Jig for installing sealing ring

Abstract

The utility model provides a jig for mounting a sealing ring. The jig comprises a main body, a separating mechanism and a fixing mechanism, the main body comprises a cylinder and a movable rod; one end of the cylinder body is sunken inwards to form a cylindrical cavity with an opening, and a first through hole communicated with the cavity is formed in the other end of the cylinder body; the movable rod penetrates through the first through hole and is arranged in the axial direction of the cavity. One end of the movable rod is arranged outside the cavity, and the other end of the movable rod is arranged in the cavity; one end of the separating mechanism is connected with the other end of the movable rod, and a plurality of push rods distributed at intervals are arranged at the other end of the separating mechanism; one end of the fixing mechanism is connected with one end of the barrel, and an annular boss is arranged at the other end of the fixing mechanism; a second through hole is formed between the boss and one end of the fixing mechanism; the push rods penetrate through the corresponding second through holes and are longer than the second through holes. The jig can effectively prevent the sealing ring from being damaged or falling off, and the installation efficiency of the sealing ring is obviously improved.

Description

Technical Field

[0001] The utility model relates to the technical field of mechanical equipment, in particular to a jig for installing a sealing ring. Background Art

[0002] In the semiconductor manufacturing process, a variety of equipment is required. When some equipment is under maintenance or fails, the O-rings inside the equipment need to be replaced. For example, Figure 1 and Figure 2 As shown, a furnace tube device for performing low-temperature nitridation treatment on wafers is provided with a plurality of nozzles 3 (inject, nozzle). During equipment maintenance or when a failure occurs, the O-ring 1 on each nozzle 3 needs to be replaced. Since the space inside the equipment is very small, the O-ring 1 can be replaced with the aid of a fixture 2.

[0003] like Figure 1 and Figure 2 As shown, one end of the jig 2 is provided with a groove for placing the O-ring 1. When installing the O-ring 1, the O-ring 1 needs to be placed in the groove of the jig 2, and then the operator holds the jig 2 and pushes the O-ring 1 onto the nozzle 3.

[0004] However, if Figure 2 As shown, when installing the O-ring 1, the O-ring 1 is easy to move or tilt in the groove of the fixture 2. If the fixture 2 is continued to be pushed at this time, the O-ring 1 is easy to be damaged due to the extrusion of irregular force; if the O-ring 1 falls off from the groove of the fixture 2, the O-ring 1 needs to be re-placed and then installed, and the installation efficiency is low. Utility Model Content

[0005] The utility model provides a jig for installing a sealing ring, so as to solve the technical problems that the sealing ring is easily damaged during installation and the sealing ring installation efficiency is low.

[0006] In order to solve the above technical problems, the utility model provides a jig for installing a sealing ring, comprising a main body, a disengagement mechanism and a fixing mechanism;

[0007] The main body comprises a cylinder and a movable rod; one end of the cylinder is recessed inward to form a cylindrical cavity with an opening, and the other end of the cylinder is provided with a first through hole connected to the cavity; the movable rod passes through the first through hole and is arranged along the axial direction of the cavity; one end of the movable rod is arranged outside the cavity, and the other end is arranged inside the cavity;

[0008] One end of the disengagement mechanism is connected to the other end of the movable rod, and the other end of the disengagement mechanism is provided with a plurality of push rods distributed at intervals;

[0009] One end of the fixing mechanism is connected to one end of the cylinder, and the other end of the fixing mechanism is provided with an annular boss; a second through hole is provided between the boss and one end of the fixing mechanism; the push rod passes through the corresponding second through hole, and the length of the push rod along the axial direction parallel to the cylinder is greater than the length of the second through hole along the axial direction parallel to the cylinder.

[0010] Optionally, one end of the disengagement mechanism is detachably connected to the other end of the movable rod.

[0011] Optionally, one end of the disengagement mechanism is detachably connected to the other end of the movable rod via a bolt.

[0012] Optionally, one end of the fixing mechanism is detachably connected to one end of the cylinder.

[0013] Optionally, one end of the fixing mechanism is detachably connected to one end of the cylinder via a thread.

[0014] Optionally, the fixture further includes a return spring, which is sleeved on the movable rod and arranged between the first through hole and the disengagement mechanism.

[0015] Optionally, the number of the push rods is four.

[0016] Optionally, the four push rods are evenly distributed on the other end of the disengagement mechanism along the circumferential direction, and the shape of the boss is cylindrical.

[0017] Optionally, a handle is provided at one end of the movable rod.

