Plasma density detection scanning power supply
By adopting a single control circuit and synchronous control technology in the Langmuir probe scanning power supply, the problem of insufficient resolution and speed of existing scanning power supply in high-speed and high-precision scanning is solved, and a more efficient and accurate scanning effect is achieved.
CN222674552UActive Publication Date: 2025-03-25CHENGDU ELEKOM VACUUM ELECTRON TECH CO LTD
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Patent Information
- Application Number
- CN202421219870.3
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-05-30
- Publication Date
- 2025-03-25
- Estimated Expiration
- 2034-05-30
AI Technical Summary
Technical Problem
The existing Langmuir probe scanning power supply has problems with relatively poor output resolution and speed and low scanning accuracy in high-speed and high-precision scanning.
Method used
A plasma density detection scanning power supply is designed, and a single control circuit is used to realize the output of the scan signal and the input of the sampled signal. The D/A converter and A/D converter are synchronized through the control circuit to ensure the real-time and accuracy of sampling.
Benefits of technology
It achieves the improvement of scanning speed and efficiency, ensures the accuracy and real-timeness of scanning results, and meets the needs of high-speed and high-precision scanning.
✦ Generated by Eureka AI based on patent content.
Abstract
Relates to the technical field of plasma diagnosis, in particular to a plasma density detection scanning power supply which comprises a control circuit, a D / A converter, a scanning voltage generating circuit, a sampling circuit, a signal conditioning circuit and an A / D converter. A signal transmission pin of the control circuit is electrically connected with the upper computer, a power input pin of the control circuit is electrically connected with the power supply system, and a scanning signal output pin of the control circuit is electrically connected with the D / A converter; the output end of the D / A converter is electrically connected with the Langmuir probe through the scanning voltage generation circuit; the input end of the sampling circuit is electrically connected with the Langmuir probe, and the output end of the sampling circuit is electrically connected with the A / D converter through the signal conditioning circuit; the A / D converter is electrically connected with an input pin of the control circuit; the power supply is high in scanning speed and accurate in scanning result.
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