Automatic foreign substance cleaning device used in LIS equipment

Abstract

The utility model provides an automatic foreign matter cleaning device used in LIS equipment. The automatic foreign matter cleaning device comprises a rack. A product is arranged at an opening in the top of the rack through a jig; an inlet of a material collecting hopper of the foreign matter collecting unit is located under a product mounting cavity in the jig; the blowing unit is arranged above the jig, the blowing unit and the receiving hopper are located on the same vertical plane, and the blowing unit and the receiving hopper move synchronously when the blowing unit moves; and an air blowing pipe in the material blowing unit is connected with an air pressure and vacuum control loop through an elbow interface. A product needing to be cleaned is placed in the jig, the air blowing pipe is arranged above the jig, the foreign matter collecting unit is arranged below the jig, and due to the fact that the air blowing pipe and the foreign matter collecting unit move synchronously, multi-style foreign matter cleaning work can be conducted on the outer surface of the product in a non-invasive mode, manual cleaning time is saved, and cleaning efficiency is improved. Moreover, the quality risk caused by the contact of personnel with the product can be reduced, and the product yield is improved to the greatest extent.

Description

Technical Field

[0001] The utility model relates to the field of semiconductor chip appearance detection, in particular to the field of automatic cleaning technology, and specifically is an automatic cleaning device for foreign matter in LIS equipment. Background Art

[0002] LIS equipment is product appearance inspection equipment. The company's initial yield, that is, the result of the first inspection, has been at a medium level for a long time, affecting the company's overall profits. The reason is that during the production process of a small number of products, due to the environment of the production workshop and the equipment for placing chips, various tiny foreign objects will inevitably stick to the surface of the product, while the actual product appearance and its electrical properties are normal. They are directly treated as scrap in the LIS project, wasting production costs.

[0003] Since the investigation cycle of the previous engineering production links is long and the problems that have occurred cannot be dealt with in time, the losses can only be recovered in the final link of the appearance inspection. Therefore, the current LIS equipment urgently needs to develop a set of equipment that automatically cleans foreign matter and does not require human intervention for improvement.

[0004] In addition, the following problems were found in the experiment of using brush cleaning method in the early stage of development:

[0005] 1. Direct contact between the brush and the product may damage the product surface and affect the quality and safety;

[0006] 2. The initial screening of brush materials meets ESD requirements. After half a month, the ESDElectro-Staticdischarge electrostatic discharge test sometimes fails to meet the standards and is not stable enough;

[0007] 3. After about 10 days of work, it was found that there was oil and foreign matter between the brushes, which may cause the risk of secondary pollution. The replacement of brush consumables increases the cost and the cost of regular manpower cleaning of the brushes. Summary of the invention

[0008] In view of the above-mentioned shortcomings of the prior art, the purpose of the present invention is to provide an automatic cleaning device for foreign matter in LIS equipment to solve the difficulties of the prior art.

[0009] In order to achieve the above-mentioned and other related purposes, the utility model provides an automatic cleaning device for foreign matter in LIS equipment, comprising:

[0010] A frame 1, wherein the top of the frame 1 is open and a cavity for accommodating a foreign matter collecting unit is formed inside;

[0011] A fixture 2, wherein a plurality of products to be cleaned are loaded in the fixture 2, and the products are arranged at the opening at the top of the frame 1 through the fixture 2;

[0012] A foreign matter collecting unit, wherein the entrance of the receiving hopper 3 of the foreign matter collecting unit is located directly below the product cavity installed in the fixture 2;

[0013] A blowing unit, which is arranged above the fixture 2 and is located on the same vertical plane as the receiving hopper 3. When moving, the blowing unit and the receiving hopper 3 move synchronously;

[0014] Air pressure and vacuum control circuit, the air blowing pipe 4 in the blowing unit is connected to the air pressure and vacuum control circuit through an elbow interface.

[0015] According to a preferred embodiment, a plurality of vertically penetrating grid holes 5 for mounting products are provided in the fixture 2 .

