Turnover device and substrate processing system

Abstract

The utility model discloses a turnover device and a substrate processing system. The turnover device comprises a clamping assembly, a first driving device, a second driving device and a first limiting piece. The turnover device comprises two clamping assemblies which are oppositely arranged, the clamping piece comprises a support and a clamping piece which are used for jointly clamping a substrate, the first driving device is used for driving the two clamping assemblies to jointly turn over up and down, the second driving device is used for enabling the two clamping assemblies to selectively get close to or get away from each other, and at least one clamping assembly is connected with a first limiting piece; and the side edge is used for abutting against the substrate. When the substrate rotates to the vertical state, the first limiting piece can be used for providing supporting force for the substrate, so that the friction force between the clamping piece and the substrate can be reduced, the pressure applied to the substrate by the clamping piece can be reduced, the substrate cannot slide off on the premise that the substrate is not prone to being crushed, and the substrate machining cost is saved.

Description

Technical Field

[0001] The utility model relates to but is not limited to the technical field of semiconductor processing, and in particular to a flipping device and a substrate processing system. Background Art

[0002] For example, during semiconductor processing, it is necessary to flip the substrate. In the related art, a clamping device is used to clamp the opposite surfaces of the substrate for flipping. However, after the substrate is flipped to a vertical state, the substrate is fixed by the friction between the clamping device and the substrate. If the pressure between the clamping device and the substrate is too small, that is, the friction between the clamping device and the surface of the substrate is too small, the substrate may slip. If the pressure between the clamping device and the surface of the substrate is too large, the substrate may be easily crushed, resulting in an increase in the substrate processing cost. Utility Model Content

[0003] The utility model aims to solve at least one of the technical problems existing in the prior art. To this end, the utility model provides a flipping device that can safely complete the flipping while ensuring that the substrate will not be crushed, thereby saving the substrate processing cost.

[0004] The utility model also provides a substrate processing system comprising the above-mentioned turning device.

[0005] According to the first aspect of the present invention, the flipping device includes: a clamping assembly, a first driving device, a second driving device and a first limiting member.

[0006] The flipping device includes two clamping assemblies arranged opposite to each other, and the clamping assemblies include a bracket and a clamping member, the clamping member is connected to the bracket, and the clamping members of the two clamping assemblies are used to clamp the substrate together. The first driving device is connected to at least one of the two clamping assemblies, and is used to drive the two clamping assemblies to flip up and down together. The second driving device is connected to at least one of the two clamping assemblies, and is used to make the two clamping assemblies selectively approach and move away. At least one of the clamping assemblies is connected to the first limiting member, and the first limiting member is located on the radial side of the rotation axis of the two clamping assemblies. The first limiting member is used to abut the side edge of the substrate.

[0007] The flipping device according to the embodiment of the utility model has at least the following beneficial effects:

[0008] In the present embodiment, a first stopper is provided on the radial side of the rotation axis of the clamping assembly, and the first stopper is used to hold the side edge of the substrate. Therefore, when the flipping device of the present embodiment is used to flip the substrate, the rotation direction of the clamping assembly is set according to the first stopper, so that after the substrate is flipped to a vertical state, the first stopper is located below the substrate and provides support for the substrate, thereby preventing the substrate from sliding and avoiding the substrate from falling. It can be seen that, compared with the conventional technology, in the present embodiment, when the substrate is rotated to a vertical state, the first stopper can be used to provide a supporting force to the substrate, thereby reducing the friction between the clamping member and the substrate, thereby reducing the pressure applied by the clamping member to the substrate, and then on the premise of ensuring that the substrate is not easily crushed, it will not slide, thereby saving the substrate processing cost.

[0009] According to some embodiments of the utility model, the flipping device further includes a second limiting member;

[0010] The second limiting member and the first limiting member are connected to the same clamped component at intervals; or,

[0011] The second stopper is connected to one of the clamping assemblies, and the second stopper is connected to another of the clamping assemblies;

[0012] The first limiting member and the second limiting member are used to abut against opposite side edges of the substrate.

[0013] According to some embodiments of the present invention, the clamping member has a clamping surface, and the clamping surface is used to press against the substrate. The first direction is the direction from the bracket to the clamping surface.

[0014] The first limiting member has a first limiting surface, the second limiting member has a second limiting surface, the second limiting member and the first limiting member are spaced apart and connected to the same clamped component, and along the first direction, the distance between the first limiting surface and the second limiting surface gradually increases.

