Rigid-flexible coupling platform with deviation rectifying function

Abstract

The utility model relates to the technical field of motion platforms, in particular to a rigid-flexible coupling platform with a deviation rectifying function. In order to solve the problem that the precision is reduced due to the fact that deformation of flexible hinges on the two sides is different due to the fact that the friction force of a guide rail, the rigidity of the flexible hinges, motor installation and the like are affected by manufacturing errors, the interior of the platform deflects, the following technical scheme is provided: the platform comprises a base and a first platform arranged above the base; the two groups of first linear motors are mounted at the top of the base and are used for driving the first platform to move; and the first limiting assemblies are arranged between the base and the first platform and are used for limiting when the first platform moves. According to the rigid-flexible coupling platform, the problems that the rigid-flexible coupling platform deforms due to friction of the guide rail and deforms asymmetrically due to rigidity of the rigid-flexible hinge and eccentricity of the motor are solved, and manufacturing and mounting errors of perpendicularity and parallelism can be compensated through tiny angle adjustment.

Description

Technical Field

[0001] The utility model relates to the technical field of motion platforms, in particular to a rigid-flexible coupling platform with a deviation correction function. Background Art

[0002] Precision detection and precision manufacturing require motion platforms to have sub-micron or even nanometer precision. However, existing platforms are affected by the friction of the guide rails, and their precision is limited. Existing technologies have proposed rigid-flexible coupling motion platforms, which use flexible hinges to isolate the influence of friction. In theory, the accuracy of grating feedback can be achieved. However, the friction of the guide rails, the stiffness of the flexible hinges, the installation of the motor, etc. are all inconsistent due to manufacturing errors, resulting in different deformations of the flexible hinges on both sides, which causes deflection inside the platform and reduces precision. In addition, most of the equipment is composed of multi-axis platforms, and there are requirements for verticality or parallelism between the platforms. Due to manufacturing and installation errors, they can only be compensated by control programs. In view of this, the utility model proposes a rigid-flexible coupling platform with a correction function. Utility Model Content

[0003] The purpose of the utility model is to propose a rigid-flexible coupling platform with a correction function to address the problem in the background technology that the guide rail friction, flexible hinge stiffness, motor installation, etc. are affected by manufacturing errors, resulting in different deformations of the flexible hinges on both sides, thereby causing deflection inside the platform and reducing the accuracy.

[0004] The technical solution of the utility model: a rigid-flexible coupling platform with a correction function, comprising a base and a first platform arranged above the base; two groups of first linear motors installed on the top of the base for driving the first platform to move; at least two groups of first limit components, the first limit components are arranged between the base and the first platform to limit when the first platform moves, the first limit components include a first guide rail installed on the top of the base, and at least two groups of first sliders are slidably connected to the first guide rail; multiple groups of flexible hinges, the flexible hinges are installed in the first platform and are respectively fixedly connected to the multiple groups of first sliders; two groups of first sensors are arranged below the first platform for monitoring the deformation deviation of the first platform, and the two groups of first sensors are symmetrically arranged.

[0005] Optionally, two groups of the first linear motors are symmetrically arranged on the top of the base, and the output ends of the two groups of the first linear motors are respectively fixedly connected to a group of first connecting plates, and the two groups of the first connecting plates are fixedly connected to the bottom of the first platform.

[0006] Optionally, a plurality of through slots are provided on the first platform, positions of the through slots correspond to the first slider and the flexible hinges, and the plurality of flexible hinges are respectively installed in the plurality of through slots.

[0007] Optionally, the flexible hinge includes a connecting block and a connecting plate, the connecting block is arranged at the center of the through slot, the connecting block is fixedly connected to the first slider, both sides of the connecting block are fixedly connected to the inner wall of the through slot with at least two groups of connecting plates, and the connecting plate is perpendicular to the first guide rail.

[0008] Optionally, the first linear motor is arranged parallel to the first guide rail.

[0009] Optionally, a first mounting plate is fixedly connected to one side of the first sensor, and the first mounting plate is installed at the bottom of the first platform.

[0010] Optionally, it also includes a second platform arranged above the first platform, and at least two groups of symmetrically arranged second limit assemblies are also installed on the top of the first platform. The second limit assemblies include a second guide rail installed on the top of the first platform, and at least two groups of second sliders are slidably connected to the second guide rail. The second slider is fixedly connected to the second platform through a flexible hinge, and the connecting piece arranged in the second platform is perpendicular to the second guide rail.

