Tubular linear motor and binding head structure of high-speed die bonder
By adopting the structure of a tubular linear motor in a high-speed crystal solidification machine, the rotor assembly reciprocates linear motion along the axial direction of the stator assembly, directly driving the solid crystal binding head movement, solving the problem of decreasing the motion accuracy and speed of the solid crystal binding head in the prior art, and achieving high-precision and high-speed solid crystal efficiency.
Patent Information
- Application Number
- CN202420427740.2
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-03-05
- Publication Date
- 2025-03-25
- Estimated Expiration
- 2034-03-05
AI Technical Summary
The head binding structure of the existing semiconductor high-speed crystal solid machine requires a screw nut assembly for transmission, resulting in a decrease in the accuracy and speed of the solid crystal tie head movement, which cannot meet the high-precision and high-speed requirements of the high-speed crystal solid machine, and reduces the crystal solid efficiency.
The structure of a tubular linear motor is adopted, wherein the actuator assembly includes a plurality of coils arranged in sequence along the axial direction of the stator assembly, and there is a gap between the coil and the magnet unit. The actuator assembly reciprocating linear motion along the axial direction of the stator assembly, directly driving the solid crystal binding head movement.
It improves the accuracy and speed of the solid crystal binding head movement, meets the high-precision and high-speed requirements of high-speed crystal solid machines, reduces friction resistance, and improves the solid crystal efficiency.
Smart Images
Figure CN222674115U_ABST
Abstract
Description
Technical Field
[0001] The utility model relates to the technical field of motors, in particular to a tubular linear motor and a head binding structure of a high-speed crystal bonding machine. Background Art
[0002] The head binding structure of the existing semiconductor high-speed crystal bonding machine generally includes a base, a driving mechanism and a crystal bonding head. The driving mechanism includes a servo motor and a screw nut assembly arranged on the base. The screw nut assembly includes a screw rotatably arranged on the base and a nut matched with the screw thread. The servo motor is connected to the screw, and the nut is connected to the crystal bonding head. The crystal bonding head is located on one side of the base. In actual application, the screw is driven to rotate by the servo motor, so that the crystal bonding head can be driven to make reciprocating linear motion relative to the base through the nut, so that the crystal bonding head can absorb the wafer from the film expansion mechanism of the high-speed crystal bonding machine and install the absorbed wafer on the LED bracket of the crystal bonding track of the high-speed crystal bonding machine. The driving mechanism of this structure needs to be provided with a screw nut assembly for transmission, thereby reducing the accuracy and speed of the movement of the crystal bonding head, and cannot meet the high-precision and high-speed requirements of the high-speed crystal bonding machine, and reduces the crystal bonding efficiency. Utility Model Content
[0003] In order to overcome the deficiencies of the prior art, the utility model provides a tubular linear motor and a head binding structure for a high-speed crystal bonding machine, which can improve the accuracy and speed of the crystal bonding head movement, meet the high-precision and high-speed requirements of the high-speed crystal bonding machine, and improve the crystal bonding efficiency.
[0004] The technical solution adopted by the utility model to solve its technical problems is:
[0005] The first aspect of the utility model provides a tubular linear motor, the tubular linear motor comprises a stator assembly and a mover assembly, the mover assembly is sleeved on the outer periphery of the stator assembly with a gap therebetween, the mover assembly can perform reciprocating linear motion along the axial direction of the stator assembly; the stator assembly comprises an axis core and a magnet unit, the two ends of the axis core are respectively mounted on two support seats, the two support seats are arranged oppositely, the magnet unit is sleeved on the outer periphery of the axis core, the magnet unit comprises a plurality of permanent magnets and a plurality of yokes, the plurality of yokes are sleeved on the outer periphery of the axis core in sequence and at intervals along the axial direction of the axis core, one permanent magnet is arranged between two adjacent yokes, and the permanent magnet is sleeved on the outer periphery of the axis core; the mover assembly comprises an outer shell and a plurality of coils, the outer shell has a through cavity running through both ends thereof, the outer shell is annularly arranged on the outer periphery of the magnet unit through the through cavity, the plurality of coils are sequentially arranged in the through cavity in the axial direction of the outer shell and sleeved on the outer periphery of the magnet unit in sequence and at intervals, and the plurality of coils and the magnet unit have the gap therebetween.