[0015] According to some embodiments of the present invention, the first position-limiting member and / or the second position-limiting member may be movably connected to the corresponding bracket, so that the distance between the first position-limiting member and the second position-limiting member is adjustable.

[0016] According to some embodiments of the present invention, the clamping assembly includes a plurality of the clamping members, each of the plurality of the clamping members is spaced apart from the other, and each of the plurality of the clamping members is detachably connected to the bracket.

[0017] According to some embodiments of the present invention, the bracket has a plurality of first mounting holes, and each of the clamping members is disposed in one of the first mounting holes and protrudes out of the first mounting hole.

[0018] According to some embodiments of the utility model, the flipping device further includes a second limiting member;

[0019] The second limiting member and the first limiting member are connected to the same clamped component at intervals;

[0020] The direction from the first limit member to the second limit member is the second direction. Along the second direction, the bracket has a plurality of first mounting holes distributed at intervals. Along the second direction, the plurality of clamps include the two outermost clamps. The first limit member and the second limit member are respectively connected to the two outermost clamps.

[0021] According to some embodiments of the utility model, the clamping assembly also includes an elastic member, one end of which is connected to the bracket, and the other end is connected to the clamping member. When the elastic member in one of the clamping assemblies is deformed, the elastic member applies a force toward the other clamping assembly to the corresponding clamping member.

[0022] According to some embodiments of the present invention, the second driving device includes a torque motor, and the torque motor is connected to at least one of the two brackets.

[0023] According to some embodiments of the utility model, the second driving device further comprises a screw rod, one of the two having a threaded hole, the screw rod is passed through the threaded hole and is threadedly connected to the corresponding bracket, and the screw rod is rotatably connected to the other bracket;

[0024] The first driving device is connected to any one of the brackets.

[0025] According to the second aspect of the present invention, the substrate processing system includes: the flipping device described in the first aspect.

[0026] The substrate processing system according to the embodiment of the utility model has at least the following beneficial effects:

[0027] In the flipping device of the first aspect embodiment, a first stopper is provided on the radial side of the rotation axis of the clamping assembly, and the first stopper is used to hold the side edge of the substrate. Therefore, when the flipping device of this embodiment is used to flip the substrate, the rotation direction of the clamping assembly is set according to the first stopper, so that after the substrate is flipped to a vertical state, the first stopper is located below the substrate and provides support for the substrate, thereby preventing the substrate from sliding and avoiding the substrate from falling. It can be seen that, compared with the conventional technology, in this embodiment, when the substrate is rotated to a vertical state, the first stopper can be used to provide a supporting force to the substrate, thereby reducing the friction between the clamping member and the substrate, thereby reducing the pressure applied by the clamping member to the substrate, and then on the premise of ensuring that the substrate is not easily crushed, it will not slide, thereby saving the substrate processing cost.

[0028] Additional aspects and advantages of the present invention will be given in part in the following description, and in part will become apparent from the following description, or will be learned through the practice of the present invention. BRIEF DESCRIPTION OF THE DRAWINGS

[0029] The present invention is further described below with reference to the accompanying drawings and embodiments, wherein:

[0030] Figure 1 It is a structural schematic diagram of a turning device according to the first embodiment of the utility model;

[0031] Figure 2 for Figure 1 Schematic diagram from another perspective;

[0032] Figure 3 It is a schematic diagram of the flip device clamping the substrate;

[0033] Figure 4 for Figure 3 A magnified schematic diagram of the middle A area;

[0034] Figure 5 for Figure 3 A magnified schematic diagram of the middle B area;

[0035] Figure 6 for Figure 3 A schematic diagram of the middle clamping assembly, the first limiting member and the second limiting member clamping the substrate;

[0036] Figure 7 for Figure 1 Schematic diagram of the clamping assembly.

[0037] Reference numerals:

[0038] Substrate 1000

[0039] Clamping assembly 100, A clamping assembly 100a, B clamping assembly 100b, bracket 110, first mounting hole 111, A bracket 110a, B bracket 110b, clamping member 120, clamping surface 121, elastic member 130,

[0040] A first driving device 200;

[0041] A second driving device 300, a torque motor 310, and a screw rod 320;

[0042] A first limiting member 400 and a first limiting surface 410;

[0043] Second limiting member 500, second limiting surface 510

[0044] Guide member 600. DETAILED DESCRIPTION

[0045] The embodiments of the present invention are described in detail below, and examples of the embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals throughout represent the same or similar elements or elements having the same or similar functions. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain the present invention, and cannot be understood as limiting the present invention.

