Electromagnetic coupling rotary reflection target X-ray source device

Abstract

The utility model provides an electromagnetic coupling rotary reflection target X-ray source device which comprises a vacuum pump and a cavity, the vacuum pump is communicated to the cavity, an insulating base is arranged on one side in the cavity, a cathode unit is arranged at the end of the insulating base, and an anode opposite to the cathode unit is further arranged in a wall. The anode is connected with a focusing flange through a centering coil, a focusing coil is arranged on the circumferential outer surface of the focusing flange, and a coil cooling device is arranged on the outer side of the focusing coil; a single lens is arranged on the outer side of the focusing flange, and an anode target assembly is further arranged in the cavity. A rotating assembly is arranged outside the cavity and is used for rotating the anode target assembly; and a cooling structure is also arranged in the anode target assembly. According to the utility model, the anode target automatically rotates in the use process of the radiation source, so that the heat dissipation efficiency and the anode target power are improved; the defects of low resolution and poor image quality during rapid imaging of a reflective X-ray source are overcome; the X-ray flux is improved, and the imaging time is shortened.

Description

Technical Field

[0001] The utility model belongs to the field of ray sources, in particular to an electromagnetically coupled rotating reflection target X-ray source device. Background Art

[0002] Using the principle of reflective X-ray source, the electron beam emitted by the electron beam system bombards the anode target metal target at a certain angle, of which a very small percentage of the electron beam energy is converted into X-rays reflected out of the window, and the rest is converted into heat and gathered on the anode target metal target. The anode target must be manually rotated after a period of use, and its heat dissipation volume is small and the heat dissipation efficiency is low; the imaging efficiency is low during high-resolution imaging; the resolution is low during rapid imaging, and the image quality is poor. Utility Model Content

[0003] In view of this, the utility model aims to propose an electromagnetically coupled rotating reflection target X-ray source device, which is driven by a servo motor and uses a right-angle transmission magnetic wheel to transmit power contactlessly, so that the anode target rotates automatically during the use of the ray source, thereby improving the heat dissipation efficiency and the anode target power; overcoming the shortcomings of low resolution and poor image quality during rapid imaging of the reflection X-ray source; increasing the X-ray flux and reducing the imaging time.

[0004] In order to achieve the above object, the technical solution of the utility model is implemented as follows:

[0005] An electromagnetically coupled rotating reflection target X-ray source device comprises a vacuum pump and a cavity, wherein the vacuum pump is connected to the cavity, an insulating base is provided on one side of the cavity, a cathode unit is provided at the end of the insulating base, and an anode opposite to the cathode unit is also provided in the wall;

[0006] The anode is connected to the focusing flange through the centering coil. A focusing coil is provided on the outer circumferential surface of the focusing flange. A coil cooling device is provided on the outer side of the focusing coil. A single lens is provided on the outer side of the focusing flange.

[0007] An anode target assembly is also provided in the cavity;

[0008] A passage is formed in the middle of the focusing flange, and the charged particles emitted by the cathode unit bombard the anode target body of the anode target assembly through the anode, the focusing flange, and the single lens in sequence;

[0009] A rotating assembly is arranged outside the cavity, and the rotating assembly is used for rotating the anode target assembly; a cooling structure is also arranged inside the anode target assembly.

[0010] Furthermore, the passage is connected to the anode target assembly through a particle beam inlet.

[0011] Furthermore, the anode target assembly includes a target head, a support frame and a substrate; the support frame and the substrate are arranged inside, the substrate is sleeved into the No. 1 inner cavity of the support frame to form a fit, the substrate is provided with a No. 2 inner cavity, and the side wall of the support frame is provided with a water outlet, and cooling water can enter the No. 1 inner cavity from the No. 2 inner cavity and then be discharged from the water outlet; the top of the support frame is provided with an anode target body.

[0012] Furthermore, the material of the anode target body is copper, and a fixing groove is formed on the top of the support frame. The fixing groove is used to install the anode target body. The anode target body is connected to the fixing groove by vacuum heat welding. A diamond layer is attached to the top surface of the target body by deposition growth, and a layer of sputtered tungsten is provided on the surface of the diamond layer by magnetron sputtering.