[0011] Optionally, the first guide rail and the second guide rail are perpendicular to each other.

[0012] Optionally, a second linear motor installed on the top of the first platform is also provided between the two groups of the second limit assemblies, and the moving end of the second linear motor is fixedly connected to a second connecting plate installed on the bottom of the second platform, and the second linear motor is perpendicular to the first linear motor.

[0013] Optionally, a second sensor for monitoring the deformation deviation of the second platform is further provided below the second platform, and one side of the second sensor is fixedly connected to a second mounting plate installed at the bottom of the second platform.

[0014] Compared with the prior art, the utility model has the following beneficial technical effects:

[0015] The utility model can drive the first platform to move smoothly after the first linear motor is started by setting the first limit assembly, and can drive the second platform to move smoothly after the second linear motor is started by setting the second limit assembly, thereby realizing multi-directional movement of the second platform;

[0016] Furthermore, by setting the first sensor, the deformation deviation of the first platform is measured in real time, and the first linear motor is used to compensate for it, thereby eliminating the deviation caused by friction, the stiffness of the flexible hinge and the motor installation position; when there is a deviation in verticality or parallelism, the first linear motor is measured and the dual first linear motors are controlled, and the deviation angle is formed through the deformation difference of the flexible hinge, thereby realizing compensation for straightness or parallelism;

[0017] In summary, the utility model solves the problem of asymmetric deformation of the rigid-flexible coupling platform caused by friction deformation of the guide rail, stiffness of the rigid-flexible hinge, and motor eccentricity, and can also compensate for manufacturing and installation errors of verticality and parallelism through slight angle adjustment. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] Figure 1 This is a schematic diagram of the structure of the first embodiment of the utility model;

[0019] Figure 2 for Figure 1 A schematic diagram of the cross-sectional structure of;

[0020] Figure 3 for Figure 1 A top view schematic diagram of

[0021] Figure 4 This is a schematic diagram of the structure of the second embodiment of the present utility model;

[0022] Figure 5 This is a schematic diagram of the structure of the third embodiment of the present utility model;

[0023] Figure 6 This is a schematic structural diagram of the fourth embodiment of the present utility model.

[0024] Reference numerals:

[0025] 1. base; 2. first platform; 21. through slot;

[0026] 3. A first linear motor; 31. A first connecting plate;

[0027] 4. First limit assembly; 41. First guide rail; 42. First slide block;

[0028] 5. Flexible hinge; 51. Connecting block; 52. Connecting piece;

[0029] 6. a first sensor; 61. a first mounting plate;

[0030] 7. second platform; 8. second position-limiting assembly; 81. second guide rail; 82. second slide block;

[0031] 9. A second linear motor; 91. A second connecting plate;

[0032] 10. Second sensor; 11. Second mounting plate. DETAILED DESCRIPTION

[0033] The technical solution of the present utility model will be clearly and completely described below in conjunction with the accompanying drawings. Obviously, the described embodiments are only part of the embodiments of the present utility model, rather than all of the embodiments.

[0034] The components of the embodiments of the present invention generally described and shown in the drawings herein can be arranged and designed in various different configurations. Therefore, the following detailed description of the embodiments of the present invention provided in the drawings is not intended to limit the scope of the claimed invention, but merely represents selected embodiments of the present invention.

[0035] Based on the embodiments of the present utility model, all other embodiments obtained by ordinary technicians in the field without making any creative work shall fall within the scope of protection of the present utility model.

[0036] In the description of the present invention, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc., indicating the orientation or positional relationship, are based on the orientation or positional relationship shown in the drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as limiting the present invention. In addition, the terms "first", "second", and "third" are used for descriptive purposes only, and cannot be understood as indicating or implying relative importance.

