Overlay measuring device capable of preventing light scattering

By designing a forging measurement device to prevent light dispersion, the coordinated work of lifting and lowering components and positioning components is used to solve the problems of light dispersion and dislocation during lithography forging, and the efficiency and accuracy of laser engraving are significantly improved.

CN222626503UActive Publication Date: 2025-03-18YONGCHUN SEMICON (WUXI) CO LTD
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Patent Information

Application Number
CN202420317531.2
Authority / Receiving Office
CN · China
Patent Type
Utility models(China)
Current Assignee / Owner
Filing Date
2024-02-20
Publication Date
2025-03-18
Estimated Expiration
2034-02-20

AI Technical Summary

Technical Problem

During the lithography engraving process, the intercalation error is caused by the deviation between the loading material and the cover plate, the vibration of the laser engraving machine, the ambient light and the light dispersion caused by high temperature weather.

Method used

A scattering measurement device is designed to prevent light dissipation, including a base, a positioning assembly, a laser engraving machine body, a dissipation plate and a lifting assembly. By switching from horizontal to vertical the state of the lifting component, the anti-scatter plate is pushed up to the highest height of the positioning component, the laser engraving machine body and the sleeve plate to block the surrounding light. At the same time, the positioning components are positioned synchronously by approaching each other by four corners to prevent rigid dislocation of the sleeve.

Benefits of technology

It effectively avoids the light dispersion problem caused by the light laser engraving machine, greatly increases the efficiency of laser engraving, and prevents the misalignment of the set of stereotypes due to vibration, ensuring the accuracy of lithography.

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Abstract

The utility model discloses an overlay measurement device capable of preventing light scattering, and relates to the technical field of overlay measurement. The laser engraving machine comprises a base, a positioning assembly is installed on the top of the base in a sliding mode, a laser engraving machine body is fixedly installed on one side of the top of the base, one side of the laser engraving machine body is located over the positioning assembly, and an anti-scattering plate is installed in an inner cavity of the base in a sliding mode. Lifting assemblies are symmetrically and rotationally installed on the top of the anti-scattering plate, and the lifting assemblies and the base are installed in a sliding mode. The state of the lifting assembly is driven to be switched from the horizontal state to the vertical state, so that the lifting assembly can push the anti-scattering plate installed in the inner cavity of the base in a sliding mode to rise to the highest height of the positioning assembly, the laser engraving machine body and the sleeving engraving plate; and the problem of light scattering of the laser engraving machine body caused by light around the laser engraving machine body is avoided, and the laser engraving efficiency is greatly improved.
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Description

Technical Field

[0001] The utility model belongs to the technical field of overlay measurement, and in particular relates to an overlay measurement device capable of preventing light dispersion. Background Art

[0002] There are many types of engraving technology. Laser engraving is based on CNC technology, with laser as the processing medium and electromechanical transmission as the power. The surface of the processed material is instantly heated and vaporized under the action of the laser beam, so that the laser engraving can achieve the processing purpose.

[0003] Among them, the photolithography engraving plate uses laser and a plate to engrave the material, but when loading the material and the plate, deviations are prone to occur, and since there is still a small vibration during laser engraving, the material and the plate are slightly misaligned. In addition, since the light source is brighter in the environment around the laser engraving machine when the light source is transmitted, or when the weather is hot that day, the sunlight shines on the laser engraving machine, which will cause the laser engraving machine to affect the engraving plate, that is, the light source of the laser engraving machine will be scattered, causing engraving errors.

[0004] Currently, no effective solution has been proposed for the problems in the related technologies. Utility Model Content

[0005] In view of the problems in the related art, the utility model proposes an overlay measurement device for preventing light dispersion, so as to overcome the above technical problems existing in the existing related art.