[0006] As a preferred technical solution, two partitions are provided on the outer periphery of the shaft core, the magnet unit is located between the two partitions, the two partitions are respectively close to the two support seats, and the partition is a non-magnetic conductive part.
[0007] As a preferred technical solution, the mover assembly further includes two cover plates, the two cover plates respectively cooperate with the two ends of the through cavity, the two cover plates are respectively arranged around the outer circumference of the magnet unit, and the multiple coils are located between the two cover plates.
[0008] As a preferred technical solution, a clamping block is formed on the outer periphery of the cover plate, and an inner wall of the through cavity is provided with a clamping groove extending along the axial direction of the shell, and the clamping blocks of the two cover plates are respectively engaged with both ends of the clamping groove.
[0009] As a preferred technical solution, an insulating plate is provided between two adjacent coils, and the insulating plate is arranged around the outer circumference of the magnet unit.
[0010] As a preferred technical solution, a connector and a through hole are provided on one side of the shell, the connector is used to be electrically connected to an external power supply through a lead, and the through hole is connected to the through cavity. Among the multiple coils, the starting end of the first coil and the terminal end of the last coil respectively pass through the through hole and are electrically connected to the connector, and among two adjacent coils, the terminal end of the previous coil is electrically connected to the starting end of the next coil.
[0011] As a preferred technical solution, the support seat includes a main body and a mounting block formed at the bottom end of the main body, the two ends of the shaft core are respectively mounted on the main bodies of the two support seats, the two ends of the mounting block respectively protrude from the two ends of the main body, and the two ends of the mounting block are respectively provided with mounting holes.
[0012] As a preferred technical solution, a plug-in hole is provided on one side of the body, the plug-in hole extends to the other side of the body, the plug-in hole is close to the top of the body, and the two ends of the shaft core are respectively plugged into the plug-in holes of the two support seats.
[0013] As a preferred technical solution, one end of the main body is provided with a groove connected to the plug-in hole, the bottom inner wall of the groove is provided with a first mounting hole, the top of the main body is provided with a second mounting hole connected to the groove, and fasteners are installed in the first mounting hole and the second mounting hole.
[0014] The second aspect of the utility model provides a head binding structure of a high-speed crystal bonding machine, including a base and a crystal bonding head, wherein the crystal bonding head is located on one side of the base, and also includes the tubular linear motor described in the above technical solution, wherein the two support bases of the tubular linear motor are respectively installed on the base, and the crystal bonding head is connected to the outer casing of the tubular linear motor.
[0015] The beneficial effect of the utility model is that the utility model provides a mover assembly and a stator assembly, and in actual application, the mover assembly performs reciprocating linear motion along the axial direction of the stator assembly, thereby driving the crystal binding head of the binding head structure of the high-speed crystal bonding machine to perform reciprocating linear motion. Compared with the prior art, there is no need to set a transmission assembly, which improves the accuracy of the movement of the crystal binding head. Moreover, the plurality of coils are respectively arranged on the outer circumference of the magnet unit, and there are gaps between the plurality of coils and the magnet unit, so that the friction resistance encountered by the mover assembly during movement is small, which can increase the movement speed of the mover assembly, thereby increasing the movement speed of the crystal binding head, meeting the high-precision and high-speed requirements of the high-speed crystal bonding machine, and improving the crystal bonding efficiency. BRIEF DESCRIPTION OF THE DRAWINGS
[0016] The utility model is further described below in conjunction with the accompanying drawings and embodiments.
[0017] Figure 1 This is a structural schematic diagram of a tubular linear motor provided by an embodiment of the utility model;
[0018] Figure 2 yes Figure 1 A schematic top view of the tubular linear motor shown;
[0019] Figure 3 yes Figure 1 A schematic cross-sectional view of the tubular linear motor shown;
[0020] Figure 4 yes Figure 1 A schematic structural diagram of a mover assembly of the tubular linear motor shown;
[0021] Figure 5 yes Figure 4 An exploded schematic diagram of the mover assembly shown;
[0022] Figure 6 yes Figure 4 A schematic structural diagram of the housing of the mover assembly shown;
[0023] Figure 7 yes Figure 1 An exploded schematic diagram of a stator assembly of the tubular linear motor shown;
[0024] Figure 8 yes Figure 7 A schematic plan view of a first permanent magnet, a second permanent magnet, and a yoke located between the first permanent magnet and the second permanent magnet of a stator assembly is shown. DETAILED DESCRIPTION
[0025] The following will clearly and completely describe the concept, specific structure and technical effects of the utility model in combination with the embodiments and drawings, so as to fully understand the purpose, characteristics and effects of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of them. Based on the embodiments of the utility model, other embodiments obtained by technicians in this field without creative work are all within the scope of protection of the utility model. In addition, all the connection / connection relationships involved in the patent do not refer to the direct connection of components, but refer to the formation of a better connection structure by adding or reducing connection accessories according to the specific implementation situation. The various technical features in the creation of the utility model can be combined interchangeably without conflicting with each other.