[0037] In the description of the present invention, it should be noted that, unless otherwise clearly specified and limited, the terms "installation", "connection" and "connection" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or it can be indirectly connected through an intermediate medium, or it can be the internal communication of two components. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0038] Embodiment 1

[0039] like Figure 1 and Figure 2 As shown, the utility model proposes a rigid-flexible coupling platform with a deviation correction function, including a base 1 and a first platform 2 arranged above the base 1. Two groups of first linear motors 3 are installed on the top of the base 1 to drive the first platform 2 to move, and the two groups of first linear motors 3 are symmetrically arranged on the top of the base 1. The output ends of the two groups of first linear motors 3 are respectively fixedly connected with a group of first connecting plates 31, and the two groups of first connecting plates 31 are fixedly connected to the bottom of the first platform 2. The first linear motor 3 drives the first platform 2 to move after starting. The linear motor belongs to the existing technology and will not be described in detail here.

[0040] Furthermore, the rigid-flexible coupling platform includes two groups of first limiting components 4, which are arranged between the base 1 and the first platform 2 to limit the first platform 2 when it moves. The first limiting component 4 includes a first guide rail 41 installed on the top of the base 1, and two groups of first sliders 42 are slidably connected to the first guide rail 41. When the first platform 2 moves, it drives the first slider 42 to move synchronously, so that the first platform 2 is limited by the first guide rail 41 and the first slider 42 when it moves, so that the movement of the first platform 2 is stable. At the same time, due to the different positions of the objects placed on the first platform 2, the friction between the two groups of first sliders 42 and the first guide rail 41 is different, and then their wear degrees are different. During long-term use, the difference in friction may increase due to the different wear degrees, thereby causing the first platform 2 to deform and deviate during movement. The first linear motor 3 is arranged in parallel with the first guide rail 41 to facilitate driving the first platform 2 to move.

[0041] For further information, see Figure 3 The rigid-flexible coupling platform also includes a plurality of flexible hinges 5, which are installed in the first platform 2 and fixedly connected to the plurality of first sliders 42, respectively. The first platform 2 is provided with a plurality of through slots 21, which are convenient for setting the flexible hinges 5. The positions of the through slots 21 correspond to the first sliders 42 and the flexible hinges 5, and the plurality of flexible hinges 5 are respectively installed in the plurality of through slots 21. The flexible hinge 5 includes a connecting block 51 and a connecting sheet 52, the connecting block 51 is arranged at the center of the through slot 21, the connecting block 51 is fixedly connected to the first slider 42, and two sets of connecting sheets 52 are fixedly connected to the inner wall of the through slot 21 on both sides of the connecting block 51, and the connecting sheet 52 is perpendicular to the first guide rail 41. When the first slider 42 is affected by friction and the moving distance is not synchronized with the first platform 2, the connecting sheet 52 is bent, so that the first platform 2 remains relatively stable.

[0042] Specifically, the above-mentioned rigid-flexible coupling platform includes two groups of first sensors 6 arranged under the first platform 2 for monitoring the deformation deviation of the first platform 2. The two groups of first sensors 6 are symmetrically arranged. One side of the first sensor 6 is fixedly connected with a first mounting plate 61, and the first mounting plate 61 is installed at the bottom of the first platform 2. The first sensor 6 can adopt a grating scale or a magnetic scale to monitor the deformation deviation of the first platform 2 in real time, and eliminate the deviation caused by friction, stiffness of the connecting plate 52 and the installation position of the first linear motor 3 through compensation by two groups of first linear motors 3.

[0043] In this embodiment, the two groups of first linear motors 3 are synchronously started to drive the first platform 2 to move. At this time, the first platform 2 is slidably connected to the two groups of first guide rails 41 through the four groups of first sliders 42 at the bottom to limit the movement of the first platform 2. At the same time, the deformation deviation of the first platform 2 is monitored in real time by the first sensor 6, and the deviation caused by the friction force, the stiffness of the connecting piece 52 and the installation position of the first linear motor 3 is eliminated through compensation by the two groups of first linear motors 3.

[0044] Embodiment 2

[0045] like Figure 4 As shown, based on the first embodiment, the rigid-flexible coupling platform includes two groups of first limiting components 4, which are arranged between the base 1 and the first platform 2 to limit the first platform 2 when it moves. The first limiting component 4 includes a first guide rail 41 installed on the top of the base 1, and three groups of first sliders 42 are slidably connected to the first guide rail 41. When the first platform 2 moves, the first slider 42 is driven to move synchronously, so that the first platform 2 is limited by the first guide rail 41 and the first slider 42 when it moves, so that the first platform 2 moves smoothly. The first linear motor 3 is arranged in parallel with the first guide rail 41 to facilitate driving the first platform 2 to move.

