Exhaust mechanism of vacuum coating machine

Abstract

The utility model relates to the technical field of vacuum coating machines, and provides an exhaust mechanism of a vacuum coating machine. An exhaust mechanism is arranged, a motor is started to rotate forwards, so that an output end drives a rotating shaft to rotate to drive a gear I to rotate and be meshed with a gear II to enable a circular plate to rotate synchronously, and the circular plate rotates to drive two connecting plates to rotate, so that a rotating rod is clamped in a clamping groove through a sliding block to rotate synchronously and is in threaded connection with a nut; the effects that the rotating rod moves rightwards to abut against the mounting plate and the piston moves rightwards synchronously to exhaust gas completely from the exhaust cavity in the vacuum coating machine body are achieved, and the problem that gas cannot be completely exhausted from the exhaust cavity in the vacuum coating machine body in the prior art is solved; the piston is tightly attached to the inner wall of the exhaust cavity and transversely displaces to exhaust gas in the vacuum coating machine body, the phenomenon that the gas reversely overflows from a gap can be effectively prevented, and when the mounting plate pushes the piston to displace, the bead is in sliding connection with the inner wall of the exhaust cavity, so that shaking caused by inertia can be buffered, and the piston more stably exhausts the gas.

Description

Technical Field

[0001] The utility model relates to the technical field of vacuum coating machines, and in particular to an exhaust mechanism of a vacuum coating machine. Background Art

[0002] A vacuum coating machine is a coating equipment that needs to be carried out under a high vacuum degree, including vacuum resistance heating evaporation, electron gun heating evaporation, magnetron sputtering, MBE molecular beam epitaxy, PLD laser sputtering deposition, ion beam sputtering, etc. The coating substrate and target material are in the same vacuum chamber, and the coating is carried out by evaporation and sputtering. Evaporation coating generally heats the target material to evaporate the surface components in the form of atomic groups or ions, while sputtering coating uses electrons or high-energy lasers to bombard the target material, and the surface components are sputtered out in the form of atomic groups or ions, and finally deposited on the substrate surface, undergoing a film-forming process, and finally forming a thin film. The vacuum coating machine needs to be exhausted when in use.

[0003] The cam is provided with a plurality of gears, and the plurality of gears are connected to each other with a plurality of gears, and the plurality of gears are connected to each other with a plurality of gears, and the plurality of gears are connected to each other with a plurality of gears.

[0004] However, in the implementation of relevant technologies, the following problems were found: the exhaust mechanism of the existing vacuum coating machine drives the threaded block to move through the rotation of the threaded rod, and the threaded block drives the push plate to move in the exhaust chamber, thereby exhausting the vacuum coating machine body. However, the push plate is sleeved on the outer wall of the threaded rod and moves laterally, which may cause a gap between the push plate and the threaded rod, making it easy for the gas to overflow from the gap to the other side of the push plate, thereby causing the gas to be unable to be completely discharged from the exhaust chamber in the vacuum coating machine body.

[0005] Therefore, an exhaust mechanism for a vacuum coating machine is needed. Utility Model Content

[0006] The utility model provides an exhaust mechanism for a vacuum coating machine, which solves the problem in the related art that gas cannot be completely exhausted from an exhaust cavity in a vacuum coating machine body.

[0007] The technical solution of the utility model is as follows: an exhaust mechanism of a vacuum coating machine, comprising an exhaust seat, an exhaust cavity opened inside the exhaust seat, a plurality of exhaust holes opened on the top of the exhaust seat, and a support fixed on the bottom of the exhaust seat, a piston is provided on the inner wall of the exhaust cavity, an exhaust mechanism is provided at one end of the exhaust seat, and the exhaust mechanism is used to push the piston to move horizontally in the exhaust cavity to exhaust.

[0008] Preferably, the exhaust mechanism includes a motor, the output end of the motor is fixedly connected to a rotating shaft, the outer wall of the rotating shaft is fixedly connected to gear one, the top of gear one is meshingly connected to gear two, the inner wall of gear two is fixedly connected to a circular plate, the side of the circular plate is fixedly connected to two connecting plates, the surfaces of the two connecting plates are provided with sliding grooves, the inner wall of the sliding groove is slidably connected to a slider, and one end of the slider is fixedly connected to a rotating rod.