[0026] Please refer to Figures 1 to 3 An embodiment of the utility model provides a tubular linear motor, comprising a mover assembly 10 and a stator assembly 20. The mover assembly 10 is sleeved on the outer periphery of the stator assembly 20 with a gap therebetween, and the mover assembly 10 can perform left-right reciprocating linear motion along the axial direction of the stator assembly 20.
[0027] Specific, combined Figures 4 to 7 As shown, the mover assembly 10 includes a housing 11 and a plurality of coils 12 .
[0028] The shell 11 is a rectangular parallelepiped structure. The material of the shell 11 is non-metallic material, such as plastic. The shell 11 has a through cavity 11a that runs through its two ends, namely the left end and the right end. The cross-sectional shape of the through cavity 11a is circular. A plurality of coils 12 are arranged in the through cavity 11a in sequence from left to right along the axial direction of the shell 11. The number of coils 12 can be set according to actual conditions. A connector 14 and a through hole 112 are provided on one side, namely the front side, of the shell 11, and the connector 14 is used to be electrically connected to an external power supply (i.e., a DC power supply) through a lead 15. The through hole 112 is connected to the through cavity 11a. The through hole 112 and the connector 14 are both close to the right end of the shell 11. Among the plurality of coils 12, the starting end of the first coil 12 and the terminal end of the last coil 12 respectively pass through the through hole 112 and are electrically connected to the connector 14, and among the two adjacent coils 12, the terminal end of the previous coil 12 is electrically connected to the starting end of the next coil 12. After the lead wire 15 is connected to the external power source, the external power source can supply power to the multiple coils 12 via the lead wire 15 and the connector 14. The side of the housing 11 away from the connector 14, i.e., the rear side, is used to connect to the die bonding head of the head bonding structure of the high-speed die bonding machine.
[0029] The stator assembly 20 includes a shaft core 21 and a magnet unit. The two ends of the shaft core 21, i.e., the left end and the right end, are respectively mounted on two support seats 22, and the two support seats 22 are arranged opposite to each other on the left and right sides. The two support seats 22 are respectively used to be mounted on the base of the head binding structure of the high-speed crystal bonding machine, and the two support seats 22 play a role of mounting support for the shaft core 21. The magnet unit is sleeved on the outer periphery of the shaft core 21. The housing 11 is arranged on the outer periphery of the magnet unit through the through cavity 11a. A plurality of coils 12 are respectively sleeved on the outer periphery of the magnet unit. There is the above-mentioned gap between the plurality of coils 12 and the magnet unit. In this embodiment, the magnet unit includes a plurality of permanent magnets 23 and a plurality of yokes 24. A plurality of yokes 24 are sleeved on the outer periphery of the shaft core 21 in sequence along the axial direction of the shaft core 21, and a permanent magnet 23 is provided between two adjacent yokes 24. The permanent magnet 23 is sleeved on the outer periphery of the shaft core 21, and the yoke 24 is in contact with the adjacent permanent magnets 23. In this embodiment, the number of the yokes 24 is 29, and the number of the permanent magnets 23 is 28. It can be understood that the number of the permanent magnets 23 and the yokes 24 can be set according to actual conditions. Figure 8 As shown, the magnetic pole at one end of the permanent magnet 23 is an N pole, and the magnetic pole at the other end is an S pole. The polarities of the adjacent magnetic poles of two adjacent permanent magnets 23 are the same. For example, assuming that the magnetic pole at the left end of the first permanent magnet 23 is an N pole and the magnetic pole at the right end is an S pole, then the magnetic pole at the left end of the second permanent magnet 23 is an S pole and the magnetic pole at the right end is an N pole, and the magnetic pole at the left end of the third permanent magnet 23 is an N pole and the magnetic pole at the right end is an S pole, and so on. The permanent magnet 23 is used to generate a magnetic field. The permanent magnet 23 is a ferrite magnet, a neodymium iron boron