[0046] In the description of the present invention, it should be understood that descriptions involving orientation, such as up, down, front, back, left, right, etc., indicating orientations or positional relationships, are based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present invention.

[0047] In the description of the present utility model, "several" means more than one, "many" means more than two, "greater than", "less than", "exceed" etc. are understood to exclude the number itself, and "above", "below", "within" etc. are understood to include the number itself. If there is a description of "first" or "second", it is only used to distinguish the technical features, and cannot be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features or implicitly indicating the order of the indicated technical features.

[0048] In the description of the present invention, unless otherwise clearly defined, terms such as setting, installing, connecting, etc. should be understood in a broad sense, and technicians in the relevant technical field can reasonably determine the specific meanings of the above terms in the present invention based on the specific content of the technical solution.

[0049] For example, during semiconductor processing, it is necessary to flip the substrate, and the substrate is, for example, a glass substrate or a silicon substrate. In the related art, a clamping device is used to clamp the opposite surfaces of the substrate for flipping. However, after the substrate is flipped to a vertical state, the substrate is fixed by the friction between the clamping device and the substrate. If the pressure between the clamping device and the substrate is too small, that is, the friction between the clamping device and the surface of the substrate is too small, the substrate may slip. If the pressure between the clamping device and the surface of the substrate is too large, the substrate may be easily crushed, which increases the cost of substrate processing.

[0050] Based on this, the first embodiment of the utility model proposes a flipping device, which can safely complete the flipping under the premise of ensuring that the substrate 1000 will not be crushed, thereby saving the processing cost of the substrate 1000. It should be noted that the flipping device of this embodiment is not limited to being applied to the flipping of the substrate 1000 in the semiconductor processing process, for example, it can also be applied to the flipping of the substrate 1000 in the photovoltaic or liquid crystal processing process, refer to Figures 1 to 3 , Figure 1This is a schematic diagram of the structure of the flipping device of the first embodiment of the utility model. Figure 2 for Figure 1 Another perspective diagram, Figure 3 Schematic diagram of the flipping device clamping a substrate. The flipping device of this embodiment includes: a clamping assembly 100, a first driving device 200 and a second driving device 300.

[0051] The flipping device includes two clamping assemblies 100 disposed opposite to each other, and the clamping assembly 100 includes a bracket 110 and a clamping member 120 (such as Figure 1 As shown), the clamping member 120 is connected to the bracket 110, and the clamping members 120 of the two clamping assemblies 100 are used to clamp the substrate 1000 together. The first driving device 200 is connected to at least one of the two clamping assemblies 100, and is used to drive the two clamping assemblies 100 to flip up and down together. The second driving device 300 is, for example, a cylinder, a hydraulic cylinder or a motor. The second driving device 300 is used to make the two clamping assemblies 100 selectively close to and away from each other, and when the second driving device 300 is a torque motor 310, during the working process, the torque output of the torque motor 310 itself is used as the thrust limit. When the torque is greater than the set value, the torque motor 310 automatically stops working, thereby preventing the substrate 1000 from being crushed. In addition, when clamping substrates 1000 of different thicknesses, there is no need to adjust the stroke of the clamping member 120. After the substrate 1000 is clamped, the clamping member 120 can automatically stop moving, so that the flipping device of this embodiment is more convenient to use. Furthermore, the torque motor 310 is used to drive the bracket 110 so that the speed of the bracket 110 is controllable, which can not only quickly respond to the clamping action but also reduce the impact speed on the substrate 1000 (i.e., accelerate first and then decelerate when approaching the substrate 1000), thereby preventing the substrate 1000 from being crushed.

[0052] The second driving device 300 is connected to at least one of the two clamping assemblies 100. For the convenience of description, the two clamping base assemblies are respectively referred to as A clamping assembly 100a and B clamping assembly 100b, the bracket 110 in the A clamping assembly 100a is referred to as A bracket 110a, and the bracket 110 in the B clamping assembly 100b is referred to as B bracket 110b (e.g. Figure 2 and Figure 1For example, in some embodiments, the flipping device further includes a connecting member, the A bracket 110a and the B bracket 110b are both connected to the connecting member, and at least one bracket 110 is slidably connected to the connecting member by a connection method such as a slide rail and a slider or a slider and a slide groove, such as the A bracket 110a is slidably connected to the bracket 110, the second driving device 300 is connected to the A bracket 110a, and is used to drive the A bracket 110a to move relative to the connecting member to adjust the distance between the A bracket 110a and the B bracket 110b, thereby achieving clamping and releasing of the substrate 1000, and the first driving device 200 is connected to the connecting member, and is used to drive the two brackets 110 to rotate together to flip the substrate 1000.

