In the wet process device 2, the acid liquid contacts the wafer and performs necessary chemical reactions, such as etching or cleaning, to form a specific structure of the integrated circuit.

[0027] Waste acid generation: After chemical reaction, the acid liquid becomes waste acid, which usually has a temperature range of 50-80°C and contains impurities generated during the integrated circuit manufacturing process.

[0028] Waste acid transportation: High-temperature waste acid is transported from the wet process device 2 to the outer tank 31 of the heat exchange device 3 through a pipeline to prepare for heat exchange.

[0029] Heat exchange preparation: The outer tank 31 receives the waste acid, while the inner tank 32 is already filled with a medium as a waste heat source, usually a substance with high specific heat capacity and latent heat of phase change.

[0030] Heat exchange process: The waste acid in the outer tank 31 exchanges heat with the waste heat source in the inner tank 32. The waste heat source absorbs the heat of the waste acid, causing the temperature of the waste acid to decrease while the temperature of the waste heat source to increase.

[0031] Waste liquid recovery: After heat exchange, the temperature of the waste acid is reduced, and then it is transported to the waste liquid recovery tank 4 through a pipeline for storage for subsequent treatment or disposal.

[0032] The temperature of the waste heat source is increased: after the waste heat source in the inner tank 32 absorbs the heat of the waste acid, the temperature increases, providing the necessary heat energy for the next power generation process.

[0033] The ORC system 5 is started: the waste heat source with increased temperature enters the evaporator 51 of the ORC system 5, further heating and evaporating the working medium into high-temperature and high-pressure steam.

[0034] Energy conversion: High-temperature and high-pressure steam enters the expander 52, expands and performs work, and converts thermal energy into mechanical energy.

[0035] Power generation process: the expander 52 is connected to the generator 6, and the mechanical energy is converted into electrical energy to achieve waste heat power generation.

[0036] Electric energy storage: The generated electric energy is stored in the battery 7 for use by the factory when needed, or is incorporated into the power grid for use by other users.

[0037] Working medium cycle: After the steam does work in the expander 52, it enters the condenser 53, releases heat and condenses back into liquid. Then, the working medium pump 54 transports the condensed working medium back to the evaporator 51 to complete the cycle.

[0038] Finally, it should be noted that the above is only a preferred embodiment of the present invention and is not intended to limit the present invention. Although the present invention has been described in detail with reference to the aforementioned embodiments, those skilled in the art can still modify the technical solutions described in the aforementioned embodiments or make equivalent substitutions for some of the technical features therein. Any modifications, equivalent substitutions, improvements, etc. made within the spirit and principles of the present invention should be included in the protection scope of the present invention.

Claims

1. A power generation system using the heat recovery principle and applied in the field of integrated circuits, comprising an acid supply device (1), characterized in that: The acid supply device (1) is connected to a wet process device (2) via a pipeline and supplies acid to the wet process device (2). The wet process device (2) is connected to a heat exchange device (3) via a pipeline. The heat exchange device (3) comprises an outer tank (31) and an inner tank (32). The waste acid generated by the wet process device (2) is transported to the outer tank (31) via a pipeline. The inner tank (32) is arranged inside the outer tank (31). A waste heat source is connected to the inner tank (32). The waste heat source in the inner tank (32) exchanges heat with the waste liquid in the outer tank (31). After the heat exchange, the waste acid in the outer tank (31) is connected to the waste liquid via a pipeline. The waste liquid is stored in a recovery tank (4), the inner tank (32) is connected to an ORC system (5), the heat of the waste heat source in the inner tank (32) is used to generate electricity through the ORC system (5), the ORC system (5) comprises an evaporator (51), the evaporator (51) is connected to the inner tank (32) through a pipeline and performs heat exchange, the evaporator (51) is connected to an expander (52) through a pipeline, the expander (52) is connected to a condenser (53) through a pipeline, the condenser (53) is connected to a working fluid pump (54) through a pipeline, and the working fluid pump (54) is connected to the evaporator (51).

2. The power generation system using heat recovery principle applied to the field of integrated circuits according to claim 1, characterized in that: The expander (52) is connected to a generator (6) for generating electricity, and the generator (6) is connected to a storage battery (7). The electricity generated by the generator (6) is stored in the storage battery (7).

3. The power generation system using heat recovery principle applied to the field of integrated circuits according to claim 2 is characterized in that: The acid provided by the acid supply device (1) is at room temperature.

4. The power generation system using heat recovery principle applied to the field of integrated circuits according to claim 3 is characterized in that: The temperature of the waste acid discharged from the wet process device (2) is 50-80°C.

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