Flower basket discharging device

By setting a pressing mechanism on the second platform of the flower basket discharge device and controlling the flip with the second motor, combined with the transmission line between the synchronous belt and the first motor, the problems of flower basket shaking and silicon chip fragmentation in the prior art are solved. The smooth and accurate discharge process is achieved, ensuring the quality of the silicon wafer.

CN222507580UActive Publication Date: 2025-02-18WUXI NANYA SCI-TECH CO LTD
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Patent Information

Application Number
CN202420853125.8
Authority / Receiving Office
CN · China
Patent Type
Utility models(China)
Current Assignee / Owner
Filing Date
2024-04-24
Publication Date
2025-02-18
Estimated Expiration
2034-04-24

AI Technical Summary

Technical Problem

During the flip process, the existing flower basket discharge device shaking due to unstable air pressure, and the silicon wafer is easily vibrating and shaking, and the chain transmission is sliding, making it difficult to accurately locate, resulting in the robot's pressure frame and impacting the silicon wafer when grabbing. Condition.

Method used

A flower basket discharge device is designed, and a pressing mechanism is provided on the second platform to apply pressure to the flower basket through the cylinder control block to ensure that the flower basket always abuts the second platform during the flip process and avoids shaking. At the same time, the second motor is used to control the flip process to ensure smooth flipping, and the movement of the first platform is accurately controlled through the conveyor line combined with the synchronous belt and the first motor.

Benefits of technology

It effectively prevents the shaking of the flower basket during the discharge process, avoids the breakage of the silicon wafer, ensures the quality of the silicon wafer, and reduces the pressure and impact of the robot through precise transmission and grabbing.

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Abstract

The utility model discloses a flower basket discharging device which comprises a conveying line, a first platform, a second platform, a pressing mechanism and a turnover mechanism. The first platform is arranged on the conveying line and is driven by the conveying line to move between a material receiving position and a material discharging position; the second platform is located at the end, close to a material receiving position, of the conveying line, the second platform has a vertical state and a horizontal state, and a pressing mechanism is arranged on the second platform and used for pressing a flower basket borne by the second platform when the state of the second platform is switched; the turnover mechanism is connected with the second platform and is used for driving the second platform to be switched between a vertical state and a horizontal state; and the second platform is positioned in the first platform at the material receiving position in a horizontal state, and transfers the flower basket carried by the second platform to the first platform. The flower basket discharging device can prevent the flower basket from vibrating in the discharging process, and silicon wafers in the flower basket are prevented from being broken due to vibration.
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Description

Technical Field

[0001] The utility model relates to the field of silicon wafer discharging, in particular to a flower basket discharging device. Background Art

[0002] During the production process of silicon wafers, the wafer inserting machine inserts qualified silicon wafers into the basket for storage. After the basket is full, the basket full of silicon wafers will be unloaded to replace the empty basket to continue storing silicon wafers. The existing basket unloading process mainly includes turning the full basket from the vertical state of the wafer inserting position to a flat state, and then transporting the flat basket away from the wafer inserting machine.

[0003] This process has the following problems. The existing discharging mechanism uses a cylinder to clamp the flower basket and flip it from a vertical state to a horizontal state. During the flipping process, the air pressure generated by the cylinder is unstable, causing the flower basket to shake up and down, and the silicon wafers in the flower basket are easily broken by vibration. This is especially true for the situation where existing silicon wafers are getting thinner and thinner. When the flower basket in a horizontal state is transported away from the wafer inserter, the flower basket is moved to the end away from the wafer inserter by chain transmission, and then directly transported by a robot. Due to the sliding phenomenon of chain transmission, the flower basket is often not accurately positioned to the target grabbing position, causing the robot to press the frame and hit the silicon wafer during the grabbing process. Summary of the invention

[0004] In order to overcome the defects in the prior art, an embodiment of the utility model provides a flower basket discharging device, which can prevent the flower basket from vibrating during the discharging process and avoid the silicon wafers in the flower basket from being broken by vibration.

[0005] In order to achieve the above-mentioned purpose, the technical solution adopted by the utility model is: a flower basket discharging device, comprising:

[0006] Conveyor lines;

[0007] A first platform, which is disposed on the conveyor line and is driven by the conveyor line to move between a material receiving position and a material discharging position;

[0008] The second platform is located at one end of the conveyor line close to the material receiving position, the second platform has a vertical state and a horizontal state, and a clamping mechanism is provided on the second platform, and the clamping mechanism is used to clamp the flower basket carried by the second platform when the state of the second platform is switched;

[0009] The flipping mechanism is connected to the second platform and is used to drive the second platform to switch between a vertical state and a horizontal state; when the second platform is in the horizontal state, it is located inside the first platform at the material receiving position and transfers the flower basket it carries to the first platform.

