Etching liquid circulating device and etching equipment with same

Abstract

The utility model discloses an etching liquid circulating device and etching equipment with the same, which comprise a rack, a push rod assembly, a driving assembly and a driving assembly, the push rod assembly comprises a sliding rod, a water absorption pad, a push rod and an eccentric wheel, the sliding rod is connected to the rack in a sliding mode, the water absorption pad is fixedly connected to the bottom of the sliding rod, the push rod is rotationally connected to a guide rod at the eccentric position of the eccentric wheel, and the eccentric wheel is rotationally connected with the rack; the etching liquid recycling device can effectively recycle the etching liquid.

Description

Technical Field

[0001] The utility model belongs to the technical field of etching, and in particular relates to an etching liquid circulation device and etching equipment with the device. Background Art

[0002] Etching is a technique that uses chemical reactions or physical impact to remove part of a material. Etching technology can be divided into two categories: wet etching and dry etching. It was first used to make printing embossed plates such as copper plates and zinc plates. It is also widely used to reduce the weight of instrument panels, nameplates, and thin workpieces that are difficult to process by traditional processing methods. After continuous improvement and development of process equipment, it can also be used for the processing of precision etching products of electronic thin-film parts in the aviation, machinery, and chemical industries. Especially in the semiconductor process, etching is an indispensable technology. However, when etching is performed by spraying, a large amount of etching liquid is likely to remain on the workpiece, resulting in waste. Now a device that can recover the residue on the workpiece is proposed. Utility Model Content

[0003] In view of the deficiencies in the prior art, the utility model provides an etching liquid circulation device and an etching device having the device, which solves the above problems.

[0004] To achieve the above purpose, the utility model is implemented through the following technical scheme: an etching liquid circulation device and an etching equipment with the device, including a frame, and also including: a push rod assembly, which is used to absorb the etching liquid on the workpiece; the push rod assembly includes a sliding rod, a water absorbent pad, a push rod and an eccentric wheel, the sliding rod is slidably connected to the frame, the water absorbent pad is fixedly connected to the bottom of the sliding rod, the push rod is rotatably connected to the guide rod at the eccentric position of the eccentric wheel, and the eccentric wheel is rotatably connected to the frame.

[0005] Beneficial Effects

[0006] The utility model provides an etching liquid circulation device and an etching device having the same, which have the following beneficial effects compared with the prior art:

[0007] After the workpiece is sprayed with etching liquid, the relevant technician starts the motor, so that the motor drives the reciprocating screw fixedly connected to its output shaft to rotate synchronously, so that the slide cylinder threadedly connected to the reciprocating screw begins to move linearly along the connection between it and the frame, so that the slide cylinder drives the push rod A hinged to it, so that the push rod A starts to push the pressure plate hinged to it, so that the slider slidingly connected to the pressure plate starts to slide, so that the push rod B slidingly connected to the slider starts to move synchronously, and the pressure plate starts to move linearly downward under the cooperation of push rods A and push rods B. At this time, the main shaft starts to rotate synchronously with the reciprocating screw under the cooperation of the belt connected to it, so that the worm fixedly connected to the main shaft rotates synchronously, so that the worm drives the worm wheel meshing with it to start The worm gear rotates, thereby causing the worm gear to drive the wheel axle fixed at its axis to rotate synchronously, thereby causing the eccentric wheel fixed on the wheel axle to start rotating, causing the push rod connected to the eccentric part of the eccentric wheel to start circular motion, thereby causing the push rod to start pushing the sliding rod hinged to it, causing the sliding rod to drive the water-absorbing pad at its bottom to start linear motion, so that when the water-absorbing pad contacts the workpiece on the workpiece slot of the frame, the etching liquid on it is evenly spread, and excess etching liquid is absorbed. After the water-absorbing pad absorbs the etching liquid, the sliding rod pushes the water-absorbing pad into the groove of the frame, and the pressing plate contacts it synchronously and starts to squeeze it, so that the etching liquid absorbed by the water-absorbing pad flows through the mesh plate to the container placed at the bottom of the frame, thereby recovering the excess etching liquid on the remaining workpiece. BRIEF DESCRIPTION OF THE DRAWINGS

[0008] Figure 1 It is a schematic diagram of the three-dimensional structure of the utility model.

