Efficient condensation type particulate filter

Abstract

The utility model relates to the technical field of semiconductor ALD (Atomic Layer Deposition) film coating and PECVD (Plasma Enhanced Chemical Vapor Deposition) process systems, in particular to an efficient condensation type particle trap which comprises a movable bottom plate device, a water mist spraying system and a barrel body with a particle collecting function, the utility model has the advantages that the particulate matter trapping effect is good, the position of the air inlet can be changed, the process gas flowing path is increased by three to four times compared with the previous product, the guide plate structure is added in the process gas flowing area, and the time for increasing the process gas flowing path is prolonged along with the reduction of the temperature of the process gas. Particle dust is fully precipitated and attached to the surfaces of a guide plate, a partition plate and a cylinder wall in the catcher, the probability of intercepting and attaching particles can be effectively improved, meanwhile, better compatibility is achieved, the butt joint position of an air inlet and a process pipeline is not limited any more, and the position of the air inlet can be adjusted according to the arrangement height of the process pipeline; and the particulate matter collecting function and effect of the trap are not influenced.

Description

Technical Field

[0001] The utility model relates to the technical field of semiconductor ALD coating and PECVD process system, in particular to a high-efficiency condensation type particle collector. Background Art

[0002] The semiconductor ALD coating process is an important part of the semiconductor manufacturing process. It is a process that processes silicon wafers into integrated circuit chips with a specific circuit structure through a series of complex process steps. During the production and processing of semiconductors, a condensing particle collector is required to capture and remove the fine particles contained in the process gas.

[0003] During the use of traditional condensing particle collectors, due to the limitation of the spiral path, the air inlet can only be at the upper end of the cylinder of the collector that has the function of collecting particulate matter, and cannot be adjusted downward, resulting in the connection position between the air inlet of the collector and the process pipeline being restricted. If the air inlet is adjusted downward, the flow path of the process gas will become shorter, and the particle capture effect will be worse.

[0004] In order to solve the above technical problems, we have designed a high-efficiency condensing particle collector. Utility Model Content

[0005] The purpose of the utility model is to provide a high-efficiency condensing particle collector with the advantages of strong compatibility, better capturing effect and automatic water replenishment, which solves the problem that the existing collector cannot adjust the position of the air inlet according to actual usage during use and cannot automatically replenish the water inside the water bottle.

[0006] To achieve the above-mentioned objectives, the utility model provides the following technical solutions: a high-efficiency condensing particulate collector, comprising a movable bottom plate device, a water mist spray system and a dust collection mechanism, the top of the movable bottom plate device is connected to a cylinder with a particulate matter collecting function through a C-type caliper, the top of the cylinder with the particulate matter collecting function is connected to a top plate through a C-type caliper, the top of the top plate is connected to an exhaust pipe opening, the bottom of the front side of the cylinder with the particulate matter collecting function is connected to an air inlet, a center tube is welded to the top of the movable bottom plate device, a guide port is opened at the bottom of the front side of the center tube, a center guide spiral blade is connected to the top of the movable bottom plate device, a partition is welded to the surface of the center tube, a guide plate is welded to the surface of the partition, and the top of the front side of the cylinder with the particulate matter collecting function is connected to a water mist spray port.

[0007] Preferably, the water mist spray system includes a water bottle, a liquid level sensor is fixedly connected to the front side of the top of the water bottle, the left side of the top of the water bottle is connected to a pneumatic diaphragm valve through a KF flange, the top of the pneumatic diaphragm valve is connected to a water mist pipeline, and the left end of the water mist pipeline is connected to the water mist spray port.

[0008] Preferably, a first flow guide hole is opened on the surface of the central flow guide spiral blade, and the number of the first flow guide holes is several.

[0009] Preferably, a first positioning groove is formed on the surface of the central tube, and a second positioning groove is formed on the surface of the partition.

[0010] Preferably, casters are bolted to the four corners of the bottom of the movable base plate device, and a sealing strip is connected to the bottom of the partition by gluing.

