Positive photoresist stripping device

Abstract

The utility model relates to the technical field of panel preparation, and provides a positive photoresist stripping device which comprises a liquid storage tank, an air inlet assembly, a spraying assembly and a backflow filtering assembly, a bin gate is arranged on the liquid storage tank, the liquid storage tank is used for containing stripping liquid and a substrate, and the bin gate is used for taking and placing the substrate from the liquid storage tank; the gas inlet assembly comprises a pre-filtering cavity, an oxygen adsorption cavity and a carbon dioxide adsorption cavity which are sequentially communicated, and the carbon dioxide adsorption cavity is communicated with the interior of the liquid storage tank. According to the positive photoresist stripping device, the gas inlet assembly is arranged, and the pre-filtering cavity, the oxygen adsorption cavity and the carbon dioxide adsorption cavity are formed in the gas inlet assembly, so that oxygen and carbon dioxide in air are effectively removed, the purpose of slowing down the reduction of the amine content in stripping liquid is achieved, meanwhile, tiny particles in the air can be filtered out, and the stripping efficiency is improved. Therefore, the problem of particle residue on the surface of a substrate after photoresist stripping caused by the fact that particles are mixed into liquid medicine is solved.

Description

Technical Field

[0001] The utility model relates to the technical field of panel preparation, in particular to a positive photoresist stripping device. Background Art

[0002] In the panel preparation process, photolithography is usually used to make pattern circuits of different film layers. Positive photoresist is a must in the photolithography process. The photolithography process includes processes such as coating, photoresist coating, development, etching, and photoresist stripping. Photoresist stripping refers to the stripping and removal of unnecessary photoresist film layers after etching to form a fine circuit. Photoresist stripping and removal technology occupies a very important position in the microelectronics industry. The quality of stripping directly affects the yield of the product. At present, industrial water generally adopts a wet stripping process, that is, using a stripping liquid to dissolve and remove the photoresist. For example, the photoresist stripping method and photoresist stripping device with the publication number CN103995441A strip the photoresist on the surface of the substrate by using a photoresist stripping liquid.

[0003] The stripping solution is mainly composed of organic solvents and additives. The organic solvents include alcohol amines, amides and alcohol ether solvents. The alcohol amines mainly act on the connections between photoresist molecules to break them to form a disintegrated small molecule photoresist, and the small molecule photoresist continues to dissolve in the amide and alcohol ether solvents. When the content of alcohol amines is high, the stripping ability of the photoresist film layer is strong and the stripping rate is also fast. When the content of alcohol amines is reduced to a certain level, the photoresist cannot be effectively stripped and removed under the same process conditions (same temperature and stripping time) due to the decrease in stripping ability, resulting in photoresist residues on the substrate surface. Therefore, the content of alcohol amines plays a decisive role in the stripping performance of the photoresist.

[0004] During operation, the stripping machine will continuously generate waste gas containing stripping liquid components. Due to the high content of organic components in the waste gas, it seriously pollutes the environment. Therefore, the waste gas must be collected and treated through the exhaust system. At this time, negative pressure is formed in the internal space of the stripping machine, causing the outside air to continuously enter the interior of the stripping machine. The factors affecting the amine content include the carbon dioxide and oxygen content in the air. When the stripping liquid in the stripping machine strips and removes the photoresist on the surface of the substrate, the liquid surface of the stripping liquid and the liquid flow sprayed by the nozzle are in direct contact with the air. The alkaline amine will react with the weakly acidic gas carbon dioxide to neutralize, causing the amine content to continue to decrease. At this time, the amine will also undergo a redox reaction with oxygen, resulting in oxidative degradation of the amine, further reducing its content. In the process of continuous air replenishment, new oxygen and carbon dioxide will be continuously introduced, causing the amine in the stripping liquid to continue to react with carbon dioxide and oxygen. The decrease in amine content affects the stripping effect of the photoresist. Utility Model Content

[0005] In view of this, the utility model proposes a positive photoresist stripping device, which effectively removes oxygen and carbon dioxide in the air by setting an air intake component, and arranging a pre-filter chamber, an oxygen adsorption chamber and a carbon dioxide adsorption chamber on the air intake component, so as to achieve the purpose of slowing down the decrease of amine content in the stripping liquid. At the same time, it can also filter out tiny particles in the air to avoid the problem of residual particles on the surface of the substrate after photoresist stripping caused by particles mixing into the liquid.