[0016] According to the preferred embodiment, support blocks 6 are installed around the top of the frame 1, and a connection end 7 is extended from the bottom of the support block 6 toward the side away from the fixture 2, and the connection end 7 is connected to the frame 1 through a bolt;

[0017] An L-shaped receiving groove 8 is formed on a side surface of the support block 6 facing the fixture 2 , and the corners of the support block 6 are arranged in the receiving groove 8 .

[0018] According to a preferred solution, the height of the support block 6 is greater than the height of the fixture 2 .

[0019] According to a preferred embodiment, the foreign matter collecting unit comprises:

[0020] A receiving hopper 3, wherein the receiving hopper 3 is conical in shape, with a large width at the top and a small width at the bottom;

[0021] A movable bottom plate 9, wherein the movable bottom plate 9 is horizontally mounted at the bottom of the receiving hopper 3, and both ends of the movable bottom plate 9 extend out of the two sides of the frame 1;

[0022] The linear movable guide rail 10 is installed on the inner side of the bottom of the frame 1 , and the slider is connected to the movable bottom plate 9 through a transition block 11 and drives the receiving hopper 3 to move along the starting position of the fixture 2 .

[0023] According to a preferred embodiment, the top feed port of the receiving hopper 3 is arranged close to the bottom of the fixture 2 .

[0024] According to a preferred embodiment, the blowing unit comprises:

[0025] An air blowing pipe 4, which is arranged on the top of the jig 2 in parallel with the direction of the feeding port of the receiving hopper 3;

[0026] Side support plates 12 , both ends of the air blowing pipe 4 are connected to the moving bottom plate 9 through the vertically installed side support plates 12 , and move synchronously with the movement of the moving bottom plate 9 .

[0027] According to the preferred embodiment, the air pressure and vacuum control circuit includes:

[0028] A main pressure regulating valve 13, wherein the air inlet end of the main pressure regulating valve 13 is connected to the compressed gas;

[0029] A filter 14, wherein the filter 14 is connected to the gas outlet path of the main pressure regulating valve 13;

[0030] The electromagnetic valve group 15 has one group connected to the air blowing pipe 4 and another group connected to the linear motion guide rail 10 .

[0031] According to a preferred solution, the remaining group of solenoid valves in the solenoid valve group 15 serves as a spare solenoid valve.

[0032] According to a preferred embodiment, the air pressure and vacuum control circuit further includes a vacuum generator 16 , which is installed between the solenoid valve group 15 and the filter 14 .

[0033] The utility model places the product to be cleaned in a fixture, arranges an air blowing pipe above the fixture, and configures a foreign matter collection unit below the fixture. Since the air blowing pipe and the foreign matter collection unit move synchronously, it can realize non-invasive cleaning of various foreign matters on the outer surface of the product, saves manpower cleaning time, and can reduce the quality risk caused by personnel contacting the product, thereby improving the product yield to the greatest extent; specifically, it includes the following points:

[0034] 1. No additional manpower is required for manual cleaning, the equipment automatically cleans the product surface and saves manpower;

[0035] 2. 100% removal of foreign matter on products in the workshop can be achieved;

[0036] 3. No secondary pollution will be caused to the product.

[0037] The best embodiment of the present invention will be described in more detail below in conjunction with the accompanying drawings so that the features and advantages of the present invention can be easily understood. BRIEF DESCRIPTION OF THE DRAWINGS

[0038] Figure 1 The display is a three-dimensional structural schematic diagram of the utility model;

[0039] Figure 2 Shown is a partial three-dimensional structural schematic diagram of the utility model;

[0040] Figure 3 Shown is an enlarged schematic diagram of the three-dimensional structure of the support block in the utility model;

[0041] Figure 4 Shown is a three-dimensional diagram of the internal structure of the utility model;

[0042] Figure 5 It shows an enlarged schematic diagram of the three-dimensional structure of the foreign matter collecting unit and the blowing unit in the utility model;

[0043] Figure 6 The display is a front view of the air pressure and vacuum control circuit in the utility model;

