High-safety silicon tetrafluoride buffer tank

Abstract

The utility model provides a high-safety silicon tetrafluoride buffer tank. The high-safety silicon tetrafluoride buffer tank comprises a tank body, the two drying boxes are both arranged at the bottom of the tank body, feeding valves are fixedly installed at the tops of the two drying boxes, discharging valves are fixedly installed at the bottoms of the two drying boxes, output valves are fixedly installed at the tops of the two drying boxes, input valves are fixedly installed at the bottoms of the two drying boxes, and the feeding valves are fixedly installed at the bottoms of the two drying boxes. And adsorption materials are arranged in the two drying boxes. According to the high-safety silicon tetrafluoride buffer tank provided by the utility model, the two drying boxes, the feeding valve, the output valve, the discharging valve, the input valve, the first three-way pipe, the second three-way pipe and other structures are matched with one another, so that when the high-safety silicon tetrafluoride buffer tank is used and an adsorption material is replaced, a user can use the other drying box to carry out adsorption operation, and the use is convenient. Therefore, the situation that the adsorption material is stopped to be replaced can be avoided, and the use efficiency is improved.

Description

Technical Field

[0001] The utility model relates to the technical field of silicon tetrafluoride storage equipment, in particular to a high-safety silicon tetrafluoride buffer tank. Background Art

[0002] Silicon tetrafluoride plays an important role in the electronics and semiconductor industries. It is mainly used as an etchant for tantalum silicide and silicon nitride, a P-type dopant, and a diffused silicon source for epitaxial deposition. It can also be used to prepare dot-silane or polysilicon. In addition, silicon tetrafluoride is also widely used in cement manufacturing, electronic materials, solar cell components, copier photosensitive drums, very large-scale integrated circuits, etc. When storing silicon tetrafluoride, a buffer tank is required.

[0003] For example, in the patent application with publication number CN 213965697 U in the prior art, an air inlet pipe and an air outlet pipe are connected through the buffer tank body, and a pre-treatment device is also connected to the end of the air inlet pipe away from the buffer tank body, and the pre-treatment device includes a filter tank and a dehumidification tank, the filter tank is connected to the silicon tetrafluoride delivery pipeline, the filter tank is provided with activated carbon and diatomaceous earth, the dehumidification tank is connected to the filter tank, the dehumidification tank is connected to the air inlet pipe, and a dehumidification component is provided in the dehumidification tank. The present application removes part of the moisture and large particle impurities in the silicon tetrafluoride through the activated carbon and diatomaceous earth in the filter tank, and then removes the remaining moisture and impurities through the dehumidification component, thereby improving the cleanliness of silicon tetrafluoride and reducing the hydrolysis of silicon tetrafluoride; the silicon tetrafluoride gas is evenly dispersed in the dehumidification tank through the air distribution pipe and the air distribution branch pipe, thereby increasing the adsorption area of ​​the molecular sieve and improving the working efficiency of the dehumidification tank.

[0004] However, after the equipment has been used for a long time, when the adsorbent needs to be replaced, it is necessary to stop the transportation in the buffer tank and then replace the adsorbent, which reduces work efficiency.

[0005] Therefore, it is necessary to provide a high-safety silicon tetrafluoride buffer tank to solve the above technical problems. Utility Model Content

[0006] The utility model provides a high-safety silicon tetrafluoride buffer tank, which solves the problem that the adsorbent can be replaced only after the transportation in the buffer tank is stopped, thus reducing the work efficiency.

[0007] In order to solve the above technical problems, the utility model provides a high-safety silicon tetrafluoride buffer tank, comprising:

[0008] Tank;

[0009] Two drying boxes, both of which are arranged at the bottom of the tank body, the tops of the two drying boxes are fixedly equipped with a feed valve, the bottoms of the two drying boxes are fixedly equipped with a discharge valve, the tops of the two drying boxes are fixedly equipped with an output valve, the bottoms of the two drying boxes are fixedly equipped with an input valve, and the interiors of the two drying boxes are provided with adsorbents;

[0010] A first three-way pipe, wherein both ends of the first three-way pipe are respectively fixedly mounted on the tops of the two output valves, and the top of the first three-way pipe is fixedly mounted on the bottom of the tank body;

[0011] A second three-way pipe, both ends of which are fixedly mounted on the bottoms of the two input valves.

[0012] Preferably, metal mesh covers are fixedly mounted on the bottom of the inner sides of the two drying boxes, and the interior of the metal mesh covers is connected to the interior of the input valve.

[0013] Preferably, support frames are fixedly mounted on all four sides of the bottom of the tank body, and mounting plates are fixedly mounted on the outer side surfaces of the support frames.

