Shaping jig of neutralizer RF coil
By designing a plastic shaping fixture for the neutralizer RF coil, the deformation coil is compressed and shaped by the coordination of the limiting part and the socket part, the problem of abnormal neutralizer caused by coil deformation is solved, and the reuse of the coil and cost savings are achieved.
Patent Information
- Application Number
- CN202421319835.9
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-06-11
- Publication Date
- 2025-02-28
- Estimated Expiration
- 2034-06-11
AI Technical Summary
During use, existing RF coils are easily deformed due to sandblasting and sand particle impact, losing their spiral structure, resulting in abnormal gas ionization of the neutralizer, causing product abnormalities, and they cannot be corrected and can only be scrapped, which increases the company's costs.
A plastic shaping fixture for the neutralizer RF coil is designed, including a first fixture and a second fixture. Through the coordination of the limiting part and the socket part, the coil is compressed and shaped by using the sleeve hole of the second fixture to correct its shape.
Correcting the deformed RF coil through plastic shaping fixtures can reuse the coil, save purchase costs, and ensure the normal operation of the neutralizer.
Smart Images
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Abstract
Description
Technical Field
[0001] The utility model relates to the technical field of coil shaping jigs, and more specifically to a shaping jig for a neutralizer RF coil. Background Art
[0002] The RF coil is one of the components on the neutralizer. It is an inductive spiral wire installed around the discharge chamber of the neutralizer. The function of the RF coil on the neutralizer is to generate high-frequency waves when it is energized. Under the action of the high-frequency waves, the gas in the discharge chamber of the neutralizer is ionized to produce electrons. The electrons then neutralize with the cations emitted by the ion source and bombard the substrate. As mentioned above, the RF coil is used on the neutralizer and is part of the components on the neutralizer. Then the neutralizer is used in the chamber of the coating machine.
[0003] The existing RF coils were used for about half a year, and they were deformed by sandblasting and sand impact at 0.2MP pressure, and the deformed structure was no longer a spiral structure. When the RF coil is not a spiral structure, the deformed coil will be used in the neutralizer forcibly, which will cause gas ionization anomalies. The neutralizer anomalies will eventually lead to abnormal products. In the absence of a shaping jig, the deformation is serious and cannot be corrected, so it has to be scrapped. After scrapping, the RF copper coil needs to be purchased again, which increases the company's costs. Utility Model Content
[0004] In view of the problems existing in the prior art, the purpose of the utility model is to provide a fixture that can reshape and correct a deformed coil.
[0005] In order to solve the above problems, the utility model adopts the following technical solutions: A shaping jig for a neutralizer RF coil, comprising:
[0006] The first fixture comprises a limiting portion and a sleeve portion mounted on the limiting portion, wherein the coil is sleeved on the sleeve portion and one end of the coil is against the limiting portion;
[0007] The second jig is provided with a sleeve hole matched with the sleeve portion for guiding. The coil is compressed and shaped by moving the second jig and / or the first jig to shorten the distance between the second jig and the limiting portion.
[0008] Preferably, a first notch is formed at one end of the limiting portion away from the sleeve portion, and a second notch is formed at one end of the first fixture away from the limiting portion.
[0009] Preferably, the first notch and the second notch are on the same side.
[0010] Preferably, the sleeve connection portion is a cylinder, and the inner circle of the sleeve hole is circular.
[0011] Preferably, the limiting portion is disc-shaped, and the second fixture is ring-shaped.
[0012] Preferably, the sleeve portion is perpendicular to the limiting portion, and the axis lines of the sleeve portion and the limiting portion are on the same straight line.
[0013] Preferably, the outer diameter of the limiting portion is larger than the outer diameters of the sleeve portion and the sleeve hole.
[0014] Preferably, the outer diameter of the limiting portion is equal to the outer diameter of the second fixture.
[0015] Preferably, the length of the sleeve portion is the same as the length of the second fixture.
[0016] Preferably, the outer diameter of the sleeve portion is less than or equal to the inner diameter of the sleeve hole.
[0017] Beneficial effects of the utility model:
[0018] (1) The coil is put on the sleeve portion, and then the second fixture is put on the sleeve portion. At this time, the two ends of the coil are respectively against the limit portion and the second fixture. Then, the coil is compressed to correct the coil. After correction, it can be reused, saving purchase costs.
[0019] (2) The second jig guide sleeve is placed on the sleeve joint, which can stably compress and shape the coil. BRIEF DESCRIPTION OF THE DRAWINGS
[0020] Figure 1 It is a schematic diagram of the structure of the utility model;
[0021] Figure 2 It is a cross-sectional view of the utility model.
[0022] Description of the numbers in the figure:
[0023] 1. First fixture; 11. Limiting portion; 12. Sleeve connection portion; 2. Second fixture; 21. Sleeve hole; 3. First notch; 4. Second notch; 5. Coil. DETAILED DESCRIPTION
[0024] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.