[0053] Alternatively, in some embodiments, the second driving device 300 further includes a screw rod 320 (eg Figure 2 As shown in the figure, the bracket 110 of one of the two clamping assemblies 100 has a threaded hole, the screw rod 320 is inserted into the threaded hole and is threadedly connected to the corresponding bracket 110, the screw rod 320 is rotatably connected to the other bracket 110, and the first driving device 200 is connected to any bracket 110. For example, the A bracket 110a has a threaded hole, the screw rod 320 is inserted into the threaded hole, and is threadedly connected to the A bracket 110a through a thread, and the screw rod 320 is rotatably connected to the B bracket 110b, so that when the first driving device 200 drives the screw rod 320 to rotate, the distance between the A bracket 110a and the B bracket 110b can be adjusted. Specifically, if the position of bracket B 110b is fixed, the screw rod 320 is passed through bracket B 110b and can rotate relative to bracket B 110b, thereby, during the rotation of the second drive device 300, bracket A 110a moves along the axial direction of the screw rod 320 and approaches or moves away from bracket B 110b; or, bracket A 110a is fixed, the screw rod 320 is passed through bracket B 110b and can rotate relative to bracket B 110b, and the second drive device 300 is connected to bracket B 110b. After the second drive device 300 drives the screw rod 320 to rotate, since the position of bracket A 110a is fixed, the screw rod 320 moves along its own axial direction and drives bracket B 110b to move closer to or away from bracket A 110a. In this embodiment, the screw rod 320 is used for driving, so that the distance between the A bracket 110a and the B bracket 110b can be adjusted, and the rigid connection between the A bracket 110a and the B bracket 110b can be achieved. Therefore, the first driving device 200 only needs to connect one of the A bracket 110a and the B bracket 110b to achieve the common rotation of the two, and there is no need to set up a connecting piece as in the above embodiment, so that the flip device structure of this embodiment is simpler and the cost is lower.

[0054] The flipping device also has a first stopper 400, at least one clamping assembly 100 is connected to the first stopper 400, and the first stopper 400 is located at the radial side of the rotation axis of the two clamping assemblies 100, and the first stopper 400 is used to abut the side edge of the substrate 1000. For example, the first stopper 400 is connected to the A bracket 110a, but is not limited to being connected only to the A bracket 110a, and it can also be connected to the B bracket 110b, or the A bracket 110a and the B bracket 110b are both connected to the first stopper 400, as long as the first stopper 400 is located at the radial side of the rotation axis of the clamping assembly 100 and can abut the side edge of the substrate 1000. In addition, the first stopper 400 can be directly connected to the bracket 110, and can also be indirectly connected to the bracket 110 through other structures (such as the first stopper 400 is connected to the clamping member 120 in the following implementation, and is indirectly connected to the bracket 110 through the clamping member 120).

[0055] Specifically, when the flipping device is used to flip the substrate 1000, the flipping direction of the clamping assembly 100 is set according to the first stopper 400, so that after the substrate 1000 is flipped to the vertical state, the first stopper 400 is located below the substrate 1000 and provides support for the substrate 1000, thereby preventing the substrate 1000 from sliding and preventing the substrate 1000 from falling. It can be seen that, compared with the conventional technology, in this embodiment, when the substrate 1000 is rotated to the vertical state, the first stopper 400 can be used to provide support force for the substrate 1000, thereby reducing the friction between the clamping member 120 and the substrate 1000, thereby reducing the pressure applied by the clamping member 120 to the substrate 1000, and then ensuring that the substrate 1000 is not easily crushed and will not slide, thereby saving the processing cost of the substrate 1000.