[0046] In this embodiment, the two groups of first linear motors 3 are started synchronously to drive the first platform 2 to move. At this time, the first platform 2 is slidably connected to the two groups of first guide rails 41 through the six groups of first sliders 42 at the bottom to limit the movement of the first platform 2, and at the same time, it has a greater bearing capacity than the first embodiment. At the same time, the deformation deviation of the first platform 2 is monitored in real time by the first sensor 6, and the deviation caused by the friction, the stiffness of the connecting piece 52 and the installation position of the first linear motor 3 is eliminated through compensation by the two groups of first linear motors 3.

[0047] Embodiment 3

[0048] like Figure 5 As shown, based on the above-mentioned embodiment 1 or embodiment 2, the above-mentioned rigid-flexible coupling platform includes three groups of first limiting components 4, and the first limiting components 4 are arranged between the base 1 and the first platform 2 to limit the position when the first platform 2 moves. The first limiting component 4 includes a first guide rail 41 installed on the top of the base 1, and two groups of first sliders 42 are slidably connected to the first guide rail 41. When the first platform 2 moves, the first slider 42 is driven to move synchronously, so that the first platform 2 is limited by the first guide rail 41 and the first slider 42 when moving, so that the first platform 2 moves smoothly. The first linear motor 3 is arranged in parallel with the first guide rail 41, which is convenient for driving the first platform 2 to move.

[0049] In this embodiment, two groups of first linear motors 3 are started synchronously to drive the first platform 2 to move. At this time, the first platform 2 is slidably connected to the three groups of first guide rails 41 through the six groups of first sliders 42 at the bottom to limit the movement of the first platform 2. At the same time, compared with the first embodiment, it has a greater bearing capacity, and the middle position of the first platform 2 will not be deformed after bearing a heavy weight. At the same time, the deformation deviation of the first platform 2 is monitored in real time by the first sensor 6, and the deviation caused by the friction, the stiffness of the connecting piece 52 and the installation position of the first linear motor 3 is eliminated through compensation by the two groups of first linear motors 3.

[0050] Embodiment 4

[0051] like Figure 6 As shown, based on the above-mentioned embodiment 1, embodiment 2 or embodiment 3, the above-mentioned rigid-flexible coupling platform also includes a second platform 7 arranged above the first platform 2, and two groups of symmetrically arranged second limiting components 8 are also installed on the top of the first platform 2. The second limiting component 8 includes a second guide rail 81 installed on the top of the first platform 2, and two groups of second sliders 82 are slidably connected on the second guide rail 81. The second slider 82 is fixedly connected to the second platform 7 through a flexible hinge 5, and the second platform 7 is smoothly moved by the limiting action of the second guide rail 81 and the second slider 82. And the connecting piece 52 arranged in the second platform 7 is perpendicular to the second guide rail 81, which is used to buffer the friction force on the second slider 82. The first guide rail 41 and the second guide rail 81 are perpendicular to each other, and are used to adjust the position of the second platform 7 in two directions, so that the second platform 7 can be moved to any position within the adjustment range. A second linear motor 9 installed on the top of the first platform 2 is also arranged between the two groups of second limiting components 8, and the moving end of the second linear motor 9 is fixedly connected to a second connecting plate 91 installed at the bottom of the second platform 7, and the second linear motor 9 is used to drive the second platform 7 to move. The second linear motor 9 is perpendicular to the first linear motor 3. A second sensor 10 for monitoring the deformation deviation of the second platform 7 is also provided under the second platform 7. One side of the second sensor 10 is fixedly connected to a second mounting plate 11 installed at the bottom of the second platform 7. The second sensor 10 is used to monitor the deformation deviation of the second platform 7 in real time, and eliminate the deviation caused by friction, stiffness of the connecting plate 52 and the installation position of the second linear motor 9 through compensation by the second linear motor 9.

[0052] In this embodiment, after starting, the first linear motor 3 drives the first platform 2 to move under the limiting action of the first limiting assembly 4, and after starting, the second linear motor 9 drives the second platform 7 to move under the limiting action of the second limiting assembly 8, so that the second platform 7 can be adjusted in multiple directions and is easy to move to any position. At the same time, the deformation deviation of the second platform 7 is monitored in real time by the second sensor 10, and the deviation caused by the friction, the stiffness of the connecting piece 52 and the installation position of the second linear motor 9 is eliminated through compensation by the second linear motor 9.