[0006] The technical solution of the utility model is implemented as follows: The utility model provides a positive photoresist stripping device, including a liquid storage tank, an air intake component, a spray component and a reflux filter component, wherein:

[0007] A door is provided on the liquid storage tank, the liquid storage tank is used to contain the stripping liquid and the substrate, and the door is used to take the substrate from the liquid storage tank;

[0008] The air intake assembly includes a pre-filter chamber, an oxygen adsorption chamber and a carbon dioxide adsorption chamber which are connected in sequence, wherein the carbon dioxide adsorption chamber is connected to the interior of the liquid storage tank, and the pre-filter chamber, the oxygen adsorption chamber and the carbon dioxide adsorption chamber are used to filter out particles, oxygen and carbon dioxide in the atmosphere respectively;

[0009] The spray assembly includes a spray end and a supply end, wherein the spray end is arranged in a liquid storage tank to spray a stripping liquid onto the substrate, and the supply end is connected to the spray end;

[0010] The reflux filter assembly includes an input end and an output end, wherein the input end is connected to the liquid storage tank, and the output end is connected to the supply end of the spray assembly. The reflux filter assembly is used to filter out insoluble impurities in the stripping liquid and allow the stripping liquid to flow from the liquid storage tank to the spray assembly.

[0011] On the basis of the above technical solution, preferably, the oxygen adsorption chamber and the carbon dioxide adsorption chamber are filled with oxygen adsorbent and carbon dioxide adsorbent respectively.

[0012] Further preferably, the air intake assembly also includes a rear filter chamber, one end of the rear filter chamber is connected to the carbon dioxide adsorption chamber, and the other end is connected to the liquid storage tank, and the rear filter chamber is used to filter particles introduced when the air passes through the oxygen adsorption chamber and the carbon dioxide adsorption chamber.

[0013] On the basis of the above technical solution, preferably, the liquid storage tank includes a tank body, a feed pipe, an exhaust pipe and a waste liquid discharge pipe, wherein:

[0014] The tank body is in communication with the air intake assembly, and the spray assembly is arranged on the tank body;

[0015] The feed pipe is connected to the tank body and is used to add stripping liquid to the tank body;

[0016] The exhaust pipe is connected to the top of the tank body and is used to discharge the organic gas in the tank body;

[0017] The waste liquid discharge pipe is connected with the bottom end of the tank body, and the waste liquid discharge pipe comprises a waste discharge end, and the waste discharge end is used for discharging waste liquid. The reflux filter assembly is connected with the tank body through the waste liquid discharge pipe.

[0018] On the basis of the above technical solution, preferably, it further comprises a plurality of support pins, which are arranged around the inner wall of the liquid storage tank, and are used to support the substrate in the liquid storage tank.

[0019] On the basis of the above technical solution, preferably, the reflux filter assembly includes a plurality of filters, and the plurality of filters are arranged between the liquid storage tank and the spray assembly, and connect the liquid storage tank and the spray assembly. The plurality of filters are connected in sequence from large to small according to the filter element accuracy, and the stripping liquid passes through each filter in sequence when entering the spray assembly from the liquid storage tank.

[0020] Further preferably, the number of the filters is three, and the filtering accuracies of the three filters are respectively set to 2-5 μm, 0.1-0.5 μm and 0.02-0.07 μm.

[0021] More preferably, it also includes a transfer pump, which is arranged on the waste liquid discharge pipe and is used to transfer the stripping liquid in the liquid storage tank to the reflux filter component or the waste discharge end.

[0022] Further preferably, it also includes an exhaust pump, which is arranged on the exhaust pipe to pump the organic gas in the exhaust pipe.

[0023] On the basis of the above technical solution, preferably, it also includes a temperature control component, which is arranged on the liquid storage tank and inserted into the liquid storage tank to monitor the temperature of the stripping liquid in the liquid storage tank and heat the stripping liquid.