[0013] Furthermore, a plurality of sealing grooves are formed on the outer surface of the middle and upper part of the support frame, the sealing grooves are used to place sealing rings, and the water outlet holes are arranged below the sealing grooves; and an assembly hole is arranged at the bottom end of the support frame;

[0014] The bottom circumferential surface of the substrate is provided with a sealing groove, the bottom end is provided with a matching hole, and the middle part is provided with a limiting platform. The upper side of the limiting platform is a cooling part, and the lower side of the limiting platform is used as a fixing part.

[0015] Furthermore, the support frame and the substrate are sealed at the upper and lower parts with the inner cavity of the target head through a sealing ring.

[0016] Furthermore, the side of the cooling part close to the limit table can fit tightly with the assembly hole of the support frame to achieve a fitting connection between the support frame and the substrate; the outer diameter of the cooling part decreases from one end close to the limit table to the other end; a gap is formed between the cooling part and the No. 1 inner cavity of the support frame, and the gap is used for the circulation of cooling water.

[0017] Furthermore, a water inlet hole is provided in the middle and lower part of the substrate, and the water inlet hole is connected to the second inner cavity of the substrate. A connecting hole is provided on the top of the substrate, and the connecting hole is connected to the first inner cavity and the second inner cavity.

[0018] Further, the rotating assembly includes a servo motor, an electromagnetic coupling transmission mechanism and a rotating shaft, the servo motor is mounted to the outer surface of the cavity through a motor mounting plate, and the output end of the servo motor is provided with an electromagnetic coupling main transmission of the electromagnetic coupling transmission mechanism;

[0019] The bottom of the substrate is connected to the rotating shaft, and the rotating shaft is provided with an electromagnetic coupling auxiliary transmission of an electromagnetic coupling transmission mechanism; the electromagnetic coupling main transmission and the electromagnetic coupling auxiliary transmission cooperate with each other to realize the driving of the servo motor on the anode target assembly.

[0020] Furthermore, a window and a limit beam are provided on the top of the target head. The limit beam is connected to the target head by bolts to fix the window. A sealing gasket is provided between the window and the target head.

[0021] Compared with the prior art, the electromagnetically coupled rotating reflection target X-ray source device described in the utility model has the following advantages:

[0022] (1) The electromagnetically coupled rotating reflection target X-ray source device described in the utility model is driven by a servo motor and uses a right-angle transmission magnetic wheel to transmit power non-contactly, so that the anode target rotates automatically during the use of the radiation source; compared with the manually rotating anode target X-ray source, the electron bombardment loss of the target surface is effectively reduced, and the effective heat dissipation volume is increased, the heat dissipation effect is obvious, and the heat dissipation efficiency and the anode target power are improved; the shortcomings of low resolution and poor image quality of the reflection X-ray source during rapid imaging are overcome; the X-ray flux is increased and the imaging time is reduced.

[0023] (2) The electromagnetically coupled rotating reflection target X-ray source device described in the utility model uses a servo motor to drive the anode target to rotate, and the rotation speed can be adjusted by the driver. The motor is connected to the right-angle transmission magnetic wheel small wheel, and the power is transmitted non-contactly, that is, it relies on the cross transmission of multi-level magnetic lines in the strong magnetic field, and the anode target is driven to rotate by the rotation of the right-angle transmission magnetic wheel large wheel; the use of electromagnetic coupling has the characteristics of non-contact, zero wear, easy installation, offset, vibration resistance, explosion prevention, isolation, and leakage prevention.