[0009] Preferably, the outer wall of the rotating rod away from the circular plate is threadedly connected with a nut, and the end of the rotating rod away from the circular plate is rotatably connected to a mounting plate, and one side of the mounting plate is fixedly mounted to one side of the piston by bolts.

[0010] Preferably, one end of the exhaust seat is fixedly connected to a load-bearing seat, the top of the load-bearing seat is fixedly connected to a stabilizing ring, the inner wall of the stabilizing ring is provided with a circular slide groove, the surfaces of the two connecting plates are fixedly connected with a rounded slider, and the rounded slider is slidably connected to the circular slide groove.

[0011] Preferably, a connecting rod is fixedly connected to the surface of the mounting plate, a rolling sleeve is provided with a ball at one end of the connecting rod, and the surface of the ball is slidably connected to the inner wall of the exhaust cavity.

[0012] Preferably, the piston is in the shape of a cube, and the surface of the piston is in close contact with the inner wall of the exhaust chamber.

[0013] Preferably, a fixing plate is fixedly connected to the bottom of the load-bearing seat, and one side of the fixing plate is fixedly installed to one end of the motor by bolts.

[0014] Preferably, the stabilizing rings are provided in a pair and are relatively arranged on the left and right sides of the top of the load-bearing seat.

[0015] Preferably, the outer wall of the nut is fixedly connected to the inner wall of one end of the exhaust seat, and the interior of the nut is communicated with the interior of the exhaust chamber.

[0016] Preferably, the size of gear one is smaller than that of gear two, and gear one is located at the bottom of gear two.

[0017] The working principle and beneficial effects of the utility model are:

[0018] 1. The utility model is provided with an exhaust mechanism, and the motor is started to rotate forwardly so that the output end drives the rotating shaft to rotate, driving the gear 1 to rotate and meshing with the gear 2 to make the circular plate rotate synchronously. The rotation of the circular plate drives the two connecting plates to rotate so that the rotating rod is clamped in the slot through the slider and rotates synchronously and is threadedly connected with the nut, so that the rotating rod moves rightward to abut against the mounting plate and the piston moves rightward synchronously to completely discharge the gas from the exhaust chamber in the vacuum coating machine body, which solves the problem in the prior art that the gas cannot be completely discharged from the exhaust chamber in the vacuum coating machine body.

[0019] 2. The utility model arranges the piston to be in close contact with the inner wall of the exhaust chamber and to displace laterally to exhaust the gas in the vacuum coating machine body, which can effectively prevent the occurrence of gas overflow from the gap, and when the mounting plate pushes the piston to displace, a bead is arranged to be slidably connected with the inner wall of the exhaust chamber to buffer the shaking caused by inertia, so that the piston can discharge the gas more smoothly. BRIEF DESCRIPTION OF THE DRAWINGS

[0020] The utility model is further described in detail below in conjunction with the accompanying drawings and specific implementation methods.

[0021] Figure 1 It is a schematic diagram of the three-dimensional structure proposed by the utility model;

[0022] Figure 2 This is a schematic diagram of the top plan structure proposed by the utility model;

[0023] Figure 3 It is a side view structural schematic diagram of the utility model;

[0024] Figure 4 This is a schematic diagram of the cross-sectional structure of the exhaust seat proposed by the utility model;

[0025] Figure 5 This is a schematic diagram of the connecting plate structure proposed by the utility model.