[0044] Description of symbols

[0045] 1. Frame; 2. Fixture; 3. Material collecting hopper; 4. Air blowing pipe; 5. Grille hole; 6. Support block; 7. Connection end; 8. Receiving groove; 9. Moving bottom plate; 10. Linear moving guide rail; 11. Transition block; 12. Side support plate; 13. Main pressure regulating valve; 14. Filter; 15. Solenoid valve group; 16. Vacuum generator. DETAILED DESCRIPTION

[0046] In order to make the purpose, technical solution and advantages of the technical solution of the utility model clearer, the technical solution of the embodiment of the utility model will be clearly and completely described in conjunction with the drawings of the specific embodiments of the utility model. The same figure marks in the drawings represent the same parts. It should be noted that the described embodiments are part of the embodiments of the utility model, not all of the embodiments. Based on the described embodiments of the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0047] Compared with the embodiments shown in the drawings, feasible implementations within the scope of protection of the present invention may have fewer components, other components not shown in the drawings, different components, differently arranged components, or differently connected components, etc. In addition, two or more components in the drawings may be implemented in a single component, or a single component shown in the drawings may be implemented as multiple separate components.

[0048] Unless otherwise defined, the technical terms or scientific terms used herein shall have the usual meanings understood by persons with ordinary skills in the field to which the utility model belongs. The words "first", "second" and similar words used in the specification and claims of the utility model patent application do not indicate any order, quantity or importance, but are only used to distinguish different components. Similarly, words such as "one" or "one" do not necessarily indicate quantity restrictions. Words such as "include" or "comprise" mean that the elements or objects appearing before the word include the elements or objects listed after the word and their equivalents, without excluding other elements or objects. Words such as "connect" or "connected" are not limited to physical or mechanical connections, but may include electrical connections, whether direct or indirect. "Up", "down", "left", "right" and the like are only used to indicate relative positional relationships. When the absolute position of the described object changes, the relative positional relationship may also change accordingly.

[0049] The utility model proposes an automatic cleaning device for foreign matter in LIS equipment, which is used to clean foreign matter on the surface of products. The utility model does not limit the type of chips, but the structure of the automatic cleaning device for foreign matter in LIS equipment is particularly suitable for identifying situations where non-damage appearance defects lead to scrapping before packaging.

[0050] In general, the automatic cleaning device for foreign matter in LIS equipment proposed by the utility model mainly includes a frame 1, a fixture 2, a foreign matter collection unit, a blowing unit and an air pressure and vacuum control circuit. Figure 1 , which shows the arrangement relationship of the frame 1, the fixture 2, the foreign matter collecting unit, the blowing unit and the air pressure and vacuum control circuit.

[0051] In order to achieve the purpose of developing a set of equipment for automatically cleaning foreign matter without manual intervention for improvement, the problem in the background technology that various fine foreign matter sticks to the surface of the product during the production process is inevitably solved due to the influence of the environment of the production workshop and the equipment for placing chips, while the actual product appearance and electrical properties are normal, and the LIS project directly treats it as scrapped, wasting production costs; because the previous project production links have a long investigation cycle and cannot deal with the problems that have occurred in time, and the losses can only be saved in the last link of the appearance inspection, so the current LIS equipment urgently needs to develop a set of equipment for automatically cleaning foreign matter without manual intervention for improvement. For this reason, in the technical solution provided by this embodiment, the product to be cleaned is placed in the fixture 2, and the air blowing pipe 2 is arranged above the fixture 2, and the foreign matter collection unit is arranged below the fixture 2. Since the air blowing pipe 2 and the foreign matter collection unit move synchronously, it can realize non-invasive cleaning of various foreign matter on the outer surface of the product, saving manpower cleaning time, and reducing the quality risk caused by personnel contacting the product, thereby maximizing the product yield.