[0014] Preferably, the two drying ovens are fixedly mounted on the top of the mounting plate.

[0015] Preferably, observation windows are fixedly mounted on the front sides of the two drying boxes.

[0016] Preferably, a protective frame is provided on the front side of the observation window.

[0017] Preferably, the protective frame is fixedly mounted on the front side of the drying box.

[0018] Compared with the related art, the high-safety silicon tetrafluoride buffer tank provided by the utility model has the following beneficial effects:

[0019] The utility model provides a high-safety silicon tetrafluoride buffer tank, which cooperates with each other through two drying boxes, a feed valve, an output valve, a discharge valve, an input valve, a first three-way pipe and a second three-way pipe. When the adsorbent is replaced during use, the user can use another drying box to perform the adsorption operation, which can avoid stopping the use to replace the adsorbent, thereby increasing the use efficiency. BRIEF DESCRIPTION OF THE DRAWINGS

[0020] Figure 1 A schematic structural diagram of a first embodiment of a high-safety silicon tetrafluoride buffer tank provided by the utility model;

[0021] Figure 2 for Figure 1 The schematic diagram of the cross-sectional structure of the drying box shown;

[0022] Figure 3 for Figure 1 An enlarged schematic diagram of part A is shown;

[0023] Figure 4 This is a structural schematic diagram of a second embodiment of a high-safety silicon tetrafluoride buffer tank provided by the utility model.

[0024] Numbers in the figure: 1. tank body, 11. support frame, 12. mounting plate, 2. drying box, 21. feed valve, 22. output valve, 23. discharge valve, 24. input valve, 25. metal mesh cover, 26. adsorption material, 3. first three-way pipe, 4. second three-way pipe, 5. observation window, 51. protective frame. DETAILED DESCRIPTION

[0025] The utility model is further described below in conjunction with the accompanying drawings and implementation modes.

[0026] First embodiment

[0027] Please refer to Figure 1 , Figure 2 , Figure 3 ,in, Figure 1 A schematic structural diagram of a first embodiment of a high-safety silicon tetrafluoride buffer tank provided by the utility model; Figure 2 for Figure 1 The schematic diagram of the cross-sectional structure of the drying box shown; Figure 3 for Figure 1 The enlarged schematic diagram of part A is shown. A high-safety silicon tetrafluoride buffer tank comprises: a tank body 1;

[0028] Two drying boxes 2, both of which are arranged at the bottom of the tank body 1, a feed valve 21 is fixedly installed on the top of each of the drying boxes 2, a discharge valve 23 is fixedly installed on the bottom of each of the drying boxes 2, an output valve 22 is fixedly installed on the top of each of the drying boxes 2, an input valve 24 is fixedly installed on the bottom of each of the drying boxes 2, and adsorbent 26 is arranged inside each of the drying boxes 2;

[0029] A first three-way pipe 3, wherein both ends of the first three-way pipe 3 are respectively fixedly mounted on the tops of the two output valves 22, and the top of the first three-way pipe 3 is fixedly mounted on the bottom of the tank body 1;

[0030] The second three-way pipe 4 has two ends fixedly mounted on the bottoms of the two input valves 24 .

[0031] A metal mesh cover 25 is fixedly mounted on the bottom of the inner side surfaces of the two drying boxes 2 , and the interior of the metal mesh cover 25 is connected to the interior of the input valve 24 .

[0032] Support frames 11 are fixedly mounted around the bottom of the tank body 1 , and mounting plates 12 are fixedly mounted on the outer side of the support frames 11 .

[0033] Support frames 11 are fixedly mounted around the bottom of the tank body 1 , and mounting plates 12 are fixedly mounted on the outer side of the support frames 11 .

[0034] The adsorbent 26 is arranged inside the two drying boxes 2. When the adsorbent 26 is replaced in one of the drying boxes 2, the other drying box 2 can be used.

[0035] The metal mesh cover 25 can prevent the adsorbent 26 from entering the interior of the second three-way pipe 4 during use.

[0036] The adsorbent 26 is activated carbon and diatomaceous earth;

[0037] Silicon tetrafluoride is dried by the adsorbent 26, thereby increasing the safety of silicon tetrafluoride stored in the buffer tank.