magnet, etc. The yoke 24 plays the role of transmitting magnetic lines of force, and the material of the yoke 24 is existing and will not be repeated here. In actual application, the two support bases 23 are respectively installed on the base of the head binding structure of the high-speed crystal bonding machine, and the rear side of the shell 11 is connected to the crystal bonding head of the head binding structure of the high-speed crystal bonding machine. After the multiple coils 12 are energized, the multiple coils 12 cut the magnetic lines of force in the magnetic field to generate axial thrust. Driven by the thrust, the multiple coils 12 can make reciprocating linear motion left and right along the axial direction of the stator assembly 20, thereby driving the shell 11 to make reciprocating linear motion left and right along the axial direction of the stator assembly 20, and then driving the crystal bonding head connected thereto to make reciprocating linear motion left and right relative to the base, so that the crystal bonding head can be used to absorb the chip from the film expansion mechanism and install the absorbed chip on the LED bracket of the crystal bonding track.
[0030] The utility model provides a mover assembly 10 and a stator assembly 20. In actual application, the mover assembly 10 makes reciprocating linear motion along the axial direction of the stator assembly 20, thereby driving the crystal bonding head of the head bonding structure of the high-speed crystal bonding machine to make reciprocating linear motion. Compared with the prior art, there is no need to set a transmission assembly, which improves the accuracy of the movement of the crystal bonding head. In addition, the multiple coils 12 are respectively arranged on the outer circumference of the magnet unit, and there are gaps between the multiple coils 12 and the magnet unit. Therefore, the friction resistance encountered by the mover assembly 10 during movement is small, which can increase the movement speed of the mover assembly 10, thereby increasing the movement speed of the crystal bonding head, meeting the high-precision and high-speed requirements of the high-speed crystal bonding machine, and improving the crystal bonding efficiency.
[0031] Furthermore, the mover assembly 10 further includes two cover plates 13, the shape of which is adapted to the shape of the through cavity 11a, and the two cover plates 13 are respectively matched with the two ends of the through cavity 11a, i.e., the left end and the right end, and the two cover plates 13 are respectively arranged around the outer circumference of the magnet unit, and the plurality of coils 12 are located between the two cover plates 13. The two cover plates 13 are arranged opposite to each other on the left and right sides, and the two sides of the two cover plates 13 that are away from each other are respectively flush with the two ends of the outer shell 11. When the outer shell 11 makes a left-right reciprocating linear motion along the axial direction of the stator assembly 20, the two cover plates 13 can move synchronously with the outer shell 11. The two cover plates 13 are provided to protect the plurality of coils 12.
[0032] A block 131 is formed on the outer periphery of the cover plate 13, and a slot 111 extending axially along the outer shell 11 is provided on the inner wall of the through cavity 11a. The blocks 131 of the two cover plates 13 are respectively engaged with the two ends of the slot 111. In this embodiment, there are four blocks 131 of each cover plate 13, and the four blocks 131 are arranged at intervals along the circumference of the cover plate 13. Correspondingly, there are also four slots 111. It can be understood that the number of blocks 131 and slots 111 can be set according to actual conditions. The provided blocks 131 and slots 111 can prevent the cover plate 13 from falling off the outer shell 11.
[0033] An insulating plate 14 is provided between two adjacent coils 12. The insulating plate 14 is arranged around the outer periphery of the magnet unit. The insulating plate 14 plays an insulating role to prevent the two adjacent coils 12 from short-circuiting due to contact. The insulating plate 14 can move synchronously with the multiple coils 12. In practical applications, epoxy resin can be filled in the gap between the coil 12, the insulating plate 14 and the inner wall of the through cavity 11a, so that the coil 12 and the insulating plate 14 can be fixed in the through cavity 11a.