[0052] Specifically, Figure 1 As shown, the top of the frame 1 is open and a jig 2 with multiple products to be cleaned is installed therein through a support block 6. A cavity for accommodating a foreign matter collection unit is formed inside the frame 1, wherein an entrance of a receiving hopper 3 of the foreign matter collection unit is located directly below the cavity in which the product is installed in the jig 2, and the blowing unit is arranged above the jig 2 and is located on the same vertical plane as the receiving hopper 3. When in use, the blowing pipe 4 in the blowing unit is connected to the air pressure and vacuum control circuit through an elbow interface to remove foreign matter on the surface of the product in the jig 2 below. Since the receiving hopper 3 and the blowing pipe 4 in the foreign matter collection unit and the blowing unit move synchronously, the removed foreign matter can be filtered and sucked into the collecting hopper 3 at the bottom in time; when the product after the foreign matter is removed is grasped and transferred by a robot, it is subjected to a secondary inspection again, and the function of automatic re-testing is realized in conjunction with the automation equipment, thereby saving the scrapped product.

[0053] Since foreign matter may exist on both the front and bottom surfaces of the product, in order to facilitate the cleaning of both surfaces, the fixture 2 provided in this embodiment is provided with a plurality of vertically penetrating grille holes 5 for mounting the product, and the air blow pipe 4 blows air vertically downward correspondingly, which can remove foreign matter on both sides of the product when moving. After practice, the above method can achieve 100% removal of foreign matter in our company's workshop.

[0054] As mentioned above, the present embodiment adopts the airflow cleaning method. The contactless cleaning method of the product can ensure the quality of the product, and since there is no contact with the product, there is no electrostatic threat and no electrostatic testing step is required. However, it is necessary to ensure that the fixture 2 does not move during the influence of the airflow. On the one hand, the size and angle of the cleaning airflow can be adjusted to avoid the situation where the product is blown away. On the other hand, support blocks 6 for installing the fixture 2 are respectively installed around the top of the frame 1, wherein the bottom of the support block 6 extends a connecting end 7 toward the side away from the fixture 2, and the connecting end 7 is connected to the frame 1 through a bolt to ensure the stability of the support block 6 itself, and an L-shaped receiving groove 8 is formed on the side of the support block 6 facing the fixture 2, and the corners of the support block 6 are arranged in the receiving groove 8, which can play a role in the stability of the fixture 2 loaded in the support block 6.

[0055] What needs to be specifically explained is the structure of the blowing unit and the foreign matter collecting unit for cleaning and collecting foreign matter on the surface of the product, wherein a receiving hopper 3 is arranged in the foreign matter collecting unit, and the top feed port of the receiving hopper 3 is arranged close to the bottom of the jig 2, wherein the receiving hopper 3 is arranged in a conical shape, with a large top width and a small bottom width, which can facilitate the rapid collection and concentration of foreign matter after cleaning the top at the bottom, and avoid the flying of foreign matter during movement; the blowing pipe 4 in the blowing unit is arranged on the top of the jig 2 parallel to the direction of the feed port of the receiving hopper 3.

[0056] Taking into account the parallel movement between the air blowing pipe 4 and the receiving hopper 3, a linear movable guide rail 10 is used as the power source. The linear movable guide rail 10 is installed on the inner side of the bottom of the frame 1. The linear movable guide rail 10 is connected to the transition block 11 on the top through a slider to compensate for the height difference between the linear movable guide rail 10 and the receiving hopper 3. In addition, in order to realize the linkage movement, the bottom plate 9 is horizontally installed at the bottom of the receiving hopper 3, and the two ends extend out of the two sides of the frame 1. The two ends of the air blowing pipe 4 are respectively connected to the moving bottom plate 9 through the vertically installed side support plates 12, so that the air blowing pipe 4 can move synchronously with the movement of the moving bottom plate 9.

[0057] On this basis, in order to achieve the effect of non-contact airflow cleaning of foreign matter, the air pressure and vacuum control circuit includes a main pressure regulating valve 13, a filter 14 and a solenoid valve group 15. The air inlet end of the main pressure regulating valve 13 is connected to the compressed gas, the filter 14 is connected to the air outlet path of the main pressure regulating valve 13, and the vacuum generator 16 is installed between the solenoid valve group 15 and the filter 14. One group of the solenoid valve group 15 is connected to the air blowing pipe 4, another group is connected to the linear moving guide rail 10, and another group is used as a backup solenoid valve.