[0011] Compared with the prior art, the beneficial effects of the utility model are as follows:

[0012] The utility model has the advantages of good dust particle capture effect and changeable air inlet position through the action of the cylinder body with the function of collecting particulate matter, the movable bottom plate device, the top plate, the air inlet, the exhaust pipe, the central guide spiral blade, the partition and the guide plate. Under the action of the exhaust pipe, the air inlet, the central guide spiral blade, the partition and the guide plate, the flow path of the process gas is increased by three to four times compared with the previous products, and the guide plate structure is added in the process gas flow area. Since the flow path of the process gas is increased and the time is prolonged, as the temperature of the process gas decreases, the particulate dust is fully precipitated and attached to the guide plate, the partition and the cylinder wall surface inside the collector, which can effectively improve the probability of intercepting and attaching particles and has better compatibility. The docking position of the air inlet and the process pipeline is no longer restricted, and the air inlet position can be adjusted according to the layout height of the process pipeline without affecting the particle collection function and effect of the collector. BRIEF DESCRIPTION OF THE DRAWINGS

[0013] Figure 1 It is a three-dimensional diagram of the structure of the utility model;

[0014] Figure 2 It is a three-dimensional cross-sectional view of the local structure of the utility model;

[0015] Figure 3 This is a three-dimensional diagram of the central tube structure of the utility model;

[0016] Figure 4 It is a three-dimensional diagram of the central guide spiral blade structure of the utility model.

[0017] In the figure: 1. movable bottom plate device; 2. water mist spray system; 3. cylinder with particle collection function; 4. top plate; 5. exhaust pipe outlet; 6. air inlet; 7. center pipe; 8. guide port; 9. sealing strip; 10. center guide spiral blade; 11. partition; 12. guide plate; 13. water mist spray outlet; 14. first guide hole; 15. second positioning groove; 16. water bottle; 17. liquid level sensor; 18. pneumatic diaphragm valve; 19. water mist pipeline; 20. casters. DETAILED DESCRIPTION

[0018] See also Figure 1-Figure 4 , a high-efficiency condensing particle collector, comprising a movable bottom plate device 1, a water mist spray system 2 and a dust collection mechanism. Under the action of the dust collection mechanism, static electricity will exist on the inner wall of the device when it is turned on, and dust will adhere to the inner wall, thereby completing the dust collection operation. The top of the movable bottom plate device 1 is connected to a cylinder 3 with a particle collection function through a C-type caliper, and the top of the cylinder 3 with a particle collection function is connected to a top plate 4 through a C-type caliper. The top of the top plate 4 is connected to an exhaust pipe port 5, and the bottom of the front side of the cylinder 3 with a particle collection function is connected to an air inlet 6. A central tube 7 is riveted on the top of the movable bottom plate device 1, and a guide port 8 is opened at the bottom of the front side of the central tube 7. The top of the movable bottom plate device 1 is movably connected to a central guide spiral blade 10 through a bearing, a partition 11 is welded on the surface of the central tube 7, and a guide plate 12 is welded on the surface of the partition 11. The top of the front side of the cylinder 3 with a particle collection function is connected to a water mist spray port 13.

[0019] See also Figure 1 and Figure 2 The water mist spray system 2 includes a water bottle 16, and a liquid level sensor 17 is fixedly connected to the front side of the top of the water bottle 16. By setting the liquid level sensor 17, the water level inside the water bottle 16 can be monitored in real time. The left side of the top of the water bottle 16 is connected to a pneumatic diaphragm valve 18 through a KF flange, and the top of the pneumatic diaphragm valve 18 is connected to a water mist pipeline 19, and the left end of the water mist pipeline 19 is connected to the water mist spray port 13.

[0020] See also Figure 1 and Figure 4 A first flow guide hole 14 is opened on the surface of the central flow guide spiral blade 10, and the number of the first flow guide holes 14 is several.

[0021] See also Figure 2 and Figure 3 A first positioning groove is provided on the surface of the central tube 7, and a second positioning groove 15 is provided on the surface of the partition plate 11. By providing the first positioning groove, the partition plate 11 can be positioned, and by providing the second positioning groove 15, the guide plate 12 can be positioned.

[0022] See also Figure 1 and Figure 2 Casters 20 are bolted to the four corners of the bottom of the movable bottom plate device 1, and a sealing strip 9 is connected to the bottom of the partition 11 by gluing. The sealing strip 9 is provided to isolate each space so that it flows along the disc-shaped path.