[0038] The working principle of a high-safety silicon tetrafluoride buffer tank provided by the utility model is as follows:

[0039] When in use, silicon tetrafluoride is transported to the interior of one of the drying boxes 2 through the second three-way pipe 4, and then discharged to the interior of the first three-way pipe 3 through the output valve 22, and then transported to the interior of the tank body 1 through the first three-way pipe 3 for storage. When the adsorbent inside the drying box 2 needs to be replaced, the user can close the input valve 22 and the output valve 22 at the top and bottom of the drying box 2, and then open the input valve 22 and the input valve 24 of the other drying box 2 to allow silicon tetrafluoride to enter the interior of the tank body 1 from the other drying box 2. Then the user will open the discharge valve 21 of the previous drying box 2 to discharge the adsorbent 26, and then close it, and then open the feed valve 21 to add the adsorbent 26 to the interior of the drying box 2 again.

[0040] Compared with the related art, the high-safety silicon tetrafluoride buffer tank provided by the utility model has the following beneficial effects:

[0041] By cooperating with each other through structures such as two drying boxes 2, feed valve 21, output valve 22, discharge valve 23, input valve 24, first three-way pipe 3 and second three-way pipe 4, when the adsorbent is replaced during use, the user can use another drying box 2 to perform the adsorption operation, which can avoid stopping the use to replace the adsorbent, thereby increasing the use efficiency.

[0042] Second embodiment

[0043] Please refer to Figure 4 Based on the high-safety silicon tetrafluoride buffer tank provided in the first embodiment of the present application, the second embodiment of the present application proposes another high-safety silicon tetrafluoride buffer tank. The second embodiment is only a preferred method of the first embodiment, and the implementation of the second embodiment will not affect the independent implementation of the first embodiment.

[0044] Specifically, the difference of the high-safety silicon tetrafluoride buffer tank provided in the second embodiment of the present application is that, in the high-safety silicon tetrafluoride buffer tank, an observation window 5 is fixedly installed on the front of the two drying boxes 2.

[0045] A protection frame 51 is provided on the front of the observation window 5 .

[0046] The protection frame 51 is fixedly installed on the front side of the drying box 2 .

[0047] The working principle of a high-safety silicon tetrafluoride buffer tank provided by the utility model is as follows:

[0048] When in use, the user can observe the drying material inside the drying box 2 through the observation window 5, so that the user can replace the adsorbent 26 in time, and by setting the protective frame 51 on the outer side of the observation window 5, the observation window 5 can be protected.

[0049] Compared with the related art, the high-safety silicon tetrafluoride buffer tank provided by the utility model has the following beneficial effects:

[0050] When the observation window 5 is in use, the user can observe the adsorbent 26 inside the drying box 2 , so that the user can replace the adsorbent 26 in time, and the protection frame 51 can protect the observation window 5 .

[0051] The above description is only an embodiment of the present invention, and does not limit the patent scope of the present invention. Any equivalent structure or equivalent process transformation made by using the contents of the specification and drawings of the present invention, or directly or indirectly applied in other related technical fields, are also included in the patent protection scope of the present invention.

Claims

1. A high-safety silicon tetrafluoride buffer tank, characterized in that: include: Tank; Two drying boxes, both of which are arranged at the bottom of the tank body, the tops of the two drying boxes are fixedly equipped with a feed valve, the bottoms of the two drying boxes are fixedly equipped with a discharge valve, the tops of the two drying boxes are fixedly equipped with an output valve, the bottoms of the two drying boxes are fixedly equipped with an input valve, and the interiors of the two drying boxes are provided with adsorbents; A first three-way pipe, wherein both ends of the first three-way pipe are respectively fixedly mounted on the tops of the two output valves, and the top of the first three-way pipe is fixedly mounted on the bottom of the tank body; A second three-way pipe, both ends of which are fixedly mounted on the bottoms of the two input valves.

2. A high-safety silicon tetrafluoride buffer tank according to claim 1, characterized in that: A metal mesh cover is fixedly mounted on the bottom of the inner side surfaces of the two drying boxes, and the interior of the metal mesh cover is connected to the interior of the input valve.

3. A high-safety silicon tetrafluoride buffer tank according to claim 2, characterized in that: Support frames are fixedly installed around the bottom of the tank body, and mounting plates are fixedly installed on the outer side of the support frames.

4. A high-safety silicon tetrafluoride buffer tank according to claim 3, characterized in that: The two drying boxes are both fixedly mounted on the top of the mounting plate.

5. A high-safety silicon tetrafluoride buffer tank according to claim 1, characterized in that: Observation windows are fixedly installed on the front sides of the two drying boxes.

6. A high-safety silicon tetrafluoride buffer tank according to claim 5, characterized in that: A protective frame is arranged on the front of the observation window.

7. A high-safety silicon tetrafluoride buffer tank according to claim 6, characterized in that: The protective frame is fixedly installed on the front side of the drying box.

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