[0006] In order to solve the above technical problems, the utility model is realized by the following technical solutions:

[0007] The utility model is an overlay measuring device for preventing light dispersion, comprising a base, a positioning assembly is slidably mounted on the top of the base, a laser engraving machine body is fixedly mounted on one side of the top of the base, one side of the laser engraving machine body is located directly above the positioning assembly, an anti-scattering plate is slidably mounted on the inner cavity of the base, a lifting assembly is symmetrically rotatably mounted on the top of the anti-scattering plate, and the lifting assembly is slidably mounted between the lifting assembly and the base;

[0008] The positioning components slidably installed on the top of the base synchronously approach each other to position the sleeve engraving plate, and the lifting components approach each other to switch their states from horizontal to vertical, and the lifting components synchronously drive the anti-scatter plate to rise in height to block the light around the positioning components, the laser engraving machine body and the sleeve engraving plate.

[0009] Furthermore, the base includes a shell, and a display screen is fixedly mounted on one end of the shell.

[0010] Furthermore, the positioning assembly includes four positioning blocks, which are slidably installed on the outer shell, and a connecting rod is rotatably installed at one end of the four positioning blocks close to each other. The four connecting rods are respectively rotatably installed on the rotating blocks, and the rotating blocks are rotatably installed at the bottom of the inner cavity of the outer shell. A telescopic rod is fixedly installed between any mutually symmetrical positioning blocks.

[0011] Furthermore, the lifting assembly includes a rotating rod, two rotating rods are respectively rotatably mounted on the bottom of the anti-scattering plate, and the two rotating rods are hingedly mounted, and the other ends of the two rotating rods are respectively rotatably mounted with sliding blocks.

[0012] Furthermore, the sliding block is slidably installed with the bottom of the inner cavity of the shell, and the ends of the two sliding blocks close to each other are threadedly installed with threaded rods, and the ends of the threaded rods close to each other are fixedly installed on the output shaft of the driving motor, and the driving motor is fixedly installed at the bottom of the inner cavity of the shell.

[0013] Furthermore, a sliding groove for slidably mounting the four positioning blocks is provided on the top of the shell, and the threads of the two threaded rods are opposite to each other.

[0014] The utility model has the following beneficial effects:

[0015] 1. The utility model switches the state of the driving lifting component from horizontal to vertical, so that the lifting component will push the anti-scattering plate slidably installed in the inner cavity of the base to the highest height of the positioning component, the laser engraving machine body and the sleeve engraving plate, avoiding the problem of light dispersion of the laser engraving machine body caused by the light around the laser engraving machine body, thereby greatly increasing the efficiency of laser engraving.

[0016] 2. The utility model moves the four corners of the positioning assembly closer to each other and synchronously positions the circumferential surface of the sleeve plate on the axis thereof, thereby preventing the sleeve plate from being dislocated due to vibration during photolithography, thereby causing the problem of inaccurate photolithography of the sleeve plate by the laser engraving machine body.

[0017] Of course, any product implementing the present invention does not necessarily need to achieve all of the advantages described above at the same time. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] In order to more clearly illustrate the technical solutions of the utility model embodiments, the drawings required for describing the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the utility model. For ordinary technicians in this field, other drawings can be obtained based on these drawings without creative work.

[0019] Figure 1 This is a three-dimensional structural diagram of the utility model;

[0020] Figure 2 It is a schematic diagram of the display screen of the utility model;

[0021] Figure 3 This is a schematic diagram of the positioning component of the utility model;

[0022] Figure 4 It is a schematic diagram of the lifting assembly of the utility model;

[0023] Figure 5 It is a schematic diagram of the telescopic rod of the utility model;

[0024] Figure 6 It is a schematic diagram of the rotating block of the utility model;

[0025] Figure 7 It is a schematic diagram of the rotating rod of the utility model.