[0034] Further, the outer periphery of the shaft core 21 is sleeved with two annular partitions 25, and the magnet unit is located between the two partitions 25. The two partitions 25 are close to the two support seats 22 respectively. The shaft core 21 and the partition 25 are both non-magnetic conductive parts, such as stainless steel parts. In practical applications, for example, when the first coil 12 moves to the partition 25 located on the left, since the partition 25 is a non-magnetic conductive part, the partition 25 does not generate a magnetic field, and thus does not generate thrust. At this time, multiple coils 12 stop moving to the left, so that the housing 11 can stop moving to the left, and then the solid crystal binding head can stop moving to the left. Similarly, when the last coil 12 moves to the partition 25 located on the right, since the partition 25 is a non-magnetic conductive part, the partition 25 does not generate a magnetic field, and thus does not generate thrust. At this time, multiple coils 12 stop moving to the right, so that the housing 11 can stop moving to the right, and then the solid crystal binding head can stop moving to the right.
[0035] In this embodiment, the support seat 22 includes a body 221 and a mounting block 222 formed at the bottom end of the body 221. The two ends of the shaft core 21, i.e., the left end and the right end, are respectively mounted on the bodies 221 of the two support seats 22. The two ends of the mounting block 222, i.e., the front end and the rear end, protrude from the front end and the rear end of the body 221, respectively, and the front end and the rear end of the mounting block 222 are respectively provided with two mounting holes 2221. In actual application, two holes corresponding to the two mounting holes 2221 at the front end and the rear end of the mounting block 222 are provided on the base of the binding head structure of the high-speed crystal bonding machine, and fasteners such as screws are installed in the holes and the corresponding mounting holes 2221, so that the corresponding mounting block 222 can be installed on the base, thereby realizing the installation of the corresponding support seat 22 on the base. It can be understood that the number of mounting holes 2221 can be set according to actual conditions.
[0036] The two ends of the shaft core 21, i.e., the left end and the right end, are respectively mounted on the bodies 221 of the two support seats 22. Specifically, one side of the body 221, such as the side of the body 221 close to the shaft core 21, is provided with a plug hole 2211, which extends to the other side of the body 221, such as the side of the body 221 away from the shaft core 21, and the plug hole 2211 is close to the top of the body 221. The left end and the right end of the shaft core 21 are respectively plugged into the plug holes 2211 of the two support seats 22.
[0037] One end of the body 221, i.e., the front end, is provided with a groove 2212 connected to the plug hole 2211, and the inner wall of the bottom end of the groove 2212 is provided with a first mounting hole, and the top end of the body 221 is provided with a second mounting hole 2214 connected to the groove 2212, and fasteners 2213 such as screws are installed in the first mounting hole and the second mounting hole 2214. In actual application, when the fasteners 2213 are installed in the first mounting hole and the second mounting hole 2214, the part of the body 221 located above the groove 2212 will be squeezed by the fasteners 2213 and elastically deform downward, and the corresponding end of the shaft core 21 is clamped by utilizing the elastic deformation of the part of the body 221 located above the groove 2212, so as to prevent the corresponding end of the shaft core 21 from coming out of the corresponding plug hole 2211. In addition, this structure also facilitates the assembly and disassembly of the shaft core 21. For example, when the left and right ends of the shaft core 21 are to be removed from the two support seats 22, the fasteners 2213 are first removed from the corresponding first mounting holes and second mounting holes 2214, and then the left and right ends of the shaft core 21 are respectively removed from the corresponding plug-in holes 2211. When the left and right ends of the shaft core 21 are to be installed on the two support seats 22, the left and right ends of the shaft core 21 are first plugged into the plug-in holes 2211 of the two support seats 22, and then the fasteners 2213 are respectively installed in the first and second mounting holes 2214 of the two support seats 22. In this embodiment, there are two first mounting holes and two second mounting holes 2214, and correspondingly, there are also two fasteners 2213. It can be understood that the number of the first mounting holes, the second mounting holes 2214 and the fasteners 2213 can be set according to actual conditions.
[0038] The utility model also provides a head binding structure of a high-speed crystal bonding machine, including a base, a crystal bonding head and the above-mentioned tubular linear motor. Two support bases 22 of the tubular linear motor are respectively installed on the base. The crystal bonding head is located on one side of the base and is connected to the rear side of the housing 11 of the tubular linear motor. By adopting the above-mentioned tubular linear motor, the accuracy and speed of the crystal bonding head movement can be improved, which meets the high-precision and high-speed requirements of the high-speed crystal bonding machine and improves the crystal bonding efficiency.