[0056] Reference Figures 3 to 5 , Figure 4 for Figure 3 A magnified schematic diagram of area A in the middle. Figure 5 for Figure 3An enlarged schematic diagram of area B in the middle, in some embodiments, the flipping device also includes a second limit member 500, and the second limit member 500 and the first limit member 400 are connected to the same clamping assembly 100 at an interval, or the second limit member 500 is connected to one clamping assembly 100, and the second limit member 500 is connected to another clamping assembly 100, and the first limit member 400 and the second limit member 500 are used to abut against opposite side edges of the substrate 1000. Specifically, it can be seen from the above embodiment that when the bracket 110 is only connected to the first limit member 400 for abutting the substrate 1000, during the flipping process, the flipping direction of the clamping assembly 100 needs to be set so that the first limit member 400 abuts against the bottom of the substrate 1000 when the substrate 1000 is flipped to a vertical state. Therefore, during the working process, after one flip, the clamping device needs to be reset before the second flip can be performed, which affects the processing efficiency of the substrate 1000. Based on this, in order to improve the processing efficiency of the substrate 1000, in this embodiment, the flipping device also includes a second limit member. 500, the second limit member 500 is spaced apart from the first limit member 400, and the second limit member 500 and the first limit member 400 are respectively used to abut against the two side edges of the substrate 1000 that are opposite to each other. Therefore, no matter how the substrate 1000 is flipped, when the substrate 1000 is in a vertical state, the first limit member 400 or the second limit member 500 can abut against the bottom of the substrate 1000. Therefore, the flipping device does not need to be reset during operation. After the previous substrate 1000 is flipped 180 degrees, the next substrate 1000 can be flipped immediately, thereby improving the processing efficiency of the substrate 1000.

[0057] Reference Figure 6 , Figure 6 for Figure 3 Schematic diagram of the clamping component, the first limit member and the second limit member clamping the substrate. In some embodiments, the clamping member 120 has a clamping surface 121, and the clamping surface 121 is used to press against the substrate 1000. The first direction is the direction from the bracket 110 to the clamping surface 121. The first limit member 400 has a first limit surface 410, and the second limit member 500 has a second limit surface 510. The second limit member 500 and the first limit member 400 are connected to the same clamped component 100 at an interval. Along the first direction, the distance between the first limit surface 410 and the second limit surface 510 gradually increases. Therefore, there are multiple different distances between the first limit surface 410 and the second limit surface 510, that is, the first limit surface 410 and the second limit surface 510 have multiple abutting points of different sizes, so that the first limit surface 410 and the second limit surface 510 can abut against the substrate 1000 within a certain size range, thereby improving the practicality of the flipping device of this embodiment.

[0058] In some embodiments, the first position-limiting member 400 and / or the second position-limiting member 500 may be movably connected to the corresponding bracket 110 , so that the distance between the first position-limiting member 400 and the second position-limiting member 500 is adjustable. Specifically, for example, the first limit member 400 and the second limit member 500 are connected to the same bracket 110 (such as bracket A 110a), and along the direction from the first limit member 400 to the second limit member 500 (the second direction), bracket A 110a has at least three spaced-apart mounting holes, the first limit member 400 and the second limit member 500 are inserted into the mounting holes, and the distance between the first limit member 400 and the second limit member 500 is adjusted by connecting the first limit member 400 and the second limit member 500 in different mounting holes; or, bracket A 110a has a mounting groove, the mounting groove has a profile extending along the second direction, the first limit member 400 and / or the second limit member 500 can be slidably disposed in the mounting groove, and can be locked to adjust the distance between the first limit member 400 and the second limit member 500. Therefore, during operation, the distance between the first limiting member 400 and the second limiting member 500 can be adjusted according to the size of the substrate 1000 to adapt to different substrates 1000, so as to improve the practicality of the flipping device of this embodiment.

[0059] When the first limit member 400 and the second limit member 500 are connected to different brackets 110, that is, the first limit member 400 is connected to bracket A 110a, and the second limit member 500 is connected to bracket B 110b, bracket A 110a and / or bracket B 110b have multiple mounting holes, or bracket A 110a and / or bracket B 110b have mounting grooves, or bracket A 110a has mounting holes and bracket B 110b has mounting grooves, it is sufficient to ensure that the first limit member 400 and the second limit member 500 are adjustable.