[0026] In the figure: 1 exhaust seat; 11 exhaust hole; 12 support; 13 exhaust chamber; 2 piston; 3 exhaust mechanism; 31 motor; 32 rotating shaft; 33 gear 1; 34 gear 2; 35 round plate; 36 connecting plate; 37 rotating rod; 38 nut; 39 mounting plate; 4 load-bearing seat; 41 fixing plate; 5 stabilizing ring; 6 connecting rod; 61 ball. DETAILED DESCRIPTION

[0027] The following will be combined with the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments of the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0028] See also Figures 1 to 5 The utility model provides a technical solution for an exhaust mechanism of a vacuum coating machine: an exhaust mechanism of a vacuum coating machine, comprising an exhaust seat 1, an exhaust chamber 13 provided inside the exhaust seat 1, a plurality of exhaust holes 11 provided on the top of the exhaust seat 1, and a support 12 fixed to the bottom of the exhaust seat 1, a piston 2 is provided on the inner wall of the exhaust chamber 13, the outer shape of the piston 2 is a cube, and the surface of the piston 2 is in close contact with the inner wall of the exhaust chamber 13;

[0029] An exhaust mechanism 3 is provided at one end of the exhaust seat 1, and the exhaust mechanism 3 is used to push the piston 2 to move horizontally in the exhaust chamber 13 for exhaust. The exhaust mechanism 3 includes a motor 31, and a fixing plate 41 is fixedly connected to the bottom of the load-bearing seat 4. One side of the fixing plate 41 is fixedly installed with one end of the motor 31 by bolts, and the fixing plate 41 plays a role in bearing the motor 31. The output end of the motor 31 is fixedly connected to a rotating shaft 32, and the outer wall of the rotating shaft 32 is fixedly connected to a gear 1 33, and the top of the gear 1 33 is meshingly connected to a gear 2 34. The size of the gear 1 33 is smaller than that of the gear 2 34, and the gear 1 33 is located at the bottom of the gear 2 34. The gear 1 33 rotates twice to drive the gear 2 34 to rotate once. The inner wall of the gear 2 34 is fixedly connected to a circular plate 35, and the side of the circular plate 35 is fixedly connected to two connecting plates 36. One end of the exhaust seat 1 is fixedly connected to the load-bearing seat 4, and the top of the load-bearing seat 4 is fixedly connected to a stabilizing ring 5. The number of the stabilizing rings 5 ​​is a pair, and they are relatively arranged on the load-bearing seat The left and right sides of the top of 4 are provided with circular sliding grooves on the inner wall of the stabilizing ring 5, and the surfaces of the two connecting plates 36 are fixedly connected with rounded sliders, which are slidably connected with the circular sliding grooves, so as to stabilize the smooth rotation of the two connecting plates 36. The surfaces of the two connecting plates 36 are provided with sliding grooves, and the inner walls of the sliding grooves are slidably connected with sliders, which play a role in limiting the rotation rod 37. One end of the slider is fixedly connected with the rotation rod 37, and the outer wall of the rotation rod 37 away from the circular plate 35 is threadedly connected with a nut 38. The outer wall of the nut 38 is fixedly connected with the inner wall of one end of the exhaust seat 1, and the interior of the nut 38 is connected with the interior of the exhaust chamber 13. The end of the rotation rod 37 away from the circular plate 35 is rotatably connected with a mounting plate 39, and the surface of the mounting plate 39 is fixedly connected with a connecting rod 6. One end of the connecting rod 6 is rollingly sleeved with a ball 61, and the surface of the ball 61 is slidably connected with the inner wall of the exhaust chamber 13, so as to reduce the inertia and make the movement of the mounting plate 39 more stable. One side of the mounting plate 39 is fixedly installed with one side of the piston 2 by bolts.

[0030] The working principle and use process of the utility model are as follows: when the vacuum coating machine body is to be vented, the motor 31 is started to rotate forward so that the output end driving shaft 32 rotates two circles, and the rotation of the shaft 32 drives the gear 1 33 to rotate and mesh with the gear 2 34, so that the circular plate 35 rotates, and the rotation of the circular plate 35 drives the two connecting plates 36 to rotate, so that the rotating rod 37 is stuck in the slot through the slider and rotates synchronously, and at the same time, the rotating rod 37 is threadedly connected with the nut 38 so that the rotating rod 37 rotates and moves to the right, thereby pushing the mounting plate 39 to move to the right. At this time, the piston 2 is synchronously displaced to make the air in the exhaust chamber 13 flow out from the exhaust hole 11, thereby achieving the purpose of completely discharging the gas from the exhaust chamber 13 in the vacuum coating machine body.