[0024] (3) The electromagnetically coupled rotating reflection target X-ray source device described in the utility model adopts the light emission principle of the reflection X-ray source. After the charged particle beam is emitted, it is affected by the focusing coil and focused. Under the premise of fixing the number of coil turns, the focusing distance and the focal point size are adjusted by adjusting the current, so as to achieve the optimal efficiency of the number of charged particles bombarding the target surface. While the charged particle beam bombards the anode target, the anode target rotates, reducing the damage caused by long-term bombardment of a point and achieving heat dissipation during the rotation process; a cooling water channel is designed at the target head position to further increase the heat dissipation efficiency of the anode target, thereby increasing the anode target power; the rotating target plus the water-cooling structure target head design reduces the bombardment loss of the target surface, increases the service life of the ray source, and realizes continuous operation of X-ray detection. BRIEF DESCRIPTION OF THE DRAWINGS

[0025] The accompanying drawings constituting a part of the present invention are used to provide a further understanding of the present invention. The illustrative embodiments of the present invention and their descriptions are used to explain the present invention and do not constitute an improper limitation on the present invention. In the accompanying drawings:

[0026] Figure 1 This is a schematic diagram of an electromagnetically coupled rotating reflection target X-ray source device according to an embodiment of the utility model;

[0027] Figure 2 This is a schematic diagram of a rotating assembly according to an embodiment of the utility model;

[0028] Figure 3 This is a schematic diagram of the anode target assembly described in an embodiment of the utility model.

[0029] Description of reference numerals:

[0030] 1. Vacuum pump; 2. Cavity; 3. Insulating base; 4. Cathode unit; 5. Anode; 6. Centering coil; 7. Focusing flange; 8. Focusing coil; 9. Coil cooling device; 10. Single lens; 11. Anode target assembly; 111. Support frame; 1111. Inner cavity No. 1; 1112. Fixing groove; 1113. Sealing groove; 1114. Water outlet; 1115. Assembly hole; 112. Base material; 1121. Inner cavity No. 2; 1122. Matching hole; 1123. Limiting table; 1124. Cooling part; 1125. Fixing part; 1126. Water inlet; 113. Anode target body; 12. Rotating assembly; 121. Servo motor; 122. Electromagnetic coupling transmission mechanism; 1221. Electromagnetic coupling main transmission; 1222. Electromagnetic coupling auxiliary transmission; 123. Rotating axis; 13. Target head. DETAILED DESCRIPTION

[0031] It should be noted that, in the absence of conflict, the embodiments of the present invention and the features in the embodiments can be combined with each other.

[0032] In the description of the present utility model, it should be understood that the terms "center", "longitudinal", "lateral", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside" and the like indicate positions or positional relationships based on the positions or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present utility model and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present utility model. In addition, the terms "first", "second", etc. are only used for descriptive purposes, and cannot be understood as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Therefore, features defined as "first", "second", etc. may explicitly or implicitly include one or more of the features. In the description of the present utility model, unless otherwise specified, "multiple" means two or more.

[0033] In the description of the present invention, it should be noted that, unless otherwise clearly specified and limited, the terms "installation", "connection" and "connection" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or it can be an indirect connection through an intermediate medium, or it can be the internal communication of two components. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood by specific circumstances.

[0034] The present invention will be described in detail below with reference to the accompanying drawings and in combination with embodiments.

[0035] An electromagnetically coupled rotating reflection target X-ray source device, such as Figure 1-Figure 3 As shown, it includes a vacuum pump 1 and a cavity 2. The vacuum pump 1 is connected to the cavity 2. An insulating base 3 is provided on one side of the cavity 2. A cathode unit 4 is provided at the end of the insulating base 3. An anode 5 opposite to the cathode unit 4 is also provided in the wall.

[0036] The anode 5 is connected to the focusing flange 7 through the centering coil 6. A focusing coil 8 is provided on the circumferential outer surface of the focusing flange 7. A coil cooling device 9 is provided on the outer side of the focusing coil 8. A single lens 10 is provided on the outer side of the focusing flange 7.

[0037] An anode 5 target assembly is also provided in the cavity 2; the anode 5 target assembly is connected and sealed to the single lens 10 through bolts and a sealing ring.