[0009] Figure 2 It is a schematic cross-sectional view of the eccentric wheel structure of the utility model.

[0010] Figure 3 It is a schematic cross-sectional view of the push rod structure of the utility model.

[0011] Notes on figure marks: frame 101, push rod assembly 2, slide bar 201, water absorbent pad 202, push rod 203, eccentric wheel 204, axle 205, worm gear 206, worm 207, main shaft 208, belt 209, reciprocating screw 301, motor 302, slide cylinder 303, push rod A 304, push rod B 305, slider 306, pressure plate 307, mesh plate 308. DETAILED DESCRIPTION

[0012] In order to make the purpose, technical solution and advantages of the utility model more clear, the utility model is further described in detail below in conjunction with the accompanying drawings and embodiments. It should be understood that the specific embodiments described here are only used to explain the utility model and are not used to limit the utility model.

[0013] The specific implementation of the present utility model is described in detail below in conjunction with specific embodiments.

[0014] See also Figures 1 to 3 , provided in one embodiment of the utility model, is an etching liquid circulation device and an etching device having the same, comprising a frame 101, and also comprising:

[0015] A push rod assembly 2, used for absorbing etching liquid on the workpiece;

[0016] The push rod assembly 2 includes a slide rod 201, a water absorbent pad 202, a push rod 203 and an eccentric wheel 204. The slide rod 201 is slidably connected to the frame 101, the water absorbent pad 202 is fixedly connected to the bottom of the slide rod 201, the push rod 203 is rotatably connected to the guide rod at the eccentric position of the eccentric wheel 204, and the eccentric wheel 204 is rotatably connected to the frame 101.

[0017] For the above example, those skilled in the art should be aware that when implementing the above technical solution, they are not limited to the specific water-absorbent pad 202 described in the above embodiment. For example, the water-absorbent pad 202 is detachably fixedly connected to the bottom groove of the slide rod 201 through its upper clamping plate. The purpose of this setting is that this method can realize the rapid disassembly and replacement of the water-absorbent pad 202; and the water-absorbent pad is made of corrosion-resistant material.

[0018] For the above examples, those skilled in the art should be aware that when implementing the above technical solutions, they are not limited to the specific push rod 203 described in the above embodiments. For example, the push rod 203 should be made of an integrated material, and the hinges at both ends should be further hardened and reinforced. The purpose of this arrangement is to prevent it from being broken by stress in this way.

[0019] Specifically, a wheel axle 205 is fixedly connected to the axis center of the other side of the eccentric wheel 204 , a worm wheel 206 is fixedly connected to the wheel axle 205 , and the worm wheel 206 is meshingly connected to the worm 207 .

[0020] For the above examples, those skilled in the art should be aware that when implementing the above technical solutions, they are not limited to the specific axle 205 described in the above embodiments. For example, a bearing ring may be provided at the connection between the axle 205 and the frame 101. The purpose of this arrangement is to reduce the friction encountered during rotation in this way, thereby preventing the axle from breaking.

[0021] Specifically, the worm 207 is fixedly connected to the main shaft 208 , and the main shaft 208 is rotatably connected to the frame 101 . A belt 209 is transmission-connected to the main shaft 208 , and the other end of the belt 209 is transmission-connected to the reciprocating screw 301 .

[0022] For the above examples, those skilled in the art should be aware that when implementing the above technical solutions, they are not limited to the specific main shaft 208 and reciprocating screw 301 described in the above embodiments. For example, the pulleys on the mesh plate 308 and the reciprocating screw 301 connected to the belt 209 should have deeper grooves. The purpose of this setting is to increase the limiting effect of the belt 209 in this way, thereby preventing it from dislocating.