[0031] The above are only preferred embodiments of the present invention and are not intended to limit the present invention. Any modifications, equivalent substitutions, improvements, etc. made within the spirit and principles of the present invention should be included in the protection scope of the present invention.

Claims

1. An exhaust mechanism of a vacuum coating machine, comprising an exhaust seat (1), an exhaust cavity (13) provided inside the exhaust seat (1), a plurality of exhaust holes (11) provided on the top of the exhaust seat (1), and a support (12) fixed on the bottom of the exhaust seat (1), characterized in that: The inner wall of the exhaust chamber (13) is provided with a piston (2), and one end of the exhaust seat (1) is provided with an exhaust mechanism (3), and the exhaust mechanism (3) is used to push the piston (2) to move horizontally in the exhaust chamber (13) to exhaust gas.

2. The exhaust mechanism of a vacuum coating machine according to claim 1, characterized in that: The exhaust mechanism (3) comprises a motor (31), the output end of the motor (31) is fixedly connected to a rotating shaft (32), the outer wall of the rotating shaft (32) is fixedly connected to a gear 1 (33), the top of the gear 1 (33) is meshingly connected to a gear 2 (34), the inner wall of the gear 2 (34) is fixedly connected to a circular plate (35), the side of the circular plate (35) is fixedly connected to two connecting plates (36), the surfaces of the two connecting plates (36) are provided with sliding grooves, the inner wall of the sliding groove is slidably connected to a slider, and one end of the slider is fixedly connected to a rotating rod (37).

3. The exhaust mechanism of a vacuum coating machine according to claim 2, characterized in that: The outer wall of the rotating rod (37) at one end away from the circular plate (35) is threadedly connected with a nut (38), and the end of the rotating rod (37) away from the circular plate (35) is rotatably connected with a mounting plate (39), and one side of the mounting plate (39) is fixedly mounted to one side of the piston (2) by bolts.

4. The exhaust mechanism of a vacuum coating machine according to claim 1, characterized in that: One end of the exhaust seat (1) is fixedly connected to a load-bearing seat (4), the top of the load-bearing seat (4) is fixedly connected to a stabilizing ring (5), the inner wall of the stabilizing ring (5) is provided with a circular sliding groove, and the surfaces of the two connecting plates (36) are fixedly connected to rounded sliding blocks, and the rounded sliding blocks are slidably connected to the circular sliding groove.

5. The exhaust mechanism of a vacuum coating machine according to claim 3, characterized in that: A connecting rod (6) is fixedly connected to the surface of the mounting plate (39), and a rolling sleeve is provided with a ball (61) at one end of the connecting rod (6), and the surface of the ball (61) is slidably connected to the inner wall of the exhaust chamber (13).

6. The exhaust mechanism of a vacuum coating machine according to claim 1, characterized in that: The piston (2) is in the shape of a cube, and the surface of the piston (2) is in close contact with the inner wall of the exhaust chamber (13).

7. The exhaust mechanism of a vacuum coating machine according to claim 4, characterized in that: A fixing plate (41) is fixedly connected to the bottom of the load-bearing seat (4), and one side of the fixing plate (41) is fixedly mounted to one end of the motor (31) by means of bolts.

8. The exhaust mechanism of a vacuum coating machine according to claim 4, characterized in that: The stabilizing rings (5) are provided in a pair and are arranged relatively on the left and right sides of the top of the load-bearing seat (4).

9. The exhaust mechanism of a vacuum coating machine according to claim 3, characterized in that: The outer wall of the nut (38) is fixedly connected to the inner wall of one end of the exhaust seat (1), and the interior of the nut (38) is connected to the interior of the exhaust chamber (13).

10. The exhaust mechanism of a vacuum coating machine according to claim 2, characterized in that: The size of the gear one (33) is smaller than the size of the gear two (34), and the gear one (33) is located at the bottom of the gear two (34).

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