The application discloses a kind of particle traps for MOCVD equipment, comprising: gas inlet
flange, shell, mounting base, filter core
assembly and gas outlet
flange;Two ends of shell are connected gas inlet
flange and gas outlet flange respectively, gas inlet flange is used to connect MOCVD equipment, and gas outlet flange is used to connect
exhaust gas processor;Shell inside is equipped with mounting base, and mounting base divides into filter chamber and
mixing chamber inside shell;Multiple filter core assemblies are installed side by side on mounting base, and filter core
assembly is located in filter chamber, and the top of filter core
assembly is sealed;The
exhaust gas discharged by MOCVD equipment enters filter chamber inside by gas inlet flange, and enters filter core assembly inside by filter core assembly side portion after filtering, and then is discharged into
mixing chamber by filter core assembly bottom portion, and finally filtered
exhaust gas is discharged by gas outlet flange.The application has the advantages of compact structure, easy maintenance and uniform capture of
small particles in process gas, solves the problem of too much
sediment in pipeline caused by harsh environment of MOCVD equipment vacuum
system due to particles, difficult to extract high vacuum, short maintenance cycle of
butterfly valve sealing ring, short service life of dry pump and other problems.