[0038] A passage is formed in the middle of the focusing flange 7, and the charged particles emitted by the cathode unit 4 sequentially pass through the anode 5, the focusing flange 7, and the single lens 10 to bombard the anode 5 target body of the anode 5 target assembly;

[0039] A rotating assembly 12 is provided outside the cavity 2, and the rotating assembly 12 is used for rotating the anode 5 target assembly; a cooling structure is also provided inside the anode 5 target assembly.

[0040] Under the action of the vacuum pump 1, the cavity 2 and the channel connected to the cavity 2 are kept in a vacuum state through a sealing design; the rear end of the insulating base 3 is connected to a high-voltage tube, and the front end is installed with a cathode unit 4. The charged particle beam is emitted from the cathode unit 4, passes through the anode 5, the focusing flange 7, and the single lens 10 in the particle beam channel in sequence, and finally bombards the target surface of the anode 5. A very small percentage of the energy of the charged particle beam is converted into X-rays reflected out of the window, and most of the rest is converted into heat and accumulated on the target surface;

[0041] The centering coil 6 makes the charged particle beam align with the axis, and the focusing coil 8 makes the charged particle beam focus. The trajectory and position of the charged particle beam are adjusted by the number of coil turns and the current of the centering coil 6 and the focusing coil 8. During the coil action, a large amount of heat is generated, which affects the centering and focusing effects. A coil cooling device 9 is arranged outside the shell for water cooling to ensure the centering and focusing effects of the charged particle beam.

[0042] Preferably, the passage is connected to the anode 5 target assembly through a particle beam inlet.

[0043] Preferably, the anode 5 target assembly includes a target head 13, a support frame 111 and a substrate 112; the support frame 111 and the substrate 112 are arranged inside the target head 13, the substrate 112 is sleeved into the No. 1 inner cavity 1111 of the support frame 111 to form a fit, the substrate 112 is provided with a No. 2 inner cavity 1121, and the side wall of the support frame 111 is provided with a water outlet 1114, and cooling water can enter the No. 1 inner cavity 1111 from the No. 2 inner cavity 1121 and then be discharged from the water outlet 1114; the top of the support frame 111 is provided with the anode 5 target body.

[0044] Preferably, the anode target body is made of copper, a fixing groove 1112 is formed on the top of the support frame 111, the fixing groove 1112 is used to install the anode target body, and the anode target body is connected to the fixing groove 1112 by vacuum heat welding; the solder of the vacuum heat welding is silver-copper solder, a diamond layer is attached to the top surface of the target body by deposition growth, and a layer of sputtered tungsten is provided on the surface of the diamond layer by magnetron sputtering;

[0045] The anode target body of the sputtered tungsten is connected to the copper support frame 111 by vacuum heat welding. Copper has the characteristics of high thermal conductivity and corrosion resistance, and is easy to process and shape, with improved heat dissipation capacity and shortened cooling time.

[0046] Preferably, the surface of the anode target body is sputtered with tungsten by magnetron sputtering; tungsten is sputtered onto the surface of diamond by magnetron sputtering technology. Tungsten has a high melting point and a low high-temperature vapor pressure, which can avoid being ablated by a large amount of heat generated by the electron beam bombarding the target surface, thereby extending the service life of the target material; the anode target body material is formed in one go under vacuum conditions, is not easily contaminated, and has the advantages of a large X-ray emission rate, good heat dissipation, and a long service life; the anode target body material is mainly used for microfocusing tubes with transmission geometry, which can significantly increase the brightness of X-rays, but can also significantly increase the performance when used for reflection beam tubes.

[0047] Preferably, a plurality of sealing grooves 1113 are formed on the outer surface of the middle and upper part of the support frame 111, and the sealing grooves 1113 are used to place sealing rings, and the water outlet holes 1114 are arranged below the sealing grooves 1113; and an assembly hole 1115 is arranged at the bottom end of the support frame 111;

[0048] The bottom circumferential surface of the substrate 112 is provided with a sealing groove 1113, the bottom end is provided with a matching hole 1122, and the middle part is provided with a limit platform 1123, the upper side of the limit platform 1123 is a cooling part 1124, and the lower side of the limit platform 1123 is used as a fixing part 1125; the cooling part 1124 is used to enter the No. 1 inner cavity 1111 of the support frame 111, and the fixing part 1125 is used to cooperate with the target head 13;

[0049] Preferably, the support frame 111 and the substrate 112 are sealed at the upper and lower parts with the inner cavity of the target head 13 through a sealing ring.