[0010] The present application sets a clamping mechanism on the second platform. When the flower basket loaded with silicon wafers is flipped from a vertical state to a horizontal state on the second platform, the clamping mechanism keeps the flower basket in contact with the second platform, thereby preventing the flower basket from shaking during the flipping process and preventing the silicon wafers in the flower basket from breaking. This is particularly suitable for situations where the thickness of the silicon wafer is less than 125 μm.

[0011] A first platform is provided on the conveyor line. When the flower basket is carried by the second platform and flipped from a vertical state to a horizontal state, it can gradually contact the first platform during the flipping process, making the state switching process smoother. The flower basket is limited by the first platform during transmission to reduce vibration, further avoid silicon wafer breakage, and ensure product quality.

[0012] As a further improvement, the second platform includes a bottom plate, a side plate vertically connected to the bottom plate, the side plate is located on the side of the bottom plate facing the material receiving position, and a clamping mechanism is provided at one end of the side plate away from the bottom plate. At least two guide members are provided on the bottom plate, and the guide members are arranged opposite to each other and located on both sides of the side plate. The side plate is opposite to the middle part of the bottom plate, and the width of the side plate is smaller than the width of the flower basket and the width of the first platform. When the second platform is accommodated in the first platform, the side plate is located below the support portion of the first platform.

[0013] During the wafer insertion process, the second platform is in a vertical state. At the same time, the flower basket is placed vertically on the bottom plate of the second platform, and the bottom plate carries the flower basket. The back of the flower basket fits the side plate of the second platform, and the open side of the flower basket faces the wafer inserter, which is used to store silicon wafers. After the flower basket is full of silicon wafers, the clamping mechanism applies pressure to the top of the flower basket, so that the flower basket is clamped between the bottom plate and the clamping mechanism, so that during the flipping process of the second platform, the flower basket can be prevented from vibrating and the silicon wafers can be prevented from breaking. As the flipping process proceeds, the second platform gradually enters the first platform. Since the width of the side plate is smaller than the width of the flower basket and the width of the first platform, the back of the flower basket contacts the support part of the first platform until the second platform is in a flat state, and the side plate is located below the support part of the first platform. At this time, the back of the flower basket is placed on the first platform and separated from the side plate of the second platform. The flower basket is carried by the first platform, and the flower basket is in a flat state with the open side of the flower basket facing upward. The flipping process is simple and easy to operate, and the whole process can avoid the vibration of the flower basket and ensure the quality of the silicon wafer.

[0014] As a further improvement, the clamping mechanism includes a cylinder and a clamping block connected to the telescopic rod of the cylinder. During the flipping process, the cylinder controls the clamping block to apply pressure to the flower basket. When the flower basket is flat after the flipping is completed, the cylinder controls the clamping block to release the flower basket so that the flower basket can be taken away by the first platform and moved to the feeding position. The clamping block can rotate relative to the side plate of the second platform to switch between clamping and loosening to avoid interference with the movement of the flower basket.

[0015] As a further improvement, the pressing block includes at least one elastic column. Preferably, two elastic columns can be arranged at intervals along the width direction of the flower basket to increase the force-bearing area. The elastic column is made of silicone material to avoid damaging the flower basket.

[0016] As a further improvement, the flipping mechanism includes a second motor, a rotating shaft connected to the second motor, and the second platform is sleeved on the rotating shaft. The second motor is used to control the rotation of the second platform. Compared with the cylinder, the second motor can better control the entire movement process, ensuring that the entire flipping process is carried out at a uniform speed and smoothly, reducing shaking.

[0017] As a further improvement, the first platform includes at least two support members, the two support members are arranged opposite to each other along the transmission direction perpendicular to the conveying line, a sliding member is connected between the support members, the sliding member is lower than the supporting part of the support member, and there is a storage space for accommodating the second platform between the sliding member and the support member. The support member can be strip-shaped or block-shaped, and it only needs to be able to stably support the flower basket. For example, two strip-shaped bending members can be selected as the support member. The sliding member is arranged below the support member to form a storage space between the support member and the sliding member. When the second platform is in a flat state, the side plate and the clamping mechanism of the second platform are avoided to ensure that the side plate of the second platform is located below the support member, and the flower basket can be smoothly transferred from the second platform to the first platform. The sliding member is connected to the conveying line and driven by the conveying line to move between the receiving position and the feeding position.