[0023] For the above example, those skilled in the art should be aware that when implementing the above technical solution, they are not limited to the specific belt 209 described in the above embodiment. For example, the belt 209 should be made of a material with high wear resistance. The purpose of this setting is to increase its wear resistance in this way, thereby preventing deformation caused by long-term use.

[0024] Specifically, the reciprocating screw rod 301 is rotatably connected to the frame 101 , the other end of the reciprocating screw rod 301 is fixedly connected to the output shaft of the motor 302 , and the motor 302 is fixedly connected to the frame 101 .

[0025] For the above examples, those skilled in the art should be aware that when implementing the above technical solutions, they are not limited to the specific motor 302 described in the above embodiments. For example, the motor 302 can be a motor that can adjust its speed at regular intervals. The purpose of this setting is to facilitate the adjustment of its transmission ratio in this way.

[0026] Specifically, a slide cylinder 303 is threadedly connected to the reciprocating screw rod 301 , and the slide cylinder 303 is slidably connected to the frame 101 . A push rod A304 is hinged to the slide cylinder 303 , and the other end of the push rod A304 is hinged to the pressure plate 307 .

[0027] For the above examples, those skilled in the art should be aware that when implementing the above technical solutions, they are not limited to the specific slide 303 described in the above embodiments. For example, a damping rubber strip is provided at the connection between the slide 303 and the frame 101. The purpose of this setting is to increase the damping of the connection in this way and prevent abnormal noise during sliding.

[0028] Specifically, the other side of the pressure plate 307 is slidably connected to a slider 306, the slider 306 is hinged with a push rod B305, the push rod B305 is rotatably connected to the push rod A304, the other end of the push rod B305 is hinged on the frame 101, and a mesh plate 308 is fixedly connected in the groove of the frame 101.

[0029] For the above example, those skilled in the art should be aware that when implementing the above technical solution, they are not limited to the specific pressing plate 307 described in the above embodiment. For example, the pressing plate 307 is provided with a plurality of dot-shaped protrusions. The purpose of this setting is to increase the effect of squeezing the water-absorbing pad 202 in this way.

[0030] In the embodiment of the utility model, after the workpiece is sprayed with etching liquid, the relevant technicians start the motor 302, so that the motor 302 drives the reciprocating screw 301 fixedly connected to its output shaft to rotate synchronously, so that the slide cylinder 303 threadedly connected to the reciprocating screw 301 begins to perform linear motion along the connection between it and the frame 101, so that the slide cylinder 303 drives the push rod A304 hinged thereto, so that the push rod A304 starts to push the pressure plate 307 hinged thereto, so that the slider 306 slidably connected to the pressure plate 307 starts to slide, so that the push rod B305 slidably connected to the slider 306 starts to move synchronously, and the pressure plate 307 starts to perform linear motion downward under the cooperation of the push rod A304 and the push rod B305. At this time, the main shaft 208 starts to rotate synchronously with the reciprocating screw 301 under the cooperation of the belt 209 connected thereto, so that the worm 207 fixedly connected to the main shaft 208 rotates synchronously, so that the worm 207 drives the reciprocating screw 301 to rotate synchronously. The meshing worm gear 206 starts to rotate, so that the worm gear 206 drives the wheel shaft 205 fixedly connected at its axis to rotate synchronously, so that the eccentric wheel 204 fixedly connected on the wheel shaft 205 starts to rotate, and the push rod 203 connected to the eccentric part of the eccentric wheel 204 starts to perform circular motion, so that the push rod 203 starts to push the sliding rod 201 hinged thereto, so that the sliding rod 201 drives the water absorbent pad 202 at its bottom to start linear motion, so that when the water absorbent pad 202 contacts the workpiece on the workpiece slot of the frame 101, the etching liquid on it is evenly spread, and the excess etching liquid is absorbed. After the water absorbent pad 202 absorbs the etching liquid, the sliding rod 201 pushes the water absorbent pad 202 into the groove of the frame 101, and the pressing plate 307 contacts it synchronously and starts to squeeze it, so that the etching liquid absorbed by the water absorbent pad 202 flows through the mesh plate 308 to the container placed at the bottom of the frame 101, so that the excess etching liquid on the remaining workpiece is recovered.