[0026] In the accompanying drawings, the components represented by the reference numerals are listed as follows:

[0027] 1. Base; 101. Shell; 102. Display screen; 103. Sliding slot; 2. Positioning assembly; 201. Positioning block; 202. Rotating rod; 203. Rotating block; 204. Telescopic rod; 3. Laser engraving machine body; 4. Anti-scatter plate; 5. Lifting assembly; 501. Rotating rod; 502. Sliding block; 503. Threaded rod; 504. Driving motor. DETAILED DESCRIPTION

[0028] The following will be combined with the drawings in the utility model embodiments to clearly and completely describe the technical solutions in the utility model embodiments. Obviously, the described embodiments are only part of the utility model embodiments, not all of the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0029] In the description of the present utility model, it should be understood that the terms "opening", "upper", "lower", "top", "middle", "inside" and the like indicating orientation or positional relationship are only for the convenience of describing the utility model and simplifying the description, and do not indicate or imply that the components or elements referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the utility model.

[0030] See also Figure 1-Figure 7As shown, the utility model is an overlay measuring device for preventing light dispersion, comprising a base 1, a positioning assembly 2 is slidably mounted on the top of the base 1, a laser engraving machine body 3 is fixedly mounted on one side of the top of the base 1, one side of the laser engraving machine body 3 is located directly above the positioning assembly 2, an anti-scattering plate 4 is slidably mounted in the inner cavity of the base 1, a lifting assembly 5 is symmetrically rotatably mounted on the top of the anti-scattering plate 4, and the lifting assembly 5 is slidably mounted between the base 1;

[0031] The positioning components 2 slidably installed on the top of the base 1 are synchronously approached to each other to position the sleeve engraving plate, and the lifting components 5 are approached to each other to switch their states from horizontal to vertical, and the lifting components 5 synchronously drive the anti-scatter plate 4 to rise in height to block the light around the positioning component 2, the laser engraving machine body 3 and the sleeve engraving plate.

[0032] First, the sleeve engraving plate is placed on the top of the base 1 and on the central axis of the positioning component 2. Then, the four corners of the positioning component 2 are moved close to each other, and the circumferential surface of the sleeve engraving plate on the central axis is synchronously positioned to prevent the sleeve engraving plate from being displaced due to vibration during the photolithography engraving, thereby causing the laser engraving machine body 3 to have inaccurate photolithography of the sleeve engraving plate. Then, in order to prevent the laser engraving machine body 3 from being affected by the light around the laser engraving machine body 3 when the laser engraving machine body 3 is photolithographically etching the sleeve engraving plate, causing the laser engraving machine body 3 to have light scattered, the lifting component 5 is first driven to slide at the bottom of the inner cavity of the base 1 and approach each other. So that the state of the lifting component 5 is switched from horizontal to vertical, and then the lifting component 5 will push the anti-scatter plate 4 slidably installed in the inner cavity of the base 1 to rise, and rise to the highest height of the positioning component 2, the laser engraving machine body 3 and the sleeve engraving plate, and then the rise of the anti-scatter plate 4 will block the light around the positioning component 2, the laser engraving machine body 3 and the sleeve engraving plate, avoiding the problem of light scattering of the laser engraving machine body 3 due to the light around the laser engraving machine body 3. Since one side of the laser engraving machine body 3 is located directly above the positioning component 2, the laser engraving machine body 3 then performs etching on the sleeve engraving plate.

[0033] Thus, by driving the state of the lifting assembly 5 to switch from horizontal to vertical, the lifting assembly 5 will push the anti-scattering plate 4 slidably installed in the inner cavity of the base 1 to rise to the highest height of the positioning assembly 2, the laser engraving machine body 3 and the sleeve engraving plate, thereby avoiding the problem of light scattering of the laser engraving machine body 3 caused by the surrounding light of the laser engraving machine body 3, thereby greatly increasing the efficiency of laser engraving;

[0034] The four corners of the positioning assembly 2 are moved closer to each other, and the circumferential surface of the embossing plate on its axis is synchronously positioned, so as to prevent the embossing plate from being misaligned due to vibration during photolithography, thereby causing the laser engraving machine body 3 to etch the embossing plate inaccurately.

[0035] In one embodiment, for the base 1 , the base 1 includes a housing 101 , and a display screen 102 is fixedly mounted on one end of the housing 101 .

[0036] The display screen 102 is used to display the data of the laser engraving machine.