[0018] As a further improvement, the first platform includes four supporting members, which are divided into two groups and are respectively located at two ends of the sliding member. When the first platform supports the flower basket, the four supporting members are respectively opposite to the four corners of the back of the flower basket to provide stable support.

[0019] As a further improvement, the support member includes a support portion, a side of the support portion facing away from the accommodation space extends upward to form a limiting portion, and an end of the limiting portion facing away from the support portion is inclined outward away from the accommodation space to form a guiding portion. The guiding portion is provided on the support member so that the flower basket can quickly enter the first platform during the process of transferring the flower basket between the second platform and the first platform.

[0020] As a further improvement, the conveyor line includes a synchronous belt for driving a first motor of the synchronous belt. The synchronous belt, the first motor and the sliding member can be connected in a conventional manner. The first motor is used to control the first platform to move between the receiving position and the feeding position. Compared with the cylinder, the first motor has more precise control over the position, which is conducive to the robot arm to accurately grab the flower basket from the feeding position, and the moving process is more stable and reduces vibration.

[0021] As a further improvement, a cover is provided on the synchronous belt to prevent water on the silicon wafer from dripping onto the synchronous belt.

[0022] Due to the application of the above technical solution, the present invention has the following advantages compared with the prior art:

[0023] 1. The present application sets a clamping mechanism on the second platform. When the flower basket loaded with silicon wafers on the second platform is flipped from a vertical state to a horizontal state, the clamping mechanism keeps the flower basket in contact with the second platform at all times, thereby preventing the flower basket from shaking during the flipping process and preventing the silicon wafers in the flower basket from breaking. The present application is particularly suitable for situations where the thickness of the silicon wafers is less than 125 μm.

[0024] 2. Use the second motor to control the flipping of the second platform. Compared with the cylinder, the second motor can better control the entire movement process, ensuring that the entire flipping process is carried out at a uniform and smooth speed and reducing shaking.

[0025] 3. The conveyor line adopts the form of a combination of a synchronous belt and a first motor, which can accurately control the movement of the first platform between the receiving position and the feeding position, which is conducive to the robot to accurately grab the flower basket from the feeding position, and the moving process is more stable and reduces vibration.

[0026] In order to make the above and other purposes, features and advantages of the present invention more obvious and easy to understand, preferred embodiments are specifically cited below and described in detail with reference to the accompanying drawings. BRIEF DESCRIPTION OF THE DRAWINGS

[0027] In order to more clearly illustrate the embodiments of the utility model or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the utility model. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0028] Figure 1 This is a schematic diagram of the structure of the flower basket discharging device in the first embodiment of the utility model. Figure 1 ;

[0029] Figure 2This is a schematic diagram of the structure of the flower basket discharging device in the first embodiment of the utility model. Figure 2 ;

[0030] Figure 3 This is a schematic diagram of the structure of the flower basket discharging device in the first embodiment of the utility model. Figure 3 ;

[0031] Figure 4 It is a schematic diagram of the second platform being accommodated in the first platform in the first embodiment of the utility model;

[0032] Figure 5 This is a schematic diagram of a flower basket in the first platform or the second platform in the first embodiment of the utility model;

[0033] The figure marks of the above drawings are: 1. conveyor line; 11. synchronous belt; 12. first motor; 2. first platform; 21. support member; 211. support part; 212. limit part; 213. guide part; 22. sliding member; 221. sheet; 222. connecting part; 3. second platform; 31. bottom plate; 32. side plate; 33. guide member; 4. turning mechanism; 41. second motor; 42. rotating shaft; 5. clamping mechanism; 51. pressing block; 511. elastic column; 6. cover shell; 7. flower basket. DETAILED DESCRIPTION

[0034] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0035] Example 1: See Figures 1 to 5 As shown, a device for discharging a flower basket 7 comprises a conveyor line 1, a first platform 2 arranged on the conveyor line 1, a second platform 3 located at one end of the conveyor line 1, a flipping mechanism 4 connected to the second platform 3 for driving the second platform 3 to flip, and a clamping mechanism 5 arranged on the second platform 3, wherein the clamping mechanism 5 clamps the flower basket 7 carried by the second platform 3 during the flipping process of the second platform 3 to simulate its shaking. When the second platform 3 is in a flat state, it is located inside the first platform 2 at the receiving position, and can transfer the flower basket 7 carried by it to the first platform 2. The flower basket 7 is used to store silicon wafers.