[0053] The above-mentioned specific embodiments are only several optional embodiments of the present invention. Based on the technical solution of the present invention and the relevant inspiration of the above-mentioned embodiments, those skilled in the art can make various alternative improvements and combinations to the above-mentioned specific embodiments.

Claims

1. A rigid-flexible coupling platform with a deviation correction function, characterized in that: include: A base (1) and a first platform (2) arranged above the base (1); Two sets of first linear motors (3) installed on the top of the base (1) and used to drive the first platform (2) to move; At least two groups of first limiting components (4), the first limiting components (4) being arranged between the base (1) and the first platform (2) to limit the position when the first platform (2) moves, the first limiting components (4) comprising a first guide rail (41) mounted on the top of the base (1), and at least two groups of first sliding blocks (42) being slidably connected to the first guide rail (41); A plurality of groups of flexible hinges (5), wherein the flexible hinges (5) are installed in the first platform (2) and are respectively fixedly connected to the plurality of groups of first sliding blocks (42); Two groups of first sensors (6) are arranged below the first platform (2) for monitoring deformation deviation of the first platform (2), and the two groups of first sensors (6) are symmetrically arranged.

2. The rigid-flexible coupling platform with deviation correction function according to claim 1, characterized in that: Two groups of the first linear motors (3) are symmetrically arranged on the top of the base (1); the output ends of the two groups of the first linear motors (3) are respectively fixedly connected to a group of first connecting plates (31); and the two groups of the first connecting plates (31) are both fixedly connected to the bottom of the first platform (2).

3. The rigid-flexible coupling platform with a deviation correction function according to claim 2, characterized in that: The first platform (2) is provided with a plurality of through slots (21), the positions of the through slots (21) correspond to the first slider (42) and the flexible hinge (5), and the plurality of flexible hinges (5) are respectively installed in the plurality of through slots (21).

4. The rigid-flexible coupling platform with a deviation correction function according to claim 3, characterized in that: The flexible hinge (5) comprises a connecting block (51) and a connecting piece (52); the connecting block (51) is arranged at the center of the through slot (21); the connecting block (51) is fixedly connected to the first sliding block (42); at least two groups of connecting pieces (52) are fixedly connected to the inner wall of the through slot (21) on both sides of the connecting block (51); and the connecting pieces (52) are perpendicular to the first guide rail (41).

5. The rigid-flexible coupling platform with deviation correction function according to claim 4, characterized in that: The first linear motor (3) is arranged in parallel with the first guide rail (41).

6. The rigid-flexible coupling platform with deviation correction function according to claim 5, characterized in that: A first mounting plate (61) is fixedly connected to one side of the first sensor (6), and the first mounting plate (61) is mounted on the bottom of the first platform (2).

7. The rigid-flexible coupling platform with deviation correction function according to claim 6, characterized in that: The invention also comprises a second platform (7) arranged above the first platform (2); at least two groups of symmetrically arranged second limit assemblies (8) are also installed on the top of the first platform (2); the second limit assemblies (8) comprise a second guide rail (81) installed on the top of the first platform (2); at least two groups of second sliders (82) are slidably connected to the second guide rail (81); the second sliders (82) are fixedly connected to the second platform (7) via a flexible hinge (5); and a connecting piece (52) arranged in the second platform (7) is perpendicular to the second guide rail (81).

8. The rigid-flexible coupling platform with deviation correction function according to claim 7, characterized in that: The first guide rail (41) and the second guide rail (81) are perpendicular to each other.

9. The rigid-flexible coupling platform with deviation correction function according to claim 7, characterized in that: A second linear motor (9) mounted on the top of the first platform (2) is also provided between the two groups of the second limit assemblies (8); the movable end of the second linear motor (9) is fixedly connected to a second connecting plate (91) mounted on the bottom of the second platform (7); the second linear motor (9) and the first linear motor (3) are perpendicular to each other.

10. The rigid-flexible coupling platform with deviation correction function according to claim 9, characterized in that: A second sensor (10) for monitoring the deformation deviation of the second platform (7) is also provided below the second platform (7); one side of the second sensor (10) is fixedly connected to a second mounting plate (11) mounted on the bottom of the second platform (7).

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