[0039] The above is a specific description of the preferred implementation of the utility model, but the invention of the utility model is not limited to the described embodiments. Technical personnel familiar with the field can also make various equivalent deformations or substitutions without violating the spirit of the utility model. These equivalent deformations or substitutions are all included in the scope defined by the claims of this application.
Claims
1. A tubular linear motor, characterized in that: The tubular linear motor comprises a stator assembly and a mover assembly, wherein the mover assembly is sleeved on the outer periphery of the stator assembly with a gap therebetween, and the mover assembly can perform reciprocating linear motion along the axial direction of the stator assembly; The stator assembly includes an axis core and a magnet unit, the two ends of the axis core are respectively mounted on two support seats, the two support seats are arranged opposite to each other, the magnet unit is sleeved on the outer periphery of the axis core, the magnet unit includes a plurality of permanent magnets and a plurality of magnetic yokes, the plurality of magnetic yokes are sleeved on the outer periphery of the axis core in sequence and at intervals along the axial direction of the axis core, one permanent magnet is arranged between two adjacent magnetic yokes, and the permanent magnet is sleeved on the outer periphery of the axis core; The movable subassembly includes a shell and a plurality of coils, wherein the shell has a through cavity running through both ends thereof, the shell is arranged on the outer circumference of the magnet unit through the through cavity, the plurality of coils are arranged in the through cavity in sequence and spaced apart along the axial direction of the shell and are respectively sleeved on the outer circumference of the magnet unit, and the plurality of coils have the gap between them and the magnet unit.
2. The tubular linear motor according to claim 1, characterized in that: The outer periphery of the shaft core is sleeved with two partitions, the magnet unit is located between the two partitions, the two partitions are respectively close to the two support seats, and the partition is a non-magnetic conductive part.
3. The tubular linear motor according to claim 1, characterized in that: The mover assembly further includes two cover plates, which are respectively matched with two ends of the through cavity, and are respectively arranged around the outer circumference of the magnet unit, and the plurality of coils are located between the two cover plates.
4. The tubular linear motor according to claim 3, characterized in that: A clamping block is formed on the outer periphery of the cover plate, and a clamping groove extending along the axial direction of the shell is provided on the inner wall of the through cavity. The clamping blocks of the two cover plates are respectively engaged with two ends of the clamping groove.
5. The tubular linear motor according to claim 1, characterized in that: An insulating plate is arranged between two adjacent coils, and the insulating plate is arranged around the outer circumference of the magnet unit.
6. The tubular linear motor according to claim 1, characterized in that: A connector and a through hole are provided on one side of the shell, wherein the connector is used to be electrically connected to an external power source through a lead, and the through hole is communicated with the through cavity. Among the multiple coils, the starting end of the first coil and the terminal end of the last coil respectively pass through the through hole and are electrically connected to the connector, and among two adjacent coils, the terminal end of the previous coil is electrically connected to the starting end of the next coil.
7. The tubular linear motor according to claim 1, characterized in that: The support seat includes a main body and a mounting block formed at the bottom end of the main body, the two ends of the shaft core are respectively mounted on the main bodies of the two support seats, the two ends of the mounting block are respectively protruded from the two ends of the main body, and the two ends of the mounting block are respectively provided with mounting holes.
8. The tubular linear motor according to claim 7, characterized in that: A plug-in hole is provided on one side of the body, and the plug-in hole extends to the other side of the body. The plug-in hole is close to the top of the body, and both ends of the shaft core are respectively plugged into the plug-in holes of the two support seats.
9. The tubular linear motor according to claim 8, characterized in that: One end of the body is provided with a groove connected to the plug hole, the bottom inner wall of the groove is provided with a first mounting hole, the top of the body is provided with a second mounting hole connected to the groove, and fasteners are installed in the first mounting hole and the second mounting hole.
10. A head binding structure of a high-speed die bonding machine, comprising a base and a die bonding head, wherein the die bonding head is located on one side of the base, and is characterized in that: It also includes the tubular linear motor according to any one of claims 1 to 9, wherein two support seats of the tubular linear motor are respectively mounted on the base, and the die-bonding head is connected to the outer shell of the tubular linear motor.