[0024] The positive photoresist stripping device of the utility model has the following beneficial effects compared with the prior art:

[0025] (1) By providing an air intake assembly, and providing a pre-filter chamber, an oxygen adsorption chamber, and a carbon dioxide adsorption chamber on the air intake assembly, oxygen and carbon dioxide in the air can be effectively removed to achieve the purpose of slowing down the decrease of the amine content in the stripping solution. At the same time, tiny particles in the air can be filtered out to avoid the problem of particles remaining on the surface of the substrate after photoresist stripping due to the mixing of particles into the solution;

[0026] (2) The filter set on the reflux filter assembly can filter out insoluble impurity particles in the stripping liquid to prevent the particles from contacting the surface of the substrate with the liquid during spraying and causing residue. The filters combined in sequence from large to small according to the filter element accuracy can block particles of different sizes in the stripping liquid in turn, thereby maximizing the filtration efficiency of the stripping liquid. BRIEF DESCRIPTION OF THE DRAWINGS

[0027] In order to more clearly illustrate the embodiments of the utility model or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the utility model. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0028] Figure 1 It is a structural schematic diagram of the positive photoresist stripping device of the utility model. DETAILED DESCRIPTION

[0029] The following will be combined with the implementation of the utility model to clearly and completely describe the technical solutions in the implementation of the utility model. Obviously, the described implementation is only a part of the implementation of the utility model, not all of the implementations. Based on the implementation of the utility model, all other implementations obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0030] like Figure 1 As shown, the positive photoresist stripping device of the utility model comprises a liquid storage tank 1, an air intake component 2, a spray component 3 and a reflux filter component 4.

[0031] The liquid storage tank 1 is provided with a door 101 . The liquid storage tank 1 is used to contain the stripping liquid and the substrate. The door 101 is used to take the substrate from the liquid storage tank 1 .

[0032] The liquid storage tank 1 is arranged vertically, and the liquid storage tank 1 is provided with a stripping liquid whose liquid level is controlled within a certain range. The position of the chamber door 101 is arranged above the liquid level. By opening the chamber door 101, the substrate to be stripped of the photoresist can be placed in the liquid storage tank 1, or the substrate after stripping the photoresist can be taken out of the liquid storage tank 1. In addition, the liquid storage tank 1 is used to provide a space for stripping the photoresist from the substrate.

[0033] The air intake assembly 2 includes a pre-filter chamber 201, an oxygen adsorption chamber 202 and a carbon dioxide adsorption chamber 203 which are connected in sequence. The carbon dioxide adsorption chamber 203 is connected to the interior of the liquid storage tank 1. The pre-filter chamber 201, the oxygen adsorption chamber 202 and the carbon dioxide adsorption chamber 203 are respectively used to filter out particles, oxygen and carbon dioxide in the atmosphere.

[0034] The air intake component 2 is arranged at the top of the liquid storage tank 1. When the external air is under negative pressure inside the liquid storage tank 1, it will enter the liquid storage tank 1 through the air intake component 2 for replenishment. Specifically, the air first enters the pre-filter chamber 201. A coarse filter is arranged in the pre-filter chamber 201. The dust and other particulate matter in the atmosphere are filtered through the coarse filter. An oxygen adsorption groove is arranged in the oxygen adsorption chamber 202, and is filled with oxygen adsorption filler. Correspondingly, a carbon dioxide adsorption groove is arranged in the carbon dioxide adsorption chamber, and is filled with carbon dioxide adsorption filler. The oxygen and carbon dioxide in the air are effectively removed by the oxygen adsorption chamber 202 and the carbon dioxide adsorption chamber 203, so as to achieve the purpose of slowing down the decrease of amine content in the liquid medicine.

[0035] The spray assembly 3 includes a spray end and a supply end. The spray end is arranged in the liquid storage tank 1 to spray the stripping liquid onto the substrate. The supply end is communicated with the spray end.