[0037] In one embodiment, for the above-mentioned positioning assembly 2, the positioning assembly 2 includes four positioning blocks 201, the positioning blocks 201 are slidably installed on the outer shell 101, and the ends of the four positioning blocks 201 close to each other are rotatably installed with connecting rods 202, and the four connecting rods 202 are respectively rotatably installed on rotating blocks 203, and the rotating blocks 203 are rotatably installed at the bottom of the inner cavity of the outer shell 101, and telescopic rods 204 are fixedly installed between any mutually symmetrical positioning blocks 201.

[0038] First, place the engraved plate on the top of the shell 101 and at the center of the four positioning blocks 201, then the telescopic rod 204 drives the two positioning blocks 201 fixed thereto to move, then the two positioning blocks 201 will respectively drive the connecting rods 202 rotatably mounted thereto to rotate, then the connecting rods 202 will drive the rotating blocks 203 rotatably mounted thereto to rotate, since the four connecting rods 202 are respectively rotatably mounted on the rotating blocks 203, the rotation of the rotating blocks 203 will simultaneously drive the four connecting rods 202 to rotate, and the connecting rods 202 will respectively drive their respective positioning blocks 201 to move closer to each other until the four positioning blocks 201 simultaneously move to the circumferential surface of the engraved plate, at which time the telescopic rod 204 can be stopped from pushing the two positioning blocks 201.

[0039] Thus, any two symmetrical positioning blocks 201 are driven to move by the telescopic rod 204, and the positioning blocks 201 will respectively drive the connecting rods 202 on each of them to rotate, and the connecting rods 202 will drive the rotating block 203 to rotate, and the rotating block 203 will drive the four connecting rods 202 to rotate, and the connecting rods 202 will respectively drive their respective positioning blocks 201 to move closer to each other, and then the four positioning blocks 201 will move simultaneously to position the sleeve engraving plate, so as to prevent the sleeve engraving plate from being dislocated due to vibration during photolithography, thereby causing the problem of inaccurate photolithography of the sleeve engraving plate by the laser engraving machine body 3.

[0040] In one embodiment, for the above-mentioned lifting assembly 5, the lifting assembly 5 includes a rotating rod 501, two rotating rods 501 are respectively rotatably installed at the bottom of the anti-scatter plate 4, and the two rotating rods 501 are hingedly installed, and the other ends of the two rotating rods 501 are respectively rotatably installed with sliding blocks 502.

[0041] The sliding block 502 is slidably installed at the bottom of the inner cavity of the shell 101, and the ends of the two sliding blocks 502 close to each other are threadedly installed with a threaded rod 503, and the ends of the threaded rod 503 close to each other are fixedly installed on the output shaft of the driving motor 504, and the driving motor 504 is fixedly installed at the bottom of the inner cavity of the shell 101.

[0042] The top of the housing 101 is provided with a sliding groove 103 for slidingly mounting the four positioning blocks 201 , and the threads of the two threaded rods 503 are opposite to each other.

[0043] Due to the influence of the light around the laser engraving machine body 3 on the laser engraving machine body 3, the problem of light dispersion of the laser engraving machine body 3 is caused. First, the two threaded rods 503 fixedly installed at the output end of the driving motor 504 are driven to rotate. Since the threads of the two threaded rods 503 are opposite, the two threaded rods 503 will respectively drive the sliding blocks 502 on each of them to approach each other, and then the two sliding blocks 502 will drive the rotating rod 501 rotatably installed therewith to rotate, and then the state of the rotating rod 501 is switched from horizontal to vertical. Since the two rotating rods 501 are hingedly installed, the two rotating rods 501 will move at the same distance, and since the two rotating rods 501 are respectively rotatably installed at the bottom of the anti-scatter plate 4, the rotating rod 501 will then drive the anti-scatter plate 4 to move and rise to the highest height of the positioning component 2, the laser engraving machine body 3 and the sleeve engraving plate, and then the rise of the anti-scatter plate 4 will block the light around the positioning component 2, the laser engraving machine body 3 and the sleeve engraving plate.