[0025] refer to Figure 1-2A shaping jig for a neutralizer RF coil 5 comprises: a first jig 1 having a limiting portion 11 and a sleeve portion 12 mounted on the limiting portion 11, the coil 5 is sleeved on the sleeve portion 12 and one end is against the limiting portion 11; a second jig 2 having a sleeve hole 21 for guiding and cooperating with the sleeve portion 12, and the coil 5 is compressed and shaped by moving the second jig 2 and / or the first jig 1 to shorten the distance between the second jig 2 and the limiting portion 11. It can be understood that moving the second jig 2 and / or the first jig 1 means moving the first jig 1 alone, moving the second jig 2 alone, or moving the first jig 1 and the second jig 2 at the same time. The sleeve portion 12 plays a central positioning role for the coil 5, and its outer diameter is smaller than the inner diameter of the coil 5. The limiting portion 11 limits one end of the coil 5. During shaping, the coil 5 is put on the sleeve portion 12, and then the second fixture 2 is put on the sleeve portion 12. At this time, the two ends of the coil 5 are respectively against the limiting portion 11 and the second fixture 2. Finally, the distance between the second fixture 2 and the limiting portion 11 is shortened by external force, and the coil 5 is compressed and shaped.
[0026] In some embodiments, a first notch 3 is formed at one end of the limiting portion 11 away from the sleeve portion 12, and a second notch 4 is formed at one end of the first fixture 1 away from the limiting portion 11. When using a bench vise, the first notch 3 and the second notch 4 are adjusted to the same side, the bench vise is clamped on the first notch 3 and the second notch 4, and the clamping force of the bench vise is used to compress the coil 5. Of course, the first fixture 1 can also be placed vertically on the workbench, and a tool can be used to apply downward pressure on the second fixture 2 to compress and shape the coil 5. The tool can be a heavy object, a cylinder, a hydraulic cylinder, etc.
[0027] In some embodiments, since the coil 5 is a spiral ring structure, in order to better fit with the coil 5, the sleeve portion 12 is set as a cylinder, and the inner circle of the sleeve hole 21 is set as a circle. Further, the outer diameter of the sleeve portion 12 is less than or equal to the inner diameter of the sleeve hole 21, and the outer diameter of the limiting portion 11 is greater than the outer diameters of the sleeve portion 12 and the sleeve hole 21, so that the second fixture 2 can be guided by the sleeve hole 21 and sleeved on the sleeve portion 12, and the limiting portion 11 can limit the second fixture 2 to prevent slipping.
[0028] In some embodiments, the limiting portion 11 is disc-shaped, and the second fixture 2 is annular. Furthermore, the sleeve portion 12 is perpendicular to the limiting portion 11, and the sleeve portion 12 is on the same straight line as the axis of the limiting portion 11. Furthermore, the outer diameter of the limiting portion 11 is equal to the outer diameter of the second fixture 2. Furthermore, the length of the sleeve portion 12 is the same as the length of the second fixture 2. In this way, after the first fixture 1 and the second fixture 2 are matched, the whole is a cylinder, and the shape is more compact and reasonable. Specifically, the outer diameter of the limiting portion 11 is 50mm; the outer diameter of the sleeve portion 12 is 35mm, and the diameter is 40mm; the overall length of the first fixture 1 is 54mm. The outer diameter of the second fixture 2 is 50mm, the length is 40mm, and the inner diameter of the sleeve hole 21 is 35mm.
[0029] The above is only a preferred specific implementation of the utility model; however, the protection scope of the utility model is not limited thereto. Any technician familiar with the technical field can make equivalent replacements or changes according to the technical solution and improved ideas of the utility model within the technical scope disclosed by the utility model, which should be included in the protection scope of the utility model.
Claims
1. A shaping jig for a neutralizer RF coil, characterized in that: include: The first fixture (1) comprises a limiting portion (11) and a sleeve portion (12) mounted on the limiting portion (11), wherein the coil (5) is sleeved on the sleeve portion (12) and one end of the coil is against the limiting portion (11); The second jig (2) is provided with a sleeve hole (21) that cooperates with the sleeve portion (12) for guiding. The coil (5) is compressed and shaped by moving the second jig (2) and / or the first jig (1) to shorten the distance between the second jig (2) and the limiting portion (11).
2. The shaping jig for the neutralizer RF coil according to claim 1, characterized in that: A first notch (3) is formed at one end of the limiting portion (11) away from the sleeve portion (12), and a second notch (4) is formed at one end of the first fixture (1) away from the limiting portion (11).
3. The shaping jig for the neutralizer RF coil according to claim 2, characterized in that: The first notch (3) and the second notch (4) are on the same side.
4. The shaping jig for the neutralizer RF coil according to claim 1, characterized in that: The sleeve connection portion (12) is a cylinder, and the inner circle of the sleeve hole (21) is circular.
5. A shaping jig for a neutralizer RF coil according to claim 1 or 4, characterized in that: The limiting portion (11) is disc-shaped, and the second fixture (2) is ring-shaped.
6. The shaping jig for the neutralizer RF coil according to claim 1, characterized in that: The sleeve connection portion (12) is perpendicular to the limiting portion (11), and the axis lines of the sleeve connection portion (12) and the limiting portion (11) are on the same straight line.
7. The shaping jig for the neutralizer RF coil according to claim 1, characterized in that: The outer diameter of the limiting portion (11) is greater than the outer diameters of the sleeve connection portion (12) and the sleeve hole (21).
8. The shaping jig for the neutralizer RF coil according to claim 7, characterized in that: The outer diameter of the limiting portion (11) is equal to the outer diameter of the second fixture (2).
9. The shaping jig for the neutralizer RF coil according to claim 1, characterized in that: The length of the sleeve portion (12) is the same as the length of the second fixture (2).
10. The shaping jig for the neutralizer RF coil according to claim 4, characterized in that: The outer diameter of the sleeve connection portion (12) is smaller than or equal to the inner diameter of the sleeve hole (21).