[0036] Specifically, the spray assembly 3 is composed of a pipeline and a plurality of nozzles. The nozzle array is arranged on the top of the inner wall of the liquid storage tank 1. The photoresist on the substrate is stripped by spraying the stripping liquid downward. When the substrate is placed, the side with the photoresist should face the nozzle. The pipeline is connected to each nozzle to supply the stripping liquid. A pressure detection component, such as a pressure gauge, should also be provided on the pipeline to detect the pressure of the stripping liquid in the tube.

[0037] The reflux filter assembly 4 includes an input end and an output end, wherein the input end is connected to the liquid storage tank 1 , and the output end is connected to the supply end of the spray assembly 3 . The reflux filter assembly 4 is used to filter out insoluble impurities in the stripping liquid and allow the stripping liquid to flow from the liquid storage tank 1 to the spray assembly 3 .

[0038] A valve should be provided at one end of the reflux filter assembly 4 close to the liquid storage tank 1 , and the pressure of the stripping liquid in the spray assembly 3 can be changed by adjusting the opening of the valve, or the connection between the reflux filter assembly 4 and the liquid storage tank 1 can be disconnected.

[0039] In this embodiment, the oxygen adsorption chamber 202 and the carbon dioxide adsorption chamber 203 are respectively filled with oxygen adsorbent and carbon dioxide adsorbent. Specifically, the oxygen adsorbent and the carbon dioxide adsorbent are respectively filled in the oxygen adsorption tank and the carbon dioxide adsorption tank, wherein the oxygen adsorbent is an inorganic deoxidizer, preferably an iron-based deoxidizer or a sulfite-based deoxidizer, and the carbon dioxide adsorbent is a carbon dioxide capture agent, preferably activated carbon, molecular sieves, porous organic polymers, etc.

[0040] As a preferred embodiment, the air intake component 2 also includes a rear filter chamber 204, one end of the rear filter chamber 204 is connected to the carbon dioxide adsorption chamber 203, and the other end is connected to the liquid storage tank 1, and the rear filter chamber 204 is used to filter particles introduced when the air passes through the oxygen adsorption chamber 202 and the carbon dioxide adsorption chamber 203.

[0041] It should be noted that after the oxygen adsorption chamber 202 and the carbon dioxide adsorption chamber 203 are filled with oxygen adsorbent and carbon dioxide adsorbent, the air flows toward the liquid storage tank 1, which may drive the tiny particles in the oxygen adsorbent and the carbon dioxide adsorbent to flow backward together. The rear filter chamber 204 is used to intercept the introduced particles and the tiny particles in the air that are not intercepted by the pre-filter chamber 201. Specifically, a medium-efficiency filter is provided in the rear filter chamber 204, and particles in the air are filtered out through the medium-efficiency filter.

[0042] In this embodiment, the liquid storage tank 1 includes a tank body 11, a feed pipe 12, an exhaust pipe 13 and a waste liquid discharge pipe 14. The tank body 11 is connected to the air intake assembly 2. The spray assembly 3 is arranged on the tank body 11. The feed pipe 12 is connected to the tank body 11 for replenishing the stripping liquid into the tank body 11. The exhaust pipe 13 is connected to the top of the tank body 11 for discharging the organic gas in the tank body 11. The waste liquid discharge pipe 14 is connected to the bottom end of the tank body 11. The waste liquid discharge pipe 14 includes a waste discharge end, which is used to discharge waste liquid. The reflux filter assembly 4 is connected to the tank body 11 through the waste liquid discharge pipe 14.

[0043] The tank body 11 is the main part of the liquid storage tank 1. The feed pipe 12 is used to add stripping liquid to the tank body 11. The stripping liquid can be injected into the tank body through the feed pipe 12. A valve is provided on the feed pipe 12 to control the on and off of the feed pipe 12. The exhaust pipe 13 is used to discharge the organic gas in the tank body 11. The stripping device will continuously generate waste gas containing stripping liquid components during operation. Since the organic component content in the waste gas is relatively high, it seriously pollutes the environment. Therefore, the waste gas must be discharged to the waste gas treatment equipment through the exhaust pipe 13 for treatment. The waste liquid discharge pipe 14 is used to discharge the waste stripping liquid in the tank body 11. The stripping liquid needs to be replaced after long-term use. The original stripping liquid is waste liquid and needs to be discharged from the tank body 11 through the waste liquid discharge pipe 14.