[0044] Thus, by driving the two threaded rods 503 at the output end of the driving motor 504 to rotate, the two threaded rods 503 respectively drive the sliding blocks 502 on each of them to approach each other, and the two sliding blocks 502 will drive the rotating rod 501 to rotate, and then the state of the rotating rod 501 is switched from horizontal to vertical, and the rotating rod 501 will drive the anti-scatter plate 4 to move, and rise to the highest height of the positioning component 2, the laser engraving machine body 3 and the sleeve engraving plate, and then the rise of the anti-scatter plate 4 will block the light around the positioning component 2, the laser engraving machine body 3 and the sleeve engraving plate, avoiding the problem of light scattering of the laser engraving machine body 3 due to the light around the laser engraving machine body 3, thereby greatly increasing the efficiency of laser engraving.

[0045] In summary, with the aid of the above technical solution of the utility model, the sleeve engraving plate is first placed on the top of the housing 101 and at the center of the four positioning blocks 201, and then the telescopic rod 204 drives the two positioning blocks 201 to move, and then the two positioning blocks 201 will respectively drive the connecting rod 202 to rotate, and then the connecting rod 202 will drive the rotating block 203 to rotate. Since the four connecting rods 202 are respectively rotatably installed on the rotating block 203, the rotation of the rotating block 203 will simultaneously drive the four connecting rods 202 to rotate, and the connecting rods 202 will respectively drive their respective positioning blocks 201 to move closer to each other until the four positioning blocks 201 move to the circumferential surface of the sleeve engraving plate at the same time. At this time, the telescopic rod 204 can be stopped from pushing the two positioning blocks 201, so as to prevent the sleeve engraving plate from being dislocated due to vibration during photolithography, thereby causing the problem of inaccurate photolithography of the sleeve engraving plate by the laser engraving machine body 3. The surrounding light affects the laser engraving machine body 3, causing the problem of light dispersion of the laser engraving machine body 3. First, the two threaded rods 503 at the output end of the driving motor 504 are driven to rotate. Since the threads of the two threaded rods 503 are opposite, the two threaded rods 503 will respectively drive the sliding blocks 502 on each of them to approach each other, and then the two sliding blocks 502 will drive the rotating rod 501 to rotate, and then the state of the rotating rod 501 is switched from horizontal to vertical. Since the two rotating rods 501 are hingedly installed, the two rotating rods 501 will move at the same distance, and since the two rotating rods 501 are respectively rotatably installed at the bottom of the anti-scatter plate 4, the rotating rod 501 will then drive the anti-scatter plate 4 to move and rise to the highest height of the positioning component 2, the laser engraving machine body 3 and the sleeve engraving plate, and then the rise of the anti-scatter plate 4 will block the light around the positioning component 2, the laser engraving machine body 3 and the sleeve engraving plate, and then the display screen 102 is used to display the data of the laser engraving machine.

[0046] Through the above technical solution, 1. By driving the two threaded rods 503 at the output end of the driving motor 504 to rotate, the two threaded rods 503 respectively drive the sliding blocks 502 on each of them to approach each other, and the two sliding blocks 502 will drive the rotating rod 501 to rotate, and then the state of the rotating rod 501 is switched from horizontal to vertical, and the rotating rod 501 will drive the anti-scatter plate 4 to move, and rise to the highest height of the positioning component 2, the laser engraving machine body 3 and the sleeve engraving plate, and then the rise of the anti-scatter plate 4 will block the light around the positioning component 2, the laser engraving machine body 3 and the sleeve engraving plate, avoiding the problem of light scattering of the laser engraving machine body 3 caused by the light around the laser engraving machine body 3, thereby greatly increasing the efficiency of laser engraving.