[0036] See also Figures 1 to 3As shown, the conveyor line 1 is horizontally arranged and includes a synchronous belt 11 and a first motor 12 for driving the synchronous belt 11 to rotate. A cover 6 is arranged on the synchronous belt 11 to prevent water drops on the silicon wafers in the basket 7 transferred by the first platform 2 from falling onto the synchronous belt 11.

[0037] See also Figure 1 As shown, the first platform 2 is arranged on the conveyor line 1 and is driven by the conveyor line 1 to move between the receiving position and the discharging position. The first platform 2 includes four support members 21 and a sliding member 22 connected between the support members 21. The four support members 21 are divided into two groups, and the two support members 21 in the same group are arranged opposite to each other along the transmission direction perpendicular to the conveyor line 1. Figure 5 As shown, when the first platform 2 supports the flower basket 7, the four support members 21 are respectively opposite to the four corners of the back of the flower basket 7 to provide stable support. The sliding member 22 includes two sheets 221 and a connecting portion 222 connected between the two sheets 221. The two sheets 221 are arranged opposite to each other along the transmission direction perpendicular to the conveyor line 1. The middle part of each sheet 221 is recessed downward so that the two ends of the sheet 221 are higher than the middle part. The ends of the sheet 221 are respectively connected to one of the support members 21, and the connecting portion 222 is connected to the middle part of the sheet 221, so that the support member 21 is located above the connecting portion 222, and a storage space for accommodating the second platform 3 is formed between the sliding member 22 and the support member 21. When the second platform 3 is in a flat state, the sliding member 22 can avoid the side plate 32 and the clamping mechanism 5 of the second platform 3 to ensure that the side plate 32 of the second platform 3 is located below the supporting member 21, and the flower basket 7 can be smoothly rotated from the second platform 3 to the first platform 2.

[0038] The support member 21 includes a support portion 211, which is horizontally arranged. The support portion 211 is connected to the sliding member 22 on one side facing the middle of the conveyor line 1. The support portion 211 extends upward on the side facing away from the accommodation space to form a limiting portion 212. The limiting portion 212 is inclined outward away from the accommodation space on the side facing away from the support portion 211 to form a guiding portion 213. The guiding portion 213 is arranged on the support member 21 so that the flower basket 7 can quickly enter the first platform 2 during the transfer process between the second platform 3 and the first platform 2.

[0039] See also Figure 1As shown, the second platform 3 is located at one end of the conveyor line 1 close to the material receiving position, and the second platform 3 has a vertical state and a horizontal state. The second platform 3 includes a bottom plate 31, and a side plate 32 vertically connected to the bottom plate 31, and the side plate 32 is located on the side of the bottom plate 31 facing the material receiving position. At least two guide members 33 are provided on the bottom plate 31, and the guide members 33 are arranged oppositely and located on both sides of the side plate 32. The side plate 32 is opposite to the middle part of the bottom plate 31, and the width of the side plate 32 is smaller than the width of the flower basket 7 and the width of the first platform 2. When the second platform 3 is accommodated in the first platform 2, the side plate 32 is located below the support portion 211 of the first platform 2.

[0040] See also Figure 5 As shown, during the wafer insertion process, the second platform 3 is in a vertical state, and at the same time, the flower basket 7 is vertically placed on the bottom plate 31 of the second platform 3, and the flower basket 7 is supported by the bottom plate 31. The back of the flower basket 7 is in contact with the side plate 32 of the second platform 3, and the open side of the flower basket 7 is opposite to the wafer inserting machine, which is used to store silicon wafers. After the flower basket 7 is filled with silicon wafers, the clamping mechanism 5 applies pressure to the top of the flower basket 7, so that the flower basket 7 is clamped between the bottom plate 31 and the clamping mechanism 5, so that during the flipping process of the second platform 3, the flower basket 7 can be prevented from vibrating and the silicon wafers can be prevented from breaking. As the flipping process proceeds, the second platform 3 gradually enters the first platform 2. Since the width of the side panel 32 is smaller than the width of the flower basket 7 and smaller than the width of the first platform 2, the back of the flower basket 7 is in contact with the support portion 211 of the first platform 2 until the second platform 3 is in a flat state, and the side panel 32 is located below the support portion 211 of the first platform 2. At this time, the back of the flower basket 7 is placed on the first platform 2 and separated from the side panel 32 of the second platform 3. The flower basket 7 is carried by the first platform 2, and the flower basket 7 is in a flat state with the opening side of the flower basket 7 facing upwards, see Figure 4 After the second platform 3 and the first platform 2 complete the transfer of the flower basket 7, the first platform 2 can drive the flower basket 7 to move to the feeding position under the drive of the conveyor line 1. Figure 5 In the embodiment, the flat flower basket 7 is directly placed on the first platform 2. After the first platform 2 drives the flower basket 7 to leave the receiving position, the second platform 3 can be rotated from a horizontal state to a vertical state under the action of the turning mechanism 4 to carry the next flower basket 7 to be inserted.