[0044] In addition, a three-way pipe is provided on the waste liquid discharge pipe 14, through which the reflux filter assembly 4 is connected. When the waste liquid needs to be discharged, the reflux filter assembly 4 is disconnected from the tank body 11, and the tank body 11 is connected to the waste discharge end to discharge the waste liquid. Conversely, when the stripping liquid needs to flow back, the waste discharge end is disconnected from the tank body 11, and the tank body 11 is connected to the reflux filter assembly 4 to flow back the stripping liquid.

[0045] In this embodiment, a plurality of support pins 5 are also provided, and the plurality of support pins 5 are arranged around the inner wall of the liquid storage tank 1. The support pins 5 are used to support the substrate in the liquid storage tank 1. After the substrate is placed into the liquid storage tank 1 through the chamber door 101, it is placed flat on the support pins 5, and the side with the photoresist is facing the spray assembly 3, and the stripping operation can be carried out.

[0046] As a preferred embodiment, the reflux filter assembly 4 includes a plurality of filters 41, and the plurality of filters 41 are arranged between the liquid storage tank 1 and the spray assembly 3, and connect the liquid storage tank 1 and the spray assembly 3. The plurality of filters 41 are connected in sequence from large to small according to the filter element accuracy, and the stripping liquid passes through each filter 41 in sequence when entering the spray assembly 3 from the liquid storage tank 1.

[0047] The filter 41 provided can filter out insoluble impurity particles in the stripping liquid to prevent the particles from contacting the surface of the substrate with the liquid during spraying and causing residue. The filters 41 combined in sequence from large to small according to the filter element precision can block particles of different sizes in the stripping liquid in sequence, thereby maximizing the filtering efficiency of the stripping liquid.

[0048] Specifically, there are three filters 41, and the filtering accuracies of the three filters 41 are respectively set to 2-5μm, 0.1-0.5μm and 0.02-0.07μm. In this embodiment, PTFE filter elements are installed in the three filters 41, and the filtering accuracies are preferably 3μm, 0.2μm and 0.05μm respectively.

[0049] In this embodiment, a transfer pump 6 is also provided, and the transfer pump 6 is arranged on the waste liquid discharge pipe 14. The transfer pump 6 is used to transfer the stripping liquid in the liquid storage tank 1 to the reflux filter component 4 or the waste discharge end. A valve is provided on the waste discharge end of the waste liquid discharge pipe 14. When the waste liquid is discharged, the valve is opened. In addition, a valve is also provided on one end of the reflux filter component 4 connected to the waste liquid discharge pipe 14. The valve is closed when the waste liquid is discharged, and the valve is opened when the stripping liquid is controlled to reflux.

[0050] In the present embodiment, an exhaust pump 7 is further provided. The exhaust pump 7 is provided on the exhaust pipe 13 to pump the organic gas in the exhaust pipe 13 .

[0051] In addition, a temperature control component 8 is provided. The temperature control component 8 is provided on the liquid storage tank 1 and inserted into the liquid storage tank 1 to monitor the temperature of the stripping liquid in the liquid storage tank 1 and heat the stripping liquid.

[0052] The temperature control component 8 includes a temperature sensor and a heating rod. The temperature sensor is used to detect the temperature of the stripping liquid in the tank 11, and the heating rod is used to heat the stripping liquid. After the stripping liquid is heated to the required temperature, the photoresist stripping operation can be carried out.

[0053] The above description is only a preferred embodiment of the present invention and is not intended to limit the present invention. Any modifications, equivalent substitutions, improvements, etc. made within the spirit and principles of the present invention should be included in the protection scope of the present invention.