[0050] Preferably, the side of the cooling portion 1124 close to the limit platform 1123 can fit tightly with the assembly hole 1115 of the support frame 111 to achieve the fitting connection between the support frame 111 and the substrate 112; the outer diameter of the cooling portion 1124 decreases from one end close to the limit platform 1123 to the other end; a gap is formed between the cooling portion 1124 and the No. 1 inner cavity 1111 of the support frame 111, and the gap is used for the circulation of cooling water; the cooling water enters from the waterway hole at the lower end of the substrate 112, overflows through the upper end hole of the substrate 112 to the gap between the substrate 112 and the support frame 111, and finally flows out from the waterway hole of the support frame 1111, forming a cooling mechanism, which takes away a large amount of heat generated by the target surface by water cooling.

[0051] Preferably, a water inlet hole 1126 is provided in the middle and lower part of the substrate 112, and the water inlet hole 1126 is connected to the No. 2 inner cavity 1121 of the substrate 112. A connecting hole is provided on the top of the substrate 112, and the connecting hole connects the No. 1 inner cavity 1111 and the No. 2 inner cavity 1121.

[0052] Preferably, the rotating assembly 12 comprises a servo motor 121, an electromagnetic coupling transmission mechanism 122 and a rotating shaft 123, the servo motor 121 is mounted to the outer surface of the cavity 2 through a motor mounting plate, and the output end of the servo motor 121 is provided with an electromagnetic coupling main transmission 1221 of the electromagnetic coupling transmission mechanism 122;

[0053] The bottom of the substrate 112 is threadedly connected to the rotating shaft 123, and the rotating shaft 123 is provided with an electromagnetic coupling sub-transmission 1222 of the electromagnetic coupling transmission mechanism 122; the electromagnetic coupling main transmission 1221 and the electromagnetic coupling sub-transmission 1222 cooperate with each other to realize the driving of the anode 5 target assembly by the servo motor 121.

[0054] Preferably, a window and a limit beam are provided on the top of the target head 13 . The limit beam is connected to the target head 13 by bolts to fix the window. A sealing gasket is provided between the window and the target head 13 .

[0055] The light emission principle of a reflective X-ray source is adopted. After being emitted, the charged particle beam is affected by the focusing coil 8 and focuses. Under the premise of fixing the number of coil turns, the focusing distance and the focal point size are adjusted by adjusting the current, so as to achieve the optimal efficiency of the number of charged particles bombarding the target surface. While the charged particle beam bombards the anode 5 target, the anode 5 target rotates, which reduces the damage caused by bombarding a point for a long time and realizes heat dissipation during the rotation process. A cooling water channel is designed at the position of the target head 13, which further increases the heat dissipation efficiency of the anode 5 target, thereby increasing the power of the anode 5 target. The design of the rotating target plus the water-cooling structure target head 13 reduces the bombardment loss of the target surface, increases the service life of the ray source, and realizes the continuous operation of X-ray detection.

[0056] The above description is only a preferred embodiment of the present invention and is not intended to limit the present invention. Any modifications, equivalent substitutions, improvements, etc. made within the spirit and principles of the present invention should be included in the protection scope of the present invention.

Claims

1. An electromagnetically coupled rotating reflection target X-ray source device, characterized in that: It includes a vacuum pump and a cavity, wherein the vacuum pump is connected to the cavity, an insulating base is provided on one side of the cavity, a cathode unit is provided at the end of the insulating base, and an anode opposite to the cathode unit is also provided in the wall; The anode is connected to the focusing flange through the centering coil. A focusing coil is provided on the outer circumferential surface of the focusing flange. A coil cooling device is provided on the outer side of the focusing coil. A single lens is provided on the outer side of the focusing flange. An anode target assembly is also provided in the cavity; A passage is formed in the middle of the focusing flange, and the charged particles emitted by the cathode unit bombard the anode target body of the anode target assembly through the anode, the focusing flange, and the single lens in sequence; A rotating assembly is arranged outside the cavity, and the rotating assembly is used for rotating the anode target assembly; a cooling structure is also arranged inside the anode target assembly.