[0018] Optionally, the handle is disc-shaped.

[0019] The utility model provides a jig for installing a sealing ring, including a main body, a disengaging mechanism and a fixing mechanism, wherein the main body includes a cylinder and a movable rod, and the movable rod can drive the disengaging mechanism to reciprocate along the axial direction of the cylinder. A boss for fixing the sealing ring is provided on the fixing mechanism, which can prevent the sealing ring from moving or tilting. When the movable rod drives the disengaging mechanism to move to one side of the fixing mechanism, the push rod can push the sealing ring from the boss to the component to be installed. An unexpected effect is that when installing the sealing ring, the sealing ring is effectively prevented from being damaged or falling off, and the installation efficiency of the sealing ring is significantly improved, thereby improving the efficiency of equipment maintenance and troubleshooting. BRIEF DESCRIPTION OF THE DRAWINGS

[0020] Figure 1 The invention is a structural schematic diagram of a jig and an O-ring in the prior art.

[0021] Figure 2The present invention is a schematic diagram of a structure in which an O-ring is installed on a nozzle in the prior art.

[0022] Figure 3 The utility model is a structural schematic diagram of a jig for installing a sealing ring provided in one embodiment.

[0023] Figure 4 is Figure 3 Schematic diagram of the structure of fixing the sealing ring on the boss.

[0024] Figure 5 yes Figure 3 Schematic diagram of the structure of the main body of the medium fixture.

[0025] Figure 6 yes Figure 3 Schematic diagram of the structure of the disengagement mechanism of the middle fixture.

[0026] Figure 7 yes Figure 3 Schematic diagram of the structure of the fixing mechanism of the middle fixture.

[0027] Figure 8 yes Figure 3 Schematic diagram of the right side.

[0028] [Description of reference numerals is as follows]:

[0029] Figure 1-2 : O-ring-1, fixture-2, nozzle-3.

[0030] Figure 3 to Figure 8 : Sealing ring-11, fixture-12, bolt-13;

[0031] Main body-121, disengagement mechanism-122, fixing mechanism-123, return spring-124;

[0032] Cylinder body 1211, movable rod 1212, handle 1213;

[0033] Putter - 1221;

[0034] Boss-1231. DETAILED DESCRIPTION

[0035] In order to make the purpose, advantages and features of the present invention clearer, a jig for installing a sealing ring proposed by the present invention is further described in detail below in conjunction with the accompanying drawings. It should be noted that the accompanying drawings are all in a very simplified form and are not in precise proportions, and are only used to conveniently and clearly assist in explaining the purpose of the embodiments of the present invention.

[0036] In the description of the present invention, the terms "first", "second", etc. are added for the convenience of description and reference, and should not be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features. Therefore, the features defined by the terms "first", "second", etc. may explicitly or implicitly include one or more of the features.

[0037] like Figure 3 to Figure 8 As shown, this embodiment provides a jig 12 for installing a sealing ring 11, including a main body 121, a disengagement mechanism 122 and a fixing mechanism 123; the main body 121 includes a cylinder 1211 and a movable rod 1212; one end of the cylinder 1211 is recessed inward to form a cylindrical cavity with an opening, and the other end of the cylinder 1211 is provided with a first through hole connected to the cavity; the movable rod 1212 passes through the first through hole and is arranged along the axial direction of the cavity; one end of the movable rod 1212 is arranged outside the cavity, and the other end is arranged inside the cavity; one end of the disengagement mechanism 122 The other end of the disengagement mechanism 122 is connected to the movable rod 1212, and a plurality of push rods 1221 are arranged at intervals therebetween; one end of the fixing mechanism 123 is connected to one end of the cylinder 1211, and the other end of the fixing mechanism 123 is provided with an annular boss 1231; a second through hole is arranged between the boss 1231 and one end of the fixing mechanism 123; the push rod 1221 passes through the corresponding second through hole, and the length of the push rod 1221 along the axial direction parallel to the cylinder 1211 is greater than the length of the second through hole along the axial direction parallel to the cylinder 1211.

[0038] The shapes of the cylinder 1211 and the cavity are preferably cylindrical, so as to form the cylinder 1211 and the cavity by processing, and to reduce the friction between the disengagement mechanism 122 and the inner wall of the cylinder 1211. The boss 1231 is used to fix the sealing ring 11, and the sealing ring 11 can be an O-ring or a sealing ring of other shapes. The following mainly takes the O-ring as an example for description.