Claims

1. A positive photoresist stripping device, characterized in that: It comprises a liquid storage tank (1), an air intake assembly (2), a spray assembly (3) and a reflux filter assembly (4), wherein: A chamber door (101) is provided on the liquid storage tank (1), the liquid storage tank (1) is used to contain the stripping liquid and the substrate, and the chamber door (101) is used to take the substrate in and out of the liquid storage tank (1); The air intake assembly (2) comprises a pre-filter chamber (201), an oxygen adsorption chamber (202) and a carbon dioxide adsorption chamber (203) which are connected in sequence, the carbon dioxide adsorption chamber (203) being connected to the interior of the liquid storage tank (1), and the pre-filter chamber (201), the oxygen adsorption chamber (202) and the carbon dioxide adsorption chamber (203) being used to filter out particles, oxygen and carbon dioxide in the atmosphere respectively; The spray assembly (3) comprises a spray end and a supply end, wherein the spray end is arranged in the liquid storage tank (1) to spray the stripping liquid onto the substrate, and the supply end is connected to the spray end; The reflux filter assembly (4) comprises an input end and an output end, wherein the input end is connected to the liquid storage tank (1), and the output end is connected to the supply end of the spray assembly (3). The reflux filter assembly (4) is used to filter out insoluble impurities in the stripping liquid and allow the stripping liquid to flow from the liquid storage tank (1) to the spray assembly (3).

2. The positive photoresist stripping device according to claim 1, characterized in that: The oxygen adsorption chamber (202) and the carbon dioxide adsorption chamber (203) are filled with an oxygen adsorbent and a carbon dioxide adsorbent respectively.

3. The positive photoresist stripping device according to claim 2, characterized in that: The air intake assembly (2) further comprises a rear filter chamber (204), one end of the rear filter chamber (204) being connected to the carbon dioxide adsorption chamber (203), and the other end of the rear filter chamber (204) being connected to the liquid storage tank (1), and the rear filter chamber (204) being used to filter particles introduced when air passes through the oxygen adsorption chamber (202) and the carbon dioxide adsorption chamber (203).

4. The positive photoresist stripping device according to claim 1, characterized in that: The liquid storage tank (1) comprises a tank body (11), a feed pipe (12), an exhaust pipe (13) and a waste liquid discharge pipe (14), wherein: The tank body (11) is in communication with the air intake assembly (2), and the spray assembly (3) is arranged on the tank body (11); The feed pipe (12) is in communication with the tank body (11) and is used to add stripping liquid to the tank body (11); The exhaust pipe (13) is in communication with the top of the tank body (11) and is used to discharge the organic gas in the tank body (11); The waste liquid discharge pipe (14) is in communication with the bottom end of the tank body (11), the waste liquid discharge pipe (14) comprises a waste discharge end, the waste discharge end is used to discharge waste liquid, and the reflux filter assembly (4) is in communication with the tank body (11) via the waste liquid discharge pipe (14).

5. The positive photoresist stripping device according to claim 1, characterized in that: It also comprises a plurality of support pins (5), which are arranged around the inner wall of the liquid storage tank (1), and the support pins (5) are used to support the substrate in the liquid storage tank (1).

6. The positive photoresist stripping device according to claim 1, characterized in that: The reflux filter assembly (4) comprises a plurality of filters (41), wherein the plurality of filters (41) are arranged between the liquid storage tank (1) and the spray assembly (3), and connect the liquid storage tank (1) and the spray assembly (3); the plurality of filters (41) are connected in sequence from large to small according to the filter element precision, and the stripping liquid passes through each filter (41) in sequence when entering the spray assembly (3) from the liquid storage tank (1).

7. The positive photoresist stripping device according to claim 6, characterized in that: The number of the filters (41) is three, and the filtering accuracies of the three filters (41) are respectively set to 2-5 μm, 0.1-0.5 μm and 0.02-0.07 μm.

8. The positive photoresist stripping device according to claim 4, characterized in that: It also comprises a transmission pump (6), which is arranged on the waste liquid discharge pipe (14) and is used to transmit the stripping liquid in the liquid storage tank (1) to the reflux filter assembly (4) or the waste discharge end.

9. The positive photoresist stripping device according to claim 4, characterized in that: It also comprises an exhaust pump (7), which is arranged on the exhaust pipe (13) to pump the organic gas in the exhaust pipe (13).

10. The positive photoresist stripping device according to claim 1, characterized in that: It also comprises a temperature control component (8), which is arranged on the liquid storage tank (1) and inserted into the liquid storage tank (1) to monitor the temperature of the stripping liquid in the liquid storage tank (1) and heat the stripping liquid.

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