[0047] 2. Drive any two symmetrical positioning blocks 201 to move through the telescopic rod 204. The positioning blocks 201 will respectively drive the connecting rods 202 on each of them to rotate. The connecting rods 202 will drive the rotating block 203 to rotate. The rotating block 203 will drive the four connecting rods 202 to rotate. The connecting rods 202 will respectively drive their respective positioning blocks 201 to move closer to each other. Subsequently, the four positioning blocks 201 move simultaneously to synchronously position the sleeve engraving plate, so as to prevent the sleeve engraving plate from being dislocated due to vibration during photolithography, thereby causing the problem of inaccurate photolithography of the sleeve engraving plate by the laser engraving machine body 3.

[0048] In the description of this specification, the description with reference to the terms "one embodiment", "example", "specific example", etc. means that the specific features, structures, materials or characteristics described in conjunction with the embodiment or example are included in at least one embodiment or example of the utility model. In this specification, the schematic representation of the above terms does not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials or characteristics described can be combined in any one or more embodiments or examples in a suitable manner.

[0049] The preferred embodiments of the utility model disclosed above are only used to help explain the utility model. The preferred embodiments do not describe all the details in detail, nor do they limit the utility model to the specific implementation methods described. Obviously, many modifications and changes can be made according to the content of this specification. This specification selects and specifically describes these embodiments in order to better explain the principles and practical applications of the utility model, so that technicians in the relevant technical field can well understand and use the utility model. The utility model is limited only by the claims and their full scope and equivalents.

Claims

1. An overlay measurement device for preventing light scattering, comprising a base (1), characterized in that: A positioning assembly (2) is slidably mounted on the top of the base (1); a laser engraving machine body (3) is fixedly mounted on one side of the top of the base (1); one side of the laser engraving machine body (3) is located directly above the positioning assembly (2); an anti-scattering plate (4) is slidably mounted in the inner cavity of the base (1); a lifting assembly (5) is symmetrically rotatably mounted on the top of the anti-scattering plate (4); and the lifting assembly (5) is slidably mounted on the base (1); The positioning components (2) slidably mounted on the top of the base (1) are synchronously moved closer to each other to position the sleeve engraving plate, and the lifting components (5) are moved closer to each other to switch their states from horizontal to vertical, and the lifting components (5) synchronously drive the anti-scatter plate (4) to rise in height to shield the positioning components (2), the laser engraving machine body (3) and the light around the sleeve engraving plate.

2. The overlay measurement device for preventing light scattering according to claim 1, characterized in that: The base (1) comprises a housing (101), and a display screen (102) is fixedly mounted on one end of the housing (101).

3. The overlay measurement device for preventing light scattering according to claim 2, characterized in that: The positioning assembly (2) comprises four positioning blocks (201), wherein the positioning blocks (201) are slidably mounted on the housing (101), and a connecting rod (202) is rotatably mounted at one end of the four positioning blocks (201) close to each other, and the four connecting rods (202) are respectively rotatably mounted on a rotating block (203), and the rotating block (203) is rotatably mounted on the bottom of the inner cavity of the housing (101), and a telescopic rod (204) is fixedly mounted between any mutually symmetrical positioning blocks (201).

4. The overlay measurement device for preventing light scattering according to claim 3, characterized in that: The lifting assembly (5) comprises a rotating rod (501), wherein two rotating rods (501) are respectively rotatably mounted on the bottom of the anti-scatter plate (4), and the two rotating rods (501) are hingedly mounted therebetween, and sliding blocks (502) are respectively rotatably mounted on the other ends of the two rotating rods (501).

5. The overlay measurement device for preventing light scattering according to claim 4, characterized in that: The sliding block (502) is slidably mounted on the bottom of the inner cavity of the shell (101), and a threaded rod (503) is threadedly mounted on one end of the two sliding blocks (502) close to each other, and one end of the threaded rod (503) close to each other is fixedly mounted on the output shaft of the driving motor (504), and the driving motor (504) is fixedly mounted on the bottom of the inner cavity of the shell (101).

6. The overlay measurement device for preventing light scattering according to claim 5, characterized in that: The top of the housing (101) is provided with a sliding groove (103) for slidingly mounting the four positioning blocks (201), and the threads of the two threaded rods (503) are opposite to each other.