2. The electromagnetically coupled rotating reflection target X-ray source device according to claim 1, characterized in that: The passage is in communication with the anode target assembly through a particle beam inlet.

3. The electromagnetically coupled rotating reflection target X-ray source device according to claim 2, characterized in that: The anode target assembly includes a target head, a support frame and a substrate; the support frame and the substrate are arranged inside the target head, the substrate is sleeved into the No. 1 inner cavity of the support frame to form a fit, the substrate is provided with a No. 2 inner cavity, and the side wall of the support frame is provided with a water outlet, and cooling water can enter the No. 1 inner cavity from the No. 2 inner cavity and then be discharged from the water outlet; the top of the support frame is provided with an anode target body.

4. The electromagnetically coupled rotating reflection target X-ray source device according to claim 3, characterized in that: The material of the anode target body is copper, and a fixing groove is formed on the top of the support frame. The fixing groove is used to install the anode target body, and the anode target body is connected to the fixing groove by vacuum heat welding; a diamond layer is attached to the top surface of the target body by deposition growth, and a layer of sputtered tungsten is provided on the surface of the diamond layer by magnetron sputtering.

5. The electromagnetically coupled rotating reflection target X-ray source device according to claim 4, characterized in that: A plurality of sealing grooves are formed on the outer surface of the middle and upper part of the support frame, and the sealing grooves are used to place sealing rings, and the water outlet holes are arranged below the sealing grooves; and an assembly hole is arranged at the bottom end of the support frame; The bottom circumferential surface of the substrate is provided with a sealing groove, the bottom end is provided with a matching hole, and the middle part is provided with a limiting platform. The upper side of the limiting platform is a cooling part, and the lower side of the limiting platform is used as a fixing part.

6. The electromagnetically coupled rotating reflection target X-ray source device according to claim 5, characterized in that: The support frame and the substrate are both sealed at the upper and lower parts with the inner cavity of the target head through a sealing ring.

7. The electromagnetically coupled rotating reflection target X-ray source device according to claim 5, characterized in that: The side of the cooling part close to the limit platform can fit tightly with the assembly hole of the support frame to achieve the matching connection between the support frame and the substrate; the outer diameter of the cooling part decreases from one end close to the limit platform to the other end; a gap is formed between the cooling part and the No. 1 inner cavity of the support frame, and the gap is used for the circulation of cooling water.

8. The electromagnetically coupled rotating reflection target X-ray source device according to claim 7, characterized in that: A water inlet hole is provided at the middle and lower part of the substrate, and the water inlet hole is connected to the second inner cavity of the substrate. A connecting hole is provided at the top of the substrate, and the connecting hole is connected to the first inner cavity and the second inner cavity.

9. The electromagnetically coupled rotating reflection target X-ray source device according to claim 3, characterized in that: The rotating assembly comprises a servo motor, an electromagnetic coupling transmission mechanism and a rotating shaft, the servo motor is mounted to the outer surface of the cavity through a motor mounting plate, and the output end of the servo motor is provided with an electromagnetic coupling main transmission of the electromagnetic coupling transmission mechanism; The bottom of the substrate is connected to the rotating shaft, and the rotating shaft is provided with an electromagnetic coupling auxiliary transmission of an electromagnetic coupling transmission mechanism; the electromagnetic coupling main transmission and the electromagnetic coupling auxiliary transmission cooperate with each other to realize the driving of the servo motor on the anode target assembly.

10. The electromagnetically coupled rotating reflection target X-ray source device according to claim 3, characterized in that: A window and a limit beam are arranged on the top of the target head. The limit beam is connected to the target head through bolts to fix the window. A sealing gasket is arranged between the window and the target head.

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