[0060] Reference Figure 7 , Figure 7 for Figure 1 Schematic diagram of the clamping assembly in FIG. 1 . In some embodiments, the clamping assembly 100 includes a plurality of clamping members 120, each of which is spaced apart from the other, and each of the plurality of clamping members 120 is detachably connected to the bracket 110. Thus, during operation, the clamping members 120 can be installed at different positions according to the substrate 1000, thereby avoiding special parts of the substrate 1000 and preventing special parts of the substrate 1000 from being worn, thereby improving the quality of the substrate 1000. Specifically, for example, in some embodiments, the bracket 110 has a plurality of first mounting holes 111, such as Figure 7The bracket 110 shown in the figure is in a "rice" shape, and a plurality of first mounting holes 111 are provided in each part of the "rice" shape. Each clamping member 120 is disposed in a first mounting hole 111. During the working process, the clamping member 120 can be disposed in different first mounting holes 111 according to the actual situation of the substrate 1000 to avoid special parts of the substrate 1000.

[0061] Referring to Figure 6 and Figure 7 , on the basis of the above embodiments, in some embodiments, the turning device further includes a second limiting member 500. The second limiting member 500 and the first limiting member 400 are spaced apart and connected to the same clamped component 100. Along the second direction, the bracket 110 has a plurality of first mounting holes 111 (as Figure 7 shown) distributed at intervals. Along the second direction, the plurality of clamping members 120 include two outermost clamping members 120. The first limiting member 400 and the second limiting member 500 are respectively connected to the two outermost clamping members 120. Thus, through the first mounting holes 111, the position of the clamping member 120 can be adjusted, and the distance between the position of the first limiting member 400 and the second limiting member 500 can also be adjusted, so that the structure of the turning device in this embodiment is simpler and the processing is more convenient, thereby reducing the cost of the turning device in this embodiment. In addition, connecting the first limiting member 400 and the second limiting member 500 to the clamping member 120 instead of connecting them to the bracket 110 alone can make the structure of the turning device simpler.

[0062] Referring to Figure 2In some embodiments, the clamping assembly 100 further includes an elastic member 130. The elastic member 130 may be any elastic member such as a tension spring or a compression spring. One end of the elastic member 130 is connected to the bracket 110, and the other end is connected to the clamping member 120. When the elastic member 130 in one clamping assembly 100 is deformed, the elastic member 130 applies a force toward the other clamping assembly 100 to the corresponding clamping member 120. Specifically, the clamping member 120 is connected with the elastic member 130 so that the clamping member 120 can float within a certain range. On the one hand, it can play a certain buffering role in the process of clamping the substrate 1000, reducing the risk of the substrate 1000 being crushed. On the other hand, it can make the clamping surfaces 121 of the multiple clamping members 120 not be in the same plane, thereby preventing the warping part of the substrate 1000 from being crushed due to excessive pressure during the processing. Specifically, due to the high temperature treatment during the processing of the substrate 1000, local warping occurs during the processing of the substrate 1000, resulting in a non-planar surface of the substrate 1000. Therefore, during the clamping process, if the clamping surfaces 121 of multiple clamping members 120 are coplanar, the pressure on the warped portion of the substrate 1000 will be too high, causing the substrate 1000 to be easily crushed. In the present embodiment, an elastic member 130 is connected between the clamping member 120 and the bracket 110, and the clamping member 120 can float, thereby allowing the clamping surfaces 121 of the multiple clamping members 120 to be located in different planes to adapt to the warped portion of the substrate 1000, thereby reducing the risk of the substrate 1000 being crushed.

[0063] In some embodiments, the flipping device also includes a guide member 600, one of the two brackets 110 has a guide hole, the guide member 600 is passed through the guide hole and is connected to the other bracket 110, and the guide member 600 can slide axially along the guide hole to improve the stability of the two brackets 110 during relative movement.

[0064] The substrate 1000 processing system of the second embodiment of the utility model comprises: the flipping device of the first embodiment. A first stopper 400 is arranged on the radial side of the rotation axis of the clamping assembly 100 in the flipping device, and the first stopper 400 is used to clamp the side edge of the substrate 1000. Therefore, when the flipping device of this embodiment is used to flip the substrate 1000, the rotation direction of the clamping assembly 100 is set according to the first stopper 400, so that after the substrate 1000 is flipped to a vertical state, the first stopper 400 is located below the substrate 1000 and provides support for the substrate 1000, thereby preventing the substrate 1000 from sliding and avoiding the substrate 1000 from falling. It can be seen that, compared with the conventional technology, in the present embodiment, after the substrate 1000 is rotated to a vertical state, the first limit member 400 can be used to provide support force to the substrate 1000, thereby reducing the friction between the clamping member 120 and the substrate 1000, thereby reducing the pressure applied by the clamping member 120 to the substrate 1000, and further ensuring that the substrate 1000 is not easily crushed and will not slip, thereby saving the processing cost of the substrate 1000.