[0058] The above embodiments are merely illustrative of the principles and effects of the present invention, and are not intended to limit the present invention. Anyone familiar with the technology may modify or alter the above embodiments without departing from the spirit and scope of the present invention. Therefore, all equivalent modifications or alterations made by a person of ordinary skill in the art without departing from the spirit and technical concept disclosed in the present invention shall still be covered by the claims of the present invention.

Claims

1. An automatic cleaning device for foreign matter in LIS equipment, characterized in that: include: A frame (1), wherein the top of the frame (1) is open and a cavity for accommodating a foreign matter collecting unit is formed inside; A jig (2), wherein a plurality of products to be cleaned are loaded in the jig (2), and the products are arranged at an opening at the top of the frame (1) through the jig (2); A foreign matter collecting unit, wherein the entrance of the receiving hopper (3) of the foreign matter collecting unit is located directly below the product cavity installed in the fixture (2); A blowing unit, the blowing unit is arranged above the jig (2) and is located on the same vertical plane as the receiving hopper (3), and the blowing unit and the receiving hopper (3) move synchronously when moving; An air pressure and vacuum control circuit is provided, wherein the air blowing pipe (4) in the blowing unit is connected to the air pressure and vacuum control circuit via an elbow interface.

2. The automatic cleaning device for foreign matter in LIS equipment according to claim 1, characterized in that: The fixture (2) is provided with a plurality of vertically penetrating grid holes (5) for mounting products.

3. The automatic cleaning device for foreign matter in LIS equipment according to claim 2, characterized in that: Support blocks (6) are respectively installed around the top of the frame (1); a connection end (7) extends from the bottom of the support block (6) toward a side away from the fixture (2); and bolts are passed through the connection end (7) to connect with the frame (1); An L-shaped receiving groove (8) is formed on a side surface of the support block (6) facing the fixture (2), and the corners of the support block (6) are arranged in the receiving groove (8).

4. The automatic cleaning device for foreign matter in LIS equipment according to claim 3, characterized in that: The foreign matter collecting unit comprises: A material receiving hopper (3), wherein the material receiving hopper (3) is arranged in a conical shape, with a large width at the top and a small width at the bottom; A movable bottom plate (9), wherein the movable bottom plate (9) is horizontally mounted at the bottom of the receiving hopper (3), and the two ends of the movable bottom plate (9) extend out of the two sides of the frame (1); A linear movable guide rail (10) is installed on the inner side of the bottom of the frame (1), and a slide block is connected to the movable bottom plate (9) through a transition block (11) and drives the receiving hopper (3) to move along the starting position of the fixture (2).

5. The automatic cleaning device for foreign matter in LIS equipment according to claim 4, characterized in that: The blowing unit comprises: An air blowing pipe (4), wherein the air blowing pipe (4) is arranged on the top of the jig (2) parallel to the direction of the inlet of the receiving hopper (3); Side support plates (12), both ends of the air blowing pipe (4) are connected to the movable bottom plate (9) through the vertically installed side support plates (12) and move synchronously with the movement of the movable bottom plate (9).

6. The automatic cleaning device for foreign matter in LIS equipment according to claim 5, characterized in that: The air pressure and vacuum control circuit includes: A main pressure regulating valve (13), wherein the gas inlet end of the main pressure regulating valve (13) is connected to compressed gas; A filter (14), wherein the filter (14) is connected to the gas outlet path of the main pressure regulating valve (13); A solenoid valve group (15), wherein one group of the solenoid valve groups (15) is connected to the air blowing pipe (4), and the other group is connected to the linear motion guide rail (10).

7. The automatic cleaning device for foreign matter in LIS equipment according to claim 6, characterized in that: The air pressure and vacuum control circuit also includes a vacuum generator (16), which is installed between the solenoid valve group (15) and the filter (14).

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