[0023] When in use, the position of the air inlet 6 can be adjusted and determined according to the height of the on-site process pipeline layout. After the position is determined, the air inlet 6 can be directly welded to the surface of the cylinder 3 with the function of collecting particulate matter, and the process pipeline is connected to the air inlet 6. The process gas is transported to the inner cavity of the air inlet 6. After the flue gas enters the cylinder 3 with the function of collecting particulate matter, under the action of the central tube 7, the guide port 8, the central guide spiral blade 10, the partition 11 and the guide plate 12, the gas flow path is increased by three to four times, and the guide plate 12 structure is added to the gas flow area, which effectively improves the probability of intercepting and attaching particulate matter, and has better compatibility. The docking position of the air inlet 6 and the process pipeline is no longer limited and can be arranged according to the process pipeline. The position of the air inlet 6 is adjusted in height without affecting the performance. The vacuum negative pressure condition converts the water inside the water bottle 16 into a vaporized state and transports it to the water mist pipeline 19 through the pneumatic diaphragm valve 18. The water mist pipeline 19 transports the water mist through the water mist spray port 13 to the inner cavity of the cylinder 3 with the function of collecting particulate matter. The water mist sprays and attaches the particulate matter in the gas. The particulate matter settles and attaches to the top of the movable bottom plate device 1, the inner wall of the cylinder 3 with the function of collecting particulate matter, the surface of the partition 11 and the surface of the guide plate 12. The liquid level sensor 17 detects the liquid level inside the water bottle 16. When the liquid level is insufficient, the valve on the front side of the top of the water bottle 16 is opened, the valve is connected to the water source pipeline, and the pure water pipe automatically fills the water bottle 16 with water.

[0024] In summary: the high-efficiency condensing particle collector, through the coordination of the cylinder 3 with the function of collecting particulate matter, the movable bottom plate device 1, the top plate 4, the air inlet 6, the exhaust pipe port 5, the central guide spiral blade 10, the partition 11 and the guide plate 12, solves the problem that the existing collector cannot adjust the position of the air inlet according to the actual usage during use, and cannot automatically replenish the water inside the water bottle.

Claims

1. A high-efficiency condensing particle collector, comprising a movable bottom plate device (1), a water mist spray system (2) and a cylinder (3) with a function of collecting particles, characterized in that: The top of the movable bottom plate device (1) is connected to a cylinder (3) having a function of collecting particulate matter via a C-type caliper, the top of the cylinder (3) having a function of collecting particulate matter is connected to a top plate (4) via a C-type caliper, the top of the top plate (4) is connected to an exhaust pipe port (5), the bottom of the front side of the cylinder (3) having a function of collecting particulate matter is connected to an air inlet (6), a central tube (7) is welded to the top of the movable bottom plate device (1), a guide port (8) is provided at the bottom of the front side of the central tube (7), a central guide spiral blade (10) is connected to the top of the movable bottom plate device (1), a partition (11) is welded to the surface of the central tube (7), a guide plate (12) is welded to the surface of the partition (11), and a water mist spray port (13) is connected to the top of the front side of the cylinder (3) having a function of collecting particulate matter.

2. The high-efficiency condensing particle collector according to claim 1 is characterized in that: The water mist spray system (2) comprises a water bottle (16), a liquid level sensor (17) is fixedly connected to the front side of the top of the water bottle (16), the left side of the top of the water bottle (16) is connected to a pneumatic diaphragm valve (18) via a KF flange, the top of the pneumatic diaphragm valve (18) is connected to a water mist pipeline (19), and the left end of the water mist pipeline (19) is connected to the water mist spray port (13).

3. The high-efficiency condensing particle collector according to claim 1 is characterized in that: The surface of the central flow-guiding spiral blade (10) is provided with first flow-guiding holes (14), and the number of the first flow-guiding holes (14) is a plurality.

4. The high-efficiency condensing particle collector according to claim 1 is characterized in that: A first positioning groove is provided on the surface of the central tube (7), and a second positioning groove (15) is provided on the surface of the partition plate (11).

5. The high-efficiency condensing particle collector according to claim 1 is characterized in that: Casters (20) are bolted to the four corners of the bottom of the movable base plate device (1), and a sealing strip (9) is connected to the bottom of the partition (11) by gluing.

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