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1635results about How to "Avoid chipping" patented technology

Method for preparing thin film heterostructure

The invention provides a method for preparing a thin film heterostructure. The method comprises the steps of providing a wafer substrate with an injection surface; conducting ion injection from the injection surface on the wafer substrate to form an injection defect layer at the predetermined depth of the wafer substrate; providing a support substrate, and performing temperature rising bonding onthe support substrate and the wafer substrate; annealing a obtained structure to form a continuous defect layer; stripping part of the wafer substrate through external force assisting, and forming wafer film on the wafer substrate to obtain a thin film heterostructure including the support substrate and the wafer film. The method can reduce the thermal strain of a bonding structure through the temperature rising bonding, so that the bonding structure remains stable and complete in the high-temperature process, and avoid the problem of film cracking caused by thermal mismatch in the stripping process, the bonding structure is separated from the continuous defect layer through the external force assisting method, so that no effect is caused on a bonding interface, and an external force assisting stripping method can reduce stripping temperature and stripping time, thereby reducing the cumulative effect of thermal stress in a piezoelectric crystal.
Owner:SHANGHAI INST OF MICROSYSTEM & INFORMATION TECH CHINESE ACAD OF SCI

Three-axis-system composite spinning device and spinning method for tow-apt-to-fall staple

The invention provides a three-axis-system composite spinning device and a spinning method for tow-apt-to-fall staple. The three-axis-system composite spinning method is characterized in that the method comprises the steps of: feeding roving silvers containing the tow-apt-to-fall staple and cotton roving silvers into the back roller of a ring spinning machine, and conducting drafting to form a tow-apt-to-fall staple strand and a cotton strand which stretch straight in parallel; after the tow-apt-to-fall staple strand and the cotton strand are respectively positioned by using a tow-apt-to-fall staple strand positioner and a cotton strand positioner, feeding the tow-apt-to-fall staple strand and the cotton strand into the jaw of a front roller and directly feeding filament adjustable tension pulley into the jaw of the front roller; and after the tow-apt-to-fall staple strand, the cotton strand and the filament are output from the jaw of the front roller, twisting the tow-apt-to-fall staple strand and the filament at a first converging point outside the jaw of the front roller to form a structural section, and twisting the structural section and the cotton strand at a second converging point to form a three-axis-system composite yarn. The device and the method provided by the invention has the advantages that not only can the content of the tow-apt-to-fall staples in the spun composite yarn be improved, but also the situations of fiber damage and tow falling can be effectively avoided.
Owner:DONGHUA UNIV

Silicon carbide wafer bevel grinding, milling and polishing machine and operation method thereof

The invention discloses a silicon carbide wafer bevel grinding, milling and polishing machine and an operation method thereof. The silicon carbide wafer bevel grinding, milling and polishing machine comprises a supporting sheet (1), a rotating shaft (2), a driving motor (3), a motor bracket (4), a vertical rotating arm (5), a horizontal rotating arm (6), a slide frame (7) and a screw rod (9) which are sequentially connected, wherein the lower end of the screw rod (9) is sequentially connected with a first cone gear (12), a second cone gear (13), an adjusting shaft (14) and a rotating wheel (15); a machining tool (19) of a silicon carbide wafer is arranged below the supporting sheet (1). The silicon carbide wafer bevel grinding, milling and polishing machine is reasonable in structural design, convenient to operate and high in working efficiency, bevel grinding, milling and polishing integrated machining can be performed on the silicon carbide wafer, the working efficiency is high, the roughness of a polished bevel can be smaller than 0.1 micron, the machining precision is high, and the applicability is high. The operation method can be applied to the bevel grinding, milling and polishing integrated machining on the silicon carbide wafer which is round or not round.
Owner:山东粤海金半导体科技有限公司

Thin film heterostructure preparation method

The invention provides a thin film heterostructure preparation method. The method comprises steps: a wafer substrate with an injection surface is provided; ion implantation is carried out on the wafersubstrate from the injection surface, and an injection defect layer is formed at a preset depth in the wafer substrate; a support substrate is provided, and the support substrate and the wafer substrate are subjected to temperature rise bonding; the obtained structure is subjected to annealing treatment to form a continuous defect layer; the temperature of the obtained structure is reduced to a preset temperature, reverse thermal stress generated based on temperature reduction strips part of the wafer substrate along the continuous defect layer, and a thin film heterostructure comprising thesupport substrate and the wafer thin film is obtained, wherein the preset temperature is lower than the bonding temperature. In the temperature rise bonding mode, the thermal stress of the bonding structure can be reduced, the bonding structure can keep stable and complete in a high temperature process, the problem of wafer crack generated by thermal mismatch in the stripping process can be effectively solved, and through the reverse thermal stress assisting method, the bonding structure is separated at the continuous defect layer and a bonding interface is not influenced.
Owner:上海新硅聚合半导体有限公司
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