[0031] It should be noted that, in this article, relational terms such as first and second, etc. are only used to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Moreover, the terms "include", "comprise" or any other variants thereof are intended to cover non-exclusive inclusion, so that a process, method, article or device including a series of elements includes not only those elements, but also other elements not explicitly listed, or also includes elements inherent to such process, method, article or device.

[0032] The fixed connection referred to in this application refers to a connection in which a part or component is fixed without any relative movement, which can be divided into detachable connection and non-detachable connection.

[0033] (1) Removable connection: The parts are fixed together by screws, splines, wedge pins, etc. This connection method can be disassembled for maintenance without damaging the parts. However, the specifications of the connectors used must be correct (such as the length of the bolts, keys, and wedge pins) and they must be properly tightened.

[0034] (2) Non-detachable connection: mainly refers to welding, riveting and tenoning. Since forging, sawing or oxygen cutting are required for disassembly during maintenance or replacement, spare parts generally cannot be reused. At the same time, attention should be paid to process quality, technical inspection and remedial measures (such as calibration, polishing, etc.) during connection.

[0035] The sliding connection referred to in the present application means that the component can slide along a linear trajectory, and the hinged connection referred to in the present application means that the component can rotate along an axial constraint.

[0036] In some cases, the sliding connection and hinge referred to in the present application may also be damped so that the components have the ability to maintain a desired position.

[0037] Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that various changes, modifications, substitutions and variations may be made to the embodiments without departing from the principles and spirit of the present invention, and that the scope of the present invention is defined by the appended claims and their equivalents.

Claims

1. An etching liquid circulation device, comprising a frame (101), characterized in that: Also includes: A push rod assembly (2), used for absorbing etching liquid on the workpiece; The push rod assembly (2) comprises a slide rod (201), a water absorbent pad (202), a push rod (203) and an eccentric wheel (204); the slide rod (201) is slidably connected to the frame (101); the water absorbent pad (202) is fixedly connected to the bottom of the slide rod (201); the push rod (203) is rotatably connected to a guide rod at an eccentric position of the eccentric wheel (204); and the eccentric wheel (204) is rotatably connected to the frame (101).

2. The etching liquid circulation device according to claim 1, characterized in that: A wheel axle (205) is fixedly connected to the axis center of the other side of the eccentric wheel (204), a worm wheel (206) is fixedly connected to the wheel axle (205), and the worm wheel (206) is meshingly connected to a worm (207).

3. The etching liquid circulation device according to claim 2, characterized in that: The worm (207) is fixedly connected to a main shaft (208), the main shaft (208) is rotatably connected to a frame (101), a belt (209) is transmission-connected to the main shaft (208), and the other end of the belt (209) is transmission-connected to a reciprocating screw (301).

4. The etching liquid circulation device according to claim 3, characterized in that: The reciprocating screw rod (301) is rotationally connected to the frame (101), the other end of the reciprocating screw rod (301) is fixedly connected to the output shaft of the motor (302), and the motor (302) is fixedly connected to the frame (101).

5. The etching liquid circulation device according to claim 4, characterized in that: The reciprocating screw rod (301) is threadedly connected with a slide cylinder (303), the slide cylinder (303) is slidably connected to the frame (101), a push rod A (304) is hinged on the slide cylinder (303), and the other end of the push rod A (304) is hinged on the pressure plate (307).

6. The etching liquid circulation device according to claim 5, characterized in that: The other side of the pressure plate (307) is slidably connected to a slider (306), the slider (306) is hinged with a push rod B (305), the push rod B (305) is rotatably connected to the push rod A (304), the other end of the push rod B (305) is hinged on the frame (101), and a mesh plate (308) is fixedly connected in a groove of the frame (101).

7. The etching liquid circulation device according to claim 6, characterized in that: The pressing plate (307) is provided with a plurality of dot-shaped protrusions.

8. An etching device, characterized in that: The invention comprises an etching liquid circulation device as described in any one of claims 1 to 7.

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