[0065] It should be noted that, since this embodiment adopts the flipping device of the first embodiment, this embodiment has all the beneficial effects brought by the first embodiment, which will not be repeated here.

[0066] The above is a detailed description of the embodiment of the utility model in conjunction with the accompanying drawings, but the utility model is not limited to the above-mentioned embodiment, and various changes can be made without departing from the purpose of the utility model within the scope of knowledge possessed by ordinary technicians in the relevant technical field. In addition, in the description of the utility model, the description of the reference terms "one embodiment", "some embodiments", "illustrative embodiments", "examples", "specific examples", or "some examples" means that the specific features, structures, materials or characteristics described in conjunction with the embodiment or example are included in at least one embodiment or example of the utility model. In this specification, the schematic representation of the above terms does not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials or characteristics described can be combined in any one or more embodiments or examples in a suitable manner.

Claims

1. A turning device, characterized in that: include: A clamping assembly, wherein the flipping device comprises two clamping assemblies arranged opposite to each other, the clamping assembly comprises a bracket and a clamping member, the clamping member is connected to the bracket, and the clamping members of the two clamping assemblies are used to clamp the substrate together; A first driving device, connected to at least one of the two clamping assemblies, for driving the two clamping assemblies to flip up and down together; A second driving device, connected to at least one of the two clamping assemblies, for selectively moving the two clamping assemblies closer together and farther apart; A first limiting member, at least one of the clamping assemblies is connected with the first limiting member, and the first limiting member is located on the radial side of the rotation axis of the two clamping assemblies, and is used to abut against the side edge of the substrate.

2. The turning device according to claim 1, characterized in that: The flipping device also includes a second limiting member; The second limiting member and the first limiting member are connected to the same clamped component at intervals; or, The first limiting member is connected to one of the clamping assemblies, and the second limiting member is connected to the other of the clamping assemblies; The first limiting member and the second limiting member are used to abut against opposite side edges of the substrate.

3. The turning device according to claim 2, characterized in that: The clamping member has a clamping surface, the clamping surface is used to press against the substrate, and the first direction is the direction from the bracket to the clamping surface; The first limiting member has a first limiting surface, the second limiting member has a second limiting surface, the second limiting member and the first limiting member are spaced apart and connected to the same clamped component, and along the first direction, the distance between the first limiting surface and the second limiting surface gradually increases.

4. The turning device according to claim 2, characterized in that: The first limiting member and / or the second limiting member may be movably connected to the corresponding bracket, so that the distance between the first limiting member and the second limiting member is adjustable.

5. The turning device according to any one of claims 1 to 4, characterized in that: The clamping assembly comprises a plurality of clamping members, each of which is spaced apart from the other, and each of the clamping members is detachably connected to the bracket.

6. The turning device according to claim 5, characterized in that: The bracket has a plurality of first mounting holes, and each of the clamping members is disposed in one of the first mounting holes and protrudes out of the first mounting hole.

7. The turning device according to claim 5, characterized in that: The flipping device further includes a second limiting member; the second limiting member and the first limiting member are spaced apart and connected to the same clamped component; The direction from the first limit member to the second limit member is the second direction. Along the second direction, the bracket has a plurality of first mounting holes distributed at intervals. Along the second direction, the plurality of clamps include the two outermost clamps. The first limit member and the second limit member are respectively connected to the two outermost clamps.

8. The turning device according to claim 5, characterized in that: The clamping assembly also includes an elastic member, one end of which is connected to the bracket, and the other end is connected to the clamping member. When the elastic member in one of the clamping assemblies is deformed, the elastic member applies a force to the corresponding clamping member toward the other clamping assembly.

9. The turning device according to claim 1, characterized in that: The second driving device includes a torque motor connected to at least one of the two brackets.

10. The turning device according to claim 9, characterized in that: The second driving device further comprises a screw rod, one of the two screw rods has a threaded hole, the screw rod is passed through the threaded hole and is threadedly connected to the corresponding bracket, and the screw rod is rotatably connected to the other bracket; The first driving device is connected to any one of the brackets.

11. A substrate processing system, characterized in that: include: The turning device according to any one of claims 1 to 10.

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