[0041] The flipping mechanism 4 is connected to the second platform 3, and is used to drive the second platform 3 to switch between the vertical state and the horizontal state. The flipping mechanism 4 includes a second motor 41, a rotating shaft 42 connected to the second motor 41, and the second platform 3 is sleeved on the rotating shaft 42. The second motor 41 is used to control the rotation of the second platform 3. Compared with the cylinder, the second motor 41 can better control the entire movement process, ensure that the entire flipping process is carried out at a uniform speed and smoothly, and reduce shaking.

[0042] See also Figure 1 , 4 As shown, the clamping mechanism 5 includes a cylinder (not shown) and a clamping block 51 connected to the telescopic rod of the cylinder. The clamping block 51 can rotate relative to the side plate 32 of the second platform 3 to switch between clamping and loosening. During the flipping process, the cylinder controls the clamping block 51 to apply pressure to the flower basket 7. When the flower basket 7 is in a flat state after the flipping is completed, the cylinder controls the clamping block 51 to release the flower basket 7, so that the flower basket 7 can be taken away by the first platform 2 and moved to the feeding position.

[0043] In a possible implementation manner, the pressing block 51 includes two elastic columns 511 spaced apart along the width direction of the flower basket 7 . The elastic columns 511 are made of silicone material to avoid damaging the flower basket 7 .

[0044] The present invention uses specific embodiments to illustrate the principles and implementation methods of the present invention. The description of the above embodiments is only used to help understand the method and core idea of ​​the present invention. At the same time, for those skilled in the art, according to the idea of ​​the present invention, there will be changes in the specific implementation methods and application scope. In summary, the content of this specification should not be understood as a limitation on the present invention.

Claims

1. A flower basket discharging device, characterized in that: include: Conveyor lines; A first platform, which is disposed on the conveyor line and is driven by the conveyor line to move between a material receiving position and a material discharging position; The second platform is located at one end of the conveyor line close to the material receiving position, the second platform has a vertical state and a horizontal state, and a clamping mechanism is provided on the second platform, and the clamping mechanism is used to clamp the flower basket carried by the second platform when the state of the second platform is switched; The flipping mechanism is connected to the second platform and is used to drive the second platform to switch between a vertical state and a horizontal state; when the second platform is in the horizontal state, it is located inside the first platform at the material receiving position and transfers the flower basket it carries to the first platform.

2. The flower basket discharging device according to claim 1, characterized in that: The second platform comprises a bottom plate and a side plate vertically connected to the bottom plate, the side plate is located on a side of the bottom plate facing the material receiving position, and a clamping mechanism is provided at one end of the side plate away from the bottom plate.

3. The flower basket discharging device according to claim 2, characterized in that: The clamping mechanism comprises a cylinder and a clamping block connected to a telescopic rod of the cylinder.

4. The flower basket discharging device according to claim 3, characterized in that: The pressing block includes at least one elastic column.

5. The flower basket discharging device according to claim 1, characterized in that: The flipping mechanism comprises a second motor, a rotating shaft connected to the second motor, and the second platform is sleeved on the rotating shaft.

6. The flower basket discharging device according to claim 1, characterized in that: The first platform includes at least two support members, and the two support members are arranged opposite to each other along a transmission direction perpendicular to the conveyor line. A sliding member is connected between the support members, and the sliding member is lower than the supporting part of the support member. There is an accommodating space for accommodating the second platform between the sliding member and the support member.

7. The flower basket discharging device according to claim 6, characterized in that: The first platform includes four support members, which are divided into two groups and are respectively located at two ends of the sliding member.

8. The flower basket discharging device according to claim 6, characterized in that: The support member comprises a support portion, a side of the support portion facing away from the accommodation space extends upward to form a limiting portion, and an end of the limiting portion facing away from the support portion is inclined outwardly facing away from the accommodation space to form a guiding portion.

9. The flower basket discharging device according to claim 1, characterized in that: The conveyor line comprises a synchronous belt and a first motor for driving the synchronous belt.

10. The flower basket discharging device according to claim 9, characterized in that: A cover shell is arranged on the synchronous belt.