[0039] like Figure 3 and Figure 4 As shown, the method of using the fixture 12 is as follows: put the sealing ring 11 on the boss 1231, the diameter of the boss 1231 is greater than or equal to the diameter of the sealing ring 11, so as to prevent the sealing ring 11 from falling off the boss 1231; align the sealing ring 11 with the component to be installed, push the movable rod 1212, and the push rod 1221 on the disengagement mechanism 122 moves forward to move the sealing ring 11 from the boss 1231 to the component.

[0040] The present embodiment provides a jig 12 for installing a sealing ring 11, comprising a main body 121, a disengaging mechanism 122 and a fixing mechanism 123, wherein the main body 121 comprises a cylinder 1211 and a movable rod 1212, wherein the movable rod 1212 can drive the disengaging mechanism 122 to reciprocate along the axial direction of the cylinder 1211. A boss 1231 for fixing the sealing ring 11 is provided on the fixing mechanism 123, which can prevent the sealing ring 11 from moving or tilting. When the movable rod 1212 drives the disengaging mechanism 122 to move toward one side of the fixing mechanism 123, the push rod 1221 can push the sealing ring 11 from the boss 1231 to the component to be installed. An unexpected effect is that when installing the sealing ring 11, the sealing ring 11 is effectively prevented from being damaged or falling off, and the installation efficiency of the sealing ring 11 is significantly improved, thereby improving the efficiency of equipment maintenance and troubleshooting. The jig 12 is mainly suitable for installing the sealing ring 11 in equipment with a very small space.

[0041] Optional, such as Figure 3 , Figure 5 and Figure 6 As shown, one end of the disengagement mechanism 122 is detachably connected to the other end of the movable rod 1212. When the disengagement mechanism 122 or the movable rod 1212 is damaged, the damaged part can be removed and a new part can be installed.

[0042] Optional, such as Figure 3 , Figure 5 , Figure 6 and Figure 8 As shown, one end of the disengagement mechanism 122 is detachably connected to the other end of the movable rod 1212 by a bolt 13. The disengagement mechanism 122 can be easily disassembled and installed by the bolt 13. In other embodiments, one end of the disengagement mechanism 122 can be detachably connected to the other end of the movable rod 1212 by means of a buckle or magnetic force.

[0043] Optionally, the outer diameter of one end of the disengagement mechanism 122 is equal to the inner diameter of the cylinder 1211. An elastic layer may be provided at one end of the disengagement mechanism 122, and after lubricating oil is applied to the elastic layer, the friction between one end of the disengagement mechanism 122 and the inner wall of the cylinder 1211 may be reduced.

[0044] Optional, such as Figure 3 , Figure 5 and Figure 7As shown, one end of the fixing mechanism 123 is detachably connected to one end of the cylinder 1211. By replacing the fixing mechanism 123, the diameter of the boss 1231 on the fixing mechanism 123 can be changed, and bosses 1231 of different diameters can fix sealing rings 11 of different diameters; the push rod 1221 corresponds to the boss 1231, and when the diameter of the boss 1231 changes, the position of the push rod 1221 also changes accordingly, so that the push rod 1221 pushes the sealing ring 11 from the boss 1231 to the component to be installed, which can improve the versatility of the fixture 12.

[0045] Optional, such as Figure 3 , Figure 5 and Figure 7 As shown, one end of the fixing mechanism 123 is detachably connected to one end of the barrel 1211 by a thread. The thread can facilitate the removal and installation of the fixing mechanism 123. In other embodiments, one end of the fixing mechanism 123 can be detachably connected to one end of the barrel 1211 by a buckle or magnetic force.

[0046] Optional, such as Figure 3 and Figure 4 As shown, the jig 12 further includes a return spring 124, which is sleeved on the movable rod 1212 and disposed between the first through hole and the disengagement mechanism 122. The return spring 124 can restore the movable rod 1212 from a pressed state to an initial state, and the operator does not need to manually pull the movable rod 1212, which is convenient for installing the sealing ring 11 next time.

[0047] Optional, such as Figure 3 , Figure 4 and Figure 8 As shown, there are four push rods 1221. The four push rods 1221 can apply thrust to four locations of the sealing ring 11, so that the sealing ring 11 moves from the boss 1231 to the component to be installed. In other embodiments, the number of the push rods 1221 can be three or other numbers.

[0048] Optional, such as Figure 3 , Figure 4 and Figure 8As shown, the four push rods 1221 are evenly distributed on the other end of the disengagement mechanism 122 along the circumferential direction, and the boss 1231 is cylindrical in shape. The commonly used sealing ring 11 is an O-type sealing ring 11, and the boss 1231 is cylindrical in shape, which can easily fix the O-type sealing ring 11; the four push rods 1221 are evenly distributed on the other end of the disengagement mechanism 122 along the circumferential direction, so that the thrust applied by the four push rods 1221 to the O-type sealing ring 11 can be more uniform, so that the O-type sealing ring 11 moves from the boss 1231 to the component to be installed. In other embodiments, if the shape of the sealing ring 11 is rectangular or other shapes, the shape surrounded by the push rods 1221 and the shape of the boss 1231 can be changed accordingly.

[0049] Optional, such as Figure 3 As shown, a handle 1213 is provided at one end of the movable rod 1212 , so that it is convenient for an operator to push and pull the movable rod 1212 through the handle 1213 .

[0050] Optional, such as Figure 3 As shown, the handle 1213 is in the shape of a disc, which makes it convenient for the operator to hold the handle 1213. In other embodiments, the handle 1213 may be in the shape of an ellipse or other shapes.

[0051] In summary, the utility model provides a jig 12 for installing a sealing ring 11, including a main body 121, a disengaging mechanism 122 and a fixing mechanism 123. The main body 121 includes a cylinder 1211 and a movable rod 1212. The movable rod 1212 can drive the disengaging mechanism 122 to reciprocate along the axial direction of the cylinder 1211. A boss 1231 for fixing the sealing ring 11 is provided on the fixing mechanism 123, which can prevent the sealing ring 11 from moving or tilting. When the movable rod 1212 drives the disengaging mechanism 122 to move to one side of the fixing mechanism 123, the push rod 1221 can push the sealing ring 11 from the boss 1231 to the component to be installed. The unexpected effect is that when installing the sealing ring 11, the sealing ring 11 is effectively prevented from being damaged or falling off, and the installation efficiency of the sealing ring 11 is significantly improved, thereby improving the efficiency of equipment maintenance and troubleshooting.

[0052] The above description is only a description of the preferred embodiment of the utility model, and is not any limitation to the scope of the utility model. Any changes and modifications made by ordinary technicians in this field based on the above disclosure are within the protection scope of the utility model.

Claims

1. A jig for installing a sealing ring, characterized in that: It includes the subject, the disengaging mechanism and the fixing mechanism; The main body comprises a cylinder and a movable rod; one end of the cylinder is recessed inward to form a cylindrical cavity with an opening, and the other end of the cylinder is provided with a first through hole connected to the cavity; the movable rod passes through the first through hole and is arranged along the axial direction of the cavity; one end of the movable rod is arranged outside the cavity, and the other end is arranged inside the cavity; One end of the disengagement mechanism is connected to the other end of the movable rod, and the other end of the disengagement mechanism is provided with a plurality of push rods distributed at intervals; One end of the fixing mechanism is connected to one end of the cylinder, and the other end of the fixing mechanism is provided with an annular boss; a second through hole is provided between the boss and one end of the fixing mechanism; the push rod passes through the corresponding second through hole, and the length of the push rod along the axial direction parallel to the cylinder is greater than the length of the second through hole along the axial direction parallel to the cylinder.

2. A jig for installing a sealing ring as claimed in claim 1, characterized in that: One end of the disengagement mechanism is detachably connected to the other end of the movable rod.

3. A jig for installing a sealing ring as claimed in claim 2, characterized in that: One end of the disengagement mechanism is detachably connected to the other end of the movable rod via a bolt.

4. A jig for installing a sealing ring as claimed in claim 2, characterized in that: One end of the fixing mechanism is detachably connected to one end of the cylinder.

5. A jig for installing a sealing ring as claimed in claim 4, characterized in that: One end of the fixing mechanism is detachably connected to one end of the cylinder through a thread.

6. A jig for installing a sealing ring as claimed in claim 1, characterized in that: The fixture further comprises a return spring, which is sleeved on the movable rod and arranged between the first through hole and the disengagement mechanism.

7. A jig for installing a sealing ring as claimed in claim 1, characterized in that: The number of the push rods is four.

8. A jig for installing a sealing ring as claimed in claim 7, characterized in that: The four push rods are evenly distributed on the other end of the disengagement mechanism along the circumferential direction, and the boss is in a cylindrical shape.

9. A jig for installing a sealing ring as claimed in claim 1, characterized in that: A handle is arranged at one end of the movable rod.

10. A jig for installing a sealing ring as claimed in claim 9, characterized in that: The